FINAL PROGRAM - SESHA Final Program.pdf · FINAL PROGRAM. We are excited to announce that UL &...

Scottsdale Resort at McCormick RanchScottsdale, Arizona • 2-6 May 2016

38th Annual International High Technology Symposium

FINAL PROGRAM

We are excited to announce that UL & SESHA have partnered to release a new training curriculum for SESHA professionals in the semiconductor and high-tech industries. Topics include:

NEW UL/SESHA ONLINE COURSES

– General EHS, Ergonomics and Semiconductor Safety (4 courses)– Chemical Safety including Toxic Gases (5 courses)– Hazardous Energy and Electrical Safety (7 courses)– Fab Worker Safety (2 courses)

Want to learn more about these new courses? Visit UL at booth #21 or visit www.ULEHSS.com.

UL and the UL Logo are trademarks of UL LLC © 2016

LM_SESHA Back Cover.indd 1 3/29/16 10:27 AM

We are excited to announce that UL & SESHA have partnered to release a new training curriculum for SESHA professionals in the semiconductor and high-tech industries. Topics include:

NEW UL/SESHA ONLINE COURSES

– General EHS, Ergonomics and Semiconductor Safety (4 courses)– Chemical Safety including Toxic Gases (5 courses)– Hazardous Energy and Electrical Safety (7 courses)– Fab Worker Safety (2 courses)

Want to learn more about these new courses? Visit UL at booth #21 or visit www.ULEHSS.com.

UL and the UL Logo are trademarks of UL LLC © 2016

LM_SESHA Back Cover.indd 1 3/29/16 10:27 AM

Final Program 1

SESHA38th Annual International High

Technology ESH Symposium & Exposition

Important CM Point InformationPlease see the registration desk for a certificate of participation for CM Points.

This event contains the following technical content hours. (PDCs are additional)

Tuesday - 6 technical hoursWednesday - 6 technical hoursThursday - 5 technical hours

These may be eligible for ABIH and BCSP CM credit. See ABIH website (www.ABIH.org) and BCSP website (www.BCSP.org) for CM credit criteria.

Table of ContentsSession/Event Grid ........................................................................................................ 2Week at a Glance (Committees, Events, Sessions) ............................................... 4Professional Development Course Descriptions .................................................... 6Exhibitors ........................................................................................................................... 9Floorplans ........................................................................................................................14

Exhibit Hall Hours: Grand Coronado BallroomTuesday 3 May .............................. 10:00 am-7:00 pm

Break ...................................................... 10:15 am-10:45 amSESHA Sponsored Lunch ....................11:30 am-1:00 pmBreak & Raffle Ticket Distribution ........3:00 pm-3:30 pmOpening Reception & Raffle

Ticket Distribution/Drawing ................5:00 pm-6:30 pm

Wednesday 4 May .......................... 9:00 am-4:00 pmBreak & Raffle Ticket

Distribution/Drawing ......................... 9:30 am-10:00 amExhibitor Sponsored Lunch

& Raffle Drawing ................................11:30 am-1:00 pmBreak and Raffle Drawing .......................3:00 pm-3:30 pm

Registration Hours: Grand Coronado Ballroom FoyerMonday 2 May ................................ 3:00 pm-5:30 pmTuesday 3 May ............................... 7:30 am-5:00 pmWednesday 4 May .......................... 8:00 am-4:00 pmThursday 5 May ...................................8:00 am-Noon

Scottsdale Resort at McCormick Ranch7700 E McCormick ParkwayScottsdale, Arizona 85258Guest Phone: 480-991-9000

SESHA 38th Annual International H

igh Technology ESH Sym

posium & Exposition

2

8:30 am-9:15 am Opening Ceremony and Awards Presentation, Hilary Matthews, SESHA President, Arizona II &III

9:15 am-10:15 am Keynote Presentation, Dr. Braden Allenby, Arizona II &III10:00 am-7:00 pm Exhibits, Grand Coronado Ballroom10:15 am-10:45 am Break, Grand Coronado Ballroom10:45 am-11:30 am Concurrent Sessions, Arizona I-III

11:30 am-1:00 pm Complimentary Lunch - Sponsored by SESHA, Raffle Ticket Distribution, Grand Coronado Ballroom

1:00 pm-3:00 pm Concurrent Sessions, Arizona I-III3:00 pm-3:30 pm Break - Raffle Ticket Distribution, Grand Coronado Ballroom3:30 pm-5:00 pm Concurrent Sessions, Arizona I-III5:00 pm-6:30 pm Opening Reception - Raffle Ticket Drawing, Grand Coronado Ballroom

NANO – Room: Arizona II/III PSM – Room: Arizona I10:45 am NanoStreeM: Nanomaterials and Strategies for Safety Assessment in

