Formtracer SV-C3100 / SV-C4100 - Mitutoyo · K-16 K Formtracer SV-C3100 / SV-C4100 SERIES 525 —...

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Formtracer SV-C3100 / SV-C4100SERIES 525 — Surface Roughness / Contour Measuring System

FEATURES•Dramaticallyincreaseddrivespeed(Xaxis:

80 mm/s, Z2 axis column: 20mm/s) further reduces total measurement time.

•Mitutoyohasadoptedhighlyrigidceramicguides, combining small secular change and remarkable resistance to abrasion, to maintain the traverse linearity specification for an extended period of time.

•Thedriveunit(Xaxis)andcolumn(Z2axis)are equipped with highly accurate linear encoders (ABS type on the Z2 axis). This improves reproducibility of continuous automatic measurement of small holes in the vertical direction and repeated measurement of parts which are difficult to position.

Technical Data: CommonBase size (W x H): 600 x 450mm or 1000 x 450mmBase material: GraniteMass

Main unit: 140kg (S4), 150kg (H4), 220kg (W4) 140kg (S8), 150kg (H8), 220kg (W8)

Controller Unit: 14kg Remote Control Box: 0.9kgPower supply: 100 – 240VAC ±10%, 50/60HzPower consumption: 400W (main unit only)

Technical Data: Contour MeasurementX axis Measuring range: 100mm or 200mm Resolution: 0.05µm Scale: Reflective-type linear encoder Drive speed: 0 - 80mm/s and manual Measuring speed: 0.02 - 5mm/s Measuring direction: Forward/backward Traverse linearity: 0.8µm / 100mm, 2µm / 200mm *with the X axis in horizontal orientation Linear displacement: ±(1+0.01L)µm (SV-C3100S4, H4, W4)

accuracy (at 20°C) ±(0.8+0.01L)µm (SV-C4100S4, H4, W4) ±(1+0.02L)µm (SV-C3100S8, H8, W8) ±(0.8+0.02L)µm (SV-C4100S8, H8, W8)

* L = Drive length (mm) Inclining range: ±45° (with X-axis inclination unit)Z2 axis (column) Vertical travel: 300mm or 500mm Resolution: 1µm Scale: ABSOLUTE linear encoder Drive speed: 0 - 20mm/s and manualZ1 axis (detector unit) Measuring range: ±25mm Resolution: 0.2µm (SV-C3100),

0.05µm (SV-C4100) Scale: Linear encoder (SV-C3100),

laser hologage (SV-C4100) Linear displacement: ±(2+I4HI/100)µm (SV-C3100)

accuracy (at 20°C) ±(0.8+I0.5HI/25)µm (SV-C4100) *H: Measurement height from the

horizontal position (mm) Stylus up/down operation: Arc movement Face of stylus: Upward/downward Measuring force: 30mN Traceable angle: Ascent: 77°, descent: 87°

(using the standard stylus provided and depending on the surface roughness)

Stylus tip Radius: 25µm, carbide tip

Technical Data: Surface Roughness MeasurementX1 axis Measuring range: 100mm or 200mm Resolution: 0.05µm Scale: Linear encoder Drive speed: 0 - 80mm/s and manual Traverse direction: Backward Traverse linearity: (0.05+1L/1000)µm (S4, H4, W4 types)

0.5µm/200mm (S8, H8, W8 types)Z2 axis (column) Vertical travel: 300mm or 500mm Resolution: 1µm Scale: ABSOLUTE linear encoder Drive speed: 0 - 20mm/s and manualDetector Range / resolution: 800µm / 0.01µm, 80µm / 0.001µm,

8µm / 0.0001µm (up to 2400µm with an optional stylus)

Measuring force: 4mN or 0.75mN (low force type) Stylus tip: Diamond, 90º / 5µmR

(60º / 2µmR: low force type) Type: Differential inductance

Using Rotary Table q1Using Y-axis Table

Using Rotary Table q2

Automatic Measurement•Awiderangeofoptionalperipheralsare

available for use with CNC models for automatic measurement.

SV-C3100S4 with personal computer system and software

Surface Roughness Measurement

•Traverselinearity:±(0.05+0.001L)µm* Designed to handle workpieces calling for high accuracy. *S4, H4, W4 types, L = Drive length (mm)

•CompliantwithJIS'82/'94/'01,ISO,ANSI,DIN, VDA, and other international surface roughness standards.

•Equippedasstandardwithahighaccuracydetector (0.75mN / 4mN measuring force) providing a resolution down to 0.0001µm.

Contour Drive Measurement

•Xaxisaccuracy:±(0.8+0.01L)µm* Z1-axis accuracy: ±(0.8+I0.5HI/25)µm*

Designed to handle workpieces calling for high accuracy.* SV-C4100S4, H4, W4 types, L = Drive length, H = Measurement height (mm)

•ThecontourdriveunitofSV-C4100series is equipped with a Laser Hologage detector giving excellent narrow/wide range accuracy and resolution in the Z1-axis.

(See page K-34 for more details.)

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SPECIFICATIONSModel No. SV-C3100S4 SV-C3100S4 SV-C3100H4 SV-C3100H4 SV-C3100W4 SV-C3100W4Order No. (mm) 525-421*-1 525-421*-2 525-422*-1 525-422*-2 525-423*-1 525-423*-2Order No. (inch) 525-431*-1 525-431*-2 525-432*-1 525-432*-2 525-433*-1 525-433*-2

A variety of models available for measuring requirements

SV-C3100S4 / SV-C4100S4Traverse range: 100mmVertical travel: 300mmBase size (W x D): 600 x 450mmBase material: Granite

SV-C3100H4 / SV-C4100H4Traverse range: 100mmVertical travel: 500mmBase size (W x D): 600 x 450mmBase material: Granite

SV-C3100W4 / SV-C4100W4Traverse range: 100mmVertical travel: 500mmBase size (W x D): 1000 x 450mmBase material: Granite

Model No. SV-C3100S8 SV-C3100S8 SV-C3100H8 SV-C3100H8 SV-C3100W8 SV-C3100W8Order No. (mm) 525-426*-1 525-426*-2 525-427*-1 525-427*-2 525-428*-1 525-428*-2Order No. (inch) 525-436*-1 525-436*-2 525-437*-1 525-437*-2 525-438*-1 525-438*-2

SV-C3100S8 / SV-C4100S8Traverse range: 200mmVertical travel: 300mmBase size (W x D): 600 x 450mmBase material: Granite

SV-C3100H8 / SV-C4100H8Traverse range: 200mmVertical travel: 500mmBase size (W x D): 600 x 450mmBase material: Granite

SV-C3100W8 / SV-C4100W8Traverse range: 200mmVertical travel: 500mmBase size (W x D): 1000 x 450mmBase material: Granite

Refer to the Formtracer SV-C3100 / 4100 Series leaflet (E4304) for more details.

Surface Roughness Measurement Screen

Optional SoftwareFORMTRACEPAK Allows control of the optional motor-driven Y-axis table and rotary table for efficient measurement automation. Contour evaluation can be performed using analysis of level differences, angle, pitch, area and other characteristics based on surface roughness data. An original inspection certificate can be created by setting the print format to selected requirements.

Contour Measurement Screen

Model No. SV-C4100S4 SV-C4100S4 SV-C4100H4 SV-C4100H4 SV-C4100W4 SV-C4100W4Order No. (mm) 525-461*-1 525-461*-2 525-462*-1 525-462*-2 525-463*-1 525-463*-2Order No. (inch) 525-471*-1 525-471*-2 525-472*-1 525-472*-2 525-473*-1 525-473*-2X1-axis measuring range 100mm 100mm 100mm 100mm 100mm 100mmDetector measuring force 0.75mN 4mN 0.75mN 4mN 0.75mN 4mNVertical travel 300mm power column 500mm power column 500mm power columnGranite base size (WxD) 600 x 450mm 600 x 450mm 1000 x 450mmDimensions (main unit, WxDxH) 996 x 575 x 966mm 996 x 575 x 1166mm 1396 x 575 x 1176mmMass (main unit) 140kg 150kg 220kg

Model No. SV-C4100S8 SV-C4100S8 SV-C4100H8 SV-C4100H8 SV-C4100W8 SV-C4100W8Order No. (mm) 525-466*-1 525-466*-2 525-467*-1 525-467*-2 525-468*-1 525-468*-2Order No. (inch) 525-476*-1 525-476*-2 525-477*-1 525-477*-2 525-478*-1 525-478*-2X1-axis measuring range 200mm 200mm 200mm 200mm 200mm 200mmDetector measuring force 0.75mN 4mN 0.75mN 4mN 0.75mN 4mNVertical travel 300mm power column 500mm power column 500mm power columnGranite base size (WxD) 600 x 450mm 600 x 450mm 1000 x 450mmDimensions (main unit, WxDxH) 1006 x 575 x 966mm 1006 x 575 x 1166mm 1406 x 575 x 1176mmMass (main unit) 140kg 150kg 220kg

