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Excimer Lasers & UV Optical Systems Superior Reliability & Performance 2016 Product Catalog
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  • Excimer Lasers &UV Optical Systems

    Superior Reliability & Performance

    2016 Product Catalog

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Award Winning Excimer Laser TechnologyInnovation at Work

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 3

    Excimer Lasers and UV Optical SystemsTable of Contents

    Laser Selection Guide 4-5

    Applications Matrix 6-10

    Applications Labs Worldwide 11

    Excimer LasersExciStarXS 12-13IndyStar 14-15COMPexPro 16-17BraggStarM 18-19LPXpro 20-21LEAP 22-23LAMBDASX 24-27VYPER 28-29On-SiteRequirements 30-31

    UV Optical Systems and Components 32-33UVblade 34-35LineBeam 36-37VarioLasFamily 38-39GeoLasHD 40-41Components 42-44

    Service 45-46

    Laser Measurement and Control Accessories 47-49

    How to Contact Us 50

    Visit the Coherent Website 51

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Wavelength Max. Energy Max. Repetition Rate ExciStar XS (nm) (mJ) (Hz) 157 2 500 193 10 500 248 12 500 351 5 500IndyStar1

    193 8 1000 193 4 2000 248 12 1000 248 6 2000COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308 500 50 351 300 50BraggStar M 248 140 100

    1 Max.energy(mJ)isstabilizedenergy.

    Laser Selection GuideExcimer Lasers

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    Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50 351 300 50LEAP LEAP 130K 248 650 200 LEAP 130C 308 650 200LAMBDA SX LAMBDA SX C-Series 308 1000 600 LAMBDA SX K-Series 248 1000 300 LAMBDA SX E-Series 308 1000 500VYPER VYPER 308 2000 600 TwinVYPER 308 4000 600

    Laser Selection GuideExcimer Lasers

    LMC Accessories

    Customer Support

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    Laser Selection Guide

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Applications Matrix1

    Marking Polymer,TeflonMarking VisibleandInvisibleMarking(EyeglassMarking,etc.) DiamondandJewelMarking Material Processing PolymerDrilling(InkjetNozzle,Filter) HardandBrittleDrilling FBGWriting ThinFilmStructuring(TCO,ITO,ZnO,FiNx,etc.) LaserLift-Off(LLO) Surface Treatment ExcimerLaserAnnealing(ELA/SLS) CylinderHoning PulsedLaserDeposition(PLD) LaserDirectSynthesis(LDS) LaserDirectPatterning(LDP) Laser-InducedForwardTransfer(LIFT) IonImplantation/Doping/ImplantActivation SurfaceCleaning Measurement CombustionAnalysis Optics/CoatingTesting MaskInspection Spectroscopy,LIDAR Laser-InducedFluorescence(LIF) Medical Procedures Psoriasis/VitiligoTreatment RefractiveEyeSurgery(Lasik*)

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    1 Thismatrixshowsonlyasamplingofmanypossibleapplicationsforourlasers.Pleasecontactusregardingyourspecificapplication.

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  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 7

    ApplicationsExamples

    Glass Marking LaserModel ExciStarXS

    Cylinder Honing LaserModel LAMBDASX

    LASIK Vision Correction LaserModel ExciStarOEM

    Laser Lift-Off processing of wafers and panels LaserModel LEAP,LAMBDASX,UVblade

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    Applications

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Laser CVD and PLD generated thin films (courtesyofSuperOxJapanLLC) LaserModel COMPexPro,LPXpro,LEAP,LAMBDASX

    Excimer laser debonding of thinned wafers for advanced packaging LaserModel COMPexPro,LPXpro,LEAP,LAMBDASX

    ApplicationsExamples

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    ApplicationsExamples

    Laser Annealing of Low Temperature Polysilicon LaserModel LAMBDASX,VYPER,LineBeam

    Laser ablation-ICP-MS analysis of trace elements in earth sciences and process control LaserModel GeoLasHD,ExciStarXS,COMPexPro

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    Applications

  • Superior Reliability & Performance www.Coherent.com [email protected]

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    Excimer Laser Applications

    Excimer Lasers:Masters of Microprocessing

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    CFRPPre-TreatmentThinGlassViaDrillingSiWaferDopantActivation

    BraggGratingWriting ITOFilmStructuringLaserDirectPatterning

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 11

    Ourlaserapplicationslabsprovidestate-of-the-artfeasibilitytestingofmaterialprocessingmethods.PleasecontactyourCoherentrepresentativeorCoherentsalesofficeformoreinformation.Forcontactinformation,pleasegotopage50.

    LMC Accessories

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    Applications Labs Worldwide

    Worldwide Application Lab Locations

    ApplicationLab,Goettingen

    Applications

  • Superior Reliability & Performance www.Coherent.com [email protected]

    ExciStarXSexcimerlasersaretabletopsystemswithanultra-compactdesignforeasyinstallationandoperation.DuetotheintegrationoftheAlmetaXStubedesign,theydeliverexcellentresultsinlowpulseenergyapplications.

    Featuringsoftcoronapreionization,theExciStarXSprovidesahomogeneousenergydistributionandhighpulse-to-pulsestability.Solid-stateswitchingprovidesimmediateandmaintenance-freeoperation,andunitsareavailablewithmaximumrepetitionratesof200Hzand500Hz.

    ExciStar XSExcimer Lasers

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    ExciStar XSExcimer Lasers

    Key Features Customer Benefits Ultra-Compact Low investment costs Lightweight Design Flexible integration Almeta XS Tube Design Extended tube lifetime High pulse-to-pulse stability Available at 157 nm, 193 nm, 248 nm and 351 nm wavelengths Corona Preionization Homogeneous beam profile Solid-State Switch Immediate operation Maintenance-free operation Energy Monitor Preset stabilized energy operation

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    Wavelength ExciStar XS 200/ ExciStar XS 500/ (nm) ExciStar XS 200 emon ExciStar XS 500 emonMax.PulseEnergy(mJ) 157 2 2 193 10 10 248 12 12 351 5 5StabilizedPulseEnergy(W) 157 1 1 193 5 5 248 8 8 351 4 4AveragePulsePower(W)(1) 157 0.2 0.5 193 1 2.5 248 1.6 4 351 0.8 2EnergyStability(sigma,%) All

  • Superior Reliability & Performance www.Coherent.com [email protected]

    TheIndyStarSeriesrepresentsacompactlaserseriesforapplicationsneedinghighrepetitionratesupto2000Hzandlowpulseenergy.Availablefor193nmand248nm,itcombinesthedemandingrequirementsofasemi-S2-certificationwithanextendedcompo-nentslifetime.

