Diamond Field Emitter Arrays on Micromachined Silicon Nano Science & Engineering Lab ECE Old...
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Transcript of Diamond Field Emitter Arrays on Micromachined Silicon Nano Science & Engineering Lab ECE Old...
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Diamond Field Emitter Arrayson Micromachined SiliconNano Science & Engineering LabECEOld Dominion University Norfolk, Virginia 23529Dr. Wehai FuDr. Sacharia Albin
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Outline SummaryIntroductionField emissionExperimentsIIIIIIIVField emission and applicationsAdvantages of diamond field emitters Project goalFowler-Nordheim field emissionField emission enhancementSilicon tip array fabricationDiamond emitter fabricationResults and discussionVSilicon tip array wet etchingDiamond film characterizationDiamond emitter I-V characteristics
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I. Introduction Thermal excitationPhoto excitationTunnelingElectron emission mechanismsSurface barrierSurface barrier bending due to applied fieldAdvantages of field emissionLow energy consumptionHigh current densitySmall device size (sharp tips)
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Cold cathode Flat panel displayVacuum microelectronic deviceMicrosensorScanning probe microscope for surface imagingAnodeGateEmitterProbeGateEmitter arrayPhosphorConductive coating5 mmdE-beamEmitter arrayExtracting gateFocusing electrodeField Emission ApplicationsPressureI. Introduction
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Requirements for applications:Drawbacks of metal and silicon emitters:Low turn-on voltage Large emission current Uniform over the arrayStable emissionHigh extracting fieldSputtering damageSurface adsorptionEmitter overheatingAnodeEmitterI. Introduction
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Diamond Field EmitterHardest known material 10,400 kg/cm2Highest thermal conductivity 20 W/cm-oC 5 times larger than copperChemically inertSmall effective work functionProperties of diamondAdvantages for field emissionLow threshold voltage for electron emissionResistance to sputtering damage by residual gasEfficient and fast thermal dissipation Robust performance in harsh environment I. Introduction
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Research Developments 1928 Field emission theory proposed (Fowler and Nordheim) 1968 First metal field emitter with self-aligned gate demonstrated (Spindt)1990 Silicon field emitter array with self-aligned gate developed (Betsui)1979 Negative electron affinity (NEA) of diamond discovered (Himpsel)1976 Enhanced chemical vapor deposition (CVD) diamond developed (Deryagin)1994 Mold-filled CVD diamond tip array fabricated (Okano)1997 Diamond film coated silicon sharp tips demonstrated (Zhirnov)1997 Diamond tips for tunneling microscopy developed (Albin)YearHighlightsI. Introduction1999 Diamond field emitter arrays with self-aligned gate succeeded (Albin)
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Project Goal Scanning electron microscopyOptical emission spectroscopyRaman spectroscopyI-V measurementDesign, fabricate, and characterize diamond field emitter arrays using:Silicon surface micro-machiningPlasma enhanced CVD diamondI. Introduction
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Surface Energy Barrier#Image ChargeApplied Field Combined effect# S. O. Kasap, Principles of Electrical Engineering Materials and Devices (McGraw-Hill, 1997).II. Field Emission fEfEfEfxxxfFefff- exFPe(x)Pext(x)P(x)Schottky barrier reductiondSurface barrier thinningVacuum LevelVacuum LevelVacuum Level
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Fowler-Nordheim Equation# m mass of electron work function of the cathode y function of F and t(y), v(y) approximated as constants# R. H. Fowler and L. W. Nordheim, Proc. R. Soc. London A119, 173 (1928).