* To denote your AC power cable add the following suffixes to the order No.: ”mm” type: A for UL/CSA, C for JIS (for Taiwan), D for CEE, E for BS, DC for China, K for EK “inch” type: A for UL/CSA, D for CEE, E for BS, DC for China, No suffix is requied for JIS/100V (for Taiwan)

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Formtracer Extreme SV-C3000CNC / SV-C4000CNCSERIES 525 — Surface Roughness/Form Measuring Instrument

Technical Data: CommonBase size (W x D): 750 x 600mmBase material: GraniteMass: 240kg, 250kg (high column type)Power supply: 100 – 240VAC ±10%, 50/60HzPower consumption: 500W (main unit only)

Technical Data: Contour MeasurementX1-axis Measuring range: 200mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick) Measuring speed: 0.02 - 2mm/s Measuring direction: Forward/backward Traverse linearity: 2µm/200mm *with the X axis in horizontal orientation Linear displacement accuracy (at 20°C):

±(1+4L/200)µm ±(0.8+4L/200)µm

Inclination angle: -45° to +10° Resolution: 0.000225° Rotating speed: 1rpmZ2-axis (column) Vertical travel: 300mm or 500mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick)Z1-axis (detector unit) Measuring range: ±25mm Resolution: 0.2µm (SV-C3000CNC),

0.05µm (SV-C4000CNC) Measurement method: Linear encoder (SV-C3000CNC),

laser hologage (SV-C4000CNC) Linear displacement: ±(2+|4H|/100)µm (SV-C3000CNC)

accuracy (at 20°C) ± (0.8+I0.5HI/25)µm (SV-C4000CNC) *H: Measurement height from the horizontal

position (mm) Stylus up/down operation: Arc movement Face of stylus: Downward Measuring force: 30mN Traceable angle: Ascent: 70°, descent: 70°


Stylus tip Radius: 25µm, carbide tip

Technical Data: Surface Roughness MeasurementX1-axis Measuring range: 200mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick) Measuring speed: 0.02 - 2mm/s Traverse linearity: 0.5µm / 200mmα-axis Inclination angle: -45° to +10° Resolution: 0.000225° Rotating speed: 1rpmZ2-axis (column) Vertical travel: 300mm or 500mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick)Detector (optional) Range / resolution: 800µm / 0.01µm, 80µm / 0.001µm,

8µm / 0.0001µm (up to 2400µm with an optional stylus)

Measuring force: 4mN or 0.75mN (low force type) Stylus tip: Diamond, 90º / 5µmR

(60º / 2µmR: low force type) Detecting method: Differential inductance

FEATURES•High-accuracyCNCSurfaceRoughness/

Form Measuring Instrument that allows measurement of surface roughness and form/contour with one unit.

•Eachaxishasthemaximumdrivespeedof 200mm/s, which permits high-speed positioning that may result in a large increase in the throughput of multiple-profile/multiple-workpiece measurement tasks.

•Formodelswiththeα axis, it is possible to perform continuous measurement over horizontal and inclined surfaces by power-tilting the detector unit.

•FormodelswiththeY-axistable,itispossible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direction.

•ThecontourdriveunitofSV-C4000CNCseries is equipped with a Laser Hologage detector giving excellent narrow/wide range accuracy and resolution in the Z1-axis.

•Enablesinclinedplanemeasurementsthrough 2-axis simultaneous control in the X- and Y-directions.

•Whenthedetectorforform/contourmeasurement is replaced with that for surface roughness measurement, or vice versa, it is a simple, one-touch replacement without re-routing of the connecting cables.

•SincetheZ1-axisdetectorincorporatesananti-collision safety device, the detector unit will automatically stop even if its main body collides with a workpiece or jig

•Suppliedwithaneasy-to-operateRemoteBox, on which the user can make any movement by selecting the required axis using the two joysticks. The current axis selection is easily identified by the icon on the key top.

•CommunicationwiththeDataProcessing/Analysis section is via USB.

SV-3000CNC with personal computer system and software

Surface roughness drive unit Contour drive unit

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Z2

X-axis displacement range

Y axis

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SPECIFICATIONSModel No. SV-C3000CNC SV-C3000CNC SV-C3000CNC SV-C3000CNCOrder No. (100V - 120V) 525-521-1 525-522-1 525-523-1 525-524-1Order No. (200V - 240V) 525-521-2 525-522-2 525-523-2 525-524-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 300mm 300mm 300mm 300mmY-axis table unit — — Installed Installedα-axis unit — Installed — InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 651 x 1000mm 800 x 651 x 1000mm 800 x 651 x 1000mm 800 x 651 x 1000mmMass (main unit) 240kg 240kg 240kg 240kg

Model No. SV-C3000CNC SV-C3000CNC SV-C3000CNC SV-C3000CNCOrder No. (100V - 120V) 525-541-1 525-542-1 525-543-1 525-544-1Order No. (200V - 240V) 525-541-2 525-542-2 525-543-2 525-544-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 500mm 500mm 500mm 500mmY-axis table unit — — Installed Installedα-axis unit — Installed — InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 651 x 1200mm 800 x 651 x 1200mm 800 x 651 x 1200mm 800 x 651 x 1200mmMass (main unit) 250kg 250kg 250kg 250kg



Refer to the CNC Form Measuring Instrument Series leaflet (E4284) for more details.

Optional AccessoriesVibration insulating standVibration insulating mechanism: Diaphragm air spring Natural frequency : 2.5 - 3.5HzDamping mechanism: OrificeLeveling mechanism: Automatic control with mechanical valvesAir supply pressure: 0.4MpaAllowable loading capacity: 350kgDimensions (W x D x H): 1000 x 895 x 715mmMass: 315kg

Y-axis table unitMeasuring range: 200mmMinimum reading : 0.05µmScale unit: Reflective-type Linear Encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick)Maximum loading capacity: 20 kgTraverse linearity 0.5µm / 200mmLinear displacement accuracy (at 20°C): ± (2+2L/100)µm, contour mode L: Dimension between two measured points (mm)Table size: 200 x 200mmDimensions (W x D x H): 320 x 646 x 105mmMass: 35kg

Optional SoftwareFORMTRACEPAK V5Enables control of the optional motor-driven Y-axis table and rotary table for realizing efficient measurement automation. You can also perform contour evaluation that allows free analysis of level differences, angle, pitch, area and other characteristics based on surface roughness data. In addition, you can create an original inspection certificate by setting the print format to suit your particular requirements.

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Technical Data:X1-axis Measuring range: 100mm Resolution: 0.05µm Drive speed: 0 - 80mm/s and manual Measuring speed: 0.02, 0.05, 0.1, 0.2mm/s (in surface roughness measurement)

0.02, 0.05, 0.1, 0.2, 0.5, 1, 2mm/s (In contour measurement) Measuring direction: Forward / backward Traverse linearity: 0.2µm/100mm (0.4µm/100mm: at

the extended detector position) *with the X axis in horizontal orientation

Linear displacement accuracy (20°C): ±(0.8+0.01L)µm L = Drive length (mm)

Inclining range: ±45ºZ1-axis Measuring range: 5mm Resolution: 80nm (5mm range) 8nm (0.5mm range) 0.8nm (0.05mm range) Linear displacement accuracy (20°C): ±(1.5+I2HI/100)µm

H = Measurement height from the horizontal position (mm) Measuring force: 0.75mN Traceable angle: Ascent: 65°, Descent: 65°

(using the standard chisel-cut stylus and depending on the surface roughness) Stylus tip (standard): Tip angle: 60º, Tip radius: 2µm,

Diamond tip Stylus tip (cone): Tip angle: 30º, Tip radius: 25µm,

Sapphire tip Face of stylus: DownwardZ2-axis (column) Column travel: 300mm Resolution: 1µm Drive speed: 0 - 20mm/s and manual

FEATURES•Thedriveunit(X-axis)andcolumn(Z2-axis)

are equipped with high-accuracy linear scales (ABS type) enabling fully automatic measurement combining vertical and horizontal movement. This improves reproducibility of continuous automatic measurement of small holes in the vertical direction and repeated measurement of parts which are difficult to position.

•Thedetectorunitcanbeextendedtoavoid interference between the drive unit and workpiece. All detector and drive unit cables are housed inside the main unit to eliminate any risk of abrasion and guarantee trouble free, high-speed operation.

•MeasuringrangeintheZ1-axis(height)direction is dramatically increased from 5mm to 50mm when contour detector units 3000*, or 4000*, are specified. (Both are factory-set options.)

•Driveunit(X-axis)tiltingfunctionpowerfully supports measurements on inclined planes and for heavy workpieces that are not easily moved.

CS-3200S4 with personal computer system and software

Formtracer CS-3200SERIES 525 — Surface Roughness / Contour Measuring System

Technical Data: CommonBase size (W x D): 600 x 450mmBase material: GraniteDimension (W x D x H): 756 x 482 x 966mm (main unit)Mass: 140kg (main unit)Power supply: 100 – 240VAC ±10%, 50/60HzPower consumption: 400W (main unit only)

Outside diameter 1

Outside diameter 2

Inside diameter

Continuous measurement example (Outside diameter 1→Outside diameter 2→Inside diameter)

*: Styli for CS-3200 cannot be used. Styli for contour measuring instruments CV-3100/4100 series can be used.Supports contour measurement only.

