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EE695K VLSI Interconnect
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EE695K: Modeling and Optimizationof High Performance Interconnect
Instructor: Cheng-Kok KohEmail: [email protected]: MSEE 220Telephone: 496-3683Office Hours: Wed, Fri: 10:30 - 12 am
or by appointments
Grading Policy
• Homework 20%• Mid-Term Exam 30%• Project 50%• Your final grade will depend on the total of the
three components• You get an A if your score ≥ 90.• Students caught engaging in an academically
dishonest practice will receive a failing grade forthe course. University policy on academicdishonesty will be followed strictly.
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Course Requirements
• Unofficial Prerequisites– EE559 MOS VLSI Design– EE608 Computational Models and Methods
• They will help your appreciation of the materials inthis course
References
• Circuits, Interconnects, and Packaging for VLSI,H. Bakoglu, Addison Wesley
• Cong et al., Performance Optimization of VLSIInterconnect Layout, Integration, the VLSI Journal 21(1996) 1--94.
• Selected research papers from TCAD, TVLSI, andmajor CAD conferences such as DAC and ICCAD
• Digital Integrated Circuits: A Design Perspective,J. Rabaey, Prentice Hall
• Principles of CMOS VLSI Design: A SystemsPerspective, 2nd Ed.,N. H. E. Weste and K. Eshraghian, Addison Wesley
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Related VLSI CAD Conferences and Journals
• ACM IEEE Design Automation Conference (DAC)• International Conference on Computer Aided Design(ICCAD)• IEEE International Symposium on Circuits and Systems
(ISCAS)• Design, Automation and Test in Europe (DATE)• Asia and South Pacific Design Automation Conference (ASP-
DAC)• IEEE Transactions on CAD of Circuits and systems (T-CAD)• ACM Trans. on Design Automation of Electronic Systems
(TODAES)• Integration: The VLSI Journal• IEEE Transactions on Circuits and Systems (T-CAS)• IEEE Trans. on VLSI Systems (T-VLSI)
Course Outline
• Lecture 1: Overview and Introduction: Trends of VLSIInterconnect, Challenges of Interconnect Design
• Lecture 2: Modeling of VLSI Interconnects: Interconnectas R(L)C Tree/Networks, Elmore Delay Model,Moment Computation, Asymptotic Waveform,Evaluation, Pade Via Lanczos, Pole Analysis,Transmission Line
• Lecture 3: Modeling of VLSI Devices• Lecture 4*: Parasitic Extraction• Lecture 5: Timing-Driven Placement: Delay
budgeting, Net-based timing-driven placement, Path-based Timing-Driven Placement
• Lecture 6: Device Optimization: Device Sizing, BufferInsertion, Transistor Ordering
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Course Outline (Continued)
• Lecture 7: Interconnect Topology Optimization: forWirelength Minimization, for Pathlength Minimization,for Delay Minimization
• Lecture 8: Interconnect Sizing: Local RefinementBased, Dynamic Programming-Based, SensitivityBased, Mathematical Programming, TerminizationOptimization
• Lecture 9: Simultaneous Topology Optimization, BufferInsertion, Buffer and Wire Sizing
• Lecture 10: Clock Network Design: Zero-Skew,Bounded-Skew, Buffer and Wire Optimization, Non-Tree routing, Clock Schedule
• Lecture 11*: Noise Modeling, Control, and Avoidance
Class Project
• Develop a CAD tool to perform repeater planningduring floorplanning
