Flatness (Flatness) 1,157 0.934 0.711 0042 -1.074 ... · Flatness (Flatness) 1,157 0.934 0.711 0042...

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Corning Tropel Metrology Instruments Corning Tropel manufactures a complete line of non-contact metrology instruments, that measure surface form for flatness, parallelism, height, depth or thickness, with sub-micron accuracy in just seconds. Tropel systems are designed to operate in a wide range of environments, from the shop floor to the QC lab. Whatever your application youll find a system that is right for you. Automotive Display Semiconductor Hydraulics Pnuematics Data Storage Markets Precision Components Precision Components Compressor & Pumps Disk Drive Flat Panel Display Fuel Cells Fuel Injector Fuel Pumps Photomasks Seal Faces Thin Sheet & Cover Glass Wafers Tropel FlatMaster Systems Part sizes from 5 mm to 500 * mm Tropel UltraFlat System Photomask and photoblank sizes up to 150 mm Tropel UltraSort System Wafer sizes from 50 mm to 200 mm Tropel FlatMaster MSP System Part sizes up to 300 mm; step height/depth to 300 mm Ground Lapped Polished Metals Polymers Ceramics Composites Glass many others Flatness Line profiles Surface profiles Spherical radius NIST traceable standard included Photoblanks Photomasks Polished Coated Pre and post pellicle mount comparison 6025 & 5009 substrates Flatness Local slope Microwaviness Stress X-Y polyfit Robotic handling and Class 1 clean room options available Sawn Ground Lapped Polished Silicon Silicon Carbide Gallium Arsenide Gallium Nitride Gallium Phosphide Indium Phosphide Sapphire Germanium Lithium Niobate many others Wafer Parameters Bow/Warp Sag/SORI TTV/NTV Site Parameters LTV LDOF LTIR Fine ground Lapped Polished Super-finished Metals Polymers Ceramics Composites Glass many others Flatness Parallelism Depth/height Line profile Surface profile *Stitching algorithm used for parts larger than 200 mm

Transcript of Flatness (Flatness) 1,157 0.934 0.711 0042 -1.074 ... · Flatness (Flatness) 1,157 0.934 0.711 0042...

Page 1: Flatness (Flatness) 1,157 0.934 0.711 0042 -1.074 ... · Flatness (Flatness) 1,157 0.934 0.711 0042 -1.074 Straightness LS ot Flatness (Flatness) LocO.476 mm Rng um -0.001 um RMS

Corning TropelMetrology InstrumentsCorning Tropel manufactures a complete line of non-contact metrology instruments, that measure surface form for flatness, parallelism, height, depth or thickness, with sub-micron accuracy in just seconds. Tropel systems are designed to operate in a wide range of environments, from the shop floor to the QC lab. Whatever your application you’ll find a system that is right for you.

AutomotiveDisplaySemiconductorHydraulicsPnuematicsData Storage

Markets Precision ComponentsPrecision ComponentsCompressor & PumpsDisk DriveFlat Panel DisplayFuel CellsFuel InjectorFuel PumpsPhotomasksSeal FacesThin Sheet & Cover GlassWafers

Tropel® FlatMaster® SystemsPart sizes from 5 mm to 500* mm

Tropel® UltraFlat™ SystemPhotomask and photoblank sizes up to 150 mm

Tropel® UltraSort™ SystemWafer sizes from 50 mm to 200 mm

Tropel® FlatMaster® MSP SystemPart sizes up to 300 mm; step height/depth to 300 mm

• Ground• Lapped• Polished

• Metals• Polymers• Ceramics• Composites• Glass• many others

• Flatness• Line profiles• Surface profiles• Spherical radius

• NIST traceable standard included

• Photoblanks• Photomasks• Polished• Coated• Pre and post pellicle mount comparison• 6025 & 5009 substrates

• Flatness• Local slope• Microwaviness• Stress• X-Y polyfit

• Robotic handling and Class 1 clean room options available

• Sawn• Ground• Lapped• Polished

• Silicon• Silicon Carbide• Gallium Arsenide• Gallium Nitride• Gallium Phosphide• Indium Phosphide• Sapphire• Germanium• Lithium Niobate• many others

• Wafer Parameters • Bow/Warp • Sag/SORI • TTV/NTV

• Site Parameters • LTV • LDOF • LTIR

• Fine ground• Lapped• Polished• Super-finished

• Metals• Polymers• Ceramics• Composites• Glass• many others

• Flatness• Parallelism• Depth/height• Line profile• Surface profile

*Stitching algorithm used for parts larger than 200 mm