Advanced Integrated Circuits Manufacturing. Pardon, A, Prodanov, D; EHS, Imec11:30am-1:00pm Complimentary Lunch - Sponsored by SESHA, Raffle Ticket Distribution,

Grand Coronado Ballroom

10:45 am PSM Process Boundaries in the Semiconductor Industry. Moll, A; Greystone Risk Management

11:30 am-1:00 pm Complimentary Lunch - Sponsored by SESHA, Raffle Ticket Distribution, Grand Coronado Ballroom

EICC BUSINESS CONTINUITY1:00 pm EICC Roundtable, Davis, B; Cypress Semiconductor 1:00 pm How to Leverage Your Business Continuity Program to Build a More Resilient

EHS Program. Buehler; S, ERM Inc.1:45 pm Zika Presentation, AZ DHS2:15 pm Business Continuity at Cypress. Davis, B; Cypress Semiconductor

ISO2:15 pm Leveraging ISO 14001:2015 & ISO 45001:2016 to Enhance EHS Leadership,

Wilk, L; Capaccio Environmental Engineering, Inc.

VENDOR EMERGING TECH UPDATES PRINCIPALS FOR SAFE USE OF CHEMICALS3:30 pm Vendor Emerging Tech Updates 3:30 pm Risk Management Strategies for Semiconductor Chemicals without

Occupational Exposure Limits. Shepard, M; Colden Corporation4:15 pm Application of HazOp Principles to a Liquid Noble Dark Matter R&D Platform.

Kovvali, N, Frist, B; SLAC National Accelerator Laboratory, Safety & Risk Management Group

8:00 am-Noon PDC 1–The Science Behind Exhaust Gas Management, Van Gumpel, J Arizona II & III

8:00 am-5:00 pm WSC 1 Workshop—Energetics in Exhaust Systems (World Semiconductor Council (WSC) Sponsored Workshop), Arizona I

1:00 pm-5:00 pm PDC 2–Semiconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test Methodology, Sherer, Arizona II & III

2:00 pm-3:00 pm Executive Committee, Pima3:00 pm-5:30 pm SESHA Board of Directors Meeting, Pima

* PDC Course Descriptions follow on page 6

Important CM Point InformationPlease see the registration desk for a certificate of participation for CM Points.This event contains the following technical content hours. (PDCs are additional)Tuesday - 6 technical hoursWednesday - 6 technical hoursThursday - 5 technical hoursThese may be eligible for ABIH and BCSP CM credit. See ABIH website (www.ABIH.org) and BCSP website (www.BCSP.org) for CM credit criteria.

Registration Hours: Grand Coronado Ballroom FoyerMonday 2 May ................................ 3:00 pm-5:30 pmTuesday 3 May ............................... 7:30 am-5:00 pmWednesday 4 May .......................... 8:00 am-4:00 pmThursday 5 May ...................................8:00 am-Noon

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SESHA Schedule — 2016 Annual Symposium

Final Program3

6:30 am 5K Practice Run, Meet in Lobby7:30 am-8:15 am Exhibitor Breakfast, Grand Coronado Ballroom8:30 am-9:30 am Keynote Presentation - Occurrence, Removal and Regulation of Nanomaterials

at Publicly Owned Sewage Treatment Works, Paul Westerhoff, Arizona II &III9:00 am-4:00 pm Exhibits, Grand Coronado Ballroom9:30 am-10:00 am Break - Raffle Ticket Distribution & Raffle Drawing, Grand Coronado Ballroom

10:00 am-11:30 am Concurrent Sessions, Arizona I-III11:30 am-1:00 pm Complimentary Lunch - Sponsored by Exhibitors, Raffle Ticket Distribution &

Raffle Drawing, Grand Coronado Ballroom1:00 pm-3:00 pm Concurrent Sessions, Arizona I-III3:00 pm-3:30 pm Break - Raffle Ticket Distribution & Raffle Drawing, Grand Coronado Ballroom3:30 pm-5:00 pm Concurrent Sessions, Arizona I-III

6:30 am-7:00 am 5K Run, Off Property8:30 am-9:30 am Keynote Presentation - Semiconductor Market Update - IC Insights, Matas, B,

Arizona II &III9:30 am-10:00 am Break, Arizona Loggia10:00 am-11:30 am Concurrent Sessions, Arizona I-III11:30 am-1:00 pm Lunch on Your Own

Noon-1:30 pm Fellow and Region Chapter Lunch, Pima1:00 pm-2:15 pm Concurrent Sessions, Arizona I-III2:15 pm-2:45 pm Break, Arizona Loggia2:45 pm-3:45 pm Closing Ceremony & Prize Drawing, Arizona II &III4:15 pm-5:15 pm SESHA Board Meeting, Pima4:45 pm-6:45 pm PDC 3 - Ethics, Rios, J, Arizona I

