Excimer laser -Industrial Excimer laser -Industrial Versions EX10IN Specifications PARAMETER ArF KrF...

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Transcript of Excimer laser -Industrial Excimer laser -Industrial Versions EX10IN Specifications PARAMETER ArF KrF...

  • Industrial Excim er Lasers

    Total Metal/Ceramic SUPERCHAMBER II Industrial lasers feature additional technology to improve gas, optics and system lifetimes. Including ♦ High Speed Laser Blower ♦ Soft gas discharge ♦ Generation II Corona Pre-Ionization ♦ Active gas cleanup ♦ Industrial grade electronic power modules ♦ Beam line connections

    GAM LASER, INC GAM LASER, INC Hard ScienceHard Science

    Excimer laser -Industrial Versions

    EX10IN Specifications

    PARAMETER ArF KrF XeCl XeF

    Wavelength nm 193 248 308 351

    Energy Max. mJ 20 35 15 12

    Energy Control Range, mJ 5-20 10-35 7-15 7-12

    Average Power EX10IN/300 4.0 7.0 3.0 3.0

    Average Power EX10IN/600 7.0 13.0 6.0 6.0

    Average Power EX10IN/750 9.0 18.0 8.0 8.0

    Repetition rate Hz 300/600/750

    Dynamic gas lifetime1 20E6 35E6 20E6 20E6

    Static gas lifetime1 60 days 90 days > 12 months 90 days

    Pulse length, ns 15

    Beam Size, mm 8 x 3-4

    Divergence, mRad full angle 1 x 2

    Stability2 < 2% standard deviation

    Cooling Air

    Optics service 500E6 1000E6 100E6 200E6

    Tube service > 3 Billion pulses

    Dimensions: 61 X 40 X 27cm (L X W X H) Power Requirements: 95-135 and 185-240 VAC, 8A/15A, 47/63Hz. Weight 40Kg

  • GAM LASER, INC GAM LASER, INC Hard ScienceHard Science

    Industrial Excim er Lasers

    GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

    Email : [email protected] gamlaser.com Web : www.gamlaser.com

    MADE IN USA

    Copyright © 2005 GAM Laser Inc.,

    PARAMETER F2 ArF KrF XeCl XeF

    Wavelength nm 157 193 248 308 351

    Energy Max. mJ 2.5 35 50 20 20

    Average Power @ 250Hz 0.5 5 10 5 5

    Average Power @ 500Hz 1 10 20 9 9

    Average Power @ 750Hz 1.5 14 28 12 12

    Dynamic gas lifetime1 10E6 20E6 35E6 20E6

    20E 6

    Static gas lifetime1 15 days 90

    days 120 days

    > 6 month s

    120 days

    Pulse length, ns 10 17-20

    Beam Size, mm 9 x 4

    Divergence, mRad full angle 0.8 x 1.6

    Stability2 < 2% standard deviation

    Cooling Air/Water

    Optics service 1000E6 1000E

    6 1000 E6 200E6

    300 E6

    Tube service 3 Billion pulses

    EX50IN Specifications

    1) To 50% energy 2)

  • Industrial Excim er Lasers

    GAM LASER INC. 6901 TPC Drive #300 ORLANDO, FL 32822 Phone : 407-851-8999 Fax : 407-850-0700

    Email : [email protected] gamlaser.com Web : www.gamlaser.com

    MADE IN USA

    PARAMETER F2 ArF KrF XeCl XeF

    Wavelength nm 157 193 248 308 351

    Energy Max. mJ 1.5 12 20 7 5

    Average Power @ 250Hz 0.5 2.4 4 5 5

    Average Power @ 500Hz 1 4 8 9 9

    Average Power @ 750Hz 1.5 5 10 12 12

    Dynamic gas lifetime1 10E6 20E6 35E6 20E6

    20E 6

    Static gas lifetime1 15 days 90

    days 120 days

    > 6 month s

    120 days

    Pulse length, ns 10 17-20

    Beam Size, mm 9 x 4

    Divergence, mRad full angle 0.8 x 1.6

    Stability2 < 2% standard deviation

    Cooling Air/Water

    Optics service 1000E6 1000E

    6 1000 E6 200E6

    300 E6

    Tube service 3 Billion pulses

    EX5IN Specifications

    1) To 50% energy 2)