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DOE-SSL Manufacturing Workshop
Eric Armour Principal Scientist, Process Technology
Turbodisc MOCVD Operations Veeco Instruments
May 7, 2014
Copyright ©2014 Veeco Instruments Inc. 2
Veeco Strategy: Participate in Three-Megatrends Energy Efficiency Personal Mobility Emerging Applications
& Technologies
LED Lighting (MOCVD) Wireless Chips (MBE) Semiconductor Research (MBE)
Hard Disk Drives (Data Storage)
Optical Coatings (Data Storage)
Build on Existing Leadership
Advancing Thin Film Technologies
NOW: ALD for OLED Mobile Displays
Future: ALD for OLED TV Displays
EUV Mask Blanks, Semi
Establish a Strong Position in New Markets Power Devices
Future: ALD for OLED Lighting, Solar,
Batteries
MEMS
Copyright ©2014 Veeco Instruments Inc. 3
US-Based R&D/Engineering With Worldwide Presence Our Approach is a Competitive Differentiator
Proximity to customers is a strategic priority resulting in stronger customer support, better R&D alignment, and new customer conversion
Camarillo, CA
Fort Collins, CO
Plainview, NY St. Paul, MN Somerset, NJ
Poughkeepsie, NY
Santa Clara, CA
Edina, MN Mannheim, Germany
Shanghai, China
Hsinchu City, Taiwan
Penang, Malaysia
Seoul and Suji-gu,Korea
Singapore
Philippines Bangkok, Thailand
Tokyo, Japan
U.S.: ~ 580 Employees Europe: ~ 15 Employees Asia: ~ 200 Employees
Training and Service
Sales and Service
R&D/Engineering/Marketing
Fremont, CA
Contract Manufacturer
Kingston, NY
Copyright ©2014 Veeco Instruments Inc. 4
Veeco MOCVD Success Supported by DOE • SSL Role
‒ Capital MOCVD equipment manufacturer for critical epitaxial device layers
‒ DOE funding accelerated our roadmap, resulting in: Domestic job creation Rapid release of the MaxBright multi-chamber platform Achievement of market-leading MOCVD position
• Veeco’s R&D Footprint ‒ Specialized labs for new product and customer
demonstrations, advanced processing partnerships, and continuous improvement
‒ Comprehensive in-house analytics ‒ Actively engaged in and soliciting external collaborations
Copyright ©2014 Veeco Instruments Inc. 5
Veeco Continues to Lead in MOCVD Market
K465i and MaxBright are the #1 selling MOCVD tools Estimated market share, Veeco and Aixtron only
Veeco Market Share
63% TurboDisc® Reactor Advantages:
• LED performance • Manufacturability • Running cost • Low particles
Copyright ©2014 Veeco Instruments Inc. 6
Veeco Roadmap Facilitating LED Cost Reduction
Veeco Epi Cost reduction is 2X faster than U.S. DOE Forecast (‘10-’12)
0.00
0.05
0.10
0.15
0.20
0.25
0.30
0.35
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0.45
0.50
Nor
mal
ized
Epi
Cos
t ($/µm
.cm
2 )
2010 2013 2015 2020
$50 LED bulb Price
$13
$23
$6 $5
Throughput
Yield (HP) Automation
Cluster Yield
N+1 Platform Next Gen
U.S. Dept of Energy projected bulb cost Actual bulb cost Reduction of Epi cost from Veeco innovations
Copyright ©2014 Veeco Instruments Inc. 7
2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020
LED Lighting ~3000+ MOCVD
LED TV 1500 MOCVD
$10 LED Bulb Accelerates Lighting Demand LE
D D
eman
d by
Are
a (B
mm
2 )
Cellphone 250 MOCVD
LED Lighting CAGR 35%
LED TV
Wall Street and Veeco Estimates
Introduction of $10 LED bulbs
LED Lighting projected to grow at 35% CAGR from 2010 to 2020
Copyright ©2014 Veeco Instruments Inc. 8
SSL Market: Still A Ways to Go
• CoO will continue to drive the demand curve for earlier adoption
• The market appears to be focused on 4” production and can benefit greatly from high-capacity, automated equipment with significant floor-space efficiency
• Shift to 6” substrates in early stages
‒ Bigger sapphire substrates not generally considered at this point
• GaN-on-Si LED manufacturing:
‒ Emerging quickly to leverage significant silicon knowledge and capital
‒ Programs can benefit from a high-yield reactor requiring alternate hardware
• GaN substrate technologies focusing on niche applications
Copyright ©2014 Veeco Instruments Inc. 9
Leveraging SSL Technology towards Power Electronics: New Growth Opportunity for MOCVD
Power Supplies
Solar
Consumer Electronics
Wind
Automobile
• Power Electronics device market continues to grow1
• GaN-based power devices offer higher efficiency, switching speed and lower power consumption
• Veeco is positioned at key customer sites around the globe to support this high growth segment
Notes: 1) Yole Nov 2011, 2) IMS Research Feb 2012
GaN
Pow
er D
evic
e M
arke
t2
2011 2012 2013 2015 2018 2021
71% CAGR
Copyright ©2014 Veeco Instruments Inc. 10
Fast-ALD: Veeco’s Product to Accelerate OLED Adoption
A new generation of ALD: Fast deposition
(10x higher than traditional ALD)
Low temperature
Large area format (scalable to very large areas)
Polarizer
Encapsulation layers
OLED Layers
TFT (Plastic)