Electronic Autocollimators for Precise Angle...

TriAngle®

Electronic Autocollimators forPrecise Angle Measurement

Angle Measurement Solutions

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PageContents

Highly Flexible Angle Measurement Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5

TriAngle® - The Most Versatile Electronic Autocollimator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5

TriAngle® UltraSpec - Ultra Precision Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6

TriAngle® HiSpeed - High Speed Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

TriAngle® LASER - Measures at Low Reflectivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9

Customized TriAngle® Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10

The Complete Software Package for Angle Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Software Features und Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12

Easy Integration of Customized Measurement Solutions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

OptiAngle® Programming Interface (API) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Typical TriAngle® Measurement Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Straightness Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14

Wedge Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

Calibration of Index Tables and Rotary Encoders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16

First Electronic Autocollimator Measuring Angles in all Three Dimensions

Simultaneously: PITCH, YAW and ROLL ANGLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17

Specifications TriAngle® 3D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19

Flexibility for Measurements in the Field 19

Specification TriAngle® Mobile Display Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20

Order Information TriAngle® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20

Delivery Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20

Measurement Capabilities and Recommendations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21

TriAngle® Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21

Opto-mechanical Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21

Order Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23

TriAngle® Mobile 19

Measurement Applications 13

Accessories 21

OptiAngle® Software for TriAngle® 11

TriAngle® Angle Measurement Solutions 3

Operating Principle 4

TriAngle® Product Range 5

Technical Data and Order Information 20

TriAngle® 3D 17

The TriAngle® electronic autocollimatorsare non-contact optical test tools for thehigh-precision measurement of angular

displacements of specular reflective sur-faces and the accurate angular align-ment of optical or mechanical parts.

TriAngle® autocollimators are available infour application specific variants:


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TriAngle®


TriAngle® the most versatile electronic autocollimator for standard applications

TriAngle® UltraSpecenhanced sensor technology for highest resolution and ultra precise

measurement results

TriAngle® HiSpeed for high speed angular measurements

TriAngle® LASER for small or low-reflectivity samples or long distance measurements

• Straightness measurement• Flatness measurement• Squareness measurement

User defined measurement procedurescan be added into the standard softwareby a plug-in mechanism. In addition thereis an open programming interface for theintegration of the TriAngle® measurementfunctions into other applications.

Upon request, TRIOPTICS offers customizedTriAngle® instruments, as for example

• Increased measurement ranges • Larger apertures• Vacuum compatibility• Focusing objectives• Customized illumination• Customized sensor technology

The operating principle of an autocollima-tor combines the functions of a collimatorand a telescope in a single instrument.

The collimator part pro-jects an illuminated ret-icle to infinity and thetelescope part re-ceives this image backafter reflection at amirror surface. Both op-tical paths are separat-ed by a beam splitter.The received image isbrought to the focus ofthe objective lens inwhich the CCD of anelectronic camera orsome other posit ionsensor is located.

TriAngle® autocollimators have a versatilemodular design which allows the fitting ofa large selection of objective tubes, differ-ent sensors, reticles and light sources. Withobjective tubes of different focal lengthsand apertures the optimum measurementsolution regarding angle resolution andmeasurement range is easily found. Thedigital camera interface enables the useof a notebook or desktop PC, or a mobiletouch-screen display unit for measure-ments in the field.

The comprehensive OptiAngle® softwarerecords, analyzes, stores and reports themeasurement results for later reference. A comprehensive set of predefined mea-surement programs cover all standard ap-plications. It includes

• Absolute and relative angle measure-ments of mirror surfaces

• Absolute and relative angle measure-ments of collimated sources

• Wedge angle measurement• 90° prism errors• 45° prism errors• Wobble (run-out) measurement of rotat-ing samples


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Autocollimator Operating Principle

Operating Principle

Illumination

Objective Lens

Object Reticle

ImagePlane

MirrorSurface

Beam Splitter

Focal Length

2α

α

d

f

In this arrangement the illuminated reticleand the CCD plane are conjugate. Whenthe collimated beam falls on a mirrorwhich is almost perpendicular to thebeam axis, the crosshair image will be lo-cated somewhat near the center of theCCD. If the reflector is now tilted by an an-gle α the reflected image will be laterallydisplaced by the amount d with respectto the original position. This displacementd is a function of the tilt angle α and thefocal length f of the objective lens: d = 2 × α × f. When d is measured on theCCD the tilt angle α of the mirror can becalculated by

This displacement is linear with the tilt an-gle (small angles assumed) and the mea-surement result is independent from the in-strument’s distance to the mirror.