    TheIndyStarfromCoherentissettingnewstandardsforcomponentslifetimeinindustrialapplications.BasedontheAlmeta-tube-technology,theIndyStarachieveslifetimesofmanybillionpulses,resultinginareductionoftheoverallcostsofoperation.

    ThesuccessofaUV-laserapplicationdependsonhighperformance,reliability,easyprocessintegration,safetyandfast-responsesupportfromyourlasersupplier.Coherentknowsthatatthecoreofyourbusinessisyourprocessdeviceanditsheartisthelaser.TheIndy-Starseriesisengineeredtomeetthedemandsineveryaspectofanindustriallaser.

    IndyStarExcimer Lasers

    Part No. Product Description1285557 ExternalHeatExchangerKB200VEPro19;coolingcapacity2kW;water-to-air

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    IndyStarExcimer Lasers

    Parameter ArF ArF KrF KrFWavelength(nm) 193 193 248 248Max.RepetitionRate(Hz) 1000 2000 1000 2000StabilizedPulseEnergy(mJ) 8 4 12 6StabilizedPulsePower(W) 8 8 12 12EnergyStability(sigma,%)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    COMPexProlasersarehighlyeffectivelightsources,featuringacompactdesignandeasyinstallationandoperation.Theydeliversuperiorresultsindemandingapplications,suchassolidsamplingsystems(LA-ICP-MS),materialresearch(PLD)andprecisematerialprocessing.

    Featuringnewceramicpreionization,theCOMPexProprovidesmulti-hundredmillijoulesoutput,plusun-matchedpulse-to-pulsestability.TheCOMPexProalsocomeswithanimprovedgasprocessorthatextendsbothgasandopticslifetimes.

    COMPexProExcimer Lasers

    Part No. Product Description26082610 UnstableResonatorOptics193nm(COMPexPro50)1280255 UnstableResonatorOptics193nm(COMPexPro100)26082710 UnstableResonatorOptics248nm(COMPexPro50and100)26082810 UnstableResonatorOptics308nm(COMPexPro100)26083010 UnstableResonatorOptics193nm(COMPexPro200)26083110 UnstableResonatorOptics248nm(COMPexPro200)26083210 UnstableResonatorOptics308nm(COMPexPro200)262456 UnstableResonatorAdapter(COMPexPro50,100and200)1149339 BeamAligner1132990 TemperatureStabilizationModule

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  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 17

    COMPexProExcimer Lasers

    Wavelength1 COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro (nm) 50 102 110 201 205MaximumPulseEnergy1(mJ) 193 100 200 200 400 400 248 150 400 400 700 700 308 - 250 250 500 500 351 - 150 150 300 300MaximumAveragePower2(W) 193 4 4 12 4 15 248 7 7 30 7 30 308 - 5 16 4 20 351 - 3 12 3 15MaximumRepetitionRate(Hz) All 50 20 100 10 50PulseDuration(FWHM,ns,typ.) All 20 20 20 25 25EnergyStability(sigma,%) All 1 1 1 1 1BeamDimensions All 14x5 24x10 24x10 24x10 24x10(FWHM,VxH,mm2,typ.)BeamDivergence All 2x1 3x1 3x1 3x1 3x1(FWHM,VxH,mrad2,typ.)PartNo.(F-Version) All 1124409 1113836 1113838 1115129 1115131PartNo.(XeCl-Version) All - 1113837 1113839 1115130 1115132

    Weight COMPexPro50/100 270kg/591lbs. COMPexPro200 325kg/716lbs.Cooling Water,2to3l/min.(0.5to0.8gal./min.),15to20C, requiredforrepetitionratesabove20HzElectrical 230V10%,16A(50/60Hz,1-Phase) 208V10%,16A(50/60Hz,1-Phase) 120V10%,25A(50/60Hz,1-Phase) 104V10%,25A(50/60Hz,1-Phase)Dimensions(LxWxH) COMPexPro50/100 1282x375x793mm(51x15x31in.) COMPexPro200 1682x375x793mm(67x15x31in.)

    Specifications

    Key Features Customer Benefits Ceramic Preionization Unmatched pulse-to-pulse stability Increased pulse energy Increased static gas lifetime Integrated Vacuum Pump and Halogen Filter Compact standalone design Integrated, Purgable Energy Monitor Preset stabilized energy operation Air-Cooled (up to 20 Hz), Single-Phase Quick and easy integration

    1 Measuredat10Hz.2 Measuredatmaximumrepetitionrate.

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  • Superior Reliability & Performance www.Coherent.com [email protected]

    TheBraggStarMdelivershighpulseenergyandgreatspatialcoherenceforFiberBraggGrating(FBG)writ-ing.HighpulseenergyisacriticaladvantageinsomeFBGwritingapplications,andhighspatialcoherenceisalwaysbeneficialsinceitenablescreationofFBGswithhighercontrastand/orlongerlength.

    TheBraggStarMusesacoherenceenhancedopticaldesignatthetypicalFBG-wavelengthof248nm

    resultinginsignificantlyhigherspatialcoherencecomparedtoconventionalbroad-useexcimerlasers.Itstandsoutduetoitscompactdesignandtheeaseofoperation.ThenewBraggStarMbuildsonthefield-provenCOMPexplatformwithmorethan2500installedunitsworldwidespecificallydesignedforhighreliabilityandlongevity.