8:00 am – Noon PDC 4–Successful Evaluation and Procurement of Commercial Environmental, Health, Safety and Sustainability Management Systems Technologies, Morahan, Pima

8:00 am – 5:00 pm WSC 2 Workshop–ESH Nanomaterials (World Semiconductor Council (WSC) Sponsored Workshop), Boardroom

WATER TREATMENT – Room: Arizona II/III REGULATORY ROUNDTABLE – Room: Arizona I10:00 am Improved Methods of Microbial Control in Water Based Applications in the

Microelectronics Industry, Hobro, D, Phillis, K, Jenkins, B; Nalco, an Ecolab Company

10:45 am Recent Developments in Wastewater Treatment in the Microelectronics Industry, Phillis, K, Jenkins, B, Carroll, B; Nalco, an Ecolab Company

10:00 am Regulatory Challenges of the Semi Industry Roundtable, Baliga, S, Castorano, M

HIGH HAZARD CHEMICAL CASE STUDY GHG SESSIONS/ROUNDTABLE1:00 pm High Hazard Chemical Installation Case Study Session, Creighton, S, Trammell,

S, Wyman, M; Ultratech3:30 pm High Hazard Chemical Installation Case Study Session, Creighton, S, Trammell,

S, Wyman, M; Ultratech

1:00 pm Washington State's New GHG Regulations: A Case Study for the Future of GHG Regulations for the High Tech Industry, De Blasi, M, Weissinger, E; Fennemore Craig, Ramboll Environ

1:45 pm Reducing GHG Emissions from Heat Transfer Fluids, Higgs, T 2:15 pm Computer Based Monitoring of F-GHG Emissions in Semiconductor Fabs,

Neuber, A, Cayer, M, Van Gompel, J; AMAT2:30 pm Semiconductor Industry Greenhouse Gas Emissions & Reporting, Speed, D,

Raley, B, Beu, L; Global Foundries

CONFLICT MINERALS3:30 pm Conflict Minerals – 2015 Reporting and Compliance Expectations, Pradhan-

Kasmalkar, R, Dennis, T; WSP | Parsons Brinckerhof4:15 pm Behind the Scenes of Conflict Minerals: Lessons from Smelter Outreach

Visits, Rojas, A, Fiereck, B; Intel

ACCIDENTS / INCIDENTS ENVIRONMENTAL10:00 am Fleet Safety: You Have More Drivers Than You Think, Glass, E, UL Workplace

Health and Safety10:45 am Investigative Photography, Jacobi, J, Underwriters Laboratories

10:00 am Environmental Modeling: Understanding Risk and Enabling Compliance, Marsalla, J, Intel Corporation

10:45 am Next Generation Batteries and EHS Challenges, Joshi, K, QuantumScape

AIR EMISSIONS ACCIDENTS/INCIDENTS/EMERGENCY RESPONSE FORUM1:00 pm Minimize VOC Emission Levels by Replacing VOC Solvents for Wipe-Downs

and PM Related Tasks with DI Water Only, Barrios, A, Foamtec Internationall1:45 pm Real-Time FTIR Monitoring of Parts Per Trillion Level Vapor Intrusions and/or

Airborne Molecular Contaminations, Laush, C, Geosyntec Consultants

1:00 pm Accidents/Incidents/Emergency Response Forum4:45 pm-6:45 pm PDC 3 - Ethics, Rios, J, Arizona I

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SESHA 38th Annual International High Technology ESH Symposium & Exposition4

Week Schedule at a GlanceMONDAY 2 MAY

PDC 1–The Science Behind Exhaust Gas Management8:00 am-Noon Arizona II & III

WSC 1 Workshop–Energetics in Exhaust Systems (World Semiconductor Council (WSC) Sponsored Workshop)8:00 am-5:00 pm Arizona I

PDC 2–Semiconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test Methodology1:00 pm-5:00 pm Arizona II & III

Executive Committee2:00 pm-3:00 pm Pima

SESHA Board of Directors Meeting3:00 pm-5:30 pm Pima

TUESDAY 3 MAY

Opening Ceremony and Awards PresentationHilary Matthews, SESHA President8:30 am-9:15 am Arizona II &III

Keynote PresentationDr. Braden Allenby9:15 am-10:15 am Arizona II &III

Exhibits10:00 am-7:00 pm Grand Coronado Ballroom

Break10:15 am-10:45 am Grand Coronado Ballroom

Concurrent Sessions10:45 am-11:30 am Arizona I-III

Complimentary Lunch - Sponsored by SESHA, Raffle Ticket Distribution11:30 am-1:00 pm Grand Coronado Ballroom

