Excimer laser -Industrial VersionsExcimer laser -Industrial Versions EX10IN Specifications PARAMETER...
Transcript of Excimer laser -Industrial VersionsExcimer laser -Industrial Versions EX10IN Specifications PARAMETER...
Industrial Excimer Lasers
Total Metal/Ceramic SUPERCHAMBER II Industrial lasers feature additional technology to improve gas, optics and system lifetimes. Including ♦ High Speed Laser Blower ♦ Soft gas discharge ♦ Generation II Corona Pre-Ionization ♦ Active gas cleanup ♦ Industrial grade electronic power modules ♦ Beam line connections
GAM LASER, INC GAM LASER, INC Hard ScienceHard Science
Excimer laser -Industrial Versions
EX10IN Specifications
PARAMETER ArF KrF XeCl XeF
Wavelength nm 193 248 308 351
Energy Max. mJ 20 35 15 12
Energy Control Range, mJ 5-20 10-35 7-15 7-12
Average Power EX10IN/300 4.0 7.0 3.0 3.0
Average Power EX10IN/600 7.0 13.0 6.0 6.0
Average Power EX10IN/750 9.0 18.0 8.0 8.0
Repetition rate Hz 300/600/750
Dynamic gas lifetime1 20E6 35E6 20E6 20E6
Static gas lifetime1 60 days 90 days > 12 months 90 days
Pulse length, ns 15
Beam Size, mm 8 x 3-4
Divergence, mRad full angle 1 x 2
Stability2 < 2% standard deviation
Cooling Air
Optics service 500E6 1000E6 100E6 200E6
Tube service > 3 Billion pulses
Dimensions: 61 X 40 X 27cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 8A/15A, 47/63Hz. Weight 40Kg
GAM LASER, INC GAM LASER, INC Hard ScienceHard Science
Industrial Excimer Lasers
GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700
Email : Sales@ gamlaser.com Web : www.gamlaser.com
MADE IN USA
Copyright © 2005 GAM Laser Inc.,
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 2.5 35 50 20 20
Average Power @ 250Hz 0.5 5 10 5 5
Average Power @ 500Hz 1 10 20 9 9
Average Power @ 750Hz 1.5 14 28 12 12
Dynamic gas lifetime1 10E6 20E6 35E6 20E6 20E
6
Static gas lifetime1 15 days
90 days
120 days
> 6 months
120 days
Pulse length, ns 10 17-20
Beam Size, mm 9 x 4
Divergence, mRad full angle 0.8 x 1.6
Stability2 < 2% standard deviation
Cooling Air/Water
Optics service 1000E6
1000E6
1000E6 200E6 300
E6
Tube service 3 Billion pulses
EX50IN Specifications
1) To 50% energy 2) <1% at Max Voltage
Dimensions: 78 X 43 X 34cm (L X W X H) Power Requirements: 250/ 500Hz 95-240 VAC, 8/15A, 47/63Hz 1000Hz 208-240 VAC 15A 47/63Hz Weight 48kg.
Dimensions and electrical service
The EX50 gives high performance in a lightweight compact package. The laser is only 78 cm long. The entire laser including the vacuum pump is packaged in one table top unit..
Industrial Excimer Lasers
GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700
Email : Sales@ gamlaser.com Web : www.gamlaser.com
MADE IN USA
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5 12 20 7 5
Average Power @ 250Hz 0.5 2.4 4 5 5
Average Power @ 500Hz 1 4 8 9 9
Average Power @ 750Hz 1.5 5 10 12 12
Dynamic gas lifetime1 10E6 20E6 35E6 20E6 20E
6
Static gas lifetime1 15 days
90 days
120 days
> 6 months
120 days
Pulse length, ns 10 17-20
Beam Size, mm 9 x 4
Divergence, mRad full angle 0.8 x 1.6
Stability2 < 2% standard deviation
Cooling Air/Water
Optics service 1000E6
1000E6
1000E6 200E6 300
E6
Tube service 3 Billion pulses
EX5IN Specifications
1) To 50% energy 2) <1% at Max Voltage
Dimensions and electrical service
The EX5 gives high performance in a lightweight compact package. The laser is only 47 cm long. The entire laser including the vacuum pump is packaged in one table top unit..
Dimensions: 47 X 25 X 25cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 2.5A/5A, 47/63Hz. Weight 15Kg