Opto-digital Microscope

DSX500

Discover another dimension

Opto-digital Micr

When You Need to See a New Dimension,

Olympus Provides the Answer

Superb Operating Simplicity Absolute Performance Reliability

The DSX500 opto-digital microscope is the new standard for industrial microscopes.

Born of Olympus leading-edge opto-digital technology, this instrument offers superior

operating simplicity and a high level of reliability. Any operator, regardless of experience,

can use the Olympus DSX500 for a complete inspection and accurate analysis every time.

oscope DSX50003Page 02

The DSX500 Offers a New World of Observation and Analysis

Various Observation Methods with Simple Operation.

Quickly Acquire the Image You Need for Observation

The DSX500 can be used for any industrial microscopic observation method. Also, a new observation method

called MIX, which combines bright-field and dark-field observation. Now pressing a single button changes the

image on screen, and you acquire the high-resolution images expected of high-end optical microscopes.

HDR image

Image Clarity Exceeds the Naked Eye, with Superb High-Defi nition Surface Images

In addition to advanced optics, use of digital capabilities such as High Dynamic Range (HDR) or WiDER

enhances hard-to-see microscopic textures as well as samples prone to glare.

BFBright-field observation. The most common method with optical microscopes.

DFDark-fi eld observation. Illuminate from the side to emphasise imperfec-tions. Best method for identifying defects.

MIX (BF+DF)Use bright-fi eld (BF) and dark-fi eld (DF) observation methods at the same time, a mix of BF ease of observation and DF ease of detection.

DICDifferential Interference Contrast observation. The method to use when inspecting uneven surfaces or nanometre level imperfections.

POSimple polarised light observation is a valuable technique for eliminating glare on substrates such as printed circuit boards or transparent fi lms, allowing surface charac-teristics to be faithfully displayed.

2D image, entirely in focus 3D images at a touch

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Surface Shown Clearly in 3D

View sample surfaces in 3D from any angle, and rely on extended focal image to maintain focus across the

entire surface.

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Panoramic image

Easy-to-Use Customisable Report Function

One click sets the report function in motion to record and create a report of both the images and measurement

results. Reports can be customised for your application to greatly improve efficiency.

Panoramic Images Allow You to Image beyond the Field of View

Panoramic images let you easily capture areas beyond the standard field of view. The images are automati-

cally combined into an on-screen image that shows a very broad field in high definition. 2D, EFI, and 3D can

all be combined.

A Huge Variety of Measurement Capabilities Are Standard on the DSX500,

So All Your Measurement Objectives Are Met

Fundamental industrial microscope measurements are standard features of DSX software, so it is easy to

obtain measurement results. In addition, optional software is available for 3D measurement, caliper measure-

ment and particle analysis.

05Page 04

Profi le measurement

Page 10-11

Page 14-15

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Report outputA click can generate a report

Ease of operation and high reliability come standard with your DSX500 but Super HDR provides it with even

greater imaging performance.

Expand Your DSX’s Capabilities Page 16Option

Three user-selectable modes – Choose the mode that best fits your measurement environment

Superb Opera t ing S imp l i c i t y

07Page 06

Advanced ModeProvides the fl exibility and power advanced users need while retaining an intuitive and simple to use interface.

Operator ModeThis customisable mode is ideal for routine work as all

non-essential menus can be eliminated.

Tutorial ModeEven fi rst-time users can follow the suggestions of the system

and it will create the image that meets their needs.

MEMS Pattern

Operating Simplicity that Guides Operators to

Optimum Output, Regardless of Their Experience

The DSX500 provides a new way to see. No need to look through eyepieces, everything you need is on the

screen. Operate the instrument with touch panel or mouse. What’s more, virtually anyone of any experience

level can use this new system efficiently. The screen guides the operator through the process, from inspection

to measurement to analysis to final report. Short, simple steps. Quick results.

Optical Zoom Gets You Closer to Your Sample

Change the magnification to fit your needs with continuously

variable optical zoom. The DSX500 gives you an optical zoom

up to 13x and a digital zoom all the way to 30x. A single optical

lens can cover the typical magnification range of conventional

optical microscopes. Plus, two lenses can be mounted at

once for an even greater magnification range. When you

switch lenses, DSX500 automatically adjusts magnification so

the viewing area size is maintained.