Measurement element

Positioning element

With contour detector unit 3000 equipped•Dramaticallyincreaseddrivespeed(X-axis:

80mm/s, Z2-axis: 20mm/s) further reduces total measurement time. Small holes can be efficiently measured using the fine-feed knobs on the X- and Z2-axes.

This machine incorporates a startup system (relocation detection system), which disables operation when an unexpected vibration is applied or the machine is relocated. Be sure to contact your nearest Mitutoyo office prior to relocating this machine after initial installation. Refer to page IX for details.

Main UnitStartup System

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Refer to the Formtracer CS-3200 leaflet (E4327) for more details.

SPECIFICATIONSModel No. CS-3200S4Order No. (mm) 525-401*Order No. (inch) 525-411*X1-axis measuring range 100mmZ2-axis vertical travel 300mmY-axis table unit Optiona-axis unit Installed

* To denote your AC power cable add the following suffixes to the order No.: ”mm” type: A for UL/CSA, C for JIS (for Taiwan), D for CEE, E for BS, DC for China, K for EK “inch” type: A for UL/CSA, D for CEE, E for BS, DC for China, No suffix is requied for JIS/100V (for Taiwan)

Optional SoftwareFORMTRACEPAK-6000

Stylus

Measuring instrument control

Contour analysis

Surface roughness analysis

Design data creation (CAD file import)

Contour verification

Inspection certificate creation

30°

ø3

66.5591

3.2

ø4810

（6.5）

60°0.6 （6.5）59

3.2

ø4

9ø1.2

10 0.4

66.1

24.84

60°

ø3

ø1.2ø4

67.5

3.2

ø4

59

（8）10

18 21 （6.5）

60°

23

3.2

ø4

21

1 5966.5

ø1.2

ø3

（6.5）

136.5

ø3

ø1.2

1

3.2ø4

12.5

129

14.5

40°

（6.5）

No.12AAD554: Standard stylus (Standard accessory)For contour/surface roughness measurement

No.12AAD556: Small hole stylusFor contour/surface roughness measurement

No.12AAD552: Cone stylus (Standard accessory)For contour measurement

No.12AAD558: Eccentric type stylusFor contour/surface roughness measurement

No.12AAD560: Deep groove stylusFor contour/surface roughness measurement

No.12AAD562: 2x-long stylus*1

For contour/surface roughness measurement

ø1.2

66.5

ø3

1 59

60°ø4

3.210 8

（6.5）

Radius of tip curvature: 25µmTip material: Sapphire

Radius of tip curvature: 2µmTip material: Diamond





*1: Measuring force is 4mN and the Z1 measuring range and resolution is double that of the standard stylus.

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Formtracer Extreme CS-H4000CNCSERIES 525 — CNC Form Measuring Instruments

Technical Data:X1-axis Measuring range: 100mm Resolution: 0.00625µm Measurement method: Laser Holoscale Drive speed: Max. 40mm/s (in CNC mode)

0 - 40mm/s (in joystick control mode) Measuring speed: 0.02 - 0.2mm/s (surface roughness)

0.02 - 2mm/s (form/contour) Measuring direction: Forward / backward direction Traverse linearity: (0.05+0.0003L)µm Linear displacement accuracy (20°C): ±(0.16+0.001L)µm

L = Measured length (mm)Z1-axis Measuring range: 12mm Resolution: 0.001µm Stylus up/down: Arc movement Measurement method: Laser Holoscale Linear displacement accuracy (20°C): ±(0.07+I0.02HI)µm

H = Measured height (mm) Measuring force: 4mN Traceable angle: 60° for ascent, 60° for descent

(Depending on the workpiece surface condition) Stylus tip: Radius: 5µm, angle: 40°, diamond

(ball stylus) (Radius: 0.25mm, sapphire) Face of stylus: DownwardZ2-axis (column unit) Traverse range: 300mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: Max. 200mm/s (in CNC mode)

0 - 50mm/s (in joystick control mode) Base size (W x D): 600 x 550mm Base material: GraniteY-axis* Measuring range 100mm Resolution 0.05µm Drive speed Max.80mm/s (in CNC mode) 0~50mm/s (in joystick control mode) Max. table loading 50kg Traverse linearity 1.0µm/100mm Positioning precision ±1µm *Only for 525-753, 525-754 For positioning only.Dimension (W x D x H): 600 x 570 x 992mm (main unit)Mass: 190kg (main unit)

FEATURES•High-accuracystylustypeCNCSurface

Measuring Instrument that allows simultaneous measurement of surface roughness and form/contour.

•TheX1-andZ2-axeshavemaximumdrive speeds of 40mm/s and 200mm/s, respectively. This permits high-speed positioning that may result in a large increase in the throughput of multiple-profile / multiple-workpiece measurement tasks.

•AMitutoyoLaserHoloscaleisincorporatedin the X1- and Z1-axes so that high resolution (X1-axis: 6.25nm, Z1-axis: 1nm) is achieved and batch measurement of form/contour and surface roughness can be made.

•Theactivecontrolmethodisemployedforthe Z1-axis detector to implement a wide-range measurement capability wherein the variation in dynamic measuring force is restricted.

•SincetheZ1-axisdetectorincorporatesananti-collision safety device, the detector unit will automatically stop even if its main body collides with a workpiece or jig.


•Suppliedwiththeeasy-to-operateRemoteBox, on which the user can make any movement by selecting the required axis using the two joysticks. The current axis selection is easily identified by the icon on the key top.

•UsesUSBforcommunicatingwiththeDataProcessing / Analysis Unit (optional).

Remote box Wide range detector employing active control technology

CS-H4000CNC with personal computer system and software

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ASLPAKAspherical lens analysis program

107

65.95

ø1.2

(31.5)

35.9540º

74.51

ø6

12.5

(6.5

)

ø4

ø1.2

(31.5)

65.9535.95

74.51107

ø6

12.7

5

(6.8

)

ø4

ø0.5mm ball

15

35.9565.95

ø4ø6

1.6

0.4

ø1.2

(1.1

)

74.5 (31.5)0.6106.6

6

0.6

40ºAA

10

ø4ø6

1.2

0.6ø0

.6

(1.1

)

0.4

40º

74.5 (31.5)0.4106.4

35.9565.95

6

AAø4ø6

12.5ø6 (6.5

)

40˚35.95

ø1.2

65.95

74.5 (31.5)3109

16

12AAJ037: Standard-length stylus (tip radius: 5µm)(Standard accessory)

12AAD544: Standard-length ball stylus(Standard accessory)

12AAD651: Standard-length stylus for small hole (tip radius: 5µm)

12AAD652: Standard-length stylus for extra-small hole (tip radius: 5µm)

12AAD653: Standard-length eccentric stylus (tip radius: 5µm)

Detector Nosepiece

Unit: mm

SPECIFICATIONSModel No. CS-H4000CNC CS-H4000CNCOrder No. (mm) 525-751* 525-753*Order No. (inch) 525-752* 525-754*X1-axis measuring range 200mm 200mmZ2-axis vertical travel 300mm 300mmY-axis table unit — Installed

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, E for BS, DC for China, K for EK, No suffix is required for JIS/100V

Stylus

Optional SoftwareFORMTRACEPAK Enables control of the optional motor-driven Y-axis table and rotary table for realizing efficient measurement automation. You can also perform contour evaluation that allows free analysis of level differences, angle, pitch, area and other characteristics based on surface roughness data. In addition, you can create an original inspection certificate by setting the print format to suit your particular requirements.