• C++ is the preferred programming language• Grading policy for class project:
– 40% based on presentation (to be held in the last week ofclass)
– 60% based on write-up (to be turned in on the last day ofsemester)
• Like a conference submission• Evaluation will be based on technical merits, clarity of
presentation
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Overview
• Moore’s Law• CMOS scaling theory• Interconnect performance implied by NTRS’97• Need for a new design paradigm
Pad Metal1 Via Metal2
I/OData Path
ROM/
RAM
PLA
A/DConverter
Randomlogic
Basic Components In VLSI Circuits
• Devices– Transistors– Logic gates and cells– Function blocks
• Interconnects– Local signals– Global signals– Clock signals– Power/ground busses
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Storageelement
CombinationalLogic
Clock Period ≥ td-gates + td-interconnects + tskew + tsu + tds
td-gates = gate delay in comb. logic
td-interconnects = interconnect delay in comb. logic
tskew = clock skew
tsu = set-up time
tds = delay within storage elements
Interconnectdelay
Determining Factors of System Performance
Single-Phase Edge-Triggered Clocking
• Storage elements: edge-triggered flip-flops, edge-triggered TSPC registers
CLR1 R2D1 Q1 D2 Q2
pFFt
CLKCLKskew ttt −= '
setupt
intdevicelogic ttt +=
CLK 'CLK
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Maximum Clock Frequency
skewsetuplogicpFFcycle ttttT −++> max,max,max,min,
skewtD2
Q1
D1
CLK
CLK’
cycleT
setupt
setupt holdt
logict
Make tskew positive to increase clock frequencyMinimum clock period determined by maximum delay between latches
pFFt
Capturing the Correct Data
skewlogicpFFhold tttt −+< min,min,max,
skewtD2
previous state
Q1
D1
CLK
CLK’
cycleT
setupt
setupt holdt
logict
pFFt
holdt
Maximum positive clock skew determined by minimum delay between latches
max,holdwidthclk tt >−
(to avoid race conditions)
(to guarantee data is captured)
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Interconnect-Driven Design
Importance of VLSI Interconnect Design
• Technology Trends:– Deep sub-micron design: < 0.25-0.18 micron CMOS
technology– High-Speed: 500 MHz to 1 GHz
• Impact on VLSI System Design– Interconnect delay becomes the dominating factor in system
performance• Consumes 50%-70% clock cycle
– Distributed nature of interconnects becomes significant• Becomes distributed RCL circuits or lossy transmission lines.
Moore’s Law
• The min. transistor feature size decreases by 0.7Xevery three years (Electronics Magazine, Vol. 38,April 1965)
• True in the past 30 years!
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Evolution in Complexity
Evolution in Transistor Count
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Evolution in Performance
National Technology Roadmap forSemiconductor (NTRS’97)
Technology (um) 0.25 0.18 0.15 0.13 0.10 0.07Year 1997 1999 2001 2003 2006 2009
# transistors 11M 21M 40M 76M 200M 520MOn-Chip Clock (MHz) 750 1200 1400 1600 2000 2500
Area (mm2) 300 340 385 430 520 620Wiring Levels 6 6-7 7 7 7-8 8-9
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Parameter Scaling FactorDimensions (W, L, tgox, Xj) 1/S
Substrate doping (NSUB) SVoltages (VDD, VTN, VTP) 1/S
1/S
1/S
1
1/SPower-dissipation per gate (P=IV) 1/S2
1/S3
Area per device (A=WL) 1/S2
Power-dissipation density (P/A) 1
))V(Vte
LW
(I deviceper Current 2TDD
gox