J emission current density e electron charge h Plancks constant F electric field at cathodeII. Field EmissionField Emission Current DensityN(T,S): electron densityD(F,s,): tunneling probabilitys: kinetic energyT: temperature F: applied field: work function
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F-N Plot Where:Simplified F-N Equation#a emitting area f emitter work function field enhancement factor# C. A. Spindt, I. Brodie, L. Humphrey, and E. R.Westerberg, J. Appl. Phys. 47, 5248 (1976).5.5 eV3 eV2 eV5 eV4 eVI-V PlotF-N PlotII. Field Emissionor(400 tip array with a tip radius of 20 nm and a field enhancement factor of 105 cm-1)
Chart2
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854538523045.78123013894710.2332853787566.9905632454201.25912576163078.27823965
899255824103.6524766900626.4776943525174.90683336961013.75706357133978.99747236
945435790302.27726614523959.94381040514947.418341975590.58600098231478.28549111
993094865504.38328559603455.05921145156730.7600947541331.49572969468544.88391539
1042249138937.5330604977318.79121257860656.3107353704063.066684210859089.0136581
1092914352153.6532753481662.56181379046922.7134660512086.161883112417998.0606413
1145105905990.2135007949019.69331509145569.1316168016220.211325714161171.6484649
1198838867516.6237371206936.72081648596240.5856376269844.278639616105556.0138769
1254127976951.139846076636.7911797847946.2844885328934.87376218269177.6057474
1310987654535.0342435371753.26951957358811.8277695252100.488734220671175.8332769
1369432007353.3445141897131.6062127595826.11709106100612.84624423331834.8943227
1429474836090.8647968447697.44592309034583.77687117938434.86236526272614.6199623
1491129641715.7650917807388.93732502159023.84586130832245.33598329516180.276692
1554409632082.653992748151.15242707461165.4617144851460.3876633086431.2729435
1619327728448.0957196028990.52762925440841.22192160068251.68020937008528.7218529
1685896571894.2560530395087.22143156605428.86626176557561.4619741308921.8174181
1754128529653.7863998576963.29423401469581.88698194397114.48177746015372.9862884
Electric Field (107 V/cm)
Current Density (A/cm2)
Sheet2
-188.8999889397-343.1364309613-524.79633981100
-97.8246355229-175.8203229501-267.196339811-370.3754063466-426.0165341743
-67.466184384-120.0482869464-181.3296731443-250.3730915541-287.5710956635
-52.2869588145-92.1622689445-138.396339811-190.3719341578-218.3483764081
-43.1794234728-75.4306581434-112.636339811-154.3712397201-176.8147448548
-37.107733245-64.2762509427-95.4630064776-130.3707767616-149.1256571527
-32.7708116537-56.3088172279-83.196339811-113.2275889341-129.3477373654
-29.5181204603-50.3332419417-73.996339811-100.3701980635-114.514297525
-26.988249532-45.6855722748-66.8407842554-90.3700051641-102.9771776491
-24.9643527894-41.9674365412-61.116339811-82.3698508446-93.7474817484
-23.3084372728-38.9253254864-56.4327034473-75.8242700377-86.1959123751
-21.9285076755-36.3902329408-52.5296731443-70.3696193653-79.9029378973
-20.7608749394-34.245154633-49.2271090417-65.7541457195-74.5781133392
-19.7600468799-32.4065160834-46.396339811-61.7980254516-70.0139780037
-18.8926625617-30.8130293404-43.9430064776-58.3693878861-66.0583940462
-18.1337012832-29.4187284403-41.796339811-55.3693300163-62.5972580834
-17.4640295669-28.1884629403-39.9022221639-52.7222201311-59.5433145869
-16.8687658191-27.0948936069-38.2185620332-50.3692335666-56.8286981455
-16.3361614131-26.1164368349-36.7121292847-48.2639297983-54.3998308032
-15.8568174478-25.2358257401-35.356339811-46.3691564068-52.2138501951
-15.4231252886-24.4390823686-34.1296731443-44.6548376241-50.2360582164
-15.0288596894-23.7147702127-33.0145216292-43.0963660034-48.4380655085
-14.6688780554-23.0534417225-31.996339811-41.6734136541-46.7964199925
-14.3388948908-22.4472239399-31.0630064776-40.3690406672-45.2915782696
-14.0353103794-21.8895035798-30.204339811-39.1690175193-43.9071238845
-13.7550785228-21.374684786-29.4117244264-38.0613038443-42.6291659905
-13.4956045814-20.8980007176-28.6778212925-37.0356430341-41.4458716443
-13.254664493-20.4553655112-27.996339811-36.0832437103-40.3470983228
-13.0303409624-20.0432568708-27.3618570524-35.1965270986-39.3241024717
-12.8209723339-19.6586221397-26.7696731443-34.3689249276-38.3693063441
-12.6251113588-19.2988025526-26.2156946497-33.5947164451-37.4761099666
-12.4414916946-18.9614716896-25.696339811-32.8688959927-36.6387383627
