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3 TripleCoatingsNew generation of PVD Coatings and Equipment

TripleCoatings3

PLATITFully compatible toGeneral Information Compact hard coating unit Based on PLATIT LARC and CERC technologies (LAteral Rotating Cathodes and CEntral Rotating Cathodes) Coating on tool steels (TS) above 230 C, high speed steels (HSS) 350 - 500 C and on tungsten carbide (WC) between 350 - 600 C

Coatings Monolayers, multilayers, nanogradients, nanolayers, nanocomposites, TripleCoatings3 and their combinations Standard: TiN, TiAlN, AlTiN, nACo Optional: SuperTiN, TiCN, cVIc, TiAlCN, GRADVIc, CrN, CROMVIc, CrTiN, CROMTIVIc, Ti2N, ZrN, AlCrN, AlTiCrN, nACo, FiVIc, nACRo, nACVIc, nATCRo, nACTVIc, all TripleCoatings3 *1 The most flexible coating unit: more than 30 different coatings without cathode exchange!

Hardware Foot print: W2350 x D1660 x H2300 mm Vacuum chamber, internal sizes: W580 x D566 x H580 mm Usable plasma volume: 485 x H440 mm System with turbo molecular pump VIRTUAL and TUBE Shutters for all LARC cathodes Ionic plasma cleaning: etching with gas (Ar/H2); glow discharge, metal ion etching (Ti, Cr) Pulsed (30 or 350 kHz) BIAS supply 6 (+1) gas channels, 5 (+1) MFC controlled Electrical connection: 3x400V, 100A, 50-60 Hz, 45 kW Upgradeable to pand p user's place 311+DLC 311+OXI on

TripleCoatings3Thickness [m] 1-7 1-7 1-7 1-7 1-7 Friction (fretting) Max. usage coefficient temperature [C] 0.45 1200 / 900 0.35 1100 / 900 0.40 1150 / 900 0.4 0.6 900 900 Symbol color

TripleCoatings3 Depositable by the p 311Color 1 nACo3 2 nACRo3 3 nATCRo3 4 AlCrN3 5 AlTiCrN3 6 TiXCo3 7 nACoX3 8 User-Triples violet-blue blue-grey blue-grey black blue-grey copper black Classics Nanohardness up to [GPa] 45 / 34 40 / 34 42 / 34 38 / 32 32 / 34

AlXN3

47 / 40 1-3 0.55 1100 / 1200 30 / 40 7 - 18 0.4 1200 User-Triples: e.g. CrN - AlCrN-Multilayer/SiN - AlCrN/SiN

2

*1 The TripleCoatings3-principle was introduced on the 23.04.2007 at the ICMCTF-conference in San Diego: Morstein, M., Cselle, T., Coddet, O., Holubar, P., Jilek; M., Luemkemann, A., Torp, B.: Rotating ARC PVD Cathodes - Five Years of Dependable High Performance

SiX3

ConfigurationsA: p 311-13 Configuration3x LARC : LAteral Rotating Cathodes Target size: 96 x 510 mm 1x CERC : CEntral Rotating Cathode Target size: 110 x 510 mm Usable plasma volume: 485 - 185 mm x H440 mm Highest productivity for coating of cutting shank tools and inserts. 3 cathodes in action at the same time: Free programmable switching between cathode 2 and 4; between operation mode p 311-13 and even during deposition process. operation mode p 311-03,

1 3 2

4

1 3 2

4

B: p 311-03 Configuration3x LARC : LAteral Rotating Cathodes Target size: 96 x 510 mm No CERC : CEntral Rotating Cathode Usable plasma volume: 485 x H 440 mm For coating large-volume work pieces, especially molds and dies as well as machine parts.

nATCRo3: Deposition process

Ti Tr TripleCoating3 rple ri

CrTiN 1. step: Adhesion layer CrTiN

AlTiN AlSi

AlTiCrN/SiN

2 3Cr 2. step: Core layer AlTiN 3. step: Top layer nATCRo Ti Al(Ti)