Final Program 5

Concurrent Sessions1:00 pm-3:00 pm Arizona I-III

Break - Raffle Ticket Distribution3:00 pm-3:30 pm Grand Coronado Ballroom


Opening Reception - Raffle Ticket Drawing5:00 pm-6:30 pm Grand Coronado Ballroom

WEDNESDAY 4 MAY

5K Practice Run6:30 am Meet in Lobby

Exhibitor Breakfast7:30 am-8:15 am Grand Coronado Ballroom

Keynote Presentation - Occurrence, Removal and Regulation of Nanomaterials at Publicly Owned Sewage Treatment WorksPaul Westerhoff8:30 am-9:30 am Arizona II &III

Exhibits9:00 am-4:00 pm Grand Coronado Ballroom

Break - Raffle Ticket Distribution9:30 am-10:00 am Grand Coronado Ballroom


Complimentary Lunch - Sponsored by Exhibitors, Raffle Ticket Distribution11:30 am-1:00 pm Grand Coronado Ballroom


Break - Raffle Ticket Distribution & Raffle Drawing3:00 pm-3:30 pm Grand Coronado Ballroom


THURSDAY 5 MAY

5K Run6:30 am-7:00 am Off Property

Keynote Presentation - Semiconductor Market Update - IC InsightsBrian Matas8:30 am-9:30 am Arizona II &III

Break9:30 am-10:00 am Arizona Loggia


Lunch on Your Own11:30 am-1:00 pm

Fellow and Region Chapter LunchNoon-1:30 pm Pima


Break2:15 pm-2:45 pm Arizona Loggia

Closing Ceremony & Prize Drawing2:45 pm-3:45 pm Arizona II &III

SESHA Board Meeting4:15 pm-5:15 pm Pima

PDC 3–Ethics4:45 pm-6:45 pm Arizona I

FRIDAY 6 MAY

PDC 4–Successful Evaluation and Procurement of Commercial Environmental, Health, Safety and Sustainability Management Systems Technologies8:00 am-Noon Pima

WSC 2 Workshop–ESH Nanomaterials (World Semiconductor Council (WSC) Sponsored Workshop)8:00 am-5:00 pm Boardroom


Professional Development CoursesMONDAY 2 MAY

PDC 1–The Science Behind Exhaust Gas ManagementJoe Van Gompel; Glade Consulting, LLC8:00 am-Noon Arizona II & IIIThe various process manufacturing steps of semi-conductors, compound semiconductors, solar panels, and flat panel displays make use of a variety of process gases, many of which are toxic, combustible, explosive, and/or condensable. The technologies and strategies for dealing with both the process gases and the process exhaust byproducts are dependent on the physical and chemical properties of the combi-nations of these gases, which vary widely based on the process. There is no one-size-fits-all approach to process exhaust management, so the options must be carefully considered. The PDC begins with a survey of the chemistry of a wide variety of common process gases and byproduct gases as it relates to exhaust management, followed by an overview of some of the technologies (water scrubber, dry scrubber, burn-wet, plasma, etc.) that are used in process exhaust management, and then appropriate technologies by process. The PDC concludes with greenhouse gases; why some are more stable than others (e.g. CF4) and some approaches to abatement.

PDC 2–Semiconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test MethodologyMike Sherer; Trinity Consultants1:00 pm-5:00 pm Arizona II & IIIThis four-hour professional development course will present the semiconductor fab greenhouse gas emis-sions reporting requirements for EPA under 40 CFR Part 98 Subparts A, C and I, and the EPA test protocol for greenhouse gas destruction or removal efficiency for point-of-use (POU) abatement devices. In addi-tion, semiconductor processes that emit greenhouse gas emissions will be discussed. Additional power-point slides will be provided to attendees for typical semiconductor fab stack sampling methods and for the ISMI environmental characterization guidelines.

THURSDAY 5 MAY

PDC 3–EthicsJanelle Rios 4:45 pm-6:45 pm Arizona IMany professionals face the dual loyalty conundrum of how to best serve the needs of the client while fulfilling the requirements of management. Where do you turn when these viewpoints collide and how do you resolve this challenge? After attending this presentation, you will be able to (1) define the terms “ethics” and “dual loyalty”, (2) summarize the major concepts that appear in applicable codes of ethics, (3) state in simple terms society’s expectations of health and safety professionals, (4) describe examples of dual loyalty situations, (5) list sources of distrust and (6) apply decision-making tools to clarify, priori-tize and justify possible courses of action. We will use an audience response system to capture audi-ence opinions as we explore several common ethical dilemmas. Past audiences have remarked that using the clickers to watch opinion data grow live on the screen was an innovative way to promote participa-tion – and it was fun!

