Free Margin Masking of Capacitor Film by Flash Evaporation · Free Margin Masking of Capacitor Film...
Transcript of Free Margin Masking of Capacitor Film by Flash Evaporation · Free Margin Masking of Capacitor Film...
Free Margin Masking of Capacitor Film by Flash Evaporation
Dr. Anye Chifen Leybold Optics Alzenau, Germany
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Motivation - conventional Free Margin Evaporator
Requirements of the new FME
Technology – Principle of Operation of new FME
Experiments & Results
Advantages of the new FME for Customers
Cost Savings Calculation
Summary
Outline
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Motivation: Disadvantages of Conventional FME
The Cylindrical Evaporator Tube
1. Oil, 2. Oil vapor, 3. Nozzle, 4. Substrate (web), and web direction
Large, excess amount of oil heated Degradation of excess oil during processing Unable to regulate oil temperature during process Temperature regulation dependent upon oil level Laborious refill Unable to refill during web coating Oil evaporation before start of web coating = contamination of chamber and waste of oil
1
2
3
4
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Requirements:
Requirements of a new Free Margin Evaporator (FME)
Fast start, & stop of masking
Optimum, constant amount of masking oil on film
Fast regulation of oil thickness on film during process
Minimum oil consumption (only amount needed for masking)
No excess oil heated in machine (No degradation, No waste oil)
Free margin edge steepness can be controlled
No contamination of chamber & rollers during start & stop
Easy refill of oil during process
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Level Sensor
Principle of Operation
The Set-up: Schematic of the new FME Design
Nozzle Plate
Gas Generator
Web
Oil reservoir & pumping system
Evaporator boat
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Level Sensor
In process: Evaporation
Nozzle Plate
Gas Generator
Web
Oil reservoir & pumping system
Evaporator boat
Technology: Principle of Operation
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Level Sensor
Technology: Principle of Operation
Increase Evaporation Rate
Nozzle Plate
Evaporator boat
Gas Generator
Web
Oil reservoir & pumping system
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Motivation - conventional Free Margin Evaporator
Requirements of the new FME
Technology – Principle of Operation: new FME
Experiments & Results
Advantages of new FME for Customer
Cost Savings Calculation
Conclusion
Outline
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EXPERIMENTS – The Main Parameters
Oil Consumption & Free Margin Quality mainly depend on three parameters:
Web Speed v [m/s]
Resistivity R [Ω/]
Nozzle Area A [mm2]
Oil Thickness on Web D [nm]
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Experiment: Oil masking thickness on web
Conventional FME
The New FME
How can the Doil be determined for all the variables?
doil > 0 nmCD
deposition boatoil on web
DoilCD
doil = 0 nm
deposition boatoil on web
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Experiment: Oil masking thickness on web
)t(flow.
oil FV ≈
wv
F D
flow)t(oil ⋅≈
(t)
(t)
[s]. duration coatingt [m/s], speed webv [m], widthnozzlew
],[m consumed oil total V
[l/s], rate flow oil F
[m], webon thickness oilDwhereby;
3oil
lowf.oil
====
=
=
Calculations are based on web speed, & volumetric flow rate and are not valid for the conventional FME ( because flow rate cannot be regulated and slow heating rate during coating process)
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Experiments – Parameters
Web Speed
5 – 18 m/s
Resistivity – Al, Al/Zn
1.5 – 7.5 Ohm /sqr
Nozzle types
[% Free Margin]
4.5%, 6%, 25%
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Results – Oil flow rate vs. Web speed
Total oil for a defined process required increases with nozzle area and CD speed
Oil flow rate is controlled during process (e.g. change in web speed)
A
B
C 5
15
25
35
45
55
65
75
2 5 8 11 14 17 20coating drum speed [m/s]
volu
met
ric p
ump
perfo
rman
ce [%
]
SM-3 nozzle
ST2 - nozzle
AT1 - nozzle
Oil
flow
rate
/ %
A B C
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Results: Free Margin Width vs. Nozzle position
Oil flow rate optimized at different web speeds
Area Nozzle A: 3.9 x 2 mm2
Oil amount influences the FM width [8 m/s @ 10 %, 12 %]
Uniform FM width distribution for 54 & 64 nozzle openings (B&C)
3,80
3,85
3,90
3,95
4,00
4,05
4,10
4,15
0 1 2 3 4 5 6 7 8 9 10
Nozzle position /-
Free
Mar
gin
wid
th /
mm
18 m/s 45 % 8 m/s, 12 % low limit specification
15 m/s, 30 % 8 m/s, 10 % high limit specification
10 m/s, 20 %
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Oil flow rate vs. Resistivity for Nozzle A
Web speed: 8 m/s
Oil thickness on web decreases with resistivity (for all other nozzles)
Film thickness decreases with increasing resistivity
Less oil required for the new FME (process regulated)
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27
29
31
33
35
37
39
41
0 1 2 3 4 5 6 7 8
Resistivity [Ohm/sqr]
Volu
met
ric p
ump
perf
orm
ance
[%]
Nozzle A: 25 % Free Margin
Oil
flow
rate
/ %
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Free Margin Width: Film uniformity across Web
Optimized oil flow rate for nozzle C (0.5 mm) Excellent uniformity of free margin at different resistivity across the web,
due to optimized oil flow rate
0,44
0,46
0,48
0,50
0,52
0,54
0,56
1 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52
Free Margin Position / -
Free
Mar
gin
Wid
th /
mm
1,7 Ohm/sqr2.4 Ohm/sqr4.5 Ohm/sqr7.5 Ohm/sqrLow Limit SpecificationHigh Limit Specification
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Free Margin Width: Edge Steepness
0
50
100
150
200
250
800 850 900 950 1000 1050 1100 1150 1200
Steepness width / µm
Inte
nsity
/ -
1.7 Ohm/sqr
2.4 Ohm/sqr
4.5 Ohm/sqr
Metallized Film Free Margin Area
Transmission measurements Free Margin Measuring System (FMMS)
Optimized pump performance for Nozzle C (0.5 mm)
Oil thickness on web: 16 nm, CD speed: 8 m/s, performance: 10 %
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Free Margin Evaporator built in CAP-M
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Oil Reservoir: outside the Winding Chamber
Oil Reservoir
Oil Level Sensor
Pumping Unit
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Advantages for the customer:
Cost savings No wasted oil during start and stop
No degraded excess oil waste
Reduced time for cleaning and maintenance (No shutters)
Constant, Improved Product Quality Optimum, regulated amount of masking oil on web
FM width steepness can be regulated
No thermally degraded oil used in process
Amount of oil can be adjusted quickly and precisely during process
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Advantages for the customer:
Ease of operation Oil reservoir in atmosphere (Easy refill any time)
No machine contamination during start and stop
Constant process temperatures
Future proof technology Backwards compatible to existing machines
Patented technology by Leybold Optics
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Cost Savings Calculation for the FME
Web length 40 000 m
Consumption per run 17.3 ml
Oil thickness on web 16 nm
Cost saving / year 60 %
Calculations based on: NO OIL REFILL
NO WASTE OIL
Consumption per run for conventional FME (26.7 ml)
Optimized Oil thickness on Web, conventional FME (23 nm)
Excellent Quality of Free Margin and Oil
20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation
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Conclusion
The key advantages of this development for the web coating customer are:
short start & stop times: (no oil waste and chamber contamination),
optimum thickness of oil for each product, even at varying web
speeds, through closed loop regulation,
better free margins, sharper, steeper edges of masked areas,
constant product quality by use of 100 % of fresh masking oil,
ease of operation (easy refill of oil reservoir in atmosphere even during
process),
no oil waste due to degraded oil and
significant cost savings: thanks to regulated minimum applied oil film
thickness and zero oil waste design.
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THANK YOU FOR YOUR ATTENTION
THANK YOU
Photo: PET Film & Nozzle Free Margin Width: 0.5 mm 2.0 Ohm/sqr
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Cost Savings Calculation
Parameter unit STANDARD NEWWeb length m 40 000 40 000Price/liter € 250 250Consumption/run ml 26,7 17,3Filling ml 500 0Refills before oil change 30 0Runs/day 18 18Consumption/day ml 480,6 311,4Waste/day ml 300 0Cost of masking/day € 120,15 77,85Cost of waste/day € 75 0Working days/year 320 320Cost of masking/year € 38 448 24 912Cost of waste/year € 24 000 0Oil thickness nm 23 16Less consumption (regulator) 0,00% 5,00%
Total cost per year € 62 448 24 912
Saving/year € 37 536 significant cost savings
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Film Uniformity versus oil flow rate and nozzle area
5
10
15
20
25
30
35
40
45
0 1 2 3 4 5 6 7 8Film uniformity [Ohm/sqr.]
volu
met
ric p
ump
perfo
rman
ce [%
]
SM-3 nozzle
ST2-nozzle
AT1-nozzle
Oil thickness on web decreases with resistivity (film thickness
increases)
A
B
C
Resistivity
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Free Margin Width: edge steepness profile
4.0 mm
Schematic illustration: optimal masking oil thickness
Free Margin Profile oil thickness on film: 16 nm