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Formtracer Extreme CS-5000CNC / CS-H5000CNCSERIES 525 — CNC Form Measuring Instruments

Technical Data:X1-axis Measuring range: 200mm Resolution: 0.00625µm Measurement method: Laser Holoscale Drive speed: Max. 40mm/s (in CNC mode)

0 - 40mm/s (in joystick control mode) Measuring speed: 0.02 - 0.2mm/s (surface roughness)

0.02 - 2mm/s (form/contour) Measuring direction: Forward / backward direction Traverse linearity: (0.1+0.0015L)µm with standard stylus

(0.2+0.0015L)µm with 2X-long stylus Traverse linearity: (0.05+0.0003L)µm with standard stylus

(0.1+0.0015L)µm with 2X-long stylus (CS-H5000CNC) Linear displacement accuracy (20°C): ±(0.3+0.002L)µm

Linear displacement accuracy (20°C): ±(0.16+0.001L)µm L = Measured length (mm)

Z1-axis Measuring range: 12mm (with standard stylus)

24mm (with 2X-long stylus) Resolution: 0.004µm(with standard stylus) 0.008µm(with 2X-long stylus) 0.001µm (with standard stylus) (CS-H500CNC)

0.002µm (with 2X-long stylus) (CS-H500CNC) Stylus up/down: Arc movement Measurement method: Laser Holoscale Linear displacement accuracy (20°C): ±(0.3+I0.02HI)µm

Linear displacement accuracy (20°C): ±(0.07+I0.02HI)µm H = Measured height (mm)

Measuring force: 4mN (with standard stylus) 0.75mN (with 2X-long stylus)

Traceable angle: 60° for ascent, 60° for descent(Depending on the workpiece surface condition)

Stylus tip: See the K-25 page Face of stylus: DownwardZ2-axis (column unit) Traverse range: 300mm or 500mm *CS-H5000CNC : 300mm only. Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: Max. 200mm/s (in CNC mode)

0 - 50mm/s (in joystick control mode) Base size (W x D): 750 x 600mm Base material: GraniteY-axis* Measuring range 200mm Resolution 0.05µm Drive speed Max.200mm/s (in CNC mode) 0~50mm/s (in joystick control mode) Max.workpiece load 20kg Traverse linearity 0.5µm/200mm Linear displacement accuracy (20ºC) ±(2+2L/100)µm L = Length between arbitrary two point (mm)

Dimension (W x D x H): 800 x 620 x 1000mm (800 x 620 x 1200mm: high column type)

Mass: 240kg (250kg: high column type)*Data in red are for CS-H5000CNC

FEATURES•High-accuracystylustypeCNCSurface

Measuring Instrument that allows simultaneous measurement of surface roughness and form/contour.

•TheX1-andZ2-axeshavemaximumdrive speeds of 40mm/s and 200mm/s, respectively. This permits high-speed positioning that may result in a large increase in the throughput of multiple-profile / multiple-workpiece measurement tasks.

•AMitutoyoLaserHoloscaleisincorporatedin the X1- and Z1-axes so that high resolution [X1-axis: 6.25nm, Z1-axis: 4nm / 8nm (CS-5000CNC), 1nm/2nm (CS-H5000CNC)] is achieved and batch measurement of form/contour and surface roughness can be made.

•Theactivecontrolmethodisemployedforthe Z1-axis detector to implement a wide-range measurement capability wherein the variation in dynamic measuring force is

restricted.•SincetheZ1-axisdetectorincorporatesan

anti-collision safety device, the detector unit will automatically stop even if its main body collides with a workpiece or jig.

•CS-5000CNCismodelwiththea axis, it is possible to perform continuous measurement over horizontal and inclined surfaces by power-tilting the X1-axis.


•Suppliedwiththeeasy-to-operateRemoteBox, on which the user can make any movement by selecting the required axis using the two joysticks. The current axis selection is easily identified by the icon on the key top.

•UsesUSBforcommunicatingwiththeDataProcessing / Analysis Unit (optional).

CS-H5000CNC with personal computer system and software

Remote box Wide range detector employing active control technology

K-25

ASPHERICALPAKAspherical lens analysis program

Optional SoftwareFORMTRACEPAK Enables control of the optional motor-driven Y-axis table and rotary table for realizing efficient measurement automation. You can also perform contour evaluation that allows free analysis of level differences, angle, pitch, area and other characteristics based on surface roughness data. In addition, you can create an original inspection certificate by setting the print format to suit your particular requirements.

107

65.95

ø1.2

(31.5)

35.9540º

74.51

ø6

12.5

(6.5

)

ø4

ø1.2

(31.5)

65.9535.95

74.51107

ø6

12.7

5

(6.8

)

ø4

ø0.5mm ball

ø1.2

(31.5)

145.95115.95

40º

154.51187

ø6

(19)25

ø4

ø1.2

(31.5)

145.95115.95

60º

154.51187

ø6

(19)25

ø4

ø1.2

(31.5)

145.95115.95

154.51187

ø6

(19.

3)

25.2

5

ø4

ø0.5mmball

15

35.9565.95

ø4ø6

1.6

0.4

ø1.2

(1.1

)74.5 (31.5)0.6

106.6

6

0.6

40ºAA

10

ø4ø6

1.2

0.6ø0

.6

(1.1

)

0.4

40º

74.5 (31.5)0.4106.4

35.9565.95

6

AA

ø4ø6

12.5ø6 (6.5

)

4˚ 35.95

ø1.2

65.95

74.5 (31.5)3109

16

12AAD543*1: Standard-length stylus (tip radius: 5µm)12AAJ037*2: For CS-H5000CNC (tip radius: 5µm)Tip material: Diamond

12AAD544*1*2: Standard-length ball stylus (tip radius: 5µm)Tip material: Sapphire

12AAD545*1: Double-length stylus (tip radius: 5µm)12AAJ039*2: For CS-H5000CNC (tip radius: 5µm)Tip material: Diamond

12AAJ041*2: Double-length stylus (tip radius: 2µm)Tip material: Diamond

12AAD546*1*2: Double-length ball stylusTip material: Sapphire

12AAD651: Standard-length stylus for small holeTip radius: 5µmTip material: Diamond

12AAD652: Standard-length stylus for extra-small holeTip radius: 5µmTip material: Diamond

12AAD653: Standard-length eccentric stylusTip radius: 5µmTip material: Diamond

Detector Nosepiece

Unit: mm

*1: Standard accessory of CS-5000CNC*2: Standard accessory of CS-H5000CNC

K

SPECIFICATIONSModel No. CS-5000CNC CS-5000CNC CS-5000CNC CS-5000CNCOrder No.* (100V - 120V) 525-721-1 525-722-1 525-723-1 525-724-1Order No.* (200V - 240V) 525-721-2 525-722-2 525-723-2 525-724-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 300mm 300mm 300mm 300mmY-axis table unit — — Installed Installeda-axis unit — Installed — Installed

Model No. CS-5000CNC CS-5000CNC CS-5000CNC CS-5000CNCOrder No.* (100V - 120V) 525-741-1 525-742-1 525-743-1 525-744-1Order No.* (200V - 240V) 525-741-2 525-742-2 525-743-2 525-744-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 500mm 500mm 500mm 500mmY-axis table unit — — Installed Installeda-axis unit — Installed — Installed

*Select one of the optional accessory sets suited to your AC line voltage and measurement unit. 12AAL412 (mm, UL/CSA), 12AAL413 (mm, EU), 12AAL414 (mm, BS), 12AAL418 (mm, China), 12AAL419 (mm, EK), 12AAL415 (inch, UL/CSA), 12AAL416 (inch, EU), 12AAL417 (inch, BS), 12AAL420 (inch, China)

Model No. CS-H5000CNC CS-H5000CNCOrder No.* (100V - 120V) 525-761-1 525-763-1Order No.* (200V - 240V) 525-761-2 525-763-2X1-axis measuring range 200mm 200mmZ2-axis vertical travel 300mm 300mmY-axis table unit — Installeda-axis unit — —

*Select one of the optional accessory sets suited to your AC line voltage and measurement unit. 12AAL422 (mm, UL/CSA), 12AAL423 (mm, EU), 12AAL424 (mm, BS), 12AAL428 (mm, China), 12AAL429 (mm, EK), 12AAL425 (inch, UL/CSA), 12AAL426 (inch, EU), 12AAL427 (inch, BS), 12AAL430 (inch, China)

Stylus


K-26

Standard stylus

For small hole

Double-length for deep hole*4

For small hole/Double-length for deep hole*4

For extra small hole

For extra minute hole

For small hole*4*5

For ultra small hole*4*5

For deep hole (double-length and triple-length)*4 For small slotted hole

Styli

Colorcoding*3

Skidless nosepiece12AAB355

Detector

Detector (0.75mN): 178-396-2 Detector (4mN): 178-397-2

Detail-A

Detail-A

Detail-A

Detail-A

Ball ø0.5

Ball ø1.6

Detail-A (S=5/1)

12AAE882 (1µm)*1

12AAE924 (1µm)*2

12AAC731 (2µm)*1

12AAB403 (5µm)*2

12AAB415 (10µm)*2

12AAE883 (250µm)( ): Tip radius

12AAC732 (2µm)*1

12AAB404 (5µm)*2

12AAB416 (10µm)*2

( ): Tip radius

12AAE898 (2µm)*1

12AAE914 (5µm)*2

( ): Tip radius

12AAE892 (2µm)*1

12AAE908 (5µm)*2

( ): Tip radius

12AAE938 (2µm)*1

12AAE940 (5µm)*2

( ): Tip radius

12AAJ662 (0.5mm)( ): Tip radius

12AAE884 (0.8mm) ( ): Tip radius

12AAC733 (2µm)*1

12AAB405 (5µm)*2

12AAB417 (10µm)*2

( ): Tip radius

12AAC734 (2µm)*1

12AAB406 (5µm)*2

12AAB418 (10µm)*2

( ): Tip radius

3X stylus12AAC741 (2µm)*1

12AAB414 (5µm)*2

12AAB426 (10µm)*2

( ): Tip radius

2X stylus12AAC740 (2µm)*1

12AAB413 (5µm)*2

12AAB425 (10µm)*2

( ): Tip radius

60°/90°

0.9 37.7

7.6

44.7

ø2.4

ø1.2

5.2

A

14 60

ø8

ø14

ø14

ø7

10 11.5

3.1

3.6

1.3

4 Extension rods(12AAG202: 50mm, 12AAG203: 100mm)

Detail-A (S=5/1)