FRIDAY 6 MAY

PDC 4–Successful Evaluation and Procurement of Commercial Environmental, Health, Safety and Sustainability Management Systems TechnologiesThomas J. Morahan; Greystone Consolidated Companies8:00 am-Noon PimaA recognized EHS technology expert will system-atically lead participants through the steps necessary for the successful evaluation and procure-ment of commercial EHSS technologies as follows: 1) Requirements Development including the capital budgeting process; the ROI analysis; interviews with process owners; identification of key individuals that represent the universe of system users; confirmation of the scope and direction of the new system with senior management; surveys with future end-users

Final Program 7

to determine the attributes of a model system, confir-mation of management processes and existing software; confirmation of results through telephone interviews; and the requirements document. 2) Vendor Qualification including the identification of candidate technologies; pre-qualification of technologies; the Request for Information; the evaluation of responses; and the development of the bid list. 3) The Request for Proposal process including the compliance with corporate purchasing requirements; solicitation of proposals; and an analysis of responses; and plans for

live demonstrations. 4) Software Demonstration and Evaluation including scenarios to challenge vendors during demos; the scoring system; and the live demo process. 5) The Decision Process including develop-ment of a consensus; the alignment with corporate IT strategy; the vendor briefing; the technology recom-mendation; and the executive summary for senior management. This course will help those interested in procuring a new or replacement EHSS technology solution to become confident in the process.

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Final Program 9

Exhibitors & Exhibitor Floor Plan

Thank you for Sponsoring!Power Lunch

DAS Environmental Expert GmbH

Coffee BreakEdwards Vacuum

Golf TournamentDAS Environmental

Foamtec International

LanyardsHoneywell Analytics

5K T-shirtsCapaccio Environmental

Engineering, Inc.Colden CorporationDOD TechnologiesSalus Engineering

N. Weiss Associates

Exhibit Hall Raffle:We will be holding a raffle with some very nice prizes in the Exhibit Hall on Tuesday and Wednesday. Starting Tuesday you will be able to get tickets at each exhibit booth in exchange for a business card.You must be present to win.

Exhibitor Listing By Booth NumberDOD Technologies .....................................1

Ecosys Abatement LLC ............................2

Nalco Water ................................................3

Foamtec International ..............................4

Capaccio Environmental

Engineering, Inc. .........................................5

Ebara Technologies ...................................7

Colden Corporation ...................................8

DAS Environmental Expert GmbH .........9

BSI EHS Services and Solutions ..........11

Salus Engineering ....................................12

Envirodigm, Inc. ........................................13

KFPI Inc. .....................................................15

CS Clean Solutions ..................................16

Greystone Environmental

Management, LLC ...................................17

Honeywell Analytics ......................... 18/19

Clean Harbors .......................................... 20

UL EHS Sustainability .............................21

Edwards Vacuum ....................................26

Entegris ......................................................27

ENTRANCE

Version:Revision Date:

File Name: SESHA 2016

04/11/20162.0

SEMICONDUCTOR ENVIRONMENTAL SAFETY & HEALTH ASSOCIATION

38th Annual Symposium May 2 - 6, 2016

Scottsdale Resort & Conference CenterCoronado BallroomScottsdale, Arizona

500 Regis Avenue #18584Pittsburgh, PA 15236

Phone: (412) 882-1420Fax: (412) 882-1421

Scale:

0' 5' 10' 20'

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Exhibit Hall Hours: Grand Coronado Ballroom

Tuesday 3 May ................................................................10:00 am-7:00 pmBreak ..............................................................................................10:15 am-10:45 amSESHA Sponsored Lunch ...........................................................11:30 am-1:00 pmBreak & Raffle Ticket Distribution ............................................... 3:00 pm-3:30 pmOpening Reception & Raffle Ticket Distribution/Drawing ....... 5:00 pm-6:30 pm

Wednesday 4 May ............................................................9:00 am-4:00 pmBreak & Raffle Ticket Distribution/Drawing ............................9:30 am-10:00 amExhibitor Sponsored Lunch & Raffle Drawing .........................11:30 am-1:00 pmBreak and Raffle Drawing .............................................................. 3:00 pm-3:30 pm

Exhibitors

BSI EHS Services and Booth: 11 Solutions4 North Second Street, Suite 1270San Jose, CA 95113800-790-6236; Fax: 408-213-0944www.bsigroup.comBSI EHS Services and Solutions (formerly EORM), provides a comprehensive range of strategic, manage-ment and technical consulting solutions -- assessment, compliance, risk management, reporting, training, communication and more -- partnering with clients in the US and around the world to achieve their envi-ronmental, health, and safety short-term needs and long-term goals.