-12.269000495-18.6445851214-25.2084610231-32.1870646586-35.852116553
-12.1066558365-18.3463389396-24.7492809874-31.5453410501-35.1117666144
-11.9535880156-18.0651353967-24.316339811-30.9402873621-34.4137223866
-11.8090239626-17.7995542729-23.9074509221-30.3688477678-33.7544583937
-11.6722741827-17.5483288855-23.5206641353-29.8282968003-33.1308302923
-11.5427217596-17.3103258869-23.1542345478-29.3161958837-32.5400247225
-11.4198130505-17.0845281703-22.8065962212-28.8303565526-31.9795168743
-11.3030497769-16.8700203395-22.476339811-28.368809188-31.4470344185
-11.1919822728-16.6659763053-22.1621934695-27.929776329-30.9405267166
-11.0862036974-16.4716486538-21.8630064776-27.5116497966-30.4581384292
-10.9853450557-16.2863594976-21.5777351598-27.1129710099-29.9981868062
-10.8890708977-16.1094925758-21.3054307201-26.7324139862-29.5591420752
-10.7970755913-15.9404864061-21.0452286999-26.3687706081-29.1396104433
-10.7090800807-15.7788283307-20.796339811-26.0209378116-28.7383193172
-10.62482906-15.6240493224-20.5580419386-25.6879064107-28.3541044092
-10.5440884984-15.4757194394-20.3296731443-25.3687513182-27.9858984557
-10.46664347-15.3334438374-20.1106255253-25.0626229641-27.6327213167
-10.3922962427-15.1968592594-19.900339811-24.7687397442-27.2936712632
-10.320864593-15.0656309394-19.6983005953-24.4863813564-26.9679172902
-10.2521803144-14.9394498625-19.5040321187-24.2148829067-26.6546923162
-10.1860878954-14.8180303356-19.317094528-23.9536296814-26.3532871526
-10.1224433437-14.7011078283-19.1370805517-23.7020525016-26.0630451431
-10.0611131394-14.5884370484-18.9636125382-23.4596235828-25.7833573885
-10.0019732995-14.4797902251-18.796339811-23.2258528397-25.5136584823
-9.9449085418-14.3749555709-18.6349363022-23.0002845788-25.2534226957
-9.8898115342-14.2737359049-18.4790984317-22.7824945338-25.0021605568
-9.8365822219-14.1759474139-18.3285432008-22.5720872022-24.7594157786
-9.78512722-14.0814185393-18.1830064776-22.3686934483-24.524762493
-9.7353592673-13.9899889721-18.0422414503-22.1719683421-24.2978027577
-9.6871967324-13.9015087458-17.9060172303-21.9815892071-24.0781643042
-9.6405631669-13.8158374155-17.7741175888-21.7972538541-23.8654985001
-9.5953869004-13.7328433143-17.646339811-21.6186789809-23.6594785023
-9.5516006727-13.6524028778-17.5224936571-21.4455987192-23.4597975814
-9.5091413005-13.5744000302-17.402400417-21.2777633139-23.2661675974
-9.4679493722-13.4987256259-17.2858920498-21.1149379207-23.078317613
-9.4279689713-13.4252769393-17.1728103992-20.9569015096-22.8959926281
-9.3891474225-13.3539572001-17.0630064776-20.8034458641-22.7189524254
-9.3514350608-13.2846751678-16.956339811-20.6543746656-22.5469705143
-9.3147850192-13.2173447421-16.8526778391-20.5095026558-22.3798331639
-9.2791530343-13.1518846059-16.7518953665-20.3686548685-22.2173385178
-9.2444972682-13.0882178982-16.6538740576-20.2316659246-22.0592957798
-9.2107781444-13.0262719122-16.5585019731-20.0983793847-21.9055244671
-9.1779581972-12.9659778192-16.4656731443-19.9686471525-21.7558537228
-9.1460019328-12.9072704129-16.3752871794-19.8423289264-21.6101216822
-9.1148757013-12.8500878743-16.2872489019-19.7192916932-21.4681748895
-9.0845475783-12.7943715546-16.2014680161-19.5994092608-21.3298677581
-9.0549872559-12.7400657747-16.1178587983-19.4825618267-21.1950620731
-9.0261659415-12.6871176392-16.036339811-19.3686355785-21.0636265302
-8.9980562645-12.6354768652-15.9568336381-19.2575223241-20.9354363094
-8.9706321894-12.5850956222-15.8792666402-19.149119149-20.8103726793
-8.9438689354-12.535928385-15.8035687266-19.0433280987-20.6883226306
-8.9177429017-12.4879317964-15.7296731443-18.9400558828-20.5691785355
-8.8922315982-12.4410645392-15.6575162816-18.8392136015-20.4528378309
-8.8673135809-12.3952872183-15.5870374854-18.7407164895-20.339202724
-8.8429683915-12.3505622496-15.5181788914-18.6444836789-20.2281799185
-8.8191765019-12.3068537574-15.4508852655-18.5504379777-20.1196803585
-8.7959192615-12.2641274785-15.3851038559-18.458505663-20.0136189909
-8.7731788487-12.2223506725-15.3207842554-18.3686162886-19.9099145426
-8.7509382251-12.1814920381-15.2578782725-18.2807025049-19.8084893129
-8.7291810934-12.1415216348-15.196339811-18.1946998903-19.7092689796
-8.707891857-12.1024108102-15.1361247572-18.1105467944-19.6121824168
-8.687055583-12.0641321307-15.0771908748-18.0281841899-19.5171615256