oxDS −∝
))V(VtWLe(C ecapacitanc Gate 2
TDDgox
oxg −=
)IV
(R resistance-on TransistorDS
DDtr ∝
)CRI
VC(t delay date Intrinsic gtr
av
g =∆=
t )(P gateper product delay-Power ×
Parameter Scaling FactorDimensions (W, L, tgox, Xj) 1/S
Substrate doping (NSUB) SVoltages (VDD, VTN, VTP) 1/S
1/S
1/S
1
1/SPower-dissipation per gate (P=IV) 1/S2
1/S3
Area per device (A=WL) 1/S2
Power-dissipation density (P/A) 1
))V(Vte
LW
(I deviceper Current 2TDD
gox
oxDS −∝
))V(VtWLe(C ecapacitanc Gate 2
TDDgox
oxg −=
)IV
(R resistance-on TransistorDS
DDtr ∝
)CRI
VC(t delay date Intrinsic gtr
av
g =∆=
t )(P gateper product delay-Power ×
Scaling of MOS Transistor
Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET).The main dimensions that determine device properties are gate oxide thickness
tgox; gate length L, gate width W; and junction depth Xj
Leff
W
S D
toxXj
G
B
Ideal Scaling of MOS Transistors
• All horizontal & vertical dimensions of a transistor (W,L, tox, Xj) are reduced by S
• All voltages (VDD, VTN, VTP) are reduced by S• Substrate doping (Nsub) is increased by S
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( )[ ]( )
−−−−≤−−
≤=
tngsdstngsn
tngsdsosostngsn
tngs
ds
VVVVVßVVV/VVVVß
VVI
2
2
)2/(2
0 (Cut-off)
(Linear in terms of VGS)
(Saturation, independent of VDS)
LW
Cµß oxnn ⋅⋅=Gain Factor
ox
ox
teelectron mobility
Current Through an NMOS Transistor
Geometry of transistor
Technology Scaling Models
• Full Scaling (Constant Electrical Field)– Ideal Model: dimensions and voltages scale togather by the
same factor S
• Fixed Voltage Scaling– Most common model until recently: only dimensions scale,
voltages remain constant
• General Scaling– Most realistic for today’s situation: voltages and dimensions
scale with different factors
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Scaling Relationships for Long channel Devices
Scaling of Short Channel Devices
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Propagation Delay Scaling
20p
50p
100p
200p
500p
1n
0.5 1.0 5.0 10.0
Channel Length : Left (µm)
Gat
e D
elay
: τD
d(se
c/st
age)
F/O = 1R.T. Operation
Present ResultsReported Results
Ref.[4]3.5V
Ref.[5]3.5V
3.3V2.5VRef.[7]
2.5V
VDDScaling
VDD=5V
10p0.1
Basic interconnection parameters
Lint
Wsp Wint
HintTox
Ideal Scaling of VLSI Interconnects
• Cross Sectional dimensions ( Wint, Hint, Wsp, Tox) arereduced by S
• Die Size and global interconnection lengths areincreased by Sc
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(Fringing and mutual capacitances are neglected)
Parameter Scaling FactorCross sectional Dimensions (W int , H int , W sp, t ox) 1/S
S2
1
RC constant per unit length (R int C int ) S2
Local interconnection RC delay (l loc) 1/S
1Die size (D C) SC
Global interconnection length (l int ) SC
S2(SC)2
Transistor line time of flight (l int /v c) SC
)HW1
?(Rintint
intint = lengthunit per Resistance
)lC(R 2locintint delay RC ctioninterconne Local
)t
W(C
ox
intoxint ε= lengthunit per eCapacitanc
)lC(R 2intintint delay RC ctioninterconne Global
Parameter Scaling FactorCross sectional Dimensions (W int , H int , W sp, t ox) 1/S
S2
1
RC constant per unit length (R int C int ) S2
Local interconnection RC delay (l loc) 1/S
1Die size (D C) SC
Global interconnection length (l int ) SC
S2(SC)2
Transistor line time of flight (l int /v c) SC
)HW1
?(Rintint
intint = lengthunit per Resistance