Capaccio Environmental Booth: 5 Engineering, Inc.293 Boston Post Road WestMarlborough, MA 01752508-970-0033; Fax: 508-970-0028www.capaccio.comSince 1992, CAPACCIO’s environmental, health and safety consulting and engineering services have helped our clients grow and prosper. Specializing in high technology industries, our comprehensive services include strategic business tools that posi-tively impact the workplace and environment, improve operating performance, and provide a sustained competitive advantage. Stop by our booth to demo

our latest technology, the Environmental, Health and Safety Dashboard, which dramatically changes the way EH&S data is collected, managed, analyzed, and used. Visit www.capaccio.com to learn more about us.

Clean Harbors Booth: 2042 Longwater DriveNorwell, MA 02061781-792-5000; Fax: 781-792-5938www.cleanharbors.comClean Harbors is North America’s leading provider of environmental, energy and industrial services, including hazardous and non-hazardous waste recycling, treatment and disposal, field services, emergency response and disaster recovery, industrial services, laboratory chem-ical packing, household hazardous waste management services, vacuum services, tank cleaning and decontami-nation services. Visit us at www.cleanharbors.com

Colden Corporation Booth: 811 Round Lake RoadBallston Lake, NY 12019518-490-2261; Fax: 518-602-9221www.colden.comColden Corporation provides personalized and responsive client-focused services with profes-sionalism and intergrity to address occupational health, safety, and environmental concerns. Colden's

Final Program 11

certified professionals and doctoral-trained scientists, supported by experienced senior project managers and technical field personnel, have been helping clients to create and maintain safe and healthy workplaces.

CS Clean Solutions Booth: 1626 Commerce DriveDanbury, CT 06810203-797-8155; Fax: 203-797-0414www.cscleansystems.comCS CLEAN SOLUTIONS® is the new name of a global leader in the area of waste gas abatement. The company is the result of a merger between CS CLEAN SYSTEMS® – the technology leader in dry bed abate-ment – and centrotherm clean solutions, a leading manufacturer since the 1980’s of burn-wet and related scrubbers for the semiconductor and photovoltaic industries. With a global network of local sales and service centers, CS CLEAN SOLUTIONS is a single-source vendor for a full suite of exhaust gas treatment products, including dry, wet, burn-wet, thermal-wet and plasma-wet abatement technologies.

DAS Environmental Expert Booth: 9 GmbH Geppelnes Str 44Dresden 1219Germany49-351-40494-000; Fax: 49-351-40494-100www.das-usa.comDAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas treatment and wastewater treatment while minimizing resource usage. Our point-of-use abatement systems for treating waste gases from semiconductor process equipment protect the environment, employees and offer the lowest Cost of Ownership.

DOD Technologies Booth: 1675 Industrial Drive, Building ACary, IL 60013815-788-5200; Fax: 815-788-5300www.dodtec.comDOD Technologies manufactures and distributes gas detection life safety systems. DOD Technologies offers

a complete line of gas detection systems and related services such as calibration, training and system inte-gration. As gas detection technologies become more sophisticated it takes an expert to sort through them and select the correct technology for your applica-tions. DOD Technologies staff has over 50 years of experience consulting and satisfying customers gas detection needs. Keeping up with new technologies, and never forgetting the proven technologies of the past, we help you to explore the best of all worlds in gas detection. DOD Technologies offer a variety of low level toxic, corrosive and flammable gas detec-tion solutions. This includes personal, portable and fixed systems for your safety and protection. DOD Technologies also offers a complete service package which includes startup assistance and calibrations. Contact DOD Technologies for further information at 815-788-5200 or visit www.dodtec.com.

Ebara Technologies Booth: 751 Main AvenueSacramento, CA 95838916-920-5451; Fax: 916-830-1900www.ebaratech.comEBARA is a global innovator/local provider of vacuum pumps and advanced exhaust management solu-tions for semiconductor, photovoltaic, thin films and R&D. EBARA's products are backed by a superior global service network. EBARA continues to expand its role by bringing to the market: Dry Vacuum Pumps, Turbomolecular Pumps, and Point-of-Use Abatement.

Ecosys Abatement LLC Booth: 27380 W Sand Lake RoadSuite 500, PMB 5486Orlando, FL 3281944-7711-614800www.ecosysabatement.comEcosys Abatement LLC, Orlando Florida. – Ecosys Abatement are the US division of HT Advance Technology (Singapore) ltd. The Ecosys product line includes the Marathon, Guardian and Vector products and will provide full abatement efficiencies, including up to 99% DRE on all PFC and GHG species, to meet the needs of all of your Semiconductor and Solar fab modules. www.ecosysabatement.com


Edwards Vacuum Booth: 26Crawley Business Quarter, Manor RoyalCrawley West Sussex RH10 9LWUnited Kingdom44-0-1293-528844; Fax: 44-0-1293-534149www.edwardsvacuum.comEdwards is a leading manufacturer of sophisticated vacuum products and abatement systems, and a leading provider of related value-added services for the manufacture of microelectronics devices, including silicon, photovoltaic and compound semiconduc-tors. Our innovative leading technology solutions are designed to meet the specific requirements of our customers' existing and developing processes.