-8.6666579675-12.0266593181-15.0194977057-17.9475555349-19.4241410742
-8.6466853023-11.9899671892-14.9630064776-17.8686066436-19.3330585488
1/F (10-7 cm/V)
ln (J/F2) (ln(A/V2)
Sheet3
1439.1945194355524300000001970000000076700000000
0.00005944388.136260982575433323628000000
00.1766022129.713277184.95692883
00.000002911.066616765.072743753.52
00.00000000840.01952835.224633503.073
Work Function (eV)
Current Density (A/cm2)
Voltage (v)
Emission current (A)
Chart1
-108.6356217965-186.6305525085-278.0077254364-381.1797926873-436.8265461303
-63.0981217965-102.9730525085-149.2077254364-201.1797926873-229.1590461303
-47.9189551299-75.0872191751-106.274392103-141.1797926873-159.9365461303
-40.3293717965-61.1443025085-84.8077254364-111.1797926873-125.3252961303
-35.7756217965-52.7785525085-71.9277254364-93.1797926873-104.5585461303
-32.7397884632-47.2013858418-63.3410587697-81.1797926873-90.7140461303
-30.5713360823-43.2176953656-57.2077254364-72.6083641159-80.8251175589
-28.9449967965-40.2299275085-52.6077254364-66.1797926873-73.4084211303
-27.680066241-37.906108064-49.0299476586-61.1797926873-67.6398794637
-26.6681217965-36.0470525085-46.1677254364-57.1797926873-63.0250461303
-25.8401672511-34.5260070539-43.8259072545-53.9070654146-59.249273403
-25.1502051299-33.2584691751-41.874392103-51.1797926873-56.1027961303
-24.5663910273-32.1859371238-40.2231100518-48.8721003796-53.4403922842
-24.0659789394-31.266623937-38.8077254364-46.8940784016-51.1583318446
-23.6322884632-30.4698858418-37.5810587697-45.1797926873-49.1805461303
-23.2528092965-29.7727400085-36.5077254364-43.6797926873-47.4499836303
-22.9179747377-29.157611332-35.5606666128-42.3562632755-45.9230167186
-22.6203440188-28.6108302862-34.7188365475-41.1797926873-44.565712797
-22.3540428492-28.12160514-33.9656201732-40.1271611084-43.3512829724
-22.1143717965-27.6813025085-33.2877254364-39.1797926873-42.2582961303
-21.8975265585-27.2829334608-32.674392103-38.3226498302-41.2694032732
-21.7003945238-26.9207797812-32.1168163455-37.5434290509-40.3704097667
-21.5204044052-26.5901177258-31.6077254364-36.8319666003-39.5495896086
-21.3554134632-26.2870108418-31.1410587697-36.1797926873-38.7971711303
-21.2036217965-26.0081525085-30.7117254364-35.5797926873-38.1049461303
-21.0635064119-25.7507448161-30.3154177441-35.0259465335-37.4659692072
-20.9337699447-25.5124043603-29.9484661771-34.5131260206-36.8743239081
-20.813300368-25.2910882227-29.6077254364-34.0369355444-36.3249389875
-20.7011390379-25.0850352671-29.2904840571-33.5935857908-35.813442682
-20.5964551299-24.8927191751-28.994392103-33.1797926873-35.3360461303
-20.4985250224-24.712810573-28.7174028557-32.7926959131-34.8894493561
-20.4067155465-24.5441462585-28.4577254364-32.4297926873-34.4707648803
-20.3204702814-24.3857040236-28.2137860424-32.0888835964-34.0774552212
-20.2392982671-24.2365819202-27.9841960246-31.7680279814-33.7072814244
-20.1627646537-24.0959810799-27.7677254364-31.465506973-33.358260416
-20.0904829077-23.9631913973-27.5632809919-31.1797926873-33.0286294637
-20.022108283-23.8375795355-27.3698875985-30.909522417-32.7168164006
-19.9573323229-23.7185788242-27.1866728048-30.6534768978-32.4214145514
-19.8958782068-23.6056807136-27.0128536415-30.4105619181-32.1411615149
-19.8374967965-23.4984275085-26.8477254364-30.1797926873-31.8749211303
-19.78196326-23.396406167-26.6906522656-29.9602804922-31.6216680815
-19.7290741775-23.2992429846-26.5410587697-29.7512212587-31.3804747018
-19.6786450524-23.2065990201-26.3984231108-29.5518857106-31.1504996187
-19.6305081602-23.1181661448-26.2622708909-29.3616108691-30.9309779485
-19.5845106854-23.0336636196-26.1321698808-29.1797926873-30.721212797
-19.5405131009-22.9528351171-26.0077254364-29.0058796438-30.5205678695
-19.498387754-22.8754461255-25.8885765002-28.8393671554-30.3284610239
-19.4580176299-22.8012816751-25.774392103-28.6797926873-30.1443586303
-19.4192952659-22.7301443452-25.6648682935-28.5267314628-29.9677706201
-19.3821217965-22.6618525085-25.5597254364-28.3797926873-29.7982461303
-19.3464061103-22.596238783-25.4587058285-28.2386162167-29.6353696597
-19.3120641042-22.5331486623-25.3615715902-28.1028696104-29.4787576688
-19.279018023-22.4724393009-25.2681027949-27.9722455175-29.3280555643
-19.2471958706-22.4139784344-25.1780958067-27.846459354-29.1829350192
-19.2165308875-22.3576434175-25.0913618-27.7252472328-29.0430915849