)lC(R 2locintint delay RC ctioninterconne Local
)t
W(C
ox
intoxint ε= lengthunit per eCapacitanc
)lC(R 2intintint delay RC ctioninterconne Global
Scaling of Local and Global Interconnections
Ideal Qussi-Ideal Constant-R GeneralizedScaling Scaling Scaling Scaling
Thickness (Hint) 1/S 1/SH
Width (Wint) 1/S 1/S 1/SW
Separation (Wsp) 1/S 1/S 1/Ssp
Insulator thickness (tox) 1/S 1/Sox
Length (lloc) 1/S 1/S 1/S
Resistance (Rint) S 1 SWSH/S
Capacitance to substrate 1/S 1/S3/2 Sox/SSW
Capacitance between lines 1/S Ssp/SSH
RC delay (T) 1Voltage drop (IR) 1 1/S SWSH/S2
Current density (J) S 1 SWSH/S
Parameter
S1/
2HW /SSS≈
1/S≈
1/S≈1/S≈1/S≈
S1/S1/S1/
S1/S1/
S1/
S1/S
S
S1/≈
Ideal Qussi-Ideal Constant-R GeneralizedScaling Scaling Scaling Scaling
Thickness (Hint) 1/S 1/SH
Width (Wint) 1/S 1/S 1/SW
Separation (Wsp) 1/S 1/S 1/Ssp
Insulator thickness (tox) 1/S 1/Sox
Length (lloc) 1/S 1/S 1/S
Resistance (Rint) S 1 SWSH/S
Capacitance to substrate 1/S 1/S3/2 Sox/SSW
Capacitance between lines 1/S Ssp/SSH
RC delay (T) 1Voltage drop (IR) 1 1/S SWSH/S2
Current density (J) S 1 SWSH/S
Parameter
S1/
2HW /SSS≈
1/S≈
1/S≈1/S≈1/S≈
S1/S1/S1/
S1/S1/
S1/
S1/S
S
S1/≈
not good for packing density
Local Interconnects under Different Scaling Rules
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Ideal Constant Constant GeneralizedScaling Dimension Delay Scaling
Thickness (Hint) 1/S 1 SC 1/SH
Width (Wint) 1/S 1 SC 1/SW
Separation (Wsp) 1/S 1 SC 1/Ssp
Insulator thickness (tox) 1/S 1 SC 1/Sox
Length (lloc) SC SC SC SC
Resistance (Rint) S2SC SC 1/SC SWSHSC
Capacitance (Cint) SC SC SC
RC delay (T) S2(SC)2 (SC)2 1 SWSH(SC)2
Parameter
2≈
CS≈
1/S≈
Ideal Constant Constant GeneralizedScaling Dimension Delay Scaling
Thickness (Hint) 1/S 1 SC 1/SH
Width (Wint) 1/S 1 SC 1/SW
Separation (Wsp) 1/S 1 SC 1/Ssp
Insulator thickness (tox) 1/S 1 SC 1/Sox
Length (lloc) SC SC SC SC
Resistance (Rint) S2SC SC 1/SC SWSHSC
Capacitance (Cint) SC SC SC
RC delay (T) S2(SC)2 (SC)2 1 SWSH(SC)2
Parameter
2≈
CS≈
1/S≈S: Scaling factor for device dimensions.Sc:Scaling factor for chip size
Global Interconnects under Different Scaling Rules
Interconnection time delay and average gate delay versus yearof fabrication for the state-of-art chip fabricated that year.
1970 1980 1990Year
10-7
10-8
10-9
10-10
10-11
DE
LAY
TIM
E (s
ec)
POLY
- Si (
500µ
Ωcm)
W S
i 2 (3
0)W
(10)
Al (3
)
τG
τI
Delay versus Year of Fabrication
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Technology (um) 0.25 0.18 0.15 0.13 0.10 0.07
Res. ρ (uΩ /cm) 3.3 2.2 2.2 2.2 2.2 1.8
Dielectric constant 3.55 2.75 2.25 1.75 1.75 1.5
Min. wire width 0.25 0.18 0.15 0.13 0.10 0.07
Min. wire spacing 0.34 0.24 0.21 0.17 0.14 0.10
Metal aspect ratio 1.8:1 1.8:1 2.0:1 2.1:1 2.4:1 2.7:1
Via aspect ratio 2.2:1 2.2:1 2.4:1 2.5:1 2.7:1 2.9:1
Vdd (V) 2.15 1.65 1.35 1.35 1.05 0.75
Interconnect Parameters from NTRS’97
Cf Ca
Cx
Capacitance Computation
• Capacitance extraction using a 3D field solver(FastCap)
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Derived Interconnect & Device Parameters
Technology (um) 0.25 0.18 0.15 0.13 0.10 0.07
Ca (aF/um) 29.0 21.2 16.2 12.0 14.4 8.56
Cf (aF/um) 41.8 30.2 24.8 18.3 14.1 14.8
2X min.
width &
spacing Cx(aF/um) 71.0 58.3 49.4 42.8 45.3 41.6
Ca (aF/um) 73.5 53.6 40.6 30.0 26.6 19.5
Cf (aF/um) 63.5 47.3 38.4 28.5 28.2 23.6
5X min.