Entegris Booth: 27129 Concord RoadBillerica, MA 01821978-436-6500; Fax: 978-436-6735www.entegris.comEntegris is a leading provider of yield-enhancing materials and solutions for the most advanced manufacturing environments. For 50 years, Entegris’ innovative materials-science solutions have enabled the cost-effective production of increasingly complex generations of semiconductors and electronics. Entegris’ customers include the world’s manufacturers of semiconductors and other electronics, as well their materials and equipment suppliers.

Envirodigm, Inc. Booth: 13P.O. Box 320072Los Gatos, CA 95032408-647-2211; Fax: 408-852-3383www.envirodigm.comEnvirodigm specializes in offering semiconductor fabrication and electronic manufacturing sites with sustainable solutions and alternative lifecycle manage-ment options for solid waste management. As the leader in the field of waste minimization, recycling, and beneficial reuse of materials, Envirodigm supports clients with eco-centric cradle-to-cradle innovations to meet EHS targets. Envirodigm technologies provide millions of pounds of waste minimization, cost reduc-tion, and tangible energy and water conservation for clients annually. Disposal of waste chemicals is

worldwide industry problem growing to 10’s of billions of pounds. Cost of disposal, treatment and transporta-tion continues to impact the bottom line. Environmental leaders are continuously looking for ways to reduce the manufacturing footprint. Envirodigm offers corporate social responsibility stakeholders advanced solutions to exceed internal, as well as federal, state, and local regulatory requirements. With over 30 years of prolific problem solving in Silicon Valley, Envirodigm has helped companies overcome challenging problems with hundreds of proven high-tech, and patented solutions.

Foamtec International Booth: 41621 Ord WayOceanside, CA 92056760-599-6340; Fax: 760-599-7347www.foamtecintlwcc.comFoamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

Greystone Environmental Booth: 17 Management, LLC4 Franklin SquareSaratoga Springs, NY 12866518-682-2200; Fax: 518-682-2202www.greystone-env.comGreystone Environmental Management, LLC (Greystone) is a full service environmental, health and safety (EHS) consulting firm, committed to helping our clients achieve and maintain a safe, healthy and envi-ronmentally sound workplace. Greystone is located with offices in the northeast, and a US and international reach through our partners in Greystoneconnect™ anywhere in the world. Our clients enjoy a unique combination of the attention to detail and focused expertise found in smaller, niche firms, and the access to the depth of resources found in larger, multi-disciplinary organiza-tions. Specific to SESHA, Greystone's experienced staff and current work in the semiconductor industry has allowed us the ability to assist our clients during both

Final Program 13

the construction phase (i.e., site safety, PSM/RMP prep-aration, etc.) and industrial implementation (i.e., safety programs, PSM/RMP, tool walkdowns, etc.).

Honeywell Analytics Booth: 18/19405 Barclay BoulevardLincolnshire, IL 60069800-538-0363; Fax: 847-955-8210www.honeywellanalytics.comHoneywell Analytics offers comprehensive gas moni-toring solutions, backed by years of expertise in the semi-conductor industry. Our gas detection solutions are found in critical applications globally including patented Chemcassette(R) colorimetric paper tech-nology, FTIR, electrochemical cell technologies and flame detection. Honeywell Analytics also provides system integration software and design products as well as a complete service portfolio for your gas moni-toring needs.

Nalco Water Booth: 31601 W. Diehl RoadNaperville, IL 60563630-305-1000www.nalco.ecolab.comDiverse corporations in 170 countries look to Nalco Water, an Ecolab company, to deliver customized solu-tions and expert, onsite service. Harnessing innovative water, hygiene and process technologies and services, we partner with our customers to minimize their water consumption, maximize their results and optimize their total cost of operation.

KFPI Inc. Booth: 1510351 Olympic DriveDallas, TX 75220214-358-3593; Fax: 214-350-9930www.KFPI.comKFPI specializes in equipment fire safety solutions for the global Semiconductor & Microelectronics industries. KFPI provides complete fire safety systems including design, consulting, integration, equipment, installation, certification, & training. In addition to the compliance guarantee with SEMI S2, FM, & NFPA, KFPI focuses on equally critical items such as system reliability,

performance, and longevity. KFPI experience is shown throughout our active involvement in leadership in all related semiconductor standards development commit-tees. KFPI is a global leader with offices throughout the USA, Taiwan, Japan, China, Korea, & Europe.

NEW FOR 2016 – KFPI is pre-releasing the only “fire suppression” product for “Energetic” Pyrophoric Metal Organic Liquids found in advanced semiconductor manu-facturing (i.e. III-V). Manufacturing. This product (code name “PL35”) is the only product on the market that has been tested and proven to suppress, absorb, and neutralize metal organic liquids. Visit the KFPI booth to learn more about this product and application opportunities.