Detail-A (S=5/1)

Detail-A Detail-A

ø0.3

60°/90°

0.8

0.4

ø2.4

37.7

2.5

ø0.6

8.9

44.2

0.8

A

ø2.4

87.7 0.9

ø1.2

60°/90° 60°/90°

94.7

7.6

5.2

A

ø2.4

137.7 0.9

7.6

144.7

ø1.2

5.2

A

0.4

1.2

ø0.3

60°/90°

ø2.48.9

ø0.6

2.5

37.7

1.2

44.2

A

0.6

0.4

1.6 ø0.6

60°/90°

ø2.415

ø1.2

3.4 2.4

1.6

0.6 37.7

44.4

A

ø0.3

0.4

1.6

ø1.2

ø2.4

94.4

87.7 0.6

45

A

ø0.6

0.6

ø1.2

ø2.4

41

87.7

93.8

ø1.2

1.6

3.4

2.4 ø2

.4

94.4

87.7 0.6

30

A

0.6

ø0.6

3

1.8

0.6

ø2.4

94.7

87.7 0.9

Unit: mm

Colorcoding*3

Colorcoding*3

Colorcoding*3

Colorcoding*3

Colorcoding*3

ø0.3

ø2.4

43.8

37.7

8.5

3.1

A

Optional Styli for Surface Roughness MeasurementCompatible with SJ-400, SJ-500, SV-2100,SV-(C)3100, SV-(C)4100 series

K

*1: Tip angle 60°*2: Tip angle 90°*3:

Tip radius 1µm 2µm 5µm 10µm 250µmColor coding White Black No color Yellow No notch or color

*4: For downward-facing measurment only*5: Used for calibration, a standard step gauge (No.178-611, option) is also required.

K-27

60°

Styli

For deep groove (10mm) For deep groove (20mm)*4 / Double-length for deep hole

For rolling circle waviness*4 /*5 Double-length for deep hole

For deep groove (20mm) For deep groove (40mm)*4

For deep groove (30mm) For deep groove (30mm)*4 / Double-length for deep hole

For gear tooth For gear tooth*4 / Double-length for deep hole

For rolling circle waviness surface*5

For knife-edge detector For corner hole*4 / Double-length for deep hole

For eccentric arm*4 For bottom surface

Detail-A

Detail-A

Detail-A

Detail-A

Detail-A

Detail-A

12AAC735 (2µm)*1

12AAB409 (5µm)*2

12AAB421 (10µm)*2

( ): Tip radius

12AAE893 (2µm)*1

12AAE909 (5µm)*2

( ): Tip radius

12AAE895 (2µm)*1

12AAE911 (5µm)*2

( ): Tip radius

12AAE894 (2µm)*1

12AAE910 (5µm)*2

( ): Tip radius

12AAE896 (2µm)*1

12AAE912 (5µm)*2

( ): Tip radius

12AAE897 (2µm)*1

12AAE913 (5µm)*2

( ): Tip radius

12AAE899 (2µm)*1

12AAE915 (5µm)*2

( ): Tip radius

12AAE886 (0.25mm)( ): Tip radius

12AAC736 (2µm)*1

12AAB408 (5µm)*2

12AAB420 (10µm)*2

( ): Tip radius

12AAC737 (2µm)*1

12AAB407 (5µm)*2

12AAB419 (10µm)*2

( ): Tip radius

12AAB339 (2µm)*1

12AAB410 (5µm)*2

12AAB422 (10µm)*2

( ): Tip radius

12AAC738 (2µm)*1

12AAB411 (5µm)*2

12AAB423 (10µm)*2

( ): Tip radius

12AAC739 (2µm)*1

12AAB412 (5µm)*2

12AAB424 (10µm)*2

( ): Tip radius

12AAB338 (0.8mm)( ): Tip radius

13

ø2.4

ø1.2

60°/90°

60°/90°

14.2

44.737.7

A

23

0.9

ø2.4

24.2

ø1.2

37.7

44.7

A

33 31.8

5.2

ø1.2

A

ø2.4 ø2.4

60°/90°

37.7

45.2

60°

60°

7.6

6.4

37.7

43.8

ø1.2 ø2.4A

A37.71.4

60°/90°ø1.2

45.2

7.610

ø2.4

ø2.4

7.6

ø2.4

ø1.2

60°/90°

37.70.9

44.7

A

7.6

ø2.4

ø1.2

0.9 37.7

44.7

Ball ø1.588

5.2

0.9

23

21.8

5.2

95.2

Unit: mm

87.7

ø2.4

ø1.2

93.8

87.735

ø0.8

45°

5.8 5 ø1

.6

ø2.4

94.7

0.9 87.7

ø1.2 ø2.4

5.2

6.4

7.6

43.8

42.6

5.2

ø2.4

45.237.7

ø2.4

ø1.2

36.5

35

5.2

ø3

93.887.7

ø1.2

36.5

35

ø3

93.8

6.77

87.7

ø1.2

60°

Colorcoding*3

Colorcoding*3

Colorcoding*3

Colorcoding*3

Colorcoding*3

Colorcoding*3

25°6.2 5

ø2.4

ø1

60°/90°

37.70.5

44.3

7.4

K

*1: Tip angle 60°*2: Tip angle 90°*3:

Tip radius 1µm 2µm 5µm 10µm 250µmColor coding White Black No color Yellow No notch or color

*4: For downward-facing measurment only*5: Used for calibration, a standard step gauge (No.178-611, option) is also required.

K-28

K

Contracer CV-1000 / CV-2000SERIES 218 — Contour Measuring Instruments

FEATURES•AdigitalarcscaleisequippedintheZ-axis

detecting unit. This gives you a wider range of measurement with higher resolution. No more reliance on measurement magnifications.

•Adataanalysissystem(personalcomputersystem and FORMTRACEPAK software is available.

Connected to a personal computer, the FORMTRACEPAK contour analysis program provides various modes of measurement and analysis.

CV-1000N2 can be attached to the optical column stand.

Light emission device

Receiver ICArc scale

The CV-1000 is portable and can be carried to the machine-shop for measurement of large workpieces.

CV-2000S4 with personal computer system and software

CV-1000N2 with personal computer system and software

CV-2000M4 with personal computer system and software

Technical DataX1-axis Measuring range: 50mm (CV-1000) or 100mm (CV-2000) Resolution: 0.2µm Measurement method: Reflective-type linear encoder Drive speed: 0.2, 1mm/s and manual Measuring speed: 0.2, 0.5mm/s Measuring direction: Backward Traverse linearity: 3.5µm / 50mm (CV-1000),

3.5µm / 100mm (CV-2000) *with the X axis in horizontal orientation Linear displacement: ±(3.5+2L/100)µm

* L = Drive length (mm) Inclining range: ±45° (CV-2000)Z2-axis (column, CV-2000 only) Column type: Power drive (S4 type) ot Manual (M4 type) Vertical travel: 250mm (S4 type), 320mm (M4 type) Drive speed: 1 - 5mm/s and manual

Z1-axis (detector unit) Measuring range: 25mm (CV-1000) or 40mm (CV-2000) Resolution: 0.4µm (CV-1000) or 0.5µm (CV-2000) Measurement method: Arc encoder Linear displacement: ±(3.5+I4HI/25)µm

accuracy (at 20°C) *H: Measurement height from the horizontal position (mm)

Stylus up/down operation: Arc movement Face of stylus: Downward Measuring force: 10 - 30mN Traceable angle: Ascent: 77°, descent: 87°


Stylus tip Radius: 25µm, carbide tipBase size (W x H): 600 x 450mm (CV-2000)Base material: Granite (CV-2000)Mass: 5kg (CV-1000N2),

115.8kg (CV-2000M4), 130.3kg (CV-2000S4)

Power supply: 100 – 240VAC ±10%, 50/60Hz

Arc scale on the Z-axis

K-29

172-197172-142

172-143

218-003 172-144172-378172-234

176-107

218-002218-001 (mm)218-011 (inch)

218-024

178-023

Contracer CV-1000ContracerCV-2000

178-024

218-041 (mm)218-051 (inch)

K

SYSTEM DIAGRAM

Optional Accessories218-024: Column stand for CV-1000 (vertical travel: 320mm, inclination: ±45°)218-001: Cross-travel table (XY range: 100 x 50mm)218-011: Cross-travel table (XY range: 4” x 2")218-041: Cross-travel table (XY range: 50 x 25mm)218-051: Cross-travel table (XY range: 2” x 1")218-002: Rugged table176-107: Holder with clamp218-003: Rotary vise (heavy-duty type)172-144: Rotary vise172-234: V-block with clamp (Max. workpiece dia.: 50mm)172-378: V-block with clamp (Max. workpiece dia.: 25mm)172-197: Swivel center support172-142: Center support172-143: Center support riser178-023: Vibration isolator178-024: Vibration isolator stand998862: Pin gage unit for calibration (mm)998861: Pin gage unit for calibration (inch)––––––: Arms and styli (See page K34)* To denote your AC power cable add the following suffixes to the order No.: A

for UL/CSA, C for Taiwan, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/100V

SPECIFICATIONSModel No. CV-1000N2 CV-2000M4 CV-2000S4Order No. (mm) 218-611* 218-631* 218-632*Order No. (inch) 218-621* 218-641* 218-642*X1-axis measuring range 50mm 100mm 100mmZ1-axis measuring range 25mm 40mm 40mmZ2-axis vertical travel — 320mm 250mm

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, C for Taiwan, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/100V

K-30

Detector

Mirror

Mirror

Mirror

Scale

Mirror

Beam splitter

Laser diode

Beam splitter

K

Contracer CV-3100 / CV-4100SERIES 218 — Contour Measuring Instruments

FEATURES•Dramaticallyincreaseddrivespeed(X

axis: 80 mm/s, Z2-axis: 20 mm/s) further reduces total measurement time.