Highly Flexible Angle Measurement Solu-tions

The TriAngle® series of electronic autocolli-mators is designed for outstanding perfor-mance and flexibility. All TriAngle® instru-ments share the same form factor, de-pending on the chosen focal length, i.e.objective tube, for the required measure-ment resolution. The comprehensive andcomfortable OptiAngle® software commu-nicates with all TriAngle® autocollimators.

TriAngle® - The Most Versatile ElectronicAutocollimator

The TriAngle® electronic autocollimator isthe standard and most universal instru-ment of the TriAngle® series offering amaximum set of measurement functionsincluding various wedge and prism mea-surements. It is equipped with a highbrightness LED light source and a high-res-olution CCD sensor. The compatibility with

objective tubes of dif-ferent focal lengthsleads to a variablemeasuring range andaccuracy per for-mance between 2.5and 0.2 arcsec de-pending on the focallength.

The TriAngle® autocolli-mators are ideally suit-ed for standard anglemeasurement andalignment purposes inthe laboratory, as wellas for the productionmeasurement of prismsand wedges.

Operating Principle

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General setup of a TriAngle® autocollimator

TriAngle® Product Range

α =d

2f

Illumination

Filter

Condensor

Diffusor

Object Reticle

Digital Camera CCD Sensor Beam Splitter

Objective Lens

Target Illumination

While a high power green LED of 530 nmcenter wavelength is the standard lightsource, other illumination types (NIR-LED,Laser, halogene white light source) areavailable for the adaption to specificsample characteristics.

Sensor

TriAngle® series autocoll imators areequipped with modern high resolutionCCD camera sensors offering a maximumof image quality and signal to noise ratio.They achieve a standard measuring rateof 30 measurements per second. Highermeasurement rates are available upon re-quest. The following specification for fieldof view is given for standard sensor sizes.Please ask for other sensor sizes, depend-ing on your requirements for field of viewand angle resolution.

TriAngle® Specification

TriAngle® UltraSpec - Ultra Precision AngleMeasurement

The electronic autocollimators of the TriAn-gle® UltraSpec Series represent high-preci-sion angle measurement systems for ex-tremely high demands on angle resolutionand measuring accuracy.

The application suite further includesstraightness and flatness measurementtools for the mechanical engineering. The TriAngle® electronic autocollimator isavailable with 8 different objective tubeswith focal lengths ranging from 100 mm to1000 mm.


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Objective Tube

Identifier

Effective

Focal Length

(mm)

Clear

Aperture

(mm)

TA 100-38 100 30

TA 150-38 150 30

TA 200-38 200 30

TA 300-38 300 30

TA 300-57 300 50

TA 500-57 500 50

TA 1000-115 1000 100

TA 1000-140 1000 125

Order Code Type Field of View

hor. (x) × vert. (y)

(arcsec)

Resolution

(arcsec)

Repeatability

(arcsec)

Accuracy

(arcsec)

3-103-061 TA 100-38 6630 × 49200.1 0.3

2.5

3-103-062 TA 150-38 4420 × 3280 1.7

3-103-063 TA 200-38 3310 × 2460

0.01

0.2 1.3

3-103-064 TA 300-382210 × 1640 0.1 0.75

3-103-065 TA 300-57

3-103-066 TA 500-57 1320 × 980 0.05 0.4

3-103-068 TA 1000-115660 × 490 0.025 0.2

3-103-069 TA 1000-140

LED illumination

Peak Wavelength 530 nm

Spectral Half-width 35 nm

Objective Tube Selection Guide

Applications include:

• Calibration laboratories• Semiconductor equipment manufactur-ing

• High-energy physics• Laser physics• Space science

Therefore, TriAngle® UltraSpec autocollima-tors are used for high-end measuring, test-ing and adjustment processes where high-

est precision and reliability in angle deter-mination are required, for example:

• Adjustment and verification of the straightness of linear stages

• Run-out measurement of rotary tables• Measurement of large-area surface flat-ness

• Alignment of optical components• Alignment of machines and equipment• Stability studies


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TriAngle® UltraSpec

TriAngle® UltraSpec Application

TriAngle® HiSpeed - High Speed AngleMeasurement

The TriAngle® HiSpeed series of autocolli-mators take advantage of a high band-width position sensitive photo detector forangle measurement rates up to 10 kHz.The analog signal output of the angulardata enables the closed loop control op-eration for the fast adjustment or angularcontrol operation. The strong laser illumi-nation allows the TriAngle® HiSpeed tomeasure very small and low reflectivity sur-faces.

The employed positionsensitive detector of Tri-Angle® HiSpeed dissi-pates almost no heatand is vacuum compati-ble. For special applica-tions in space scienceand high-energy physics,TRIOPTICS has developeddedicated vacuum com-patible versions of TriAn-gle® HiSpeed, to be usede.g. in thermal vacuumchambers (TVC).

Each autocollimator of the TriAngle® Ultra-Spec series is calibrated with PTB anglestandards and supplied with test certifi-cates and individual calibration curves.Traceability of the measuring results to in-ternational standards of the angle mea-suring variable is consistently ensured.

The mechanically and thermally opti-mized design of the TriAngle® UltraSpec isavailable with the objective focal lengths300 mm and 500 mm and permits preciseand reliable measurements even underdifficult conditions. The optical system ofthe TriAngle® UltraSpec autocollimatorscomprises the superbly corrected objec-tive lens of minimum distortion and a high-resolution digital CCD camera with ex-tremely low sensor noise. The light sourceemploys a stabilized high power LED illumi-nating the newly developed sensor systemfor enhanced angle resolution.

TRIOPTICS offers the TriAngle® UltraSpecautocollimator as a complete measure-ment system including a mobile touch-screen control unit with the user-friendlyOptiAngle® software preinstalled.

TriAngle® UltraSpec Specification


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Vacuum compatible TriAngle® HiSpeed

Order Code 3-109-065 3-109-066

Type TA US 300-57 TA US 500-57

Focal Length 300 mm 500 mm

Measuring range (h × v) (1) 3010" × 2230" 1800" × 1340"

Resolution 0.005"

Clear aperture 45 mm

Measuring accuracy ±0.05" within 10" measuring range

±0.10" within 20" measuring range

±0.25" within the total measuring range

LED wavelength 530 nm, spectral half-width: 35 nm

Measuring rate > 10 measurements / sec

(1)within approx. 2 m measuring distance, diminishing beyond this

TriAngle® LASER - Measures at Low Reflec-tivity

The TriAngle® Laser is equipped with a laserlight source instead of a LED illuminated

reticle and employs a CCD camera forthe angle measurement. It is ideally suitedfor the measurement of small opticalcomponents, surfaces of low reflectivity,or long distance measurements.


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(1) sensors for enlarged field of view available (multiply value by 2.5)(2) within 80% field of view

Order Code Type Field of View(1)

(hor./vert.)

(arcsec)

Resolution

(arcsec)

Linearity(2) (%) Bandwidth

(-3dB)

3-107-061 TA HS 100-38 4000 1.0

0.8 10 kHz

3-107-062 TA HS 150-38 2660 0.6

3-107-063 TA HS 200-38 2000 0.5

3-107-064 TA HS 300-38

1330 0.33-107-065 TA HS 300-57

3-107-066 TA HS 500-57 800 0.2

3-107-068 TA HS 1000-115 400 0.1

3-107-069 TA HS 1000-140

Laser illumination

Wavelength: 635 nm

Output Power: < 2 mW

TriAngle® HiSpeed Specification

Order Code Type Field of Viewhor. (x) × vert. (y)(arcsec)

Resolution(arcsec)

Repeatability

(arcsec)

Accuracy

(arcsec)

