EDX Spectroscopy

4
1 EDX Spectroscopy Oxford INCA x-act Elemental identification down to Z=4 (Be) Material identification, contaminate identification, elemental mapping Solar, medical devices, ICs, LEDs, PC boards, MEMs, biological samples, nanoparticles, disk drive, nanostructures, cross-sections

description

EDX Spectroscopy. Oxford INCA x-act Elemental identification down to Z=4 (Be) Material identification, contaminate identification, elemental mapping Solar, medical devices, ICs, LEDs, PC boards, MEMs, biological samples, nanoparticles, disk drive, nanostructures, cross-sections. - PowerPoint PPT Presentation

Transcript of EDX Spectroscopy

Page 1: EDX Spectroscopy

1

EDX Spectroscopy

Oxford INCA x-actElemental

identification down to Z=4 (Be)

Material identification, contaminate identification, elemental mapping

Solar, medical devices, ICs, LEDs, PC boards, MEMs, biological samples, nanoparticles, disk drive, nanostructures, cross-sections

Page 2: EDX Spectroscopy

2

EDX SpectroscopySEM image of LED Ag map of LED

Au map of LED As map of LED

Page 3: EDX Spectroscopy

3

EDX SpectroscopyFe map of LED EDX compilation map of LED

Ga map of LED Al map of LED

Page 4: EDX Spectroscopy

4

EDX spot analysis

Image and spectrum of Solder ball

Elemental detection of elements above Be

Semi Quantitative