•Inordertomaintainthetraverselinearityspecification for an extended period of time, Mitutoyo has adopted highly rigid ceramic guides that combine the characteristics of smallest secular change and remarkable resistance to abrasion.

•Supportforawiderangeofoptionalperipherals designed for use with the CNC models enables simplified CNC measurement.

•Thedriveunit(X-axis)andcolumn(Z2-axis) are equipped with a high-accuracy linear encoders (ABS type on Z2-axis). This improves reproducibility of continuous automatic measurement of small holes in the vertical direction and repeated measurement of parts which are difficult to position.

•Xaxisaccuracy:±(0.8+0.01L)µm Z1-axis accuracy: ±(0.8+I0.5HI/25)µm*

Designed to handle workpieces calling for high accuracy. *CV-4100S4, H4, W4 types, L = Drive length, H = Measurement height (mm)

Technical DataX-axis Measuring range: 100mm or 200mm Resolution: 0.05µm Measurement method: linear encoder Drive speed: 0 - 80mm/s and manual Measuring speed: 0.02 - 5mm/s Measuring direction: Forward/backward Traverse linearity: 0.8µm / 100mm, 2µm / 200mm *with the X axis in horizontal orientation Linear displacement: ±(1+0.01L)µm (CV-3100S4, H4, W4)

accuracy (at 20°C) ±(0.8+0.01L)µm (CV-4100S4, H4, W4) ±(1+0.02L)µm (CV-3100S8, H8, W8) ±(0.8+0.02L)µm (CV-4100S8, H8, W8)

* L = Drive length (mm) Inclining range: ±45°

Z2-axis (column) Vertical travel: 300mm or 500mm Resolution: 1µm Measurement method: ABSOLUTE linear encoder Drive speed: 0 - 20mm/s and manualZ1-axis (detector unit) Measuring range: ±25mm Resolution: 0.2µm (CV-3100), 0.05µm (CV-4100) Measurement method: Linear encoder (CV-3100),

laser hologage (CV-4100) Linear displacement: ±(2+I4HI/100)µm (CV-3100)

accuracy (at 20°C) ±(0.8+I0.5HI/25)µm (CV-4100) *H: Measurement height from the horizontal

position (mm)

Stylus up/down operation: Arc movement Face of stylus: Upward/downward Measuring force: 30mN Traceable angle: Ascent: 77°, descent: 87°


Stylus tip Radius: 25µm, carbide tipBase size (W x H): 600 x 450mm or 1000 x 450mmBase material: GraniteMass

Main unit: 140kg (S4), 150kg (H4), 220kg (W4) 140kg (S8), 150kg (H8), 220kg (W8)

Controller Unit: 14kg Remote Control Box: 0.9kgPower supply: 100 – 240VAC ±10%, 50/60HzPower consumption: 400W (main unit only)

Mitutoyo's innovative Laser Hologage technology provides near interferometer-grade accuracy using the interference phenomenon of diffracted light, coupled with a resolution of 0.05µm over the entire detecting range of 50mm.

Hologage system

Collective Calibration Function •Adedicatedcalibrationgageenablestheuser

to calibrate the instrument for Z-axis gain, symmetry, stylus-tip radius, etc., in a single procedure.

CV-3100S4 with personal computer system and software

Using Rotary Table q1Using Y-axis Table

Using Rotary Table q2

Automatic Measuring Function•Supportforawiderangeofoptional

peripherals designed for use with the CNC models enables automatic measurement.

•ThedriveunitoftheCV-4100seriesisequipped with a Laser Hologage detector giving excellent narrow/wide range accuracy and resolution in the Z1-axis.

K-31

Data composition

Data 1 Data 2

K

SPECIFICATIONSModel No. CV-3100S4 CV-3100H4 CV-3100W4Order No. (mm) 218-421* 218-422* 218-423*Order No. (inch) 218-431* 218-432* 218-433*

A variety of models available for measuring requirements

CV-3100S4 / CV-4100S4Traverse range: 100mmVertical travel: 300mmBase size (W x D): 600 x 450mmBase material: Granite

CV-3100H4 / CV-4100H4Traverse range: 100mmVertical travel: 500mmBase size (W x D): 600 x 450mmBase material: Granite

CV-3100W4 / CV-4100W4Traverse range: 100mmVertical travel: 500mmBase size (W x D): 1000 x 450mmBase material: Granite

Model No. CV-3100S8 CV-3100H8 CV-3100W8Order No. (mm) 218-426* 218-427* 218-428*Order No. (inch) 218-436* 218-437* 218-438*

CV-3100S8 / CV-4100S8Traverse range: 200mmVertical travel: 300mmBase size (W x D): 600 x 450mmBase material: Granite

CV-3100H8 / CV-4100H8Traverse range: 200mmVertical travel: 500mmBase size (W x D): 600 x 450mmBase material: Granite

CV-3100W8 / CV-4100W8Traverse range: 200mmVertical travel: 500mmBase size (W x D): 1000 x 450mmBase material: Granite

Refer to the Contracer CV-3100 / 4100 Series leaflet (E4293) for more details.

Optional SoftwareFORMTRACEPAK V5

Measurement Control Screen

Data Composition Function

Automatic Circle/Line Application Function

Model No. CV-4100S4 CV-4100H4 CV-4100W4Order No. (mm) 218-461* 218-462* 218-463*Order No. (inch) 218-471* 218-472* 218-473*X1-axis measuring range 100mm 100mm 100mmVertical travel 300mm power column 500mm power column 500mm power columnGranite base size (WxD) 600 x 450mm 600 x 450mm 1000 x 450mmDimensions (main unit, WxDxH) 756 x 482 x 966mm 756 x 482 x 1166mm 1156 x 482 x 1176mmMass (main unit) 140kg 150kg 220kg

Model No. CV-4100S8 CV-4100H8 CV-4100W8Order No. (mm) 218-466* 218-467* 218-468*Order No. (inch) 218-476* 218-477* 218-478*X1-axis measuring range 200mm 200mm 200mmVertical travel 300mm power column 500mm power column 500mm power columnGranite base size (WxD) 600 x 450mm 600 x 450mm 1000 x 450mmDimensions (main unit, WxDxH) 766 x 482 x 966mm 766 x 482 x 1166mm 1166 x 482 x 1176mmMass (main unit) 140kg 150kg 220kg

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, C for Taiwan, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/100V

K-32

Detector

Mirror

Mirror

Mirror

Scale

Mirror

Beam splitter

Laser diode

Beam splitter

K

Technical DataX1-axis Measuring range: 200mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick) Measuring speed: 0.02 - 2mm/s Measuring direction: Forward/backward Traverse linearity: 2µm / 200mm *with the X axis in horizontal orientation Linear displacement accuracy (at 20°C):

±(1+4L/200)µm (CV-3000CNC), ±(0.8+4L/200)µm (CV-4000CNC) * L = Drive length (mm)

a-axis Inclination angle: -45° (CCW) to +10° (CW) Resolution: 0.000225° Inclination: 6°/sZ2-axis (column) Vertical travel: 300mm or 500mm Resolution: 0.05µm Measurement method: Reflective-type linear encoder Drive speed: 200mm/s (max., CNC) 0 - 60mm/s (joystick) Base size (W x H): 750 x 600mm Base material: GraniteZ1-axis (detector unit) Measuring range: ±25mm Resolution: 0.2µm (CV-3000CNC),

0.05µm (CV-4000CNC) Measurement method: Linear encoder (CV-3000CNC) Laser hologage (CV-4000CNC) Linear displacement: ± (2+I4HI/100)µm (CV-3000CNC)

accuracy (at 20°C) ± (0.8+I0.5HI/25)µm (CV-4000CNC) *H: Measurement height from the

horizontal position (mm) Stylus up/down operation: Arc movement Face of stylus: Upward/downward Measuring force: 30mN Traceable angle: Ascent: 70°, descent: 70°


Stylus tip Radius: 25µm, carbide tipY-axis* Measuring range 200mm Resolution 0.05µm Drive speed Max.200mm/s (in CNC mode) 0~60mm/s (in joystick control mode) Max. table loading 20kg Traverse linearity 2µm/200mm Linear displacement accuracy (20ºC) ±(2+2L/100)µm L = Length between arbitrary two point (mm) Mass: 240kg, 250kg (high column type) (The Y-axis table and a vibration isolating stand

are excluded.)Power supply: 100 – 240VAC ±10%, 50/60HzPower consumption: 500W (main unit only)

FEATURES•High-accuracyCNCcontour/form

measuring instrument.•X1-,Y-,andZ2-axeshaveamaximumdrive

speed of 200 mm/s, which permits high-speed positioning that may result in a large increase in the throughput of multiple-profile / multiple-workpiece measurement tasks.