    BraggStar MExcimer Lasers

    Part No. Product Description1149339 BeamAligner1132990 TemperatureStabilizationModule262856 UpgradeKitVCR(VCRgasconnectionsinsteadofregularGyrolok)

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    BraggStar MExcimer Lasers

    Wavelength(nm) 248PulseEnergy1(mJ) 140AveragePower2(W) 12MaximumRepetitionRate(Hz) 100PulseDuration(ns,typ.) 20EnergyStability(1sigma,%) 1BeamDimensions(FWHM,VxH,mm2,typ.) 12x4.5BeamDivergence(FWHM,VxH,mrad2,typ.)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    LPXproisafamilyofRoHScompliantexcimerlasers,offeredatwavelengthsof193nm,248nm,308nmand351nm,withoutputpowersashighas80Wat248nm.TheLPFprofamilyexpandswavelengthrangetovacuumUVwith157nm.Thebeamquality,highpulseenergy,shortpulselength,andhighpeakpowerofLPXproandLPFprolaserscombinetooptimizeUVapplications.

    Thesecharacteristics,plustheirprovenreliabilityandlowcostofownership,makeLPXprolaserssuitableforawiderangeofdemanding,highprecisionprocessingtasks.Theseincludedrilling,pulsedlaserdeposition(PLD),laserdirectpatterning(LDP),laserliftoff(LLO)andcleaning.

    LPXproExcimer Lasers

    Part No. Product Description26083020 UnstableResonatorOptics193nm(externalresonatorconfiguration)26083120 UnstableResonatorOptics248nm(externalresonatorconfiguration)26083220 UnstableResonatorOptics308nm(externalresonatorconfiguration)26083320 UnstableResonatorOptics351nm(externalresonatorconfiguration)26083010 UnstableResonatorOptics193nm(LPXpro240)26083110 UnstableResonatorOptics248nm(LPXpro240)262856 UpgradeKitVCRGasConnections1218314 BeamAligner

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    LPXproExcimer Lasers

    Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro (nm) 210 220 240 305 205 220Max.PulseEnergy(mJ) 157 - - - - 50 40upto10Hz 193 450 300 160 600 400 250 248 800 550 300 1100 - - 308 500 300 - 700 - - 351 400 - - 400 - -Max.StabilizedPulseEnergy(mJ) 157 - - - - - -atFullRepetitionRate 193 300 250 80 400 - - 248 700 400 160 800 - - 308 450 275 - 600 - - 351 200 - - 300 - -Max.Rep.Rate(Hz) all 100 200 300/4002 50 50 200Max.StabilizedAveragePower(W) 157 - - - - 2.53 73

    atFullRepetitionRate 193 30 50 24 20 153 403

    248 70 80 64 40 - - 308 45 55 - 30 - - 351 20 - - 15 - -EnergyStability(at5Hz,1sigma,%) 248

  • Superior Reliability & Performance www.Coherent.com [email protected]

    LEAPisaseriesofhighduty-cycleexcimerlasers,offeredatwavelengths248nmand308nm,withoutputpowersashighas130W.Thebeamquality,highstabilizedpulseenergyof650mJ,shortpulselengthandhighpeakpowerofLEAPlaserscombinetooptimizeUVmanufacturingapplications.These

    characteristics,plustheirreliabilityandeconomy,makeLEAPlaserssuitableforawiderangeofdemanding,high-precisionprocessingtasks.Theseincludemicrodrillingandstructuring,laserdirectpatterning(LDP),andsurfacetreatment.

    LEAPExcimer Lasers

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    Part No. Product Description1150265 ForkLiftSlotSet1150266 TransportationWheels1138927 UnstableResonatorOptics248nm(LEAP130K)

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    LEAPExcimer Lasers

    LEAP 130K LEAP 130CWavelength(nm) 248 308StabilizedPulseEnergyRange(mJ) 550to650 550to650MaximumStabilizedAveragePower(W) 130 130MaximumRepetitionRate(Hz) 200 200EnergyStability(sigma,%)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    LAMBDA SXExcimer Lasers

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    Part No. Product Description1258993 AnalysisSoftwareExiScope1269634 AdditionalEMOButtonGuard,SEMI1180124 15meterCableforHand-heldTerminal(5metercablecomeswithlaser)1232579 PulseShapeAnalysisModuleincl.FastPhotodiodeandDigitizer1224269 FastPhotodiodeMounted(externalOscilloscoperequired)1270173 MainsCableLAMBDASX,30kVA,25m1228700 MainsCableLAMBDASX,60kVA,25m1136303 STEPUPTRANSFORMER30kVA1136304 STEPUPTRANSFORMER60kVA

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    TheLAMBDASXindustrialexcimerlaserseriesprovidesuniquehighUVpowertotheproductionfloor.Itisdesignedtodeliverthebestenergystabilityavailable,andalsofeaturesanumberofinnovativetechnologiesforunsurpassedperformanceandreliability.

    PowerLokTheproprietaryPowerLoktechnologybringseverypulseofabursttraintothedesiredenergylevel.Itemploysaself-learningalgorithm,usingalook-uptabletosmoothoutcyclingbursts.PowerLokisavail-ableon300Wattsclassmodels.

    TimeLokTheproprietaryTimeLoktechnologystabilizesthetrigger-to-pulsedelayofallsolid-stateHVswitch-drivenexcimerlasersandminimizesthetimejitter.Italsoemploysaself-learningalgorithm,usingalook-uptablefordelaystabilizationinanyoperationmode.

    Onboard Logging/ExiScopeLaserparameterslikeHV,energyandsigmaarere-cordedindatafiles.ThesefilescaneasilybeanalyzedbytheoptionalExiScopesoftwareinordertotrackandimprovelaserperformance.ExiScopeservesasavirtualscopeforevaluationofcomplexinformationavailablefromthelaserdatafiles.Furthermore,thelaserscanop-tionallybeequippedwithpulseshapeanalysismodulesconsistingoffastphotodiodeanddigitizermodule.

