EELS - Marks Group · EELS. Electron Energy Loss Spectroscopy (Thanks to Steve Pennycook, Quan Li,...
Transcript of EELS - Marks Group · EELS. Electron Energy Loss Spectroscopy (Thanks to Steve Pennycook, Quan Li,...
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EELS
Electron Energy Loss Spectroscopy
(Thanks to Steve Pennycook, Quan Li, Charlie Lyman, Ondre Krivenak, David Muller, David Bell, Natasha Erdman, Nestor Zaluzec and many others)
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Nestor Zaluzec, ANL
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Nestor Zaluzec, ANL
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Real Life
FEG STEM at UIC
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20/09/2016 12M&M 2010 Portland
LIBRA 200® Cs and Monochromator
Corrected Omega Filter
Condenser(C1, C2 & C3)
FEG
Objective
Projector 1(P1, P2 & P3)
Projector 2(P4, P5 & P6)
Viewing chamber+ Detectors
CS Corrector
Monochromator
dispersive plane (slit)
+ Monochromator
•Dispersion free•Ease of use •30% of intensity at 0.2eV
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Energy Levels and Energy-Loss Spectrum
from Williams and Carter, Transmission Electron Microscopy, Springer, 1996
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Basic formalism• Ignore diffraction effects, not really right but OK for now• Consider inelastic scattering as completely incoherent –
99% correct• Ignore relativistic effects, not correct and over the last
decade they have been shown to be critical• Assume that processes are not dependent upon the
electron energy, good for swift electrons• Consider a simple probability P(dE,q), for dE change in
energy and q wavevector change• Many simplifications if we integrate over all q, collection
angle (experimental variable)
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Basic formalism𝑑𝑑𝑑𝑑 𝐸𝐸,𝑞𝑞,𝑧𝑧
𝑑𝑑𝑧𝑧= ∫ 𝐼𝐼 𝐸𝐸 − 𝐸𝐸′, 𝑞𝑞 − 𝑞𝑞′, 𝑧𝑧 𝑃𝑃 𝑑𝑑𝐸𝐸′,𝑑𝑑𝑞𝑞′ 𝑑𝑑𝐸𝐸′𝑑𝑑𝑞𝑞
Simplest case when energies do not overlap leads to a Poisson distribution solution:
𝐼𝐼 𝐸𝐸, 𝑞𝑞, 𝑡𝑡 = exp − 𝑡𝑡𝜆𝜆𝛿𝛿(𝐸𝐸) + 𝑡𝑡𝑃𝑃 𝑑𝑑𝐸𝐸, 𝑞𝑞 exp − 𝑡𝑡
𝜆𝜆𝛿𝛿 𝐸𝐸 − 𝑑𝑑𝐸𝐸 + ⋯
𝐼𝐼 𝐸𝐸 − 𝑛𝑛𝑑𝑑𝐸𝐸,𝑛𝑛𝑞𝑞, 𝑡𝑡 = ( 1𝑛𝑛!
)𝑡𝑡𝑛𝑛𝑃𝑃𝑛𝑛 𝑑𝑑𝐸𝐸, 𝑞𝑞 exp(−𝑡𝑡/𝜆𝜆)
1/𝜆𝜆 = ∫𝑃𝑃 𝑑𝑑𝐸𝐸, 𝑞𝑞 𝑑𝑑𝐸𝐸𝑑𝑑𝑞𝑞))We call λ the mean free path. Note that the zero-loss peak has an intensity of exp(-t/λ), so if we divide by this we get tP(dE,q) for single scattering
With multiple scattering the result is slightly more complicated, but one can do a log deconvolution to clean up the data
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Transmission Electron Microscopy by David B. Williams and C. Barry Carter, Plenum Press, New York, 1996.
Plasmon PeaksAl specimen
Thin sample Thick sample
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Al → free electron metal Fe → Transition metal
NiO – ZrO2 interfaceNiO
ZrO2
6 nm interface
1b
Transmission Electron Microscopy, David B. Williams & C. Barry Carter, Plenum Press, New York, 1996.