Three User Modes Meet

Operator Experience Levels and Job Demands

Select Tutorial, Operator or Advanced Mode to best match

the experience of your operator and the job at hand. Operator

Mode can be customised to speed up routine work. The

operator’s ID and password open the application, and auto-

matically sets the scope to the operator’s preferred mode,

observation, analysis, and measurement settings.

Macro Map: Always Know Where You Are

As you adjust the zoom magnification to a higher level the

area you can see at one time is reduced. The system auto-

matically records a full field of view image in a separate macro

window. On this full field image your location on the sample is

noted and updated as you move your sample. In addition, if

you use the panorama function it will be displayed in the macro

window to provide the same convenience on an even larger

area.

Macro map: Always know where you are

New Touch Screen User Interface

In the past, operators had to make complicated adjustments

on their microscopes to achieve their desired results; with the

DSX500, it’s simple. Once the sample is in place, everything

is controlled by touch screen, computer mouse or joystick –

inspection position, focus, zoom, illumination, and choice of

inspection methods. All controls are direct and easily performed.

In addition, auto-focus and auto-gain ensure illumination and

focus are correct every time.

GUI enables direct and comfortable operation

Zoom in on your sample

Best Image – Just choose the image you want from the previews on the screen

HDR – Enables high-defi nition inspection even in areas that have both high and low refl ectance materials

09Page 08

Superb Opera t ing S imp l i c i t y

Anisotropic conductive film (ACF) on the LCD pattern

Operating Simplicity Lets Even an Inexperienced Operator

Observe Samples They Couldn’t Before

The leading-edge digital technology of this microscope lets you see more than any other microscope can.

Before, only experts with years of experience could adjust microscopes to achieve optimum images. The

DSX500 allows any operator to do that with an easy to use interface. Now all it takes is a touch of the finger

to follow a few easy steps to achieve the ideal image for inspection or analysis.

Best Image Function Ensures

Optimum Performance

Now you can operate your system just by choosing the image

that works best for you, and the DSX500 will set the neces-

sary parameters to achieve that image. That ensures the best

possible image, whether looking for defects, uneven surfaces,

or foreign objects. Anyone can operate the system, beginner

or expert, and it can be customised for each operator or

advanced user.

HDR Gives High-Defi nition Visuals that

Go beyond the Human Eye

Samples may appear differently depending on the quality of

material, surface conditions, or illumination methods. The High

Dynamic Range (HDR) function of the DSX500 combines

several images taken at different exposures to very accurately

correct brightness differences on the sample surface. HDR

provides high-fidelity images that show not only textures but

also flaws and defects that were undetectable before. Glare

can also be reduced for more comfortable observation.

Change Observation Methods with One Click

With virtually every industrial observation method at hand, it’s

easy to choose the proper one for the current task. No com-

plicated adjustments needed.

WiDER Provides Easy Inspection of Samples

with High Refl ectance Difference

If the non-reflective area cannot be seen, merely increasing

the illumination power is often not enough, because glare can

occur. Olympus intelligent image processing technology

eliminates these problems with WiDER, a proprietary system

that works effectively with live images, is ready to go at the

click of a button, and takes care of the high contrast problems

in real time. No blackouts. No glare.

A click removes imaging problems caused by different materials

A click of a button gives you the image you want on screen

MIX Observation Method Easily Detects Defects

and Imperfections

MIX combines BF with DF LED illumination, something con-

ventional microscopes cannot do. With bright-field visibility

and added dark-field detection capabilities, defects and

imperfections can easily be detected.

MIX (BF+DF)

BF DF

Periphery of a through-hole

1 2 3 4

Superb Opera t ing S imp l i c i t y

11Page 10

Panoramic photos – Use the mouse or your finger to select the areas you want to see

3D measurement – A click of a button lets you view your sample in 3D

MEMS

Simple Operation Lets You See

What You Couldn’t See Before

The DSX500 requires no extensive knowledge or special techniques to show you exactly what you want to see.

By calling on leading-edge electronic technology, you can now see what was unclear or impossible before.

Panoramic Images Include Areas

beyond the Field of View

On the DSX500 there is no such thing as ‘outside the field of

view’. Just move the observation position on the screen, and

the motorised stage will move the sample to that place. As

the stage moves, the system automatically stitches images

into a single large field of view, in real time. Where conventional

microscopes reduce field area with increases in magnification,

Panoramic View maintains the original field while giving close-

up clarity – with 2D, extended focus, or 3D, or any combina-

tion of the three.