width &
spacing Cx(aF/um) 18.3 16.9 15.4 14.8 16.5 16.7
0.17 0.12 0.11 0.085 0.070 0.042
1.71 1.86 2.26 2.25 2.39 2.42
Buffer input cap. (fF)
Buffer Rd (x10KΩ )
Buffer intrin. delay (ps) 70.5 51.1 48.7 45.8 39.2 21.9
Impact of Interconnect Optimization on FutureTechnology Generations
0.01
0.1
1
10
0.25 0.18 0.15 0.13 0.1 0.07Technology (u m)
Del
ay (n
s)
1mm
2cm DS
2cm BIS
2cm BISWS
Intrinsic gatedelay
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Impact of Interconnect Optimization on FutureTechnology Generations
Technology (um) 0.25 0.18 0.15 0.13 0.10 0.071mm (ns) 0.059 0.049 0.051 0.044 0.052 0.0422cm DS (ns) 2.589 2.48 2.65 2.62 3.73 4.672cm BIS (ns) 1.779 1.55 1.59 1.51 1.74 1.552cm BISWS (ns) 0.895 0.793 0.77 0.7 0.77 0.672
Significance of Coupling Capacitance
0
0.2
0.4
0.6
0.8
1
0.25 0.18 0.15 0.13 0.1 0.07
Technology Generation (um)
Cx/Ctotal
Min. Spacing
2x Min. Spacing
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Coupling Noise
0
0.1
0.2
0.3
0.4
0.25 0.18 0.15 0.13 0.1 0.07
Technology (u m)
Lmax (mm)
10% Vdd min. Spacing
10% Vdd 2x min. Spacing
0.000
0.050
0.100
0.150
0.200
0.250
0.300
0.350
250 180 150 100 70
Technology (nm)
Noi
se (%
Vdd
) a pair of in-phase aggressors
one aggressor
a pair of skewed
Coupling Noise
• Coupling noise from two adjacent aggressors to themiddle victim wire with 2x min. spacing. Rise time is10% of project clock period.
• Coupling noise depends strongly on both spatial andtemporal relations!
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Interconnect Complexity
Technology (um) 0.25 0.18 0.13 0.10 0.07Length (m) 820 1,480 2,840 5,140 10,000
Wiring Levels 6 6-7 7 7-8 8-9Opt. # buffers per net few many
Opt. # wiresizes per net few manyOpt. # buffers per chip 5K 25K 54K 230K 797K
• Performance
• Signal reliability
• Electromigration
Distributions of Wire lengths
1E+00
1E+01
1E+02
1E+03
1E+04
1E+05
1E+06
1E+07
0 10 20 30Length (mm)
Num
ber
of In
terc
onne
cts
0.07 um tech.
0.25 um tech.
Rent's exponent = 0.6Rent's coefficient = 4.0Avg. fanout = 3
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Implications
• Communication is more expensive than computation• Interconnect performance has become the bottleneck
of the overall circuit/system performance• Interconnect modeling and optimization has become
very difficult due to the distributed nature ofinterconnects and their spatial and temporalinteractions
• A new design paradigm/flow is needed to handleinterconnect-dominated designs in the future
System Specification
Functional Design
Logic Design
Circuit Design
X=(AB*CD)+(A+D)+(A(B+C))
Y=(A(B+C))+AC+D+A(BC+D))
VLSI Design Cycle
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Physical Design
Fabrication
Packaging
VLSI Design Cycle (continued)
Transistors/Cells
Interconnection
Interconnection
Transistors/Cells
Conventional Approach New Approach
Interconnect-Driven Design
Need a New Paradigm for VLSI Design
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Program
Data
Data/Object
Program
Conventional Approach New Approach
Data Base Design
Object-oriented design
Paradigm Change in Software Design
Summary
• Technology scaling according to Moore’s Law hasbeen the driving force behind the exponential growthof the semiconductor industry
• Interconnect (esp. global interconnect) performancehas become the bottleneck of the overall systemperformance
• Interconnect modeling and optimization has becomevery important, yet difficult
• A new design paradigm is needed for interconnect-driven (or interconnect-centric) design