-19.1869610823-22.3033203656-25.0077254364-27.6083641159-28.9082425589
-19.1584288141-22.2509033856-24.927023682-27.495582161-28.7781250777
-19.1308804172-22.2002938878-24.8491047467-27.386689239-28.6524944062
-19.1042658643-22.1513999661-24.7738271313-27.2814876026-28.5311224015
-19.0785384632-22.1041358418-24.7010587697-27.1797926873-28.4137961303
-19.0536545834-22.0584213609-24.630676256-27.0814320316-28.3003166221
-19.0295734095-22.0141815407-24.562564146-26.9862443002-28.1904977432
-19.0062567172-21.9713461592-24.4966143253-26.8940784016-28.0841651779
-18.9836686715-21.9298493835-24.4327254364-26.8047926873-27.9811555053
-18.9617756427-21.8896294315-24.3708023594-26.7182542258-27.8813153611
-18.940546039-21.850628266-24.3107557394-26.6343381419-27.7845006758
-18.9199501548-21.8127913144-24.2525015558-26.5529270157-27.6905759811
-18.8999600318-21.7760672143-24.1959607305-26.4739103344-27.5994137774
-18.8805493328-21.7404075809-24.1410587697-26.3971839917-27.5108939564
-18.8616932251-21.7057667942-24.0877254364-26.3226498302-27.4249032732
-18.8433682754-21.6721018042-24.0358944505-26.2502152225-27.3413348627
-18.8255523521-21.6393719529-23.9855032141-26.1797926873-27.260087797
-18.8082245363-21.6075388098-23.9364925597-26.1112995366-27.1810666783
-18.7913650398-21.576566022-23.8888065174-26.0446575522-27.1041812655
-18.7749551299-21.5464191751-23.842392103-25.9797926873-27.0293461303
-18.7589770597-21.5170656663-23.7971991206-25.9166347926-26.9564803408
-18.7434140043-21.4884745864-23.7531799818-25.8551173626-26.8855071693
-18.7282500017-21.460616611-23.7102895389-25.7951773027-26.8163538226
-18.7134698978-21.4334639009-23.66848493-25.7367547126-26.7489511936
-18.6990592965-21.4069900085-23.6277254364-25.6797926873-26.6832336303
-18.6850045126-21.3811697924-23.5879723499-25.6242371317-26.6191387229
-18.6712925283-21.3559793377-23.549188851-25.5700365897-26.5566071059
-18.6579109532-21.3313958819-23.5113398942-25.5171420849-26.4955822749
-18.644847987-21.3073977465-23.474392103-25.465506973-26.436010416
-18.6320923848-21.2839642732-23.4383136717-25.415086805-26.377840248
-18.6196334245-21.2610757643-23.4030742736-25.3658391989-26.3210228745
-18.607460877-21.238713428-23.3686449766-25.3177237218-26.2655116476
-18.5955649784-21.2168593266-23.3349981636-25.2707017782-26.2112620394
-18.5839364033-21.1954963287-23.3021074588-25.2247365075-26.1582315236
-18.572566241-21.174608064-23.2699476586-25.1797926873-26.1063794637
-18.5614459724-21.1541788821-23.2384946671-25.1358366433-26.0556670094
-18.5505674487-21.1341938128-23.2077254364-25.0928361656-26.0060569999
-18.5399228718-21.11463853-23.1776179095-25.0507604292-25.9575138723
-18.5295047753-21.095499317-23.1481509683-25.0095799213-25.9100035771
-18.5193060071-21.0767630348-23.1193043837-24.9692663715-25.8634934987
-18.5093197132-21.0584170918-23.0910587697-24.9297926873-25.8179523803
-18.4995393223-21.0404494157-23.0633955395-24.8911328935-25.773350254
-18.4899585312-21.0228484268-23.0362968649-24.8532620751-25.7296583752
-18.4805712915-21.0056030135-23.0097456384-24.8161563237-25.6868491606
-18.4713717965-20.9887025085-22.9837254364-24.7797926873-25.6448961303
1/V (1/V)
ln(I/V2) (A/V2)
Sheet1
2000000400 tips with radius of 20 nm
4000000b= 10e5 cm-1
6000000
8000000
10000000
1200.00000000010000
1400.0000000010000
1600.00000000690000
1800.00000003080000
2000.00000010480000
2200.00000029010000
2400.00000068840.0000000002000
2600.00000144840.0000000007000
2800.00000277070.0000000021000
3000.00000490760.0000000053000
3200.00000816080.000000012000
3400.00001287680.0000000251000
3600.00001944080.00000004860.000000000100
3800.00002827030.00000008840.000000000300
4000.0000398080.00000015220.000000000600
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5200.00019241640.00000177260.00000001850.00000000020
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5800.00034392640.00000429110.0000000640.00000000090.0000000001
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6800.00075024360.00001377860.00000032480.00000000740.0000000011
7000.00085825960.00001680520.00000042740.00000001060.0000000016
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8000.0015519030.00003989720.00000140080.000000050.0000000092
8200.00172357510.00004641920.0000017220.00000006550.0000000124
8400.00190691140.00005368170.00000209860.00000008470.0000000166