Customisable Report Function Makes

Generating Reports Simple and Easy

With DSX500, you can perform an observation or measure-

ment, and the system will automatically generate the relevant

reports.

Colour Enhancement Feature Shows Only

What You Want to See

If you put what you need to see in colour and leave the rest in

monochrome, it’s much easier to find defects, if any exist.

Inspection is easier when you can highlight possible defects or contamination

for inspection

A click can generate a report

Report output

3D Imaging Allows You to View Your Sample

as It Actually Is

The DSX500 can easily show your sample in three dimen-

sions, and then you can examine it from any angle.

Extended Focal Range Imaging Shows Everything

Where conventional microscopes can focus only at one level,

DSX500’s Extended Focal Image (EFI) capability maintains

focus across the entire range, which makes uneven surfaces

easier to inspect.

Even when using dark-fi eld or DIC

images, focus is automatically

maintained across the fi eld of view

filament

User-friendly GUI – Complete with traditional Olympus reliability

Abso lu te Per fo rmance Re l iab i l i t y

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Semiconductor pattern

These new 10x and 40x lenses were designed and manufac-

tured for the DSX500. They combine high NA and long work-

ing distance as never before. Just zoom in and achieve

extremely high resolution. What’s

more, you can also use other

standard Olympus UIS2 lenses.

Olympus Long Experience Gives DSX Microscopes

the Ability to See What Digital Microscopes Cannot

Olympus guarantees the reliability of all DSX500 microscopes because they are born of Olympus optical and

digital technology. Glare is minimised and colour reproduction is real. And to make sure of that, Olympus uses

the perfect combination of CCD chip and graphic boards. The sample is reproduced with such accuracy it’s

like a new dimension.

High-Quality Optics Let You See Into

Another Dimension

The DSX Series is the cumulation of Olympus long history of

superior engineering and design capabilities as well as proven

manufacturing quality. In the clear images produced by the

DSX500 opto-digital microscope, you’ll find neither flare nor

distortion, unheard of in other digital microscopes.

LED Illumination Gives Picture-Perfect

Inspection While Reducing Energy

New LED illumination not only assures accurate observation,

but also provides low running costs. Most importantly, the

colour does not change with the LED’s intensity thus minimis-

ing the need for white balancing. And the long working life of

the LEDs means the instruments are virtually maintenance

free.

High Resolution 18MP Images Reproduced

with a High-Performance CCD*

Olympus High-Performance CCD is the engine that shows

exactly what our high-quality optics reveals. The image shift

function ensures high fidelity with fine detail processing, so the

clarity extends from corner to corner.

*4800x3600 pixels, 3CCD mode conversion triples the pixel count

Dedicated DSX500 Field Lenses Make

High-Grade Image Dissection a Simple Matter

The optical technology and dedicated lenses High performance CCD

2D and 3D measurements – Enable measurements from every angle for various applications

Abso lu te Per fo rmance Re l iab i l i t y

15Page 14

2D measurement

Caliper measurement

Particle analysisThrough-holes on a substrate

Profi le 3D measurement

3D Step measurement

3D Area and Volume measurement

Solar cell electrode

Precision Measurement with Absolute Reliability that

Cannot Be Matched by Conventional Digital Microscopes

The DSX500 shows Olympus dedication to accurate measurement with its telecentric optics and stabilised

frame design. The measurements are accurate and reproducible.

Traceability diagram from a DSX500 series opto-digital microscope

Telecentric Optics Ensures Precise Dimension

Measurement

With telecentric optics, the size of the image does not alter

when focus changes.

*Calibration by Olympus or dealer specialists necessary

Accuracy and Repeatability Guaranteed Low Centre of Gravity, Sturdy Frame, and

Anti-Vibration Ensure Measurement

Performance

The low centre of gravity and sturdy frame of DSX500 scopes

provide sufficient stability at high magnification. Furthermore,

the anti-vibration function reduces vibration significantly that

might affect inspection or measurement at high magnification.

Advanced Materials Analysis Capability Is

Available Through OLYMPUS Stream

Metallographic evaluation, such as granularity analysis can

be accomplished through Olympus Stream Image analysis

software*. At the touch of a button, Olympus Stream soft-

ware starts up and accesses the DSX image and data files

immediately.