1

43

PLATITGeneral Information Compact hard coating unit Based on PLATIT LARC technology (LAteral Rotating Cathodes) Coating on tool steels (TS) above 230 C, high speed steels (HSS) 350 - 500 C and on tungsten carbide (WC) between 350 - 600 C

Hard Coatings Standard: TiN, TiAlN, AlTiN, nACo Optional: TiCN-MP, TiCN, cVIc , TiAlCN, GRADVIc , CrN, CROMVIc , CrTiN, CROMTIVIc , Ti2N, ZrN, AlCrN, AlTiCrN, nACo, F-VIc, nACRo, nACVIc Monolayers, multilayers, nanogradients, nanolayers, nanocomposites, and their combinations Selected TripleCoatings3

Hardware Foot print: W1890 x D1500 x H2120 mm Vacuum chamber with internal sizes of: W450 x D320(460) x H615 mm Usable plasma volume: 355 x H440 mm Turbo molecular pump with pendulum valve Revolutionary rotating (tubular) cathode system with 2 LARC cathodes: LARC target size: 96 x 510 mm Magnetic Coil Confinement (MACC) for ARC control Virtual Shutter and Tube Shutters Ionic plasma cleaning: etching with gas (Ar/H2); glow discharge, metal ion etching (Ti, Cr) Pulsed BIAS 5 (+1) gas channels, 4 (+1) MFC controlled Special heaters with dust filter Electrical connection: 3x400V, 100A external fuse 50-60 Hz, 30 kW

Electronics and Software Industrial PC and PLC system Control system with touch-screen menu driven concept Manual and automatic process control Data logging and real-time viewing of process parameters Remote diagnostics No programming knowledge is required for process control Operator's manual on CD-ROM Upgradeable to p p user's place 111+DLC and 111+OXI on

TripleCoatings3 Depositable by the p 111Color Classics 1 nACo3 AlXN3 SiX3 4

violet-blue black copper black

Nanohardness up to [GPa] 45 / 34 38 / 32 47 / 40 30 / 40

Thickness [m] 1-7 1-7 1-3 7 - 18

Friction (fretting) Max. usage coefficient temperature [C] 0.45 1200 / 900 0.4 0.55 0.4 900 1100 / 1200 1200

Symbol color

4 AlTiCrN3 6 TiXCo3 7 nACoX3

TripleCoatings3 made in

and PL1001

Deposition of Triple Structures in p 111Cathode configuration: AlCr - Ti AlTiCrN3

Toplayer: AlCrN Core layer: AlTiCrN Adhesion layer: TiN

Position 1: AlCr-cathode

Position 2: Ti-cathode

Triple Structure: TiN - AlTiCrN - AlCrN nACo3

Toplayer: TiSiN Core layer: TiAlSiN Adhesion layer: TiSiN Position 2: TiSi-cathode Position 1: AlTi-cathode Cathode configuration: AlTi - TiSi

Triple Structure: TiSiN - TiAlSiN - TiSiN

Deposition of Triple Structures in PL1001Cathode configuration: Cr - AlTi - Cr - AlTi AlTiCrN3

Toplayer: AlTiCrN Core layer: AlTiN Adhesion layer: CrN

Triple Structure: CrN - AlTiN - AlTiCrN AlTiCrN3

Toplayer: AlTiCrN Core layer: AlCrN Adhesion layer: TiN

Cr Al Ti

Al

Cr

Cathode configuration: Ti - AlCr - Ti - AlCr

TiTriple Structure: Ti-AlCrN-AlTiCrN

5

TripleCoatings3 - Overview

The classics with Nanocomposites: for UNIVERSAL usenACo3TiN - AlTiN - TiAlN/SiN p 2:AlSi - 3:no - 4:AlTi 311: 1:Ti p - 2:TiSi 111: 1:AlTi

Standard TripleCoatings33

The TripleCoatings are the results of the systematic coating development of PLATIT. The high flexibility of the rotating cathodes makes a great variablity of coatings possible, available for universal use or dedicated to special applications.