    Optional Remote Beam AdjustmentLAMBDASXlaserscanoptionallybeequippedwithmotorizedopticsmountswhichallowremoteadjust-mentofthelaserresonatorbyhand-heldterminal.LAMBDASXlasersaredesignedfor400VAC3-phasewithNeutrallinesupply.Mainscableisnotsupplied.Transformerstobeconfiguredfor190,200,208,220,360,380,420,440,and480VAC3-phaselinevoltageareoptionallyavailable.

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 25

    LAMBDA SX K-Series and C-SeriesExcimer Lasers

    Key Features Customer Benefits Industrial Design Rugged and reliable Unmatched laser beam stability Industrial Interfaces Integrated industrial PC Ethernet interface Direct Control Port (DCP) hard wired interface Sealed and Purged Beam Path Long optics lifetimes Highest UV Laser Power Lowest costs per Watt UV Adjustable Pulse Energy Advance process control

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    TheK-SeriesandC-SeriesLAMBDASXlasersaremulti-purposeKrFandXeClexcimerlasers,respectively,pro-viding248nmor308nmhighpowerUV.Thelasersare

    idealforhighthroughputmicrostructuring,industrialPulsedLaserDeposition,LaserLift-Off,andmore.

    LAMBDA SX K300 LAMBDA SX C300 LAMBDA SX C600Wavelength(nm) 248 308 308MaximumStabilizedPulseEnergy(mJ) 1000 1000 1000MaximumStabilizedAveragePower(W) 300 300 600MaximumRepetitionRate(Hz) 300 300 600EnergyStability(sigma,%)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    LAMBDA SX for Excimer Laser AnnealingExcimer Lasers

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    TheLAMBDASXE-SeriesisspeciallydesignedforExcimerLaserAnnealing(ELA)at308nm.ThehighqualitydemandinOLEDandhighresolutionLCDdisplaymanufacturingrequireshighgradelowtemperaturepoly-Silicon(LTPS)whichcanbecreatedonlywithhighperformanceexcimerlasers.

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 27

    LAMBDA SX E300 LAMBDA SX E500Wavelength(nm) 308 308MaximumStabilizedPulseEnergy(mJ) 1050 1000MaximumStabilizedAveragePower(W) 315 500MaximumRepetitionRate(Hz) 300 500EnergyStability(sigma,%)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    TheVYPERisadoublebeamorquadbeam(TwinVYPER)veryhighpowerexcimerlaserspeciallydesignedforExcimerLaserAnnealing(ELA).Thehighqualityde-mandinhighresolutionmobiledisplaymanufacturingrequireshighgradelowtemperaturepoly-Silicon(LTPS)whichcanbecreatedonlywithhighperformanceex-cimerlasers.TheVYPERlaserfitsperfectlytothehighpowerLineBeam750and1300(TwinVYPER)optics.

    TimeLok/EquiSwitchTheproprietaryTimeLokandEquiSwitchtechnologiessynchronizethetwolaserbeamsperfectlytoadevia-tionofbelow5ns.

    Onboard Logging/ExiScopeLaserparameterslikeHV,energyandsigmaarere-cordedindatafiles.Thesefilescaneasilybeanalyzed

    bytheoptionalExiScopesoftwareinordertotrackandimprovelaserperformance.ExiScopeservesasavirtualscopeforevaluationofcomplexinformationavailablefromthelaserdatafiles.Furthermore,thelaserscanop-tionallybeequippedwithpulseshapeanalysismodulesconsistingoffastphotodiodeanddigitizermodule.

    Optional Remote Beam AdjustmentVYPERlaserscanoptionallybeequippedwithmotor-izedopticsmountswhichallowremoteadjustmentofthelaserresonatorbyhand-heldterminal.

    VYPERlasersaredesignedfor2x400VACor4x400VAC(TwinVYPER)3-phasewithNeutrallinesupply.Mainscablesarenotsupplied.Transformerstobeconfiguredfor190,200,208,220,360,380,420,440,and480VAC3-phaselinevoltageareoptionallyavailable.

    VYPERExcimer Lasers

    Part No. Product Description1226717 AnalysisSoftwareExiScope1269634 AdditionalEMOButtonGuard,SEMI1187052 CableDuct,160x80x1200mm1224269 FastPhotodiodeMounted(externalOscilloscoperequired)1255022 MotorizedOpticsModulesVYPER1202009 PulseShapeAnalysisModuleincl.FastPhotodiodeandDigitizer1207313 UpgradeKit,1200HzOperation,VYPER1180124 15meterCableforHand-heldTerminal(5metercablecomeswithlaser)

    Two transformers / mains cables per VYPER required.1228700 MainsCableLAMBDASX,60kVA,25m1136304 STEPUPTRANSFORMER60kVA

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    VYPER TwinVYPERWavelength(nm) 308 308MaximumStabilizedPulseEnergy(mJ) 2000 4000MaximumStabilizedAveragePower(W) 1200 2400MaximumRepetitionRate(Hz) 600 600EnergyStability(sigma,%)

  • Superior Reliability & Performance www.Coherent.com [email protected]

    On-sitepreparationisrequiredbeforeanexcimerlasercanbeinstalled.Thefollowingisabriefoverview.Fordetailedinformation,pleaserefertotheSitePrepara-tionManual,whichisavailablefromyourCoherentrepresentative.

    Power SupplyExcimerlaserpowerrequirementsvarybymodelandcanbeeithersingle-phase(115V,50/60Hzor230V,50/60Hz)orthree-phase(200/208V,50/60Hzor400V,50/60Hz).

    Todeterminethepowerrequirementsandwall-plugconfigurationforaparticularmodel,pleaserefertothelaserspecifications.

    Gas SupplyTheactivemediumofanexcimerlaserisamixtureofararegas(argon,kryptonorxenon),ahalogen(fluo-rineorhydrogenchloride),andabuffergas(heliumorneon).Inadditiontothepremixedgas,anothergas(inmostcases,nitrogen)isneededtopurgethelaserbeamand,forcertainserviceprocedures,aflushgas(helium)isalsorequired.Formoreinformationaboutgashandlingandinstallation,pleaserefertothesitepreparationmanual.