Plasmon peak
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Low loss spectrum from Al and Al compounds→ The differences in the spectra are due to differences in bonding
Transmission Electron Microscopy by David B. Williams and C. Barry Carter, Plenum Press, New York, 1996.
Energy-loss (eV) →
Spec
tra v
ertic
ally
dis
plac
ed fo
r eas
y vi
sibi
lity
→
Inter- and Intra Band Transitions
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Intraband transition characteristic of
Polystyrene
Band gap differences manifesting itself in the low loss region of the EELS
spectrum
Low loss region before Plasmon peak1a
Transmission Electron Microscopy, David B. Williams & C. Barry Carter, Plenum Press, New York, 1996.
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Core LossesCo
unts
x 1
0^3
eV
0
20
40
60
80
100
Coun
ts x
10^
3
700 800 900 1000 1100eV
bkgdSpectrum
Bkgd
Edge
L2
L3
L1
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Transmission Electron Microscopy by David B. Williams and C. Barry Carter, Plenum Press, New York, 1996.
Idealized edgeEdge superimposed on plural scattering
ELNES
Bonding Effects
Diffraction Effects from atoms surrounding the ionized atom
EXELFS
Thick Specimen → Combination of ionization and plasmon losses
Ionization loss
Plasmon loss
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The L edge of transition metals
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Chemical bonding
Cu and CuO
3d10
3p6
3s2
2p6
2s2
1s2920 940 960 980
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Diamond, graphite and fullerene all consist of only carbon. All of these specimens have absorption peaks around 284 eV in EELS corresponding to the existence of carbon atoms. From the fine structure of the absorption peak, the difference in bonding state and local electronic state can be detected. The sharp peak at absorption edge corresponds to the excitation of carbon K-shell electron (1s electron) to empty anti-bonding pi-orbital. It is not observed for diamond, because of no pi-electron in it.
eels.kuicr.kyoto-u.ac.jp/eels.en.html
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Sliding on NFC
Is low friction associated with π-bond formation?
In-situ result: Yes
J.C. Sanchez-Lopez et al., Surf. Coat. Tech. 163, 444 (2003)Merkle et al, Carbon, in press
Sliding Region
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FEI monochromator
(Tiejmeier et al.)
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Rez,2004:
Additional fine structure seen with monochromation
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Monochromator / Energy-Filter Performance
FWHM=600 meV
No Monochromator @ 200KV
FWHM= 81 meV
Monochromator 1um Slit @ 200KV
FWHM=62 meV
Monochromator 1um Slit @ 80KV
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Schematic of the Nion high resolution monochromator
Full description in: Krivanek et al., Phil. Trans. R. Soc. A 367 (2009) 3683.
incoming beam
energy-dispersed beam
monochromated beam
un-dispersed outgoing beam
Energy dispersion at slit is variable from ~ 2 µm/eV to ~ 200 µm/eV
EELS 1
EELS 2
The Nion monochromator is equivalent to 2 parallel EEL spectrometers arranged back-to back, with an energy-selecting slit in the mid-plane, plus (next slide):
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More recent zero loss peaks
MC in final position, stabilization schemes not yet connected up.
Stabilization scheme 1 connected, but not making much difference: short exposure time is needed to avoid broadening the ZLP.
The instability is due to elements outside the stabilization scheme, e.g. the quadrupoles of the MC or the quads of the EELS. The probe on the sample does not jitter, and this points to the EELS as the source of the problem.
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Stainless steel specimen
EELS spectra
Transmission Electron Microscopy by David B. Williams and C. Barry Carter, Plenum Press, New York, 1996.