Dedicated TripleCoatings3

nACRo3CrN - AlTiCrN - AlCrN/SiN p- 2:AlSi - 3:Cr - 4:AlTi 311: 1:no

3 TripleCoatings

nATCRo3: HSS MachiningTiCrN - AlTiN - AlTiCrN/SiN p 2:AlSi - 3:Cr - 4:AlTi 311: 1:Ti -

Numbering for cathodes' positions in p 3114

16

2

3

AlXN3 : TripleCoatings3 without Silicon

AlCrN3

p 2:Al - 3:Cr - 4:no 311: 1:Ti -

CrN - Al/CrN Multi/Nanolayer - AlTiN

AlTiCrN3Cr(Ti)N - AlTiCrN - AlCrN p 2:Al - 3:Cr - 4:no 311: 1:Ti p - 2:Ti 111: 1: AlCr PL1001: 1:Cr - 2:AlTi - 3:Cr - 4:AlTi

SiX :Tuned TripleCoatings3 with Silicon3

TiXCo3: For Superhard Machining

p 2:AlSi 3:TiSi(X) 4:no 311: 1:Ti p 2: TiSi 111: 1:AlTi

X=0, B or Cr ; TiN - nACo TiSi(X)N

nACoX3: For Dry Turning

p 2:AlSi 3:AlCr 4:AlTi 311: 1:Ti p 2:TiSi 111: 1: AlCr

TiN AlTiN nACo AlCrO(N)

Dedicated for user's applicationA: p 2:AlSi - 3:Cr - 4:no 311: 1:Al UserA's-Triple: CrN - AlCrN-Multilayer/SiN - AlCrN/SiN B: p 2:AlSiY - 3:Cr - 4:AlTi 311: 1:Ti UserB's-Triple: TiN - AlTiN - AlTiYN/SiN C: p 2:Al - 3:CrSi - 4:AlTi 311: 1:Ti UserC's-Triple: TiN - AlTiN - CrSiN D: E: F:........7

TripleCoatings3Dry Hard Milling at 60.5 HRC with nACo3After milling Lf= 444 m = 3.5 hours

Special market coating-1 for hard milling AlTiN-D

Special market coating-2 for hard milling AlTiN-X

nACo3

After milling Lf= 888 m = 7 hours

Material: 1.2080 - X210Cr12 (Hardness = 60,5 HRC) Tools: Solid carbide ball nose end mills - d=10 mm z=2 n =10445 min-1, vc=0-328 m/min - ap = 0.14mm, ae = 0.1mm, fz = 0.1mm, external cold air nozzle

Interrupted Dry Turning with Coated Ceramic Inserts by nACo314 12 10 8 6 4 2 0 CVD-1 CVD-2 CVD-3 PVD-1 CBN-1 CBN-2 2 4 3 1 1 1 nACo3 Max. Number of Cuts at VBmax = 0.2 mm 13

Material: Austempered Ductile Cast Iron, ADI 900, 325 HBWT2,5/187,5 Inserts: CNGX 120716 ceramic - vc=270 m/min, f = 0.4mm - ap=2mm, dry Tested by GFE, Schmalkalden

Milling with Insert Head using nACRo350 45 40 35 tool life; [min] 30 25 tool-1 tool-1 tool-1 tool-2 tool-2 tool-1 20 15 10 5 0 AlTiN nACRo3-gold = CrN + AlTiCrN + CrAlN/SiN + TiN AlTiN gold nACo3-gold nACRo3-gold tool-2 tool-2 31 33 28 35 42 43 39 40

nACo3-gold = TiN + AlTiN + TiAlN/SiN + TiN

Dry cutting with milling head Inserts: SPKN 1203 EDSR - Work piece material: Ck45 vc=279 m/min ap=2mm fz=0.244 mm/z ae=100 mm Source: ZCU Pilsen SHM, Sumperk, CZ

8

ApplicationsFine Punching with nACRo318'000'000 16'000'000 14'000'000 12'000'000 10'000'000 8'000'000 6'000'000 4'000'000 2'000'000 0 Number of punched work pieces 17'000'000

2'000'000 conventional PVD-coating nACRo3

Source, Stepper, Pforzheim, Germany

Micro Hobbing using AlCrN30.07 0.06 flank wear [m] 0.05 0.04 0.03 0.02 0.01 0 0 100 200 300 tool life Lf [m] 400 500Dry micro hobbing vc=200 m/min Source: Tool Manufacturer Japan