    CoolingExcimerlasershaveoverallefficienciesofabout2%or3%.Mostofthedissipatedelectricalenergyofthelaserdischargeistransformedintoheat.Lowdutycycleexcimerlasersareusuallyair-cooled.However,atmediumtohighpowersandahighdutycycle,mostexcimerlasersneedwaterorexternalheatexhangersforcooling.Forinformationaboutindividuallasercool-ingrequirements,pleaseaskfordetailedspecificationsaboutasystem.

    Exhaust VentilationAttheinstallationsite,thelasersystemmustbecon-nectedtoanexhaustventilationsystem.COMPexPro,LPXPro,LAMBDASX,andVYPERhavetheirownven-tilationfans,whichguaranteetherequirednegativepressure.Fordetailedinformationaboutindividualexhaustventilationrequirements,pleaserefertotheSitePreparationManual.

    Beam Path PurgingExcimerlaseroperationat157nmand193nmrequirespurgingofthebeampathwithnitrogeninordertoavoidabsorptionbyambientair.

    On-Site RequirementsExcimer Lasers

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    On-Site RequirementsExcimer Lasers

    Single-phase AC230V, 50/60 Hz208 V, 50/60 Hz120 V, 50/60 Hz104 V, 50/60 Hz

    Power

    Air Cooling (air-to-air exchange)

    Single-phase AC230V, 50/60 Hz

    Three-phase AC200/208V,50/60 Hz or400V, 50/60 Hz

    Three-phase AC400V 50/60 Hz (190 to 480V with transformer)

    ExciStar XS IndyStar

    LPXpro/ LPFpro/LEAP

    COMPexPro** LPXpro** LEAP LAMBDA SX VYPER

    *(required for 157 nm and 193 nm)** (single-gas operation for 308 nm only)

    Halogen is F2/He, HCl/H2/Ne(depending on wavelength and laser).

    Rare is Ar, Kr, Xe(depending on wavelength and laser).

    LAMBDA SX VYPER

    Water Cooling (water-to-water exchange)

    Laser Gases

    COMPexPro BraggStar M

    COMPexPro >20 Hz LPXpro/LPFpro/LEAP LAMBDA SX/VYPER IndyStar BraggStar M >20 Hz

    Halo

    gen

    Rare

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    Ne He

    ExciStar XS Series IndyStar COMPexPro BraggStar M LPXpro*(required for 157 nm and 193 nm)

    Prem

    ix

    He N2*

    N2*L A S E R

    ExciStar XS COMPexPro

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Modular System ApproachUVopticalsystemsusuallyincludeasetofblocksthatformtheilluminationbeampathandtheimagingbeampath.Theopticalsystemshapesandhomog-enizesthelaserradiationtoilluminateamaskthatcontainsthedesiredpattern.Thismask,whosepatterncaneasilybechanged,isthenimagedwithaprojectionlensontothesubstrate.

    Usingthistechniqueprovidesaneasywaytobuilddedicatedopticalbeamdeliverysystemsforawiderangeofapplications.

    Inadditiontoouropticalandlaserproducts,wealsoperformfeasibilitystudies,applicationlabsamplepreparation/testing,andoffersmall-scalejobshopopportunitiestocustomersaroundtheworld.

    UV Optical Systems, Modules and ComponentsUV Optical Systems

    CustomizedOpticalSystemsforawiderangeofR&Dapplications.

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    LMC Accessories

    Customer Support

    Excimer Lasers

    ApplicationsLaser Selection Guide

    Functional Blocks

    UV Optical System

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    UV Optical Systems, Modules and ComponentsUV Optical Systems

    Illumination Beam

    PathIm

    agingBeam

    Path

    Laser Shutter Attenuator

    Substrate

    Telescope

    Homogenizer

    Field Lens

    Mask

    P-Lens

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Laserlift-offisthekeytechnologyinmanufacturingflexibledigitaldisplayswherethin-filmtransistordevicestructuresaretypicallyfabricateddirectlyontoapolymerlayerthathasbeenspunonaglasssubstrate.

    UVbladeselectivelydetachesthepolymer-baseddis-playsofalltypesfromtheirrigidglasscarriers.UVbladesupportsglasssubstrategenerationsuptoGen8.

    UVbladeSystems for Laser Lift-Off Applications

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    UVblade380

    UVblade750

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    UVblade250 UVblade380 UVblade465 UVblade750Wavelength(nm) 308 308 308 308LaserPulseEnergy(mJ) 580 580 900 950RepetitionRate(Hz) 200 200 300 300EnergyDensityPlateau1(mJ/cm2) 270 235 235 235BeamLength2(mm) 250 380 465 750BeamWidth2(m) 400 300 400 250HomogeneityLongAxis2

  • Superior Reliability & Performance www.Coherent.com [email protected]

    LineBeamSystems for Excimer Laser Annealing

    TwinVYPER excimer laserwith LB1300 beam delivery

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    LineBeamforExcimerLaserAnnealing(ELA)oftypically50nmto120nmthickamorphoussiliconfilmsonlargeflatpaneldisplayglasssubstratestransferredintoindustrialproductioninthemid90s.

    Thistechniqueisprogressingtoevenlongerlinebeamsforannealinglargerareas,employingnewexcimerlaserswithmoreandmorepulseenergy.

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 37

    LineBeam LB465 LB750 LB1000 LB1300Wavelength(nm) 308 308 308 308LaserPulseEnergy(mJ) 1050 2000 4000 4000EnergyDensity(mJ/cm2) Specification >_350 >_430 >_435 >_435 TypicalValue 460 500 490 490BeamLength(mm) 465 750 1000 1300BeamWidth(m) 350 400 580 450HomogeneityLongAxis Specification

  • Superior Reliability & Performance www.Coherent.com [email protected]

    VarioLasUVmaterialprocessingsystemsbasedontheCOMPexPro100excimerlaserseriesareaffordabletoolsforhighqualityUVmicroprocessing.Superiorop-ticsdesign,ruggedmechanicsandunmatchedpulse-to-pulsestabilityarethekeyingredientsineachoftheVarioLassystemswhichareavailableforthecommonexcimerlaserwavelengths193nm,248nmand308nm.