Proper calibration is crucial to precise measurements, and

with the Olympus DSX500, any operator can calibrate simply

and accurately. This elimi-

nates any differences that

occur when different opera-

tors calibrate.

Choice of 2D and 3D Measuring

The DSX500 microscope comes equipped with both 2D and

3D imaging capabilities. That means you can measure along

the X, Y axis, or along X, Y, and Z axis. Observe, inspect, or

measure from any angle. *3D imaging function is an option

Auto-Calibration Eliminates User Errors

*Calibration sample is required

Without anti-viberation

compensation

With anti-viberation

compensation

The DSX500 provides precise and repeatable measurements.

The accuracy is traceable to national standard.

National Institute of

Advanced Industrial Science and Technology

National Metrology Institute of Japan**

JCSS AccreditedLaboratory 0044 Olympus Corporation

Quality Assurance Division Testing and Research Center**

Standard Scale for DSX500 Series

DSX500/500i

**Differs according to national and regional statutes

*Available as an option

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The Super HDR Option Provides Even Greater Imaging

Performance for Your DSX500 Microscope

Your DSX500 comes standard with ease of operation and high reliability beyond any other industrial

microscope. But if you need even more efficient observation, the super HDR option provides it.

Opt ion

Super HDR

When you need higher image quality without sacrificing

speed, Olympus offers our Super HDR software. This soft-

ware offers two modes, in the fast mode, you have increased

frame speed while in fine mode you achieve finer definition

than the standard HDR mode.

Fast HDR provides images at 12 frames per second so you

smooth imaging even when moving the stage or focusing the

sample.

● Fast HDR Mode

Fine HDR images provide a better image quality with less

noise. This is accomplished by gathering more data than

standard HDR.

● Fine HDR Mode

IC pattern

* Refresh rate is the number of times a display’s image is refreshed per second.

It depends on observation conditions (exposure time, refl ection and so on).

High

High

SN

R (S

igna

l-to

-no

ise

ratio

)

Refresh rate*

StandardHDR

Normalimage

Fine HDR(Higher quality image)

Fast HDR(Fast live image)

User-selectable Fine and Fast HDR modes

As the SNR is higher, infl uence of noise is lower to get a better image.

The DSX500 Opto-digital Microscope Offers Operating Simplicity

and High-Resolution Images that Cannot Be Matched by

Other Microscope Systems

Particle on semiconductor wafer(Dark-fi eld)

Particle on semiconductor wafer(MIX)

CCD (Bright-fi eld)

LCD (Bright-fi eld, transmitted light illumination)

Coating surface(DIC)

Coating surface(DIC + HDR)

Printing surface(Bright-fi eld + HDR)

Mould component(3D)

Diamond grindstone(3D)

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DSX500 System diagram

U-SIC4R2Right hand control

large-size stage

U-WHP2Right hand control

large-size stage

BH2-WHR433’-4’ Wafer holder plate

U-MSSP4Stage plate

Joystick

DSX-ILTLED transmitted light illuminator

DSX-UFSSU100x100mm motorised

stage for Upright frame

UIS2 objective lenses

XLMPLFLN40XDSXDSX-HR specialised

objective lens 40x

XLMPLFLN10XDSXDSX-HR specialised

objective lens 10x

BD-M-ADAdopter to mount

BF objectives

DSX-CBControl box for DSX system

DSX-HRSUHigh resolution head

LG-SFLight guide

DSX-ILPSHigh intensity LED

light source

OLS40-EMGEmergency stop device

DSX-BSWSoftware licence

DSX-ASW-3D3D measuring software

DSX-ASW-EDMEdge detecting measurement

DSX-ASW-PAMParticle analysis

DSX-ASW-SHDRSuper HDR

DSX-CTRL-EController English OS

DSX-TLCD23” touch panel display

DSX-CALS-HRCalibration sample for DSX500

DSX-HRUFUpright frame

DSX500 Series Objective Lens

DSX500 Specifications

Main frame

Zoom ratio 13.5x optical zoom (0.26x-3.5x), 30x with digital zoom

Nosepiece (Manual)

No. of objective lens Max 2 (restriction applies)