Standard coating of the tool manufacturer AlTiCrN version 1 AlTiCrN3 version 23

Hobbing with AlTiCrN36000 5000 4000 3000 2775 1-3 4-6 Tool number 7-9 10 - 12 3300 2000 1000 0 4650 tool life [work pieces] TiAlN AlCrN AlTiCrN3

Average Scatter Work piece material: 34CrNiMo6 (1.6582) vc=45m/min, fn=0.12 mm/rev, RPM=500 Coolant with oil - Source: Unimerco, Sund, DK

9

TripleCoatings3Dedicated for Applications and UsersHard Turning using Coated CBN-Inserts with Special Adhesion Structure for nACo36000 5000 tool life; Lf [m] 4000 3000 2000 1000nACo3 with monoblock interface-1

4955 3233 2883 3340

5370

nACo3 with multilayer interface-2

Adhesion layer 0 CBN

Adhesion layer 2 Adhesion layer 1 CBN

Gradient adhesion layer CBN

Mat: 100Cr6 63 HRC vc=140 m/min f=0.12mm ap=0.2mm dry - Source: GFE, Schmalkalden, Germany

Hard Milling using Dedicated Coating TiXCo3180 160 140 120 100 80 60 40 20 0 183 VBave VBmax

VB [m]

102 60

97 86 67 44 72

AlTiN (market)

AlTiN + AlCrN (market)

nACRo3

TiXCo3

Torus end mill in cold-working steel X210Cr12 (1.2080) - 61.5 HRC 8 mm - z=4 - ap=0.1mm - ae=3mm vc=100m min-1 - n=4000min-1 - fz=0.2mm - vf=3200mm min-1 - dry - Source: Development project LMT Fette-PLATIT

High Speed Dry Turning with Dedicated Oxynitride-Coating nACoX3Tool life; Tc [min] 50 40 nACoX3 30 20 10 0 nACo3 Standard coating of the insert manufacturer

Pramet Tools CNMG 120408-PM

AlCrON AlCrN nACo = TiAlN / SiN TiN = Adhesion layer

200

300 315 330 250 Cutting speed; vc [m/min]

350

10

vc=250350 m/min, f=0.25mm/rev, a=1.5 mm Material: C60 (1.1221), HB225 tool life end criterium: VBmax200 m - Measured at TH Budapest

nACo3 with gradient interface-3

uncoated

Adhesion layer with different interfaces Multilayer coating; AlTiN Top layer; nACo

0

TiN

Coating Properties1* 2 3 4* 5 6* 7* 8 9 10 11 12 13 14* 15* 16* 17* 18* 19* 20 21 22 23 24 25 26 27 28 29 30 31 32 33 Nanohardness up to [GPa] TiN gold 24 TiAlN-ML; Ti/Al ~ 50/50% violet-black 28 TiAlN-G; Ti/Al > 50/50% violet-black 32 TiCN-MP red-copper 32 CBC|DLC2 as top coating only grey 20 | 25 TiCN-grey blue-grey 37 cVIc grey 20 / 37 cVIc2 grey 25 / 37 SuperTiN gold 28 AlTiN-ML; Ti/Al 40/60% black 33 AlTiN-G; Ti/Al 40/60% black 34 TiAlCN burgundy-violet 33 GRADVIc grey 20 / 33 GRADVIc2 grey 25 / 33 CrN metal-silver 18 CROMVIc grey 20 / 18 CROMVIc2 grey 25 / 18 CrTiN metal-silver / gold 30 CROMTIVIc grey 20 / 30 CROMTIVIc2 grey 25 / 30 Ti2N silver 25 ZrN white-gold 20 AlCrN blue-grey 32 AlTiCrN blue-grey 34 nACo-G violet-blue 45 F-VIc grey 20 / 30 F-VIc2 grey 25 / 30 nACRo blue-grey 40 nACVIc grey 20 / 30 nACVIc2 grey 25 / 30 3 nACo violet-blue 45 / 34 nACRo3 blue-grey 40 / 34 AlCrN3 black 38 / 32 Ti Tr rple ri AlTiCrN3 TripleCoatings3 blue-grey 32 / 34

