End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam...
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End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam ALD Research Program, Process Technology Research Group Energy Systems Division.
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Transcript of End-Spoiling of Electrodes from Photonis June, 24 th 2010 Qing Peng, Anil U. Mane, Jeffery W. Elam...
End-Spoiling of Electrodes from Photonis
June, 24th 2010
Qing Peng, Anil U. Mane, Jeffery W. Elam
ALD Research Program, Process Technology Research Group
Energy Systems Division.
SEM of Endspoiling_ one end of 20 um MCP
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MCP NiCrElectrode is 10um into pore
EDX of Endspoiling_ one end
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NiCr NiCr
Ni Al
O Na Si
SEM of Endspoiling_ other end of 20 um MCP
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MCPNiCr
EDX of Endspoiling_ other end of 20 um MCP
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NiCr NiCr
Ni
Al
O
NaSi
Summary
The endspoiling from Photonis is goodThe penetration of NiCr is around 10um
and consistent with theoretical value 10 um if 45 degree angle is used.
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