3-108-061 TA L 100-38 6630 × 49200,5 0.8

2.5

3-108-062 TA L 150-38 4420 × 3280 1.7

3-108-063 TA L 200-38 3310 × 2460

0,05

0.4 1.3

3-108-064 TA L 300-38

2210 × 1640 0.25 0.753-108-065 TA L 300-57

3-108-066 TA L 500-57 1320 × 980 0.15 0.4

3-108-068 TA L 1000-115

660 × 490 0.08 0.23-108-069 TA L 1000-140

TriAngle® LASER Specification

measuring range without compromisingthe measurement accuracy and resolu-tion. It comes with a specially calibratedlarge field sensor and optimized imagingoptics.

Customized TriAngle® Solutions

TriAngle® LF with large field of view

The TriAngle® LF autocollimator has beendesigned for applications requiring a large


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Laser illumination

Wavelength: 635 nm

Output Power: < 2 mW

TriAngle® LF Specification

Order Code 3-103-061-LF

Type TA LF 100-38

Focal Length 100 mm

Measuring range (h × v) (1) 4° × 4°

Resolution 0.08"

Clear aperture 30 mm

Measuring accuracy ±1.0" within 80% measuring range


Measuring rate > 10 measurements / sec.

Order Code Type Focal Length (mm) Focus Range (mm)

3-104-061 TA F 100-38±10 100 ±10

3-104-062 TA F 150-38±10 150 ±10

3-104-065 TA F 300-57±25 300 ±25

3-104-066 TA F 500-57±50 500 ±50

3-104-068 TA F 1000-115±50 1000 ±50

3-104-069 TA F 1000-140±50 1000 ±50

TriAngle® F Order Information

TriAngle® F

The TriAngle® F series is based on the stan-dard TriAngle® design but employs focus-

ing objective tubes for the measurementof slightly spherical mirror surfaces or someother systems with optical power.

TriAngle® NIR

The TriAngle® NIR autocoll imators arebased on the standard TriAngle® designbut employ NIR LED illumination for the ret-icle. The NIR autocollimators are common-ly used to measure surfaces with highly ef-ficient anti-reflection coating in the visiblespectrum or for applications which requirethe measurement at the design wave-length in the NIR.

Available Wavelengths: 740 nm, 780 nm,850 nm, 910 nm, 940 nm, 950 nm.

Order Code: 3-105-061...069

The Complete Software Package for AngleMeasurement

The software OptiAngle® is a powerful toolcovering all aspects of accurate anglemeasurement with the TriAngle® electronicautocollimators in terms of measurement,control and analysis of the angular data.The well organized and modern menu-guided user interface assists even the in-experienced operator to perform accu-rate measurements and to obtain repeat-able results. A large set of pre-definedstandard measurement applications is in-tegrated into OptiAngle® which cover all

OptiAngle® Software

11Main screen of OptiAngle® Software

OptiAngle® Softwarefor TriAngle®

• Optional full screen camera window (vi-sual alignment mode)

• User defined graphical scales or indica-tors inside the camera window

• Simultaneous measurement with multi-ple (up to 12) autocollimators

• Simultaneous measurement of multiple surface reflections (up to 12)

• Comprehensive data reporting functions• ASCII (CSV) data export • Selectable angle units for screen displayand measurement certificate

• Software remote control by host com-puter via RS232 interface

• Programming interface by MS OLE Au-tomation or via DLL

• Plug-in mechanism for customized mea-surement programs

• User defined measurement certificate layout

established measurement techniques inoptical and mechanical industry. In addi-tion, customized measurement routinescan be easily developed and embeddedeither by TRIOPTICS or the experiencedend user. All OptiAngle® measurementfunctions can be further used in othercommon applications like MatLab, Lab-View or Visual Basic (Excel).

Software Features und Functions

The TriAngle® software provides many fea-tures to simplify the daily use of TriAngle®

autocollimators whether in the laboratoryor in the production environment.