Color

Thickness [m] 1-7 1-4 1-4 1-4 0.5 | 5 1-4 1-5 1-5 1-7 1-4 1-4 1-4 1.5 - 5 1.5 - 5 1-7 1 - 10 1 - 10 1-7 1 - 10 1 - 10 1-4 1-4 1-4 1-4 1-4 1-6 1-6 1-7 1 - 10 1 - 10 1-7 1-7 1-7 1-7

Friction (fretting) Max. usage coefficient temperature [C] 0.55 600 0.60 700 0.60 750 0.20 400 0.15 | 0.1 400 | 450 0.20 400 0.15 400 0.1 450 0.40 500 0.70 850 0.70 900 0.30 500 0.15 400 0.1 450 - 500 0.30 700 0.15 400 0.1 450 - 700 0.40 600 0.15 400 0.1 450 - 600 0.45 600 0.40 550 0.60 900 0.55 850 0.45 1200 0.15 400 0.1 450 - 1200 0.35 1100 0.15 400 0.1 450 - 1100 0.45 1200 / 900 0.35 1100 / 900 0.40 900 0.6 900

Symbol color

Basic

S

Triple

Nanocomposite

Optional

*LT: Low temperature processes possible.

Application Recommendations for TripleCoatings3CuttingDrilling HSS Steels Hardened steels Cast Iron Aluminium (> 12% Si) Super alloys nACRo3

For some applications, dedicated TripleCoatings3 will lead to a higher performance than standard coatings.

ChiplessTapping

Milling HM nACo3 nACo3 nACRo3 nACRo3 3 nACo

Hobbing HM nACRo3 nACo3 nACo3 nACRo3 3 nACo

HSS nACRo3

Reaming HSS HM

Forming

AlTiCrN3 AlCrN3

nACRo3 nACRo3

nACRo3 nACRo3

AlTiCrN

3

nACVIc nACRo3 nACRo3 nACVIc 3 nACRo

nACRo3

nACRo3 nACRo3 3 nACRo

nACo3 nACo3 nACRo3 nACo3 3 nACo

nACVIc

nACVIc nACVIc

11

PLATIT AG

Advanced Coating SystemsSWISS QUALITY

Advanced Coating Systems Eichholz St. 9 CH-2545 Selzach / SO Switzerland Phone: +41 (32) 544 62 00 Fax: +41 (32) 544 62 20 E-Mail: [email protected] Web: www.platit.com Service for the units PL50, PL200, Mo299, PL1000 and PL2000 SWITZERLAND PLANAR Technologie SARue d'industrie 11 CH-1632 Riaz Phone: Fax: E-Mail: +41 (26) 919 5011 +41 (26) 919 5012 [email protected]

Service for the units PL70, p and 80, p 111 p 311

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CZECH REPUBLIC LISS Coating CenterLISS a.s. Dopravni 2603 CZ-75661 Roznov p. R. Phone: +420 (571) 842 681 Fax: +420 (571) 842 681 E-Mail: [email protected]

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SOUTH KOREA PLATIT Support Center431-070 105 Ho, Dongyoung Venturestel 5th199-32 Anyang 7 dong Manangu Anyang City Kyunggido Phone: Fax: E-Mail: +82 (31) 447 4395 +82 (31) 447 4397 [email protected]

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U.S.A. PLATIT, Inc.Advanced Coating Systems 1840 Industrial Drive, Suite 220 Libertyville, IL 60048-9466 Phone: Fax: E-Mail: +1 (847) 680-5270 +1 (847) 680-5271 [email protected]

HeadquartersMoosstrasse 68 CH-2540 Grenchen Switzerland Phone: +41 (32) 654 26 00Editor: Dr. Tibor Cselle

2010 PLATIT AG. All rights reserved. Specifications subject to change. All signed trademarks are registered by the BCI Group. Several technologies described herein are protected by international patents. EV3 TripleCoatings

Design: