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![Page 1: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/1.jpg)
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ES1050 – Introductory Engineering Design and Innovation Studio
ECE Case Study
Accelerometers in Interface Design – Part IIProf. Jayshri Sabarinathan
TEB 259 [email protected]
2009 11 27
![Page 2: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/2.jpg)
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Outline
Recap of Design process for WII Introduction to electronics The microelectronics process MEMS MEMS Accelerometer
![Page 3: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/3.jpg)
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Recap
Problem definition Functionality -> existing technology to solve
some features Objectives Constraints Concepts – decision making -> accelerometers Analysis/ Calculations Simplify Next step : Iteration- need something smaller
![Page 4: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/4.jpg)
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Accelerometer Theory
Accelerometer for into plane acceleration or pitch
Strain gauge
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Wii First Proposal
We can build something like this:
Acc 1
Acc 2
Acc 3
Computer monitors and integrates
acceleration data
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Introduction to electronics It all started with the vacuum tube
Amplification mode (eg: radio)
Switching mode (eg: computing)
They are inefficient, bulky and slow
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From Electronics to Microelectronics
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Introduction to microelectronics In the late 1940s, we moved to
semiconductor technology The primary semiconductor is
silicon
Pure silicon crystal BouleSingle silicon wafer
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Progression of Silicon Wafer sizes
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Introduction to electronics Silicon forms a crystal lattice structure
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
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Introduction to electronics n-type doping with (eg) Phosphorus
PSi Si P SiPSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiP P Si SiSiSi Si
SiSi P Si SiSiSi Si
Free electrons
![Page 12: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/12.jpg)
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Introduction to electronics n-type doping with (eg) Phosphorus
PSi Si P SiPSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiP P Si SiSiSi Si
SiSi P Si SiSiSi Si
- +Electric field
![Page 13: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/13.jpg)
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Introduction to electronics n-type doping with (eg) Phosphorus
PSi Si P SiPSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiP P Si SiSiSi Si
SiSi P Si SiSiSi Si
- +Electric field
![Page 14: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/14.jpg)
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Introduction to electronics n-type doping with (eg) Phosphorus
PSi Si P SiPSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiP P Si SiSiSi Si
SiSi P Si SiSiSi Si
- +Electric field
![Page 15: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/15.jpg)
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Introduction to electronics p-type doping with (eg) Boron
BSi Si B SiBSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiB B Si SiSiSi Si
SiSi B Si SiSiSi Si
Free holes
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Introduction to electronics p-type doping with (eg) Boron
BSi Si B SiBSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiB B Si SiSiSi Si
SiSi B Si SiSiSi Si
+ -Electric field
![Page 17: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/17.jpg)
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Introduction to electronics p-type doping with (eg) Boron
BSi Si B SiBSi Si
SiSi Si Si SiSiSi Si
SiSi Si Si SiSiSi Si
SiB B Si SiSiSi Si
SiSi B Si SiSiSi Si
+ -Electric field
![Page 18: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/18.jpg)
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Introduction to electronics Once we have n-type and p-type silicon,
we have electronics These devices do everything tubes do,
only faster, cheaper and smaller
p n
Diode
n np
p pn
Transistor
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Microelectronics Process The real breakthrough was the monolithic
(integrated) circuit
p n p n
Integrated circuits are built onto a single silicon substrate, not from discrete parts
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Microelectronics Process Integrated circuits are created using a
process called lithography
Lithography uses masks and resists to dope and create circuit elements
Resist
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Microelectronics Process Masks define the locations of circuit
elements and light (or other beam) cures the resist
Mask
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Microelectronics Process Uncured resist can be washed away,
leaving only cured resist behind
Cured resist
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Microelectronics Process Dopants can then be flooded over the
wafer. They will only penetrate where they should
Boron solution
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Microelectronics Process Finally, the resist can be removed, to yield
doped silicon
P-type silicon
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Microelectronics Process A second sequence (with different mask)
continues to build the circuit
Resist
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Microelectronics Process A second sequence (with different mask)
continues to build the circuit
Mask
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Microelectronics Process A second sequence (with different mask)
continues to build the circuit
Cured resist
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Microelectronics Process A second sequence (with different mask)
continues to build the circuit
Phosphorus solution
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Microelectronics Process A second sequence (with different mask)
continues to build the circuit
Integrated diode
p n p n
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Microelectronics Process Devices can be made as small as we can
focus the exposing beam (~ 20 nm)
We can make as many simultaneously as will fit on a wafer
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Several Microchips from a single wafer
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Clicker Question #1 Which of the following combination of p-type and
n-type material is NOT a transistor?
A. B. C.
n np p pnp n
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Introduction to MEMS That’s nice, but what does this have to do
with accelerometers?
It turns out that silicon can also be etched, vertically or at a 55 degree angle
This allows us to build microelectromechanical systems (MEMS) using the lithography process
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Accelerometer Theory
Suppose we want to build this accelerometer
Strain gauge
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Accelerometer Theory
First, we create the negative of the shape as a mask
Strain gauge
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Accelerometer Theory
If we use this mask in the lithography process then etch, we can cut away the center portion with vertical etching
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Accelerometer Theory
Edge regions
Central regions
Next, an anisotropic wet (KOH) etch from the bottom creates the thin beam
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Accelerometer Theory
Edge regions
Central regions
Next, an anisotropic wet (KOH) etch from the bottom creates the thin beam
Thin, flexible support beam
Large inertial mass
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Accelerometer Theory
The strain gauges are not required, because the resistance of silicon depends on stress
Piezoresistors
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Suspended MEMS Bridge
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Wii First Proposal
Recall that we needed a computer to process the data
Acc 1
Acc 2
Acc 3
Computer monitors and integrates
acceleration data
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Accelerometer TheoryBut this is still silicon. So, we can just build the electronics on the same wafer, using more steps of the same process.
Control circuit
Accelerometer
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MEMS Process Devices can be made as small as
practical, given the needed function
We can still make as many simultaneously as will fit on a wafer!
We can build the needed electronics (to communicate with Wii, for example) right on the same chip.
![Page 44: ES1050 – Introductory Engineering Design and Innovation Studio 1 ECE Case Study Accelerometers in Interface Design – Part II Prof. Jayshri Sabarinathan.](https://reader036.fdocuments.in/reader036/viewer/2022070410/56649f1f5503460f94c37d6c/html5/thumbnails/44.jpg)
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MEMS Process Can you think of other applications for the
MEMS accelerometer?
Can you think of other applications for MEMS?
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Other Applications
Cellphones Laptop Screen rotation Laptop safety
MEMS Switches Tunable electronics with Biotechnology, RF-MEMS for
communication