• Real-time camera display• Numerical and graphical display of measurement data

OptiAngle® SOFTWARE

12TriAngle® software interface with time chart of angle results

• Demo programming examples for Excel,MatLab, LabView, VBA

• Multiple camera interface technology for IEEE 1394 (Firewire), USB, Gigabit Eth-ernet, CameraLink or Analog Video Cameras

• Production mode for batch/lot sample identification and result reporting

Easy Integration of Customized Measure-ment Solutions

The OptiAngle® software allows the inte-gration of customized measurement Plug-Ins with a dedicated user interface forspecialized target applications. Customspecific measurement routines and dis-play functions are quickly implemented totake care of specialized procedures, e.g.in a production environment. The advan-tages are

• User interface adapted to specialized applications

• Increase of throughput• Avoidance of faulty operations in pro-duction processes

• Integration of external hardware and software possible

• Adaptation to familiar data processing and display

OptiAngle® Programming Interface (API)

In addition to the above Plug-In mecha-nism, the OptiAngle® functions can be em-bedded into a larger measurementframework which then can take controlover the full functionality of OptiAngle®

measurement applications. OptiAngle®

features an open software concept andprogramming interface which allows forthe flexible and easy integration into othersoftware environments. The angle mea-surement functions of TriAngle® autocolli-mators can thus be integrated into almostany existing measurement application. Incontrast to the Plug-In technology the userhimself is enabled to develop the interfac-

ing between the TriAngle® autocollimatorand his governing application.

OptiAngle® functions are executed eitherby sending commands via serial port(RS232) or MS OLE Automation communi-cation, or directly using the DLL basedC++ programming interface (API). Existingsample applications and the comprehen-sive documentation demonstrate the con-trol of TriAngle® autocollimators by Mat-Lab, LabView, VBA, Excel. TRIOPTICS willbe happy to assist the user to integratethe TriAngle® functions into his own appli-cation.

Typical TriAngle® Measurement Applica-tions

The applications of TriAngle® autocollima-tors are mainly related to the detectionand measurement of small angular dis-placements. TRIOPTICS has successfullysupported customers in a wide area ofapplication fields.

• Assembly and adjustment of optical components like mirrors, prisms, win-dows, wedges etc.

Measurement Applications

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TriAngle® modular software concept


Straightness Measurement

The straightness measurement is the dailypractice of manufacturers of linear stages,guides and rails whether in precision me-chanics or machine tools. The travel of amoving carriage is investigated regardingangular motion errors square to the direc-tion of movement, called yaw, pitch androll errors.

A reference mirror mounted to the car-riage is moved with a constant step lengthb along the stage or rail to be measured.For each step the angular output α i of TriAngle® autocollimator is recorded. Thesoftware displays the angular measure-ment data as well as the straightness devi-ation δ in µm units. Motor driver softwaremodules for standard DC- and stepper-motors are included which makes themeasurement of motorized stages veryconvenient.

• Alignment of machinery• Proof of straightness and flatness of ta-bles, rails, linear guides, etc.

• Measurement of yaw, pitch and roll er-rors of linear stages

• Characterization of rotation stages (wobble and run-out measurement)

• Measurement of wedge, prism and polygon angles

• Measurement of parallelism of reflectingsurfaces

• CD/DVD ROM alignment (focusing and tracking)

• Thermal stability investigations• Analyzing the stability or deformation of mechanical or optical constructions

• Vibration analysis• Alignment of astronomical systems• Alignment of components for the beam control in high energy physics

• Inspection of solid state Laser rods• and many more ...

A few prominent examples will be given inthe following sections.


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TriAngle® autocollimator measuring pitch and yaw of a linear stage


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3D Straightness measurement

Wedge Measurement

The inspection of optical wedges with anautocollimator is the fastest and most con-venient way of measuring wedge angles,especially in production environments.When the parallel beam emerging fromthe TriAngle® autocollimator is directedsquare to the wedge it is reflected backfrom both the front and the back surfaceof the wedge. As the result, two crosshairsare displayed on the camera screen, witha distance d depending on the wedgeangle and the refractive index n of the material. The wedge angle δ is given by

Where

d = distance of both surface reflection images

n = refractive index of the wedge material

f = focal length of the auto-collimator

Straightness measurement with TriAngle®

δ (zn)=b tanα iΣn

i=1

δ =d

2nf


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The wedge angle is automatically com-puted by the software according to theabove formula.