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20000.03802289210.0030674840.00041721010.00006923610.000029149
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0.01-35.7756217965-52.7785525085-71.9277254364-93.1797926873-104.5585461303
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0.0055555556-27.680066241-37.906108064-49.0299476586-61.1797926873-67.6398794637
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0.0025-22.1143717965-27.6813025085-33.2877254364-39.1797926873-42.2582961303
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0.0014285714-20.1627646537-24.0959810799-27.7677254364-31.465506973-33.358260416
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0.0011363636-19.6305081602-23.1181661448-26.2622708909-29.3616108691-30.9309779485
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0.0009803922-19.3464061103-22.596238783-25.4587058285-28.2386162167-29.6353696597
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0.0009090909-19.2165308875-22.3576434175-25.0913618-27.7252472328-29.0430915849
0.0008928571-19.1869610823-22.3033203656-25.0077254364-27.6083641159-28.9082425589
0.000877193-19.1584288141-22.2509033856-24.927023682-27.495582161-28.7781250777
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0.0008333333-19.0785384632-22.1041358418-24.7010587697-27.1797926873-28.4137961303
0.0008196721-19.0536545834-22.0584213609-24.630676256-27.0814320316-28.3003166221
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0.0006329114-18.7134698978-21.4334639009-23.66848493-25.7367547126-26.7489511936
0.000625-18.6990592965-21.4069900085-23.6277254364-25.6797926873-26.6832336303
0.000617284-18.6850045126-21.3811697924-23.5879723499-25.6242371317-26.6191387229
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0.0006024096-18.6579109532-21.3313958819-23.5113398942-25.5171420849-26.4955822749
0.0005952381-18.644847987-21.3073977465-23.474392103-25.465506973-26.436010416
0.0005882353-18.6320923848-21.2839642732-23.4383136717-25.415086805-26.377840248
0.0005813953-18.6196334245-21.2610757643-23.4030742736-25.3658391989-26.3210228745
0.0005747126-18.607460877-21.238713428-23.3686449766-25.3177237218-26.2655116476
0.0005681818-18.5955649784-21.2168593266-23.3349981636-25.2707017782-26.2112620394
0.0005617978-18.5839364033-21.1954963287-23.3021074588-25.2247365075-26.1582315236
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0.0005494505-18.5614459724-21.1541788821-23.2384946671-25.1358366433-26.0556670094
0.0005434783-18.5505674487-21.1341938128-23.2077254364-25.0928361656-26.0060569999
0.0005376344-18.5399228718-21.11463853-23.1776179095-25.0507604292-25.9575138723
0.0005319149-18.5295047753-21.095499317-23.1481509683-25.0095799213-25.9100035771
0.0005263158-18.5193060071-21.0767630348-23.1193043837-24.9692663715-25.8634934987
0.0005208333-18.5093197132-21.0584170918-23.0910587697-24.9297926873-25.8179523803
0.0005154639-18.4995393223-21.0404494157-23.0633955395-24.8911328935-25.773350254
0.0005102041-18.4899585312-21.0228484268-23.0362968649-24.8532620751-25.7296583752
0.0005050505-18.4805712915-21.0056030135-23.0097456384-24.8161563237-25.6868491606
0.0005-18.4713717965-20.9887025085-22.9837254364-24.7797926873-25.6448961303
Sheet1
1/V (1/V)
ln(I/V2) (A/V2)
Sheet2
Sheet3
-
Field Enhancement Factor AnodeCathode = F / VField enhancement factor for typical emitters## H. G. Kosmahl, IEEE Trans. Electron Devices 38 (6), 1534 (1991)hdrF: electric field at emitter tip V: voltage between anode and cathodeII. Field EmissionrSpacer
-
Emitter Structure Effect SimulationTip height (top to bottom) 4 mm 3 mm 2 mm 1 mm 0.5 mmTip radius (top to bottom) 10 nm 20 nm 40 nm 60 nm 80 nm 100 nmEffect of tip radiusEffect of emitter heightII. Field Emission
Chart1
30.31848936550.106921316685.3859451441117.8764131384148.7608525507
19.192604102830.31848936550.106921316668.229429061785.3859451441
15.153546567923.045306400337.181638090450.106921316662.3177213531
13.075156485619.192604102830.31848936540.49913865850.1069213166
11.84217141816.792423484226.014789669334.476428794542.4592279104
11.062745544915.153546567923.045306400330.31848936537.1816380904
10.563175130213.967572115720.864944756727.261368195433.3015008252
10.255351484513.075156485619.192604102824.911685632330.318489365
10.090985264812.385312219417.867923953323.045306400327.947784756
10.0428601811.84217141816.792423484221.524727438326.0147896693