•Formodelswiththea axis, it is possible to perform continuous measurement over horizontal and inclined surfaces by power-tilting the X1-axis.

•ThedriveunitoftheCV-4000CNCseriesisequipped with a Laser Hologage detector giving excellent narrow/wide range accuracy and resolution in the Z1-axis.


•Enablesinclinedplanemeasurementsthrough 2-axis simultaneous control in the X- and Y-axis directions.

•SincetheZ1-axisdetectorincorporatesananti-collision safety device, the detector unit will automatically stop even if its main body collides with a workpiece or jig.

•Suppliedwithaneasy-to-operateRemoteBox, on which the user can make any movement by selecting the required axis using the two joysticks. The current axis selection is easily identified by the icon on the key top.

•CommunicationwiththeDataProcessing/Analysis section is via USB.

CV-3000CNC with personal computer system and software

Contracer Extreme CV-3000CNC / CV-4000CNCSERIES 218 — CNC Contour Measuring Instruments

Mitutoyo's innovative Laser Hologage technology provides near interferometer-grade accuracy using the interference phenomenon of diffracted light, coupled with a resolution of 0.05µm over the entire detecting range of 50mm.

Hologage system

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*1 Vibration insulating standVibration insulating mechanism: Diaphragm air spring Natural frequency : 2.5 - 3.5HzDamping mechanism: OrificeLeveling mechanism: Automatic control with mechanical valvesAir supply pressure: 390kPaMaximum loading capacity: 350kgDimensions (W x D x H): 1000 x 895 x 718mmMass: 290kg

SPECIFICATIONSModel No. CV-3000CNC CV-3000CNC CV-3000CNC CV-3000CNCOrder No.* (100V - 120V) 218-521-1 218-522-1 218-523-1 218-524-1Order No.* (200V - 240V) 218-521-2 218-522-2 218-523-2 218-524-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 300mm 300mm 300mm 300mmY-axis table unit*2 — — Installed Installeda-axis unit — Installed — InstalledVibration insulating stand*1 Installed Installed Installed InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 620 x 1000mm 800 x 620 x 1000mm 800 x 620 x 1000mm 800 x 620 x 1000mmMass (main unit) 240kg 240kg 240kg 240kg

Model No. CV-3000CNC CV-3000CNC CV-3000CNC CV-3000CNCOrder No.* (100V - 120V) 218-541-1 218-542-1 218-543-1 218-544-1Order No.* (200V - 240V) 218-541-2 218-542-2 218-543-2 218-544-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 500mm 500mm 500mm 500mmY-axis table unit — — Installed Installeda-axis unit — Installed — InstalledVibration insulating stand*1 Installed Installed Installed InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 620 x 1200mm 800 x 620 x 1200mm 800 x 620 x 1200mm 800 x 620 x 1200mmMass (main unit) 250kg 250kg 250kg 250kg

*Select one of the optional accessory sets suited to your AC line voltage and measurement unit. 12AAH790 (mm, UL/CSA), 12AAH791 (mm, EU), 12AAH792 (mm, BS), 12AAH796 (mm, China), 12AAH797 (mm, EK), 12AAH793 (inch, UL/CSA), 12AAH794 (inch, EU), 12AAH795 (inch, BS), 12AAH798 (inch, China)

Model No. CV-4000CNC CV-4000CNC CV-4000CNC CV-4000CNCOrder No.* (100V - 120V) 218-561-1 218-562-1 218-563-1 218-564-1Order No.* (200V - 240V) 218-561-2 218-562-2 218-563-2 218-564-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 300mm 300mm 300mm 300mmY-axis table unit*2 — — Installed Installeda-axis unit — Installed — InstalledVibration insulating stand*1 Installed Installed Installed InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 620 x 1000mm 800 x 620 x 1000mm 800 x 620 x 1000mm 800 x 620 x 1000mmMass (main unit) 240kg 240kg 240kg 240kg

Model No. CV-4000CNC CV-4000CNC CV-4000CNC CV-4000CNCOrder No.* (100V - 120V) 218-581-1 218-582-1 218-583-1 218-584-1Order No.* (200V - 240V) 218-581-2 218-582-2 218-583-2 218-584-2X1-axis measuring range 200mm 200mm 200mm 200mmZ2-axis vertical travel 500mm 500mm 500mm 500mmY-axis table unit*2 — — Installed Installeda-axis unit — Installed — InstalledVibration insulating stand*1 Installed Installed Installed InstalledGranite base size (WxD) 750 x 600mm 750 x 600mm 750 x 600mm 750 x 600mmDimensions (main unit, WxDxH) 800 x 620 x 1200mm 800 x 620 x 1200mm 800 x 620 x 1200mm 800 x 620 x 1200mmMass (main unit) 250kg 250kg 250kg 250kg

*Select one of the optional accessory sets suited to your AC line voltage and measurement unit. 12AAH800 (mm, UL/CSA), 12AAH801 (mm, EU), 12AAH802 (mm, BS), 12AAH806 (mm, China), 12AAH807 (mm, EK), 12AAH803 (inch, UL/CSA), 12AAH804 (inch, EU), 12AAH805 (inch, BS), 12AAH808 (inch, China)

*2 Y-axis table unitMeasuring range: 200mmMinimum reading : 0.05µmScale unit: Reflective-type Linear Encoder Drive speed: Max. 200mm/s (CNC) 0 - 50mm/s (joystick)Maximum loading capacity: 20 kgTraverse linearity: 0.5µm/200mm (surface roughness) 2µm/200mm (contour)Linear displacement accuracy (at 20°C): ± (2+2L/100) µm, contour mode L: Dimension between two measured points (mm)Table size: 200 x 200mmDimensions (W x D x H): 320 x 646 x 105mmMass: 35kg

Data composition

Data 1 Data 2

Optional SoftwareFORMTRACEPAK V5

Measurement Control Screen

Data Composition Function

Automatic Circle/Line Application Function

K-34

H 15

ø8

40 Stylus

15515

ø8

H Stylus 25

145

H 95 155

H

Straight type For small-hole stylus Eccentric type

ø8

H H

40

932693 12AAE873 Tip shape: Single bevel Cone Tip angle: 20° 30° Tip radius: 25µm 25µm Tip material: Carbide Carbide



Tip angle: 20° Edge width: 3mm Tip radius: 25µm Tip material: Carbide

Ball dia: 1mm Tip material: Carbide

Tip angle: 12° Tip radius: 25µm Tip material: Carbide



Tip angle: 30°/50°* Tip radius: 25µm Tip material: Carbide, Sapphire, Diamond*

Single bevel Cross ground

Small hole: 932693 / 12AAE873 Small hole: 932694 / 12AAE874 Small hole: 932695 / 12AAE875

Knife edge Ball Cone

Cone

H

ø3 ø3

H H

ø3

ø3 ø3 ø3

H

ø6

ø1.6 H

12.5 50

ø6

ø3 H

50 20 50

Hø4

ø8

K

List of Applicable ArmsArm Order No. Compatible stylus

height

Straight type

935111 H = 6mm935112 H = 12mm935113 H = 20mm935114 H = 30mm935115 H = 42mm

Eccentrictype


Small hole 935110 H = 0.4, 1, 2.5mm

List of Applicable StyliStylus Order No. Stylus height

Single-bevel stylus carbide-tipped


Cross-ground stylus carbide-tipped


Cone stylus carbide-tipped tip angle 20°

12AAE865 H = 6mm12AAE866 H = 12mm12AAE867 H = 20mm12AAE868 H = 30mm12AAE869 H = 42mm

Cone stylus sapphire tipped tip angle 30° *Diamond tipped *tip angle 50°

354892 H = 6mm354893 H = 12mm354894 H = 20mm355129* H = 20mm354895 H = 30mm354896 H = 42mm


12AAA566 H = 6mm12AAA567 H = 12mm12AAA568 H = 20mm12AAA569 H = 30mm12AAA570 H = 42mm