The software further includes the programfor the wedge measurement in transmis-sion (double pass) with reflection at a mir-ror behind the wedge. With this procedurethe resolution is doubled by the doublepass configuration.

Calibration of Index Tables and Rotary En-coders

The accuracy of goniometers and rotarymachine axes equipped with angular en-coders is mainly determined by the run-out error of the mechanical axis, manu-facturing errors of the encoder scale and

the eccentricity between axis and en-coder. The absolute calibration of the an-gular readings of goniometers and rotaryencoders is often made by the rosettetechnique. This procedure is based onmeasuring the difference of the anglesbetween two adjacent facets of a preci-sion polygon mirror. By measuring all thefacet angle differences a calibrationcurve is obtained which can be used tocorrect the angular readings of the en-coder for the complete system, whethermachine axis, goniometer or index table.The calculations involved are quite cum-bersome and complex without softwareassistance, but easily done with the dedi-cated software Plug-In of the OptiAngle®

software. The measurements can be per-formed with manual axis rotation or withmotor control if available.

Measuring a wedge angle in reflection mode

TriAngle® 3D

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First Electronic Autocollimator MeasuringAngles in all Three Dimensions Simulta-neously: PITCH, YAW and ROLL ANGLE

The TriAngle® electronic autocollimators repre-sent high-precision angle measurement sys-tems for high demands on angle resolutionand measuring accuracy. The new TriAngle®

3D series combines a proprietary reticle andreflector design with a sophisticated softwareand enables not only the measurement ofthe two classical tilt angles square to thebeam of light (pitch and yaw) but of the rollangle around the beam as well.

TriAngle® 3D autocollimators are used forhigh-end measuring, testing and adjustmentprocesses where high reliability in angle deter-mination are required, for example:

• Adjustment and verification of the straight-ness of linear stages including the roll angle

• Run-out measurement of rotary tables

• Measurement of large-area sur face flatness

• Alignment of optics, machines and equip-ment

• Stability studies

OptiAngle® Plug-In for index table calibration

TriAngle® 3D

The optical system of the TriAngle® 3D auto-collimators comprises an objective lens withminimum distortion and a high-resolution digi-tal CCD camera of low sensor noise. TriAngle®

3D autocollimators are available with objec-tive lenses of focal lengths 150, 200 and 300mm, offering different angle resolutions andfield of view. The mechanically and thermally

TriAngle® 3D

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TriAngle®3D

YawRoll

Pitch

TriAngle® 3D Software showing the measurement results

optimized design permits precise and reliablemeasurements. The integrated light sourceemploys a stabilized high-power LED illumina-tion for enhanced angle resolution at low re-flectivity.

Flexibility for Measurements in the Field

TriAngle® Mobile is a portable, light-weightdisplay unit with large touch-screen inter-face for the mobile operation in the fieldor changing environments. A one-cableinterface between the TriAngle® autocolli-mator and the compact display unit en-sures a maximum flexibility with minimumspace requirements at remote measure-ment locations. The ergonomically adapt-

ed OptiAngle® measurement software ex-cels in ease of use offering the completefunctionality but without requiring mouseor keyboard interaction. However, a full set of standard interfaces(USB, RS232, IEEE1394) allows the easy con-nection of peripherals like a certificateprinter, external USB storage or other in-put/output devices. In addition, all mea-surement functions of the TriAngle® Mobilecan be operated from a remote PC viathe RS232 interface.

