ECSEL Symposium 2018 Lèquepey… · markets for the European industry: automotive, medical...
Transcript of ECSEL Symposium 2018 Lèquepey… · markets for the European industry: automotive, medical...
ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018
ECSEL JU SYMPOSIUM, 19/20 JUNE, 2018
| 2ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018
• LETI’S SHORT INTODUCTION
• WHY LETI’s INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?
• WHAT KIND OF SOLUTIONS DID WE DEVELOP IN ECSEL PROJECTS?
WHAT KIND OF STRATEGIES DO WE WANT TO DEVELOP?
WHAT ARE THE BENEFITS FOR MY ORGANISATION AND FOR EUROPE ?
• Example of the success of SOI technology
• Example on Imagers
• CONCLUSION
AGENDA
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Since 1967
64 startups
315 total budget (M€)
2,763 Patents
8,500 m² clean-room space
200-300 mm
1,800 people
350 Industrial Partners
125 European projects
LETI IN NUMBERS :
A RTO FULLY INTEGRATED IN CEA (FRENCH ATOMIC AGENCY)
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Biochemistry
Micro and Nanoelectronics
MEMS (200 & 300mm) NanocharacterizationEmbedded systems
Integration
Photonics(200 & 300mm)
Clinatec
IC Design Center
LETI : WORD-CLASS INFRASTRUCTURES AND PLATFORMS
The LETI is a Laboratory of CEA
(French Atomic Agency)
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CEA, THE MOST INNOVATIVE PUBLIC
RESEARCH ORGANIZATION IN EUROPE
TOP INSTITUTIONS, 2017 International ranking
1Health & Human Services
Laboratories
USA
2Alternative Energies and
Atomic Energy Commission
France
3 Fraunhofer SocietyGermany
4Japan Science & Technology
Agency
Japan
5
National Institute of Advanced
Industrial Science &
Technology
Japan
ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018
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PIONEERING TECHNOLOGY
FOR INDUSTRY
Committed to innovation,
Leti’s teams create differentiating
solutions in miniaturization
and energy-efficient technologies
for its industrial partners.
ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018
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• LETI’S SHORT INTODUCTION
• WHY LETI’s INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?
• WHAT KIND OF SOLUTIONS DID WE DEVELOP IN ECSEL PROJECTS?
WHAT KIND OF STRATEGIES DO WE WANT TO DEVELOP?
WHAT ARE THE BENEFITS FOR MY ORGANISATION AND FOR EUROPE ?
• Example of the success of SOI technology*
• Example on Imagers
• CONCLUSION
AGENDA
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ECSEL PROJECT ARE FULLY IN LINE WITH CEA-LETI MAIN MISSION
LETI IS A RTO WORKING FOR INDUSTRY
LETI IS FILLING THE GAP BETWEEN BASIC
RESEARCH AND INDUSTRYAN EUROPEAN INITIATIVE TO PASS THE
KETS « VALLEY OF DEATH »
A PERFECT MATCH BETWEEN LETI AND ECSEL
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LETI : A STRONG INVOLVEMENT IN ENIAC/ECSEL PROJECTS
ENIAC CALL 2012-2
5 PILOT LINE PROJECTS ACCEPTED.
LETI WAS PARTNER OF ALL OF THEM
A CONTINUOUS PARTICIPATION OF LETI
17 PROJECTS ACCEPTED SINCE 2014
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IMPACT FOR LETI : A STRONG FINANCIAL SUPPORT
JU ECSEL (Eniac-Artemis)
2009-2017 : TOTAL FUNDING OF 156 M€
(without industrial funding for confidential reasons)
PA LOCAL AUTHORITIES (NANO2017)JU
ECSEL
Main Technical topics :
• Substrates
• FDSOI
• Memory
• 3D
• RF SOI
+ VALUE CHAIN THANKS
TO IC DESIGN
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• LETI’S SHORT INTODUCTION
• WHY LETI’S INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?
• WHAT KIND OF SOLUTIONS DID WE DEVELOP IN ECSEL PROJECTS?
WHAT KIND OF STRATEGIES DO WE WANT TO DEVELOP?
WHAT ARE THE BENEFITS FOR MY ORGANISATION AND FOR EUROPE ?
• Example of the success of SOI technology
• Example on Imagers
• CONCLUSION
AGENDA
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Modules
Materials
Small Circuits
Devices Complex Soc
Industrial class
Applications
Full integration Ecosystems
Roadmaps
Courtesy of Dominique Thomas (STMicroelectronics)
WHAT DOES IT TAKE TO ENABLE A SEMICONDUCTOR TECHNOLOGY?
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SOI : 27 YEARS OF HISTORY WITH A CONTINUOUS SUPPORT OF PA AND EUROPE
Supported by Public Authorities and JU ECSEL
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SEQUENCING OF FUNDING PROJECTS LEADING TO FDSOI 12NM TECHNOLOGYFDSOI IN EUROPE
2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023
ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018
Design Platform for 28FD,14FD and 22FDX
28FD Platform and 14FDSOI
PLACES2BE
14FDSOI and 14FD+
Substrate and Platform
14 FD Platform +
28FDSOI Enhancement
14 FD Prototyping
Readiness
Substrate, Techno FDSOI, Design platform
MCU 40nm and PCM/28FDMCU 40nm and memories for 28FD
Embeded memories and 22FDXPRIMEEmbedded
Memory for
Micro Controller
ECOSYSTEM FDSOI
22FDX and 12FDX
RFSOI and 12FDX
Substrats SOI for RF / 22FDX
Enhancement to RF
capabilities
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SOI ecosystem
• Soitec was created in 1992 by 2
researchers fromLeti.