TiNTiC
Ti L2,3
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No visible Grain Boundary
2.761 Å
Fourier filtered image
Dislocation structures at the Grain boundary
coun
ts
eV
10000
11000
12000
13000
14000
15000
16000
17000
18000
19000
coun
ts
1850 1900 1950 2000 2050 2100 2150 2200 2250eV
coun
ts
eV
11000
12000
13000
14000
15000
16000
17000
18000
19000
20000
coun
ts
1850 1900 1950 2000 2050 2100 2150 2200 2250eV
Si peak at 1839 eV Sr L2,3 peaks
Grain Boundary
Grain
eV1900 2000
EELS
2100 2200
~8º TILT BOUNDARY IN THE SrTiO3 POLYCRYSTAL
GB23x4
MX23x4
Dist 5 nm
VG microscope
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Single BxS1-xTO nanocubes EELS
7 nanocubes are detected as EELS, and the Ba/O=0.16-0.19Ti/O=0.33-0.36, X average value is close is 0.5.
Relative quantification:Elem. Atomic ratio (/)Ti 0.33 ± 0.046O 1.00 ± 0.000Ba 0.15 ± 0.022
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Three-window method
• W3 / (W1 +W2) = Elemental map
Window 1 Window 2 Window 3
Elemental mapping
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Multilayer coating
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Carbon Nanotube
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Electron Microscopy Methods for the Characterization of Nanomaterials (Example: Vanadium Oxide Nanotubes)
SEM: characterization of tubularmorphology
Cross-sections of VOx nanotubes: TEM and elemental maps obtained by electron spectroscopic imaging
V map C map
TEM: characterization of the wall structure
EELS: composition
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Column-by-column EELS?
Dynamical effectsBeam broadening
LocalizationInterpretation
Scanned Incident Probe
Specimen
ADF
PrismEELS
IBF = 1-ADF
Column by column image
Column by column EELS?
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Atomic resolution chemical analysis– Edge resolution test on CoSi2/Si(111) interface
– VG Microscopes HB501UX, 100 kV, ~ 2.2 Å probe
-0.2
0
0.2
0.4
0.6
0.8
1
1.2
0 1 2 3 4 5 6 7 8L-
edge
inte
nsity
(% o
f bul
k)Probe position by atomic plane
CoSi2
Si
TheoryExperiment
760 770 780 790 800 810
Coun
ts (a
rbitr
ary
units
)
Energy (eV)
1
2
3
4
5
6
7
Browning, Chisholm, Pennycook, Nature 1993
2.7 Å
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820 850 880
Inte
nsity
Energy (eV)
5 Å
La M4,5
La-doped CaTiO3
EELSSpectrometer
Annular Detector
ScannedProbe
I ∝Z2
Single Atom SpectroscopyM. Varela, et al., Phys. Rev. Lett. 92 (2004) 095502
EELS ~ XAS with atomic resolution and sensitivity to 1 atom~ STM but below the surface
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An example
D. A. Muller, Nature 399, 58 (1999)
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Atomic resolution EELS and EDX
Simultaneously acquired EELS and EDS maps from a LaFeO3/SrTiO3 interface. Principal component analysis was used to remove random noise. Data acquired in aJEOL JEM-ARM200F at 200 kV, courtesy of E. Okunishi (JEOL) and M. Varela (ORNL). Sample courtesy of Jacobo Santamaria's group (Complutense University, Spain).
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0.5 nm
Annular BrightField (ABF)
HAADF
EELS SI
Ca3Co4O9(110)
CaCoO
Data courtesy of Dr. Robert Klie, University of Illinois at Chicago
Atomic resolution Imaging and EELS map with High Energy Resolution
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survey
2 Å
ADF
N-KC-KSi-L
NSi
Atom by atom spectroscopy
Zhou, W., Lee, J., Nanda, J., Pantelides, S. T., Pennycook, S. J., & Idrobo, J.-C. (2012). Atomically localized plasmon enhancement in monolayer graphene. Nature nanotechnology, 7(3), 161–165.
Materials Science and Engineering and Scientific User Facilities Divisions
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Si-C3
Si-C4
Some 3d states in Si-C4 structure are missing!
Bonding of single Si atoms in the graphene lattice
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