Mountable objective lens

DSX Dedicated

objective lensXLMPLFLN10X, XLMPLFLN40X

UIS2 objective lens

MPLFLN1.25X, MPLFLN2.5X, MPLFLN5XBDP, MPLFLN10XBDP,

MPLFLN20XBDP, MPLFLN50XBDP, LMPLFLN10XBD,

LMPLFLN20X, LMPLFLN50X, MPLAPON50X

Accuracy and

repeatability (X-Y plane) *2

Accuracy of magnification ±3%

Repeatability of magnifi cation 3σn-1= ±2%

IlluminationEmbedded standard Bright field: LED, Dark field: LED

Optional illumination High intensity LED *1 / Transmitted LED

Camera

Image sensor

1/1.8 inch, 2.01 megapixels, Colour CCD (Total pixels : 2.10 megapixels)

Total pixels : 1688(H) x 1248(V)

Available pixels : 1628(H) x 1236(V)

Effective pixels : 1600(H) x 1200(V)

Cooling method Peltier cooling

Scan mode Progressive scan

Frame rate 15fps / 27fps with binning mode

Image size

Normal : 1194×1194(1:1) / 1592×1194(4:3)

Fine : 1194×1194(1:1) / 1592×1194(4:3)

Super fine : 3594×3594(1:1) / 4792×3594(4:3)

Sensitivity ISO100 / 200 / 400 / 800 / 1600 equivalent

Focusing unitStroke 95 mm

Resolution 0.01 μm

Maximum sample heightDSX 65 mm

UIS2 95 mm

Stage

DSX-UFSSU (Motorised)Stroke 100 x 100 mm

Load capacity 3 kg

U-SIC4R (Manual)Stroke 100 x 100 mm

Load capacity 1 kg

LCD MonitorSize 23” with Touch panel and Full HD colour LCD monitor

Resolution 1920(H) x 1080(V)

Weight Approx. 38.6 kg (Main frame, Motorised stage, LCD Monitor, Control box, Controller)

Input rating 100-120V/220-240V, 300VA, 50/60Hz

*1 DF and MIX are not available *2 Available for BF only *3 At aspect ratio 1:1 (with factory default value) *4 At aspect ratio 1:1

Series Model Perforcal distance N.A. W.D. (mm) Actual F.O.V. (μm) *3 Total Magnifi cation *4

DSX dedicated objective lensXLMPLFLN10XDSX *1

75 mm0.3 30.0 1,960-151 139x-1,803x

XLMPLFLN40XDSX *1 0.8 4.5 490-38 555x-7,211x

UIS2 objective lens

MPLFLN1.25X *2

45 mm

0.04 3.5 15,684-1,206 17x-225x

MPLFLN2.5X *2 0.08 10.7 7,842-603 35x-451x

MPLFLN5XBDP 0.15 12.0 3,921-302 69x-901x

MPLFLN10XBDP 0.25 6.5 1,960-151 139x-1,803x

MPLFLN20XBDP 0.4 3.0 980-75 277x-3,606x

MPLFLN50XBDP 0.75 1.0 392-30 693x-9,014x

LMPLFLN10XBD 0.25 10.0 1,960-151 139x-1,803x

LMPLFLN20XBD 0.4 12.0 980-75 277x-3,606x

LMPLFLN50XBD 0.5 10.6 392-30 693x-9,014x

MPLAPON50X *1 0.95 0.35 392-30 693x-9,014x

*1 Cannot be used with the embedded standard LED. *2 Calibration by Olympus or dealer specialists necessary.

is ISO9001/ISO14001 certified.• This product is designed for use in industrial environments for the EMC performance. Using it in a residential environment may affect other equipment in the environment.• All company and product names are registered trademarks and/or trademarks of theier respective owners.• Images on the PC monitors are simulated.• Specifications and appearances are subject to change without any notice or obligation on the part of the manufacturer.

Shinjuku Monolith, 2-3-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo 163-0914, Japan

Wendenstrasse 14-18, 20097 Hamburg, Germany

3500 Corporate Parkway, Center Valley, Pennsylvania 18034-0610, U.S.A.

10F, K. Wah Centre, 1010 Huai Hai Road (M), Xuhui District, Shanghai, 200031 P.R.C.

8F Olympus Tower, 446 Bongeunsa-ro, Gangnam-gu, Seoul, 135-509 Korea

3 Acacia Place, Notting Hill VIC 3168, Australia

M1743E-022014

www.olympus- ims.com/opto-d ig i ta l /

DSX500 Dimensions

unit: mm

DSX Series

High-resolution

Inverted scope

Free-angle

Wide zoom scope

215

33

8

363

55

0

1300

375