• They pioneered to the development of
PD- and FD-SOI CMOS within a full
ecosystem
RF SOI is a reality
FDSOI is an enabling platform for low-
power and low-cost applications
Through European and National funding,
SOI roadmap will continue to move
ahead !- Places2be
- WayToGoFast
- Ocean12
- Reference
SOI: ECOSYSTEM AND VISIONARY INNOVATION PARTNERSHIPSFDSOI IN EUROPE
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ENIAC THINGS2DO : APPLICATION DOMAINS AND DEMONSTRATORS
X
X
NEWNEW
Courtesy of Patrick Blouet (STMicroelectronics)
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FDSOI, THANKS TO ECSEL, IS BRIDGING THE GAP BETWEEN R&D AND PRODUCTS
2013 2014 2015 2016 2017 2018 2019
BRIDGING THE DEATH VALLEY
PL
AC
ES
2B
E
R&D 2005-2012
ECOSYTEM
MARKETS
technologies
products
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RFSOI: CREATION OF A WORLWIDE INDUSTRIAL STANDARD
High Resistive Base
Trap Rich LayerThin Buried Oxide
Mono-crystal Top Silicon
2009 2010 20112008
R&D
First RFSOI product
Front End
Module
2012 20222020 2021………..
~24mm2 RFSOI in 100% of Front-end
module of Smartphones
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RFSOI: KEEPING THE EUROPEAN LEADERSHIP THANKS TO ECSEL
High Resistive Base
Trap Rich LayerThin Buried Oxide
Mono-crystal Top Silicon
2009 2010 20112008
R&D
Front End
Module
2012 20222020 2021………..
PERFORMANCE: next Gen RFSOIMaterial research, higher frequencies
SCALING: smaller nodes & 300mmTechnology tool box, a
PROTOTYPING: time–to-market reductionNew RF FEM design concepts,
Anticipating of the complexity evolution
and market gowth of RFSOI for
First RFSOI product
RFSOI ECOSYTEM
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ECSEL POLIS CONSORTIUM
POLIS Consortium gathers 21 partners from 7 countries:
- 17 industrial partners,
- 4 institutes or universities.
POLIS is application-driven with end-users in strategic
markets for the European industry: automotive,
medical imaging, scientific instrumentation, high-
volume consumers and robotics.
The project also involves partners along the whole
value chain: material providers, equipment
manufacturers, integrated device manufacturers and
end-users are integrated in the project.
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WHICH APPLICATIONS?
Tera Thermal IR Near Infrared Visible Ultraviolet X-Ray Gamma
Security
Medical
Consumer
Security
Automotive
Industrial
Consumer
Medical
Medical MedicalSecurity
Home appliance
Medical
Automotive
Consumer
Industrial
WP2 WP4 WP5WP3 displays
WP3: 3D-Stacking to cover a wide wavelenght sensitivity
Total cost of the project : ~100M€
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• ENIAC / ECSEL PROGRAM IS A STRATEGIC FRAMEWORK FOR CEA – LETI
• Fully in line with our basic mission : working for Industry and preparing key enabling technologies
• ECSEL IS ALSO THINKING BIG WITH THE POSSIBILITY OF LAUNCHING PROJECT
HAVING A LARGE SIZE (IN TERM OF BUDGET AND NUMBER OF PARTNERS)
• Critical mass in term of manpower to ensure good results and to reach high level of TRL
• Creating coherent and global ecosystems
• Adequate tool to push first R&D results towards industry, with products and job creation
• STRONG INVESTMENT OF PUBLIC AUTHORITIES, EU FUNDING AND PRIVATE FUNDING
BY INDUSTRIAL COMPANIES
• 1€ of EU Budget, 2.9€ of public and private money
• PILOT LINE CONCEPT IS ALSO KEY TO ENSURE THAT FUTURE PRODUCTION WILL BE
MADE IN EUROPE
CONCLUSION
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MICROELECTRONICSEMPOWERING TECHNOLOGICAL REVOLUTIONS
& NOVEL USE-CASES
Conference & Exhibition, July 4-5th, 2018
www.leti-innovation-days.com
GrenobleMaison Minatec
Save the date!
Leti, technology research institute
Commissariat à l’énergie atomique et aux énergies alternatives
Minatec Campus | 17 rue des Martyrs | 38054 Grenoble Cedex | France
www.leti.fr
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CEA LETI: SUPPORTING EUROPEAN INDUSTRIAL ROADMAPS
Boosters
solutions
Technologies
tool box
Digital / FDSOI
FDSOI roadmap Courtesy of SOITEC
New material
investigations
Front End Modules -
RFSOI
FEM roadmap Courtesy of SOITEC