Knife-edge stylus carbide-tipped


Ball stylus carbide-tipped


Small-hole stylus carbide-tipped one-sided cut

932693 H = 0.4mm932694 H = 1mm932695 H = 2.5mm

Small-hole stylus carbide-tipped cone

12AAE873 H = 0.4mm12AAE874 H = 1mm12AAE875 H = 2.5mm

Optional Arms and Styli for Contour Measurement

For CV-1000 and CV-2000

K-35

H

130 15

ø8

15

ø3

Stylus 185 15

ø8

40 Stylus

185 15

ø8

H Stylus

Straight type For small-hole stylus Eccentric type

55 20

ø3 ø5

55 13

ø1.6

ø4

H

55

ø4

HHH

H

H

ø3 ø3

ø3 ø3

ø3

H

H

H

ø3

Tip shape: Single bevel Tip angle: 20° Tip radius: 25µm Tip material: Carbide

Tip shape: Single bevel Tip angle: 20° Tip radius: 25µm Tip material: Carbide

Tip angle: 20° Edge width: 3mm Tip radius: 25µm Tip material: Carbide

Ball dia: 1mm Tip material: Carbide




Tip angle: 30°/50°* Tip radius: 25µm Tip material: Carbide, Sapphire, Diamond*

Single bevel Cross ground

Small hole: 12AAE297 Small hole: 12AAE298

Tip shape: Single bevel Tip angle: 20°Tip radius: 25µmTip material: Carbide

Small hole: 12AAE299

Knife edge Ball Cone

Cone

K

•Anyspecifiedarmandstylusotherthanabovelistedcanbecustom-madetospecialorder.

List of Applicable ArmsArm Order No. Compatible stylus

height

Straight type

12AAE294 H = 6mm12AAE295 H = 12mm996506 H = 20mm996507 H = 30mm996508 H = 42mm

Eccentrictype


Small hole 12AAE296 Small-hole stylus

List of Applicable StyliStylus Order No. Stylus height

Single-bevel stylus carbide-tipped


Cross-ground stylus carbide-tipped



12AAE865 H = 6mm12AAE866 H = 12mm12AAE867 H = 20mm12AAE868 H = 30mm12AAE869 H = 42mm

Cone stylus sapphire tipped tip angle 30° *Diamond tipped *tip angle 50°

354892 H = 6mm354893 H = 12mm354894 H = 20mm355129* H = 20mm354895 H = 30mm354896 H = 42mm


12AAA566 H = 6mm12AAA567 H = 12mm12AAA568 H = 20mm12AAA569 H = 30mm12AAA570 H = 42mm

Knife-edge stylus carbide-tipped


Ball stylus carbide-tipped


Small-hole stylus carbide-tipped one-sided cut

12AAE297 H = 0.4mm12AAE298 H = 1mm12AAE299 H = 2.5mm

For CV-3100, CV-4100, CV-3000CNC, CV-4000CNC, SV-C3100, SV-C4100, SV-C3000CNC and SV-C4000CNC

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Optional Accessories for Automatic MeasurementFor SV series, SV-C series, CV series and CNC Models

Quick chuck: 211-032This chuck is useful when measuring small workpieces. You can easily clamp them with its knurled ring.

Retention range

Inner latch OD: ø1 - ø36mmInner latch ID: ø14 - ø70mOuter latch OD: ø1 - ø75mm

Dimensions ø118 x 41mmMass 1.2kg

Automatic-leveling table:178-087 (SV, CV, CS3200)Automatic-leveling table:178-037 (CNC Models)This is a stage that performs fully automatic leveling as measurement starts, freeing the user from this troublesome operation. Fully automatic leveling can be done quickly by anyone. In addition, the operation is easy and reliable.

Inclination adjustment angle ±2°Maximum load 7kgTable dimensions 130 x 100mmMass 3.5kg

Micro-chuck: 211-031This chuck is suitable for clamping extra-small diameter workpieces (ø1mm or less), which cannot be retained with the centering chuck.

Retention range OD: ø0 - ø1.5mmDimensions ø118 x 48.5mmMass 0.6kg

Displacement 360°Resolution 0.0072°Maximum load(loading moment)

4kg (343N•cmorless)

Rotational speed Max. 18°/sMass 5kg

Travel range 200mmResolution 0.05µmPositioning accuracy ±3µmDrive speed Max. 80mm/sMaximum load 50kgMass 28kg

q1-axis table: 12AAD975*For efficient measurement in the axial/transverse directions. When measuring a cylindrical workpiece, automatic alignment can be performed in combination with the Y-axis table. * q1-axis mounting plate (12AAE630) is required when directly installing on the base of the SV-3100.

q2-axis table: 178-078*You can measure multiple points on a cylindrical workpiece and automate front/rear-side measurement.* q2-axis mounting plate (12AAE718) is required when directly installing on the

base of the SV-3100.# It allows semi-automatic measurement with a Manual Type Machine by using

these items.

Y-axis table*: 178-097 For SV, SV-C and CV (not CNC models)Enables efficient, automatic measurement of multiple aligned workpieces and multiple points on a single measurement surface.* It allows semi-automatic measurement with a Manual Type Machine by using

these items.

Examples of optimal combinations of accessories for CNC models

For the combinations and the specifications of various optional accessories described in this catalog, contact your nearest Mitutoyo sales office.* : Applicable only to surface roughness measurement** : Applicable only for SV-M3000CNC

Optional accessory

Function

Y-axis Table

q1 Table q2 Table

Automatic leveling — — —Automatic alignment (Patent registered: Japan) l l —

Multiple workpiece batch measurement s — —

Measurement in the Y-axis direction l — —

Oblique measurement of the XY plane * l — —

Outside 3D surface roughness measurement/evaluation * l — —

Multiple-piece measurement in the Y-axis direction (Positioning in the Y-axis direction)

l — —

Multiple-piece measurement in the radial direction (Rotational positioning in the XY plane)

s l —

Inclined surface measurement in the X-axis direction s — —

Inclined hole inside measurement in the X-axis direction

s — —

Multiple cylinder generatrix line measurement s — l

Measurement of both top and bottom surfaces s — l

Rotary positioning of large workpiece ** — — —

Upward/downward and frontward/backward measurement of large workpiece **

— — —

Displacement 360ºResolution 0.004ºMaximum load 12kgRotational speed Max. 10º/sMass 7kg

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Recorded profiles

Aligned Not aligned

End point

Axial line

Axial line

Traverse directionTraverse direction

End point

Start point

Start point

K

l: Essential s: Better to provide with —: Not necessary

Rotary vise218-003•Two-slidejaw

type.•Max.workpiece

size: ø60mm•Minimum

reading: 1°

Precision vise178-019•Max.workpiecesize:

36mm•Canbemountedona

leveling table.

Leveling table178-043-1 (mm), 178-053-1 (inch)•Tabletop:130 x 100mm•Levelingrange:±1.5°•XYtravel:±12.5mm

Digital leveling table178-042-1 (mm)•Tabletop:130 x 100mm•Levelingrange:±1.5°•XYtravel:±12.5mm

Leveling table178-016•Tabletop:130 x 100mm•Levelingrange:±1.5°•Height:40mm

Holder with clamp176-107• Used with a

cross-travel table or rugged table.

• Max. workpiece height: 35mm

Swivel center support172-197• Max. workpiece

dia.: 80mm* * 65mm when swiveled 10°

• Max. workpiece length: 140mm

Center support riser172-143•Usedwitha

center support.•Max.workpiece

dia.: 240mm

Center support172-142•Max.workpiece

dia.: 120mm•60mmriseris

optional

V-block with clamp172-234, 172-378• Used with a

cross-travel table or rugged table.

• Max. workpiece dia.: 50mm (172-234), 25mm (172-378)

Calibration stand12AAG175For mounting a roughness specimen or step gage during calibration.

172-378172-234

3-axis adjustment tableThis table helps make the alignment adjustments required when measuring cylindrical surfaces. The corrections for the pitch angle and the swivel angle are determined from a preliminary measurement and the Digimatic micrometers are adjusted accordingly. A flat-surfaced workpiece can also be leveled with this table.

178-047

V-block998291•Workpiecediameter:

1mm to 160mm•Canbemountedona

leveling table

Cross-travel table218-001 (mm), 218-011 (inch)•Tabletop:280 x 180mm•XYtravel:100 x 50mm

Cross-travel table218-041 (mm), 218-051 (inch)•Tabletop:280 x 152mm•XYtravel:50 x 25mm

Optional Accessories for Surftest / FormtracerCompatible with Desktop Models

Drive unit tilting function (Patent pending: Japan)

Large q Table Rotary-type detector holder

l — —

s — —

— — —

— — —

— — —

s — —

— — —

— — —

l — —

l — —

— — —

— — —

— l —

— — l

Formtracer SV-C3100 / SV-C4100 - Mitutoyo · K-16 K Formtracer SV-C3100 / SV-C4100 SERIES 525 —...

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Transcript of Formtracer SV-C3100 / SV-C4100 - Mitutoyo · K-16 K Formtracer SV-C3100 / SV-C4100 SERIES 525 —...