Semicon equipment and tooling

• Laser beam delivery and shaping

• Alignment and metrology

• Wafer inspection

• Lithography

Laser annealing in the semicon market is growing rapidly.

The elementary module for the laser annealing process is

a laser beam delivery system that conditions the laser beam

such that uniform annealing is achieved over the surface.

Demcon, in cooperation with a system integrator, has

developed a laser annealing module.

Our contribution:

• The development of a custom made F-theta lens with

a long working distance

• Reduction of angular displacement errors due to manufacturing tolerances

• Tooling for optical alignment and qualification

Project specifics

• Focal length of 280 mm

• Scan range of 7 mm with ± 4 degree (Gaussian) input beams

• 500 W laser with wavelength of 500 nm

• F-theta distortion less then 0.01%

Accurate pre-alignment of wafers is key for each individual

processing step. Contactless wafer edge measurement requires

a dedicated optical head. Demcon has developed an optical head

that is capable of detecting, statically and dynamically, the edge

of a wafer with respect to the gripper and wafer marker.

Sub-micron accuracy is achieved in all three dimensions with

extended depth of focus and flat field. One of the key enablers of

such performance is the use of custom optical and opto-

mechanical designs for imaging and through lens illumination.

• Up to 6 mm out-of-focus, precision XY < 1 µm

• Up to 12 mm out-of-focus, precision XY < ~2 µm

• 24 mm field-of-view with TTL illumination

Wafer fab equipment - wafer annealing

Wafer fab equipment - wafer alignment

We are specialized in pre-trained deep learning network for

automated feature extractions including a two-step network layer

which the customer can create and train themselves, without

having knowledge of deep learning or neural networks. We also

offer the generation of synthetic data that can be used to train

the neural network. This will reduce the NRE inspection-module

cost drastically when introducing new designs.

Inspection - image analysisClassification of wafer inspection results requires proper image analysis methods.

Demcon Focal is specialized in designing the proper inspection hardware and also

designing data analysis software, including deep learning and neural

network combinations for recognition and classification purposes.

• Magnification 5x (0.2x)

• Telecentric on image side

• FOV 22 x 22 mm

• Diff limited

• CD < 0.4 um (NA > 0.5)

• High CD uniformity (< 2%)

• Useable DOF ~ 1 µm

• Distortion < 100 nm (maximum over field)

• Magnification needs to be adjustable using back-focus

• Order of magnitude 10 ppm

• Magnification and focus changes due to short term temperature

change as small as possible

• Note short term temperature change +/- 0.1 degree

• Magnification change and focus change due to pressure change

should be compensated using focus and back-focus only

Wafer fab equipment- LithographyDemcon Focal has the capabilities to design, deliver and qualify one of

the most demanding precision optical assemblies: a lithography lens.

Demcon is using state-of-the-art alignment tooling (Opticentric) and

cleanroom facilities to achieve diffraction limited imaging for a large

field of view. We have designed lithography lenses with high NA and

large field of view that is capable of imaging semiconductor structures

on wafers to produce e.g. processors, LEDs, MEMS, USB memory, etc.

Project specifics

www.demcon.com/focal

Demcon Focal is part of the international Demcon group and is specialized in design, engineering and assembly of bespoke opto-mechatronic (sub-)systems, for high technological markets like semiconductor, bio-medical, life science, aerospace, industrial manufacturing and others. Often these systems are used in applications where accuracy, stability and rapid movement or exploitation in extreme environments is required.

Demcon Focal achieves customized design and engineering in a multidisciplinary approach, entailing optical, vision, data, electronic, software, mechanical and system engineering. Activities include high-level requirement engineering, concept optical design, prototyping, detailed engineering, system integration, manufacturing and testing activities.

Demcon Focal also performs specialized volume production that requires trained engineers, dedicated equipment and a clean environment. We can offer system service and support and we have production facilities available for complex optical modules.

Demcon

Institutenweg 257521 PH EnschedeThe NetherlandsT +31(0)88 115 2000

Delftechpark 232628 XJ DelftThe NetherlandsT +31(0)88 115 2000

Zernikelaan 69747 AA GroningenThe NetherlandsT +31(0)88 115 2000

Nottulner Landweg 90D-48161 Münster-RoxelGermanyT +49 (0)251 980 16 40

25 International BusinessPark #03-60ASingapore 609916T +65 (0)9059 3463

Kanaaldijk 295683 CR BestThe NetherlandsT +31(0)88 115 2400