TriAngle® 3D / TriAngle® Mobile

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Specifications TriAngle®3D

Description Preliminary Specifications

Focal Length 150 mm, 200 mm, 300 mm

Measuring range (h × v) (arcsec) 2200 × 3200, 1600 × 2400, 1100 × 1600

Resolution Roll up to 1 arcsec

Clear aperture 30 mm, 30 mm, 50 mm

Measuring accuracy (arcsec) 1.7, 1.3, 0.75 (h x v)


Measuring rate > 5 measurements / sec

Order Code

TriAngle® 3D 150-38 3-111-062

TriAngle® 3D 200-38 3-111-063

TriAngle® 3D 300-57 3-111-065

TriAngle® Mobile

Order Information TriAngle®

Type: TA 100-38

Clear Aperture: TA...-38: 30 mmTA...-57: 50 mmTA...-57: 100 mmTA...-57: 125 mm

Delivery Kit

• TriAngle® Electronic Autocollimator• PCI interface card• OptiAngle® Software Package on CD• Protection Dongle• Interface cables• Individual Certificate of Calibration traceable to PTB angle standard

Specification TriAngle® Mobile Display Unit

Technical Data/Order Information

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TriAngle® Mobile Measurement Setup

Order number Specification

98-003-983 Display: 10,4" TFT 800x600

LED-Backlight Touch-screen, VESA

mount

CPU: Intel Atom 1,6 GHz

Passive cooling

RAM: 2GB DDR

Storage: 120 GB HDD

Interface: LAN 2 x 1 GB, USB 2 x 2.0

compliant, Serial 1 x RS232/485,

2 x IEEE1394a

Operating System:

Windows XP Embedded

Technical Data and Order Information

Objective tube diameter

Focal length (mm)

Opto-mechanical Accessories

In addition to the TriAngle® electronic au-tocollimator series, TRIOPTICS offers a largerange of opto-mechanical accessories,often required for certain standard appli-cations.

Accessories

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Measurement Task TriAngle® TriAngle® UltraSpec TriAngle® HiSpeed TriAngle® LASER TriAngle® 3D

Tilt angle

Analyzing more than one optical surface

Wedge angle in reflection

Wedge angle in double pass

45° prism error

90° prism error

Wobble

Vibrations

Low reflective surfaces

High precision measurement

Calibration tasks

Straightness measurement

Flatness measurement

TriAngle® TriAngle® UltraSpec

TriAngle®

HiSpeedTriAngle® LASER TriAngle® 3D

Sensor CCD Camera CCD Camera PSD CCD Camera CCD Camera

Light Source LED LED Laser Laser LED

Interface IEEE 1394 IEEE 1394 Analog, USB IEEE 1394 IEEE 1394

Standard TriAngle® Configurations

TriAngle® TA 300 in 2-axis adjustable holder with referen-ce mirror

Different configurations are available upon request

Measurement Capabilities and Recommendations

Accessories

Accessories

22

45° deflection mirrors D38 and D57 Clamp fixtures D57 and D38

2-axes tilt adjustable Holder with V-prism fixture D115 and D57

2-axes tilt adjustable Holder with V-prism fixture D 57 and D 38

Order Information

Accessories

23

Order Code Type

3-300-001 Clamp fixture D 38 mm


3-300-008 Clamp fixture D 57 mm, with height adjustment


3-300-005 2-axes tilt adjustable Holder with V-prism D 38

3-300-006 2-axes tilt adjustable Holder with V-prism fixture D 57



3-300-021 2-axes tilt mount wit micrometers D 38

3-300-022 2-axes tilt mount wit micrometers D 57

3-300-094 LA 57 Laser Pre-Alignment Device



3-300-025 Iris Diaphragm D38

3-300-091 45° deflection mirror D38



3-400-071 Base mirror, D75, base length 100 mm

98-004-786 View finder autocollimator alignment tool

4-300-51 Calibration wedge in mount, accuracy 1 arcsec

3-400-063 Reference 90° prism, 40×40 mm, accuracy +/-0.5 arcsec

3-400-064 Reference 90° prism, 50×50 mm, accuracy +/-0.5 arcsec

3-400-066 Penta prism, accuracy 5 arcsec

3-111-062 TriAngle®3D 150-38

3-111-063 TriAngle®3D 200-38

3-111-065 TriAngle®3D 300-57

TRIOPTICS GmbH . Optische Instrumente

Hafenstrasse 35-39 . 22880 Wedel / Germany

Phone: +49-4103 -18006 -0

Fax: +49-4103 -18006-20

E-mail: [email protected] . http://www.trioptics.com

© 2012 TRIOPTICS GmbH . All rights reserved

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