Piezoresistive cantilevers with an integrated bimorph actuator
Encased Cantilevers for Low-Noise Mass and Force Sensing in Liquids
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Transcript of Encased Cantilevers for Low-Noise Mass and Force Sensing in Liquids
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Dominik Ziegler PhD
Material Science Division, Molecular Foundry, Lawrence Berkeley National Laboratory
ENCASED CANTILEVERS FOR LOW-NOISE FORCE
AND MASS SENSING IN LIQUIDS
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Dominik Ziegler PhD
Material Science Division, Molecular Foundry, Lawrence Berkeley National Laboratory
Quantitative Mass Sensor
Gentle Imaging of
Lipid Bilayers
Encased Cantilevers
Fabrication
High Resolution
Imaging of Mica
Interferometric
Deflection Detection
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TbkQ
TkkF B
i
Bn 4
4
0
VISCOUS DAMPING LIMITS RESOLUTION
ω0≈150 kHz
Q≈200
ω0≈50 kHz
Q≈4
100 m long, 30 m wide
Fn air≈15fN/√Hz
Fn water ≈200fN/√Hz
Force Noise Smallest Measurable Force
High forces deform soft samples and limits resolution
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LET`S GO SCUBA DIVING!
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FABRICATION OF ENCASED CANTILEVERS
-Length of levers can be tuned
-Tip’s sharpness is maintained
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FABRICATION OF ENCASED CANTILEVERS
-Length of levers can be tuned
-Tip’s sharpness is maintained
![Page 7: Encased Cantilevers for Low-Noise Mass and Force Sensing in Liquids](https://reader031.fdocuments.in/reader031/viewer/2022032216/55a6aa3f1a28abe6018b45d0/html5/thumbnails/7.jpg)
ENCASED CANTILEVER IN AIR/WATER
air
water
fair=310.280kHz
fwater=309.71kHz
Qair=210
Qwater=133
Single clean resonance peak.
High Q and high frequency, performance as in air (Fn=12 fN/sqrt(Hz))
-Only small frequency shift (1%) No Added Mass
-Viscous damping of tip (few um) and double sided squeeze film damping
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GENTLE IMAGING OF LIPID BILAYERS
height of supported DPPC
bilayers on mica
softest possible imaging
amplitude modulation
Thicker measured height Less deformation by tip
“Hydra Levers” by AppNano
L = 200 µm, k=0.084N/m f=17 kHzEncased silicon lever (Mikromasch NSC36)
l =110 µm, k = 0.95N/m, f=85kHz
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HIGH-RESOLUTION IMAGING OF MICA IN LIQUID
MICA lattice using amplitude modulation
300mM KCl, 10mM K2HPO4, 5 lines/s
Unmodified commercial instrument
Multimode, Bruker
0.5 nm
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3210
20
15
10
5
0
[nm]
Am
pli
tud
e[m
V]
3210
60
40
20
0
-20
[nm]
Ph
ase
[Deg
]OSCILLATORY HYDRATION FORCE
(WATER STRUCTURE ON MICA)
~4Å
Kobayashi, J. CHEM. PHYS. 138, 184704 (2013)
Phase [
Deg]
Am
plit
ude [
Å]
0.5 nm
Ultra-small amplitude displacement of the last few water layers
single curve no averaging
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QUANTITATIVE MASS SENSING WITH ENCASED CANTILEVERS
Indirect measurement of mass over
surface stress (DC measurement)
Known location of added mass quantitative mass sensor
0
2
4
8
16
30252015105
Time [s]
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mc = 22.88ng ne =1
(biL)4=
1
Ci4
» 0.23
QUANTITATIVE MASS SENSING WITH ENCASED CANTILEVERS
Known location of added mass quantitative mass sensor
Rp = -14.8mHz/fg
250 nm Gold Particles
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Theory Gold Sphere
m=157 fgCantilever Based Mass Sensing
mavg= 168 ± 12 fgTEM Based Estimation
mavg= 175 ± 68 fg
Rp = -14.8mHz/fg
mc = 22.88ng ne =1
(biL)4=
1
Ci4
» 0.23
QUANTITATIVE MASS SENSING WITH ENCASED CANTILEVERS
250 nm Gold Particles
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l =125mm
w = 30mm
h = 2.5mm 317
220
10
0
Q
kHz
mNk
dm = 0.1 fg / Hz » 60MDa / Hz
A=100nm
l = 25mm
w = 5mm
h = 5mm
k =1700N m
w0 =11.0MHz
Q = 4500
Optimized for Mass Sensing
A=100nm
dm = 20zg / Hz »12.5kDa / Hz
Current Cantilever Design
~60 Gold Atoms
Each 0.32 zg
SMALLEST DETECTABLE MASS
Single Very Small Protein
(~100 Carbon-12 Atoms)
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l =125mm
w = 30mm
h = 2.5mm 317
220
10
0
Q
kHz
mNk
dm = 0.1 fg / Hz » 60MDa / Hz
A=100nm
l = 25mm
w = 5mm
h = 5mm
k =1700N m
w0 =11.0MHz
Q = 4500
Optimized for Mass Sensing
A=100nm
dm = 20zg / Hz »12.5kDa / Hz
Current Cantilever Design
~60 Gold Atoms
Each 0.32 zg
SMALLEST DETECTABLE MASS
Single Very Small Protein
(~100 Carbon-12 Atoms)
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INTERFEROMETRIC READOUTDestructive interference if path length difference (δ) between two
beams is
Finesse F= δλ/Δλ
Detect intensity of reflected light
(Single photodiode, high BW 50MHz)
F=δλ/Δλ
k=45N/m
f0=320kHz
Finesse ~3
Position Noise ~6fm/√Hz! (@10.6mW,~770nm)
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Encased cantilevers overcome the problem of
viscous damping in liquids
Compatible with commercial instruments
-Ultra-low force noise in liquids 12 fN/sqrt(Hz)
-Gentle and High-Resolution Imaging
-Water Hydration Layers
-Quantitative Mass Sensor 0.1 fg/sqrt(Hz)
-Interferometric Readout 6 fm/sqrt(Hz)
CONCLUSION
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ACKNOWLEDGEMENTS
National Science Foundation
Cyber-enabled Discovery and Innovation #CBET-
940417
US Department of Energy DOE
#DE-AC02-05CH11231
www.foundry.lbl.gov www.scubaprobe.com www.lbl.gov
Paul D Ashby
Technical Support
Ed Wong, Virginia Altoe
Modeling of Squeeze Film Damping
Dara Badri (UC Berkeley)
Aram Klaassen (University of Twente, The Netherlands)
Frieder Muegele (University of Twente, The Netherlands)
John Sader (University of Melbourne, Australia)
For more information please contact Dominik Ziegler PhD, [email protected], +1 510 599 4444
Interferometric Readout
Adrian Nievergelt (EPFL, Switzerland)
Preparation of Lipid Bilayers
David Chmielewski (UC Berkeley)