    VarioLasmaskimagingsystemsECOandPROprovidemicromachiningresolutionsof30mand5m,re-spectively,atafieldsizeof2x2mm2andareidealfor

    machiningofallkindsofmaterialssuchaspolymers,semiconductors,ceramicsorglasses.

    TheVarioLasSWEEPsupportsscanned,large-areaprocessingwitha50x0.6mm2linebeamforapplica-tionssuchasdopantactivationofwafersandsurfaceannealing.

    VarioLas FamilyUV Optical Systems - Material Processing Systems

    Part No. Safety Options1161813 Class1Housing1161812 AutomatedSafetyClass3InterlockCircuit1107556 AutomatedBeamShutterfor193nm1107557 AutomatedBeamShutterfor248nm1157558 AutomatedBeamShutterfor308nm

    Part No. Control Options1161814 ControlPC(withmonitor)1161815 SubstrateStage(3-axesincl.substratechuck)1161816 ObservationUnit(forVarioLasPRO,193nm)1161817 ObservationUnit(forVarioLasPRO,248nm/308nm)1161818 ObservationUnit(forVarioLasECO,allwavelengths)1161819 MotorizedAttenuator(upgrade)1161820 Mot.Attenuator,EnergyControl,PRO/ECO,193nm1161821 Mot.Attenuator,EnergyControl,PRO/ECO,248nm1161822 Mot.Attenuator,EnergyControl,PRO/ECO,308nm

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  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 39

    Wavelength VarioLasECO VarioLasPRO VarioLasSWEEPFieldGeometry All Square Square LineMaskFieldSize(mm2) All 20x20 20x20 -SubstrateFieldSize(mm2) All 2x2 2x2 50x0.6Resolution(m) All 30 5 -WorkingDistance(mm) All 50 50 150MaximumRepetitionRate2(Hz) All 100 100 100MaximumEnergyDensity(mJ/cm2) 193 1000 1000 230 248 3500 3500 600 308 3000 3000 500EnergyStability(%,rms) 193 2 2 2 248 1 1 1 308 1 1 1PulseWidth(ns) 193 15 15 15 248 20 20 20 308 20 20 20PartNo.3 193 1156386 1156390 1156394 248 1156387 1156391 1156395 308 1156388 1156392 1156396

    Weight VarioLasbeamdeliverysystem 500kg/1100lbs. COMPexPro102/110lasermodel 250kg/551lbs.Cooling Air(ifusedwithCOMPexPro102lasermodel) Water,2to3l/min.(0.5to0.8gal./min.),15to20CElectrical 230V,10%,16A,50/60Hzswitchable,1-phase 115V,10%,25A,50/60Hzswitchable,1-phaseOptions 20Hzor100HzCOMPexPro100lasermodelDimensions(LxWxH) 3300x1200x1830mm(131x48x73in.)

    VarioLas FamilyUV Optical Systems - Material Processing Systems

    Key Features Customer Benefits High Energy Excimer Laser Inside Superior pulse-to-pulse stability Largest on-sample fluence range Hands-off operation over weeks Rock Solid Optical and Mechanical Design Maintenance-free operation Unmatched processing stability Modular Concept with Upgrading Options Customizable from optical beam train to ready-to-use workstation

    Specifications1

    Weight/Utilities/ Dimensions

    1 Allspecificationsaretypicaldataandaresubjecttochangewithoutpriornoticeinordertoprovidethebestproductpossible.2 WithCOMPexPro110lasermodel(Maximum20HzwithCOMPexPro102lasermodel).3 VarioLasbeamdeliveryrequiresCOMPexPro102or110lasermodel.

    LMC Accessories

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  • Superior Reliability & Performance www.Coherent.com [email protected]

    TheGeoLasHDmakesthemostoutoftodaysad-vancedmassspectrometers.Itprovidesunmatchedenergydensitiesrangingfrom1J/cm2upto50J/cm2formaterial-independentsolidsampling.GeoLasHDusessophisticatedhomogenizingopticstoensureaccurateandshallowdepthcontrol,alongwithflat-bottomcraters.Using193nmwavelengthinsolid

    samplingproducessmallerparticlesizes,highestsignalintensitiesandlowestintrinsicfractionationduetooptimummaterial-lightinteraction.GeoLasHDhasarigiddesignwhichisvirtuallymaintenance-freeandallowstheusertofocusonwhatheisreallyinterestedinuncompromisedsolidsamplinganddatarecordingdayafterday.

    GeoLasHDUV Optical Systems - Solid Sampling System for LA-ICP-MS

    Part No. Safety Options1114417 Class1Housing1099616 ManualMaskSliderAssembly1179091 MMGSampleCell2910682 MassFlowController

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    GeoLasHDUV Optical Systems - Solid Sampling System for LA-ICP-MS

    Key Features Customer Benefits High Energy 193 nm COMPexPro Inside Superior pulse-to-pulse stability Hands-off operation over weeks Petrographic Microscope and EAGLE Superior observation capabilities Software Package Easy localization of fluid inclusions Large Range of Energy Densities Accurate ablation of all materials Precise depth profiling with flat crater bottom High Definition Ethernet Camera Micron-Resolution Overview Mapping Live Image Observation

    GeoLasHDWavelength(nm) 193EnergyDensityonSample(J/cm2) 1to50OpticalResolution(m) 1SpotSizeatSample(m) 4to160PulseStability(%,rms) 2BeamHomogeneity(%,rms) 1RepetitionRate(Hz) 1to100X,Y-DriveMin.StepSize(m) 0.1Z-FocusMin.StepSize(m) 0.1PartNo. GeoLasHD 1294980

    Weight GeoLasHDsystem 395kg/871lbs.Cooling AirElectrical 230V,10%,16A,50/60Hzswitchable,1-phase 115V,10%,25A,50/60Hzswitchable,1-phaseDimensions(LxWxH) 2470x1142x1440mm(97x45x57in.)

