FEI Quanta 250 ESEM Basic instructions - OSCAR...FEI Quanta 250 ESEM Basic Operation Manual For...
8
1 DSU Imaging Facility FEI Quanta 250 ESEM Basic Operation Manual For Assistance with SEM Please Contact: Dr. Mukti Rana Associate Professor & Chair Department of Physics and Engineering SC Room 216 302-857-6588, [email protected]
Transcript of FEI Quanta 250 ESEM Basic instructions - OSCAR...FEI Quanta 250 ESEM Basic Operation Manual For...
1
DSUImagingFacilityFEIQuanta250ESEMBasicOperationManual
ForAssistancewithSEMPleaseContact:Dr.MuktiRanaAssociateProfessor&ChairDepartmentofPhysicsandEngineeringSCRoom216302-857-6588,[email protected]
2
The chamber of the SEM is kept under vacuum.
Under Normal condition the system is logged on.
If you do not see that the system is logged on, double click on the xT Microscope icon on the desktop
Then you will see the status bar of xT microscope.
Click on start UI.
3
Log-intotheMicroscopeusingthefollowing- Username:supervisorPassword:Quanta250-9923724
Makesurethatyouareinthebeamcontroltabontherightsideofthescreen.VentthechamberbyclickingontheVENTbuttontorightsideofthewindow
Insert you sample into the chamber by using one of the sample holders and double sidedtapes
ifnecessary.Usingthe“Elephant Trunk”makesurethatyoursample is lessthan10mm. Ifyouneedtochangethebaseofthesampleholderyoucandothatbyunscrewingtheboltandconelikestructure.
4
Determinethetypeofsampleyouhaveandselecttheappropriatevacuumconditionsyouwilluse.Usehighvacuummodefornormalconductivesampleandlowvacuummodeforsoftoranduncoatednon- conductivesamples.YoumayalsousetheESEMmodewithPeltierStageandGSEDdetectorforsampleswhichcontainliquid.Vacuumbuttons
Next,selecttherightaccelerationvoltagefromthepulldowntablocatedjustbelowthemenubarorfromtherightsideofthebeamcontroltab.
Oncetheproperpressurehasbeenachieved,thechamberICONinthelowerrightsideofthescreenwillbefullygreen.
5
TurnontheBeambyclickingontheBEAMONbutton
Thedisplayshouldlooklikethis. Scanspeedcontrol Pausereleasebutton
TopleftSEimage,ToprightBackscatter,BottomLeftisthecombinedSEandBackscatterimageandtheBottomrightisthechamberviewscope.Activateuptothreedisplaysatonetimebyselectingthedisplayandtheclickonthepausereleasebutton.Thedisplaywillstarttoscan.
Toincreaseanddecreasethescanspeedsusethearrowupanddown.
6
Whileviewingthechamberscope(bottomrightscreen)pressandholdthescrollwheelbuttonandpushthemouseupwardtopositionyoursamplenearthe10mmmarkonthescreen.Itmaybenecessarytounpausethechamberscopescreenfirst.
IncreasetheMagnificationandfocustheSEimagebyusingtheUSERinterfacepanelshownbelow.F7displaysareducedscreenforeaserrealtimeadjustments.F5enlargestheactivescreentofittheentirewindow.
OncetheimageisfocusedlinktheZtoFWDbyclickingontheICONonthetoolbar
Youmayalsogotonavigationtabtoseethezdistance.
FormostoperationsitisrecommendedthataZvalueof10mmisnowsetastheworkingdistance.
7
Increasemagnificationtoatleast1k(higherthebetter)andfocustheimageaswellasyoucan.Nextfromthemainmenu,selecttheBeam>DirectadjustmentsandthenstarttheLensalignbyclickingontheLENSALIGN button.
Whileobservingtheimage,placeyoumouseoverthesmallsquareboxintheLensAlignandholditdown.Movethemouseandboxwithinthefieldtoreducemovementintheimage.
TurnoftheLensAlignbycrossingitout.RefocusyouimageandincreasetheMagnificationtoabove20k(thehigherthebetter)andusingtheUserInterfacePanel,StigmatetheimageusingtheXandYcontrolsforsharpestimagepossible.F7displaysareducedscreenforeaserrealtimeadjustments.F5enlargestheactivescreentofittheentirewindow.
WhenusingtheLowVacmode,itmaybenecessarytoadjustthepressureinthechamberforahighcontrastimage.Simplyadjustthepressureuntiltheappropriatecontrasthasbeenachieved.Inmostcasespressurebetween0.83and0.53Torrwillworkwell.
8
Oncethedesiredimageisachieved,pressF2orgotoscan>Photoorscan>snapshotfortakingandsavingimage.OncethescanhasstoppedadefaultdirectorywillappearintheSharedDataFolder.Storeyour imagesintheSharedFolderonly.Datawillbestoreonthecomputerontheleftsideofthe operator’sconsol.
Turnoffthebeambyclickingthebeamonbutton(itgoesfromyellowbackgroundtopuregrayonceitisturnedoff)
NeverleavetheESEMintheLOWVACorESEMmode,alwaysreturntheSEMtotheHIGHVACMode.