10.096275018111.409493440215.90211864120.260689433324.406241904
10.244926900611.062745544915.153546567919.192604102823.0453064003
10.489014515210.784753990914.516099923118.277828169221.8779339404
10.834658166310.563175130213.967572115717.485435244220.8649447567
11.294320702410.388954568613.491442744516.792423484219.9772106938
0.5mm
1mm
2mm
3mm
4mm
Emitter radius (nm)
Field enhancement factor
Sheet1
tip radius
1030.31848936550.106921316685.3859451441117.8764131384148.7608525507
2019.192604102830.31848936550.106921316668.229429061785.3859451441
3015.153546567923.045306400337.181638090450.106921316662.3177213531
4013.075156485619.192604102830.31848936540.49913865850.1069213166
5011.84217141816.792423484226.014789669334.476428794542.4592279104
6011.062745544915.153546567923.045306400330.31848936537.1816380904
7010.563175130213.967572115720.864944756727.261368195433.3015008252
8010.255351484513.075156485619.192604102824.911685632330.318489365
9010.090985264812.385312219417.867923953323.045306400327.947784756
10010.0428601811.84217141816.792423484221.524727438326.0147896693
11010.096275018111.409493440215.90211864120.260689433324.406241904
12010.244926900611.062745544915.153546567919.192604102823.0453064003
13010.489014515210.784753990914.516099923118.277828169221.8779339404
14010.834658166310.563175130213.967572115717.485435244220.8649447567
15011.294320702410.388954568613.491442744516.792423484219.9772106938
tip height10 nm20 nm40nm60 nm80 nm100 nm
0.530.31848936519.192604102813.075156485611.062745544910.255351484510.04286018
150.106921316630.31848936516.792423484215.153546567913.075156485611.842171418
285.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842
3117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383
4148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693
Sheet1
0.5mm
1mm
2mm
3mm
4mm
Emitter radius (nm)
Field enhancement factor
Sheet2
10 nm
20 nm
40nm
60 nm
80 nm
100 nm
Sheet3
Chart2
30.31848936519.192604102813.075156485611.062745544910.255351484510.04286018
50.106921316630.31848936516.792423484215.153546567913.075156485611.842171418
85.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842
117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383
148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693
10 nm
20 nm
40nm
60 nm
80 nm
100 nm
Emitter height (mm)
Field enhancement factor
Sheet1
tip radius
1030.31848936550.106921316685.3859451441117.8764131384148.7608525507
2019.192604102830.31848936550.106921316668.229429061785.3859451441
3015.153546567923.045306400337.181638090450.106921316662.3177213531
4013.075156485619.192604102830.31848936540.49913865850.1069213166
5011.84217141816.792423484226.014789669334.476428794542.4592279104
6011.062745544915.153546567923.045306400330.31848936537.1816380904
7010.563175130213.967572115720.864944756727.261368195433.3015008252
8010.255351484513.075156485619.192604102824.911685632330.318489365
9010.090985264812.385312219417.867923953323.045306400327.947784756
10010.0428601811.84217141816.792423484221.524727438326.0147896693
11010.096275018111.409493440215.90211864120.260689433324.406241904
12010.244926900611.062745544915.153546567919.192604102823.0453064003
13010.489014515210.784753990914.516099923118.277828169221.8779339404
14010.834658166310.563175130213.967572115717.485435244220.8649447567
15011.294320702410.388954568613.491442744516.792423484219.9772106938
tip height10 nm20 nm40nm60 nm80 nm100 nm
0.530.31848936519.192604102813.075156485611.062745544910.255351484510.04286018
150.106921316630.31848936516.792423484215.153546567913.075156485611.842171418
285.385945144150.106921316626.014789669323.045306400319.192604102816.7924234842
3117.876413138468.229429061734.476428794530.31848936524.911685632321.5247274383
4148.760852550785.385945144142.459227910437.181638090430.31848936526.0147896693
Sheet1
0.5mm
1mm
2mm
3mm
4mm
Emitter radius (nm)
Field enhancement factor
Sheet2
10 nm
20 nm
40nm
60 nm
80 nm
100 nm
Emitter height (mm)
Field enhancement factor
Sheet3
-
(a) Thermal oxidation(b) Photolithography(c) Silicon dioxide etching(d) Silicon etching(e) Tip sharpening(f) Silicon nano tipsSilicon Tip Array Fabrication III. Experiments
-
Diamond Emitter FabricationPressure ControlSubstrate height control Microwave power control Substrate heating controlGas flow meterPumping SystemH2CH4Microwave generatorWaveguidePlasmaSubstrateGaugeMotorValveQuartz windowExhaustIII. Experiments