    Specifications1

    Weight/Utilities/ Dimensions

    1 Allspecificationsaretypicaldataandaresubjecttochangewithoutpriornoticeinordertoprovidethebestproductpossible.

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  • Superior Reliability & Performance www.Coherent.com [email protected]

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    Wavelength Attenuator Module, Attenuator Module, Attenuator Module (nm) Manual Motorized for 157 nmPartNo. 157 1111338 193 2910218 1116186 248 2910216 2910566 308 1116181 1116184 351 1116182 2910568

    Attenuator Module, ManualVariableattenuationsubstrate60x35x2mm3withinversecharacteristicforhighthermalstability.Com-pensatorplate60x35x2mm3tocompensateforanybeamdisplacement.Withmanualknobanddigitalscaleforaccuratetransmittancesetting.Electromag-neticshutter.

    Attenuator Module, MotorizedVariableattenuationsubstrate60x35x2mm3withinversecharacteristicforhighthermalstability.Com-pensatorplate60x35x2mm3tocompensateforanybeamdisplacement.WithDCmotorandencoder,ATMRS-232interfacemodule,interfacecables,mini-control-lerandcontrolsoftwareforWindows*.Electromagneticshutter.

    Attenuator Module for 157 nmLeak-tightmodulehousingwithobservationwindow.Variableattenuationsubstrate60x35x2mm3withinversecharacteristicforhighthermalstability.Com-pensatorplate60x35x2mm3tocompensateforanybeamdisplacement.Manualknobanddigitalscalefortransmittancesetting.Electromagneticshutter.Flangesfortubeconnectionsandvacuumexhaust.Purgegasinletandexhaustgasoutletwithgatevalve

    Components - Attenuator ModuleUV Optical Systems

    Specifications

    *WindowsisaregisteredtrademarkofMicrosoftCorporation.

  • Toll Free: (800) 527-3786 Tel: (408) 764-4983 Fax: (800) 362-1170 43

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    Homogenizer 5x5 Homogenizer 10x10 Homogenizer 20x20HomogenizedFieldSize(mm) 5x5 10x10 20x20Zoom 10% 10% 10%Homogeneity

  • Superior Reliability & Performance www.Coherent.com [email protected]

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    P-lens 4-10x/4-xxx P-lens 5x/18-xxx P-lens 5x/30-xxx Doublet 50-xxx Doublet 100-xxxWavelength(nm) 157 157 193 193 193 248 248 248 248 308 308 308 308 308 351 351 351Demagnification 4to10x 5x 5x Variable Variable (higher demagnification onrequest)FocalLength(mm) approx.100 approx.50 approx.100ImageField 4mm 18mm 30mm Dependingon DependingonDiameter wavelength wavelengthNumerical Dependingon 0.13 0.1 - -Aperture wavelength (diffraction-limited) (diffraction-limited) (diffraction-limited forallavailable wavelengths)SpatialResolution 3m 2m 2.5m 50m 50m linesandspaces linesandspaces linesandspaces linesandspaces linesandspacesWorkingDistance Dependingon Dependingon Dependingon Approx.35mm Approx.70mm wavelength, wavelength wavelength useofeye piece,and demagnificationTrackingLength Dependingon 800mm 1050mm Dependingon Dependingon wavelength,use wavelengthand wavelengthand ofeyepiece,and demagnification demagnification demagnification ratio ratioTransmission >80% >80% >80% - -PartNo. 157nm 1116211 1116216 193nm 9680011 1116212 1116217 248nm M290009 M290022 1137121 1116213 1116218 308nm 1116206 M290008 9680052 1116214 2921330 351nm 1116207 1116215 1116219

    Components - Projection LensesUV Optical Systems

    Specifications

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    Withover40yearsofexperiencesupportingcriticallaserenvironments,Coherentknowshowimportantitistoestablishlastingpartnershipsthatenableourcustomerstoachievesuccesstodayandwellintothefuture.WithCoherentswiderangeofserviceproducts,everythingyouneedisunderoneroof,designedtosafeguardandenhanceyourinvestment.

    Value-based service agreement programs Custom Service Agreements to meet your unique needs Factory-trained service engineers across the globe Knowledgeable technical support that is only a phone call away On-site and factory-tailored training courses Certified high quality parts and accessories, consumables and upgrades, all designed exclusively for your Coherent laser along its lifecycles Customer documents (e.g., detailed manuals)

    The Support you need to stay up and runningTheProductivityPlusserviceagreementprovidesthehighestlevelofcustomercareavailableanywhere.Itgoesbeyondyourwarrantyandguaranteestheperformanceofyoursystem.ProductivityPlus(PPlus)protectsyourproductivityandprofitabilityfromun-expecteddowntimeandisavailableformostcurrentCoherentproducts.

    PPlus Service Agreements protect your investment with: Priorityon-siteservice Preventativemaintenancevisits Unlimitedaccesstothebesttechsupportinthe industry

    PPlus Service Agreements save you money by: ProtectingyourinvestmentinCoherentproducts Coveringpartsandlabor Simplifyingservicecosts Coherentunderstandsthateachoperationhasitsownsupportneeds.Weofferyouavarietyofsupportplanstochoosefrom.