Salus Engineering Booth: 123004 Scott BoulevardSanta Clara, CA 95054408-235-8831; Fax: 408-235-8578www.salusengineering.comSalus Engineering International provides the highest quality equipment safety services and aid to equipment manufacturers in satisfying the environmental health and safety requirements of this marketplace. In addition to SEMI S2 and related supporting standards, the expe-rienced Salus team provides the complete breadth of services to meet the safety needs of the high tech and semiconductor industry. Our experienced staff of profes-sionals includes electrical & mechanical professional engineers, certified industrial hygienists, environmental-ists, ergonomists and ventilation specialists.

UL EHS Sustainability Booth: 215000 Meridian Boulevard, Suite 600Franklin, TN 37067615-367-4404; Fax: 615-367-3887www.ulehss.comUL EHS Sustainability (formerly UL Workplace Health & Safety) empowers organizations to protect the well-being of workers, reduce risk, improve productivity, enhance compliance, and drive measurable business improve-ment through its EHS, occupational health, environmental, supply chain, sustainability, and corporate social respon-sibility platforms. We work with hospitals, clinics, and healthcare systems to deliver software products that support online training, safety management, and occupa-tional health. To learn more, visit www.ulehss.com.


Scottsdale Resort at McCormick Ranch Floorplan

Final Program 15

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SESHA 1313 Dolley Madison Boulevard, Suite 402

McLean, Virginia 22101703.790.1745 • Fax: 703.790.2672

[email protected]

SESHA OnlineFind a job • Post a job

Learn about chapter meetings and announcements Access the SESHA Journal

Visit the SESHA website to view new job opportunities, post your resume or to post your company’s job listing, and view resumes

of professionals in the field. Don’t miss important society news and chapter events with online updates and the online journal.

Go to www.seshaonline.org

ELIMINATE THE SOURCEKEEP OUR FABS SAFE & MINIMIZE VOC EMISSIONS

• END THE DEPENDENCE ON IPA

• REDUCE THE USE OF FLAMMABLE SOLVENTS

• REDUCE SOLVENT WASTE

• SAVE COST

PLEASE VISIT SESHA INTERNATIONAL: BOOTH #4 For more, go to: www.foamtecintlwcc.com

Wilshire Contamination Control Division

Helping companies worldwide:

• Assess and manage risks

• Protect employees

• Preserve the environment

• Be socially and globally responsible

• Achieve sustainable value

+1 800 790 6236 bsigroup.com/ehs

EHS Services and Solutions

is now

Since our beginnings in 1992, CAPACCIO ENVIRONMENTAL ENGINEERING, INC. has been a proud member and contributor of the SESHA organization and conference. Our extensive knowledge of the semiconductor, electronics, and high technology industries has enabled us to improve our clients operating performance and provide them with a sustained competitive advantage.

CAPACCIO remains on the cutting edge by providing our clients with innovative environmental, health and safety (EH&S) consulting and engineering services. We also continuously develop custom tools, web applications, and database driven solutions to help our clients lower their operational and reputational risks, which allows them to consistently perform well in financial and EH&S/sustainability rankings.

Learn how the release of ISO 14001:2015 environmental management systems (EMS) standard and the closely aligned ISO 45001:2016 Occupational Health and Safety Management Systems (HSMS) standard can facilitate new opportunities and meaningful outcomes on Tuesday, May 3, at 2:15 pm when CAPACCIO President and CEO, Lisa Wilk, presents: Leveraging ISO 14001:2015 & ISO 45001:2016 to Enhance EHS Leadership

• Audits, Compliance, and Permitting • Custom Tools and Technology, Web Applications, and Database Driven Solutions

• Environmental, Health and Safety On-Site Professional Services

• Hazardous Waste and Materials • Health, Safety, and Industrial Hygiene

• ISO 14001 and OHSAS 18001 Integrated Management Systems

• Multi-Media Training

• Site Remediation and Property Assessment

• Sustainability Assessments, Benchmarking, Strategic Planning and Reporting • Water, Wastewater, and Air- Related Engineering, Design and Construction

Our comprehensive services include:

www.capaccio.com

“Helping Industry and the Environment Prosper”

Come meet SESHA Symposium Chair, Daniel Forsythe, and learn how CAPACCIO’s latest technology, the EHS-DashboardTM is dramatically

changing how EH&S data is collected, managed, analyzed, and used.

Visit us at Booth #5 for a demo of the and Enter to Win an

Corporate Bronze SponsorApple iWatch Sport!

-Dashboard™

Working together to

“Help Industry and theEnvironment Prosper.”

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