    ServiceProductivity Plus Service Agreement

    Product Description PN for 12 month agreementExciStarXS 1169709IndyStar 1169710BraggStarM 1169717COMPexPro 1169717LPXpro/LPFpro 1169716

    Productivity Plus

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    Customer Support

    Excimer Lasers

    ApplicationsLaser Selection Guide

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    s

  • Superior Reliability & Performance www.Coherent.com [email protected]

    Fully staffed training department at Coherent Goettingen

    Use the latest in presentation materials and techniques including manuals, video overheads and a fully equipped laboratory for hands-on training experience

    Train, re-train, update/improve FSE skills

    Train, to various levels, OEM FSE in a variety of laser types and applications

    End customer training when requested

    Factory and on site tailored training courses

    Class size restrictions are strictly enforced (max. of 4 trainees per class)

    ServiceTraining Programs

    Product Line A/1 day A/2 days AB/4 days ABC/5 daysExciStarXS 1170393 1170393 1170393 1170393IndyStarseries 1170394 1170394 1170394COMPexProseries 1100554 1100554 1100554LPXpro/LPFproseries 1100598 1100598 1100598

    Product Line A/2 days AB/4 days ABC/10 daysLEAPseries 1170395 1170395 1170395LAMBDASXseries 1154279 1154279 1154279VYPERseries 1192273 1192273 1192273UVOpticalSystems 1100604 1100604 1100604

    Training Courses

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    Laser Measurement and Control AccessoriesMatrix of Recommendations

    Power Measurement FieldMaxII-TOwithPM10X FieldMaxII-TOwithPM30X FieldMaxII-TOwithPM150-50XC1 2

    FieldMaxII-TOwithPM150X 2

    FieldMaxII-TOwithPM300F-50X 2

    FieldMaxII-TOwithPM1K-100 Energy Measurement FieldMaxII-TOPwithJ-25MUV-xxx3 LabMax-TOPwithJ-25MT-10KHZ 4

    FieldMaxII-TOPwithJ-50MUV-xxx 4 2,4

    EnergyMax-USBSensorJ-25MUV-193 EnergyMax-USBSensorJ-50MUV-248 4 2,4

    FieldMaxII-TOP 1098580 FieldMaxII-TOPmetersworkwithabroadrangeofthermopile,opticaland pyroelectricsensorstomeasurepowerfromnWtokWandenergyfromnJ toJintheUV.USBconnectivityandPCapplicationssoftwaresuiteallowlive monitoringofmultiplemetersandstatisticalanalysis.

    Exci

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    COM

    PexP

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    Brag

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    SX

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    FieldMaxII-TOMeter

    LabMax-TOPMeter

    1 Aircooledoperation.2 Dependingonlasermodelandwavelength,limitedoperationatfullpower.3 xxx=193for157nmand193nm;xxx=248for248nm,308nmand351nm.4 Heatsinkrequired.

    LMC Accessories

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  • Superior Reliability & Performance www.Coherent.com [email protected]

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    Laser Measurement and Control AccessoriesMatrix of Recommendations

    LabMax-TOP Meters LabMax-TOP LabMaxmetersareidealforanyonewhoneedstoanalyzeandmonitorlaser 1104622 output.Datacanbeanalyzedviastatisticalandtrendanalysisandstoredin onboardflashmemoryforfutureretrievalwiththeFileManagertool. Alternatively,datacanalsobeprocesseddirectlyonaPCthroughUSB,RS-232, orbyloggingdatatoaUSBflashdriveattacheddirectlytothemeter.Installable applicationssoftwareandLabVIEWdriversareprovidedtosupportPCinterfacing. TheLabMaxdisplaycanbepositionedatmanydifferentanglessocustomerscan placeitwithinthelimitedbenchspacetypicallyavailableinalaserlabandstill easilyviewthedisplay.LabMax-TOPisdirectlycompatiblewithmostCoherent thermal,pyroelectricandsemiconductorsensors.UsedwithEnergyMaxsensors, LabMax-TOPcanmeasurenJtojoulesandupto10kHz.PowerMax Power Sensors PM10X PowerMaxPM-modelthermopilesensorsarecompatiblewithFieldMaxII 1098423 andLabMaxmeters(both-TOPand-TOmodels)andprovideaccurate PM30X measurementofaveragelaserpower.Forexcimerapplications,ourX-coating 1098498 offersdamageandbleachingresistanceintheultraviolet.NIST-traceability PM150-50XC andspectralmappingofthesensorresponse,loadedintoEEPROMfor 1098443 automaticwavelengthcompensation,ensuresmeasurementaccuracy PM150X throughouttheultraviolet. 1098455 PM300F-50X 1098481 PM1KX-100 1152086

    PowerMax-USB/RSSensors

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    Customer Support

    UV Optical System

    sExcim

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    Laser Selection GuideLM

    C Accessories

    EnergyMax Energy Sensors J-25MT-10KHZ WiththeEnergyMaxfamilyofpyroelectricsensors,robustMaxUV,MaxBlack 1110747 anddiffusemetallicsensorcoatingsofferahighdamagethresholdand J-25MUV-193 long-termstability,whichisfurtherincreasedoncertainmodelswiththeuse 1110741 ofoptimizeddiffuserstacks.Spectralmappingofallsensorsanddiffusers J-25MUV-248 allowseasywavelengthcompensationandensuresaccuracythroughout 1110745 theultraviolet.Theadditionofthermalcompensationgivesmeasurement J-50MUV-248 accuracythatisunaffectedbyambientconditionsandaveragepowerlevels. 1110572 Theelectronicdesignoffersaveryhighdynamicrangeandhighlyaccurate J-50MUV-193, no diffuser andlinearrepetitionrateperformancefromlargediametersensors.Coupled 1146237 witharobustmechanicalandelectronicdesignthatprovidesexcellentnoise J-50MUV-248, no diffuser immunity,EnergyMaxisideallysuitedformeasuringthepulseenergyfrom 1146243 excimerlasers.EnergyMax-USB Energy Sensors J-25MUV-193, no diffuser EnergyMaxdetectorswithdirectUSBhighspeed2.0connectiontoPC. 1191448 Nometerneeded!PowerprovidedviaUSBconnection.Fast14-bitA/D J-50MUV-248 converterwithuptofivedigitsmeasurementresolution. 1191449EnergyMax Heat Sinks Small Heat Sink for OptionalheatsinksareavailableforEnergyMaxsensors.Coupledwiththe J-25 Model Sensors sensorsinherentthermalcompensation,theseheatsinksallowpulseenergy 1123430 measurementsataveragepowersinthetensofWattsidealforhigher Large Heat Sink for averagepowerexcimerlasers. J-50 Model Sensors 1123432

    Laser Measurement and Control AccessoriesMatrix of Recommendations

    EnergyMaxEnergySensors

    EnergyMaxHeatSinks

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