-
Emitter with Self-aligned Gate1. Thermal oxidation and patterning2. Silicon tip etching3. Photoresist planarization for oxide and metal layer4. Photoresist etchback5. Expose silicon tip for seeding6. Diamond depositionSiO2SiPhotoresistMetalSiO2III. Experiments
-
IV. Results and Discussion Orientation Dependent EtchingSome alkaline etchants etch various crystal planes of silicon at different etch rates
SiO2SiliconSiO2Silicon
_958569311.doc
-
Silicon Tip Array Wet Etching Silicon tip array etched at 90oC with various tetramethylammonium hydroxide (TMAH) concentrations10% TMAH25% TMAH40% TMAH15 minute etchingExtremely non-uniformHillocks on substrate4 minute pinching under maskHillock-free but non-uniformSmall tip aspect ratio10 minute pinching under maskHillock-free and uniformLarger tip aspect ratioIV. Results and Discussion
-
Optimized Etching Results ArrayClose-upSilicon tip array etched using: 10 m square SiO2 mask40% TMAH at 90oC 2.2 m high and 1.44 m wideAspect ratio of 1.53 1.4% non-uniformityIV. Results and Discussion
-
Effect of Etchant TemperatureSilicon tip array etched in 40% TMAH at various temperaturesSilicon tip arrays etched at various temperatures show similar appearanceHeight hBase width dAspect RatioThe slight decrease of aspect ratio shows the etching selectivity between side planes and the base decrease with temperatureEtch rate increases with temperatureIV. Results and DiscussionAspect Ratio = h/d
Chart1
1.7289452.01371.12763
1.7672982.113751.160719
1.7457792.14691.207923
1.532.21.44
Temperature (oC)
Emitter Height and Width (mm) and Aspect Ratio
Sheet1
9236etched at 90C9237etched at 70C9238etched at 80C
2.161.022.06216376362.10340703891.91.071.7149479851.83499434392.181.151.83674776572.1122599306
2.151.161.79389347292.08091642862.031.191.6440534451.95642359952.191.211.74969170732.1171269658
2.131.171.76045045672.05972703442.051.111.78719031081.9837812452.151.231.68678713612.0747481774
2.131.161.77638639062.06060821312.061.221.62642818561.98424238652.161.241.68066218252.0840211063
1.961.141.65767608691.88975073912.071.21.66346570971.99615885172.151.251.65838865592.0729858198
2.171.211.73290805812.09681875032.081.151.74845117672.01071885322.171.241.68885097912.0941752141
2.911.531.84315359672.82002500292.081.141.76456143152.01160003192.211.281.66505228912.13126693
2.152.140.93203780881.99456091092.091.151.75728083562.02087296092.121.231.66202101962.0442858541
2.021.081.811076351.9559624582.011.041.87435871661.94933306532.241.241.7461725552.1652539683
1.80.9321.87297589411.74561353331.921.081.71705683391.85442138062.141.161.78513993182.0707623209
1.961.021.86306361191.90032488411.841.131.56529435841.7687826252.051.11.8042385671.9846624237
2.331.281.76024704912.25311622292.081.211.65738163692.005431780721.081.79227244681.9356542426
2.331.351.66440590492.24694797161.90.9941.85280815131.84169130241.9611.90208724161.9020872416
2.281.341.63959597892.19705861172.041.21.63808044041.96569652852.11.141.78237565562.0319082474
2.21.241.71341736882.12463753732.071.21.66346570971.99615885172.181.191.77204639962.1087352156
2.231.21.79885381292.15862457552.181.21.75654503072.10785403682.21.191.78911212692.1290434311
2.121.191.72084921782.04781056912.061.161.71511160261.9895294592.191.221.73462769432.1162457871
2.131.121.84297582872.06413292812.011.191.62698771771.9361153842.191.241.70522857222.1144834296
2.141.151.80142913012.07164349962.071.131.77197088762.0023271032.191.251.69088180062.1136022508
2.171.171.7951653552.10034346532.051.21.64654219691.97585063622.191.211.74969170732.1171269658
2.171.211.73290805812.09681875032.061.131.76298495151.99217299522.191.211.74969170732.1171269658
2.191.231.71980862462.11536460832.021.11.77654554591.95420010052.21.221.74295073342.1263998948
2.241.231.76108548542.1661351471.991.071.80035636781.92638131362.191.221.73462769432.1162457871
2.191.221.73462769432.11624578712.021.11.77654554591.95420010052.141.211.70773258442.0663564271
1.981.061.80859281561.91710838461.981.11.73962151781.91358366962.141.181.75338979952.0689999634
1.580.8541.7905109571.529096357321.091.77502115941.93477306382.151.151.8102587892.0817976074
2.14692307691.20792307691.74577918351.710.8921.8584655591.657751278721.111.74145108681.9330107063
0.22344161170.2324915350.18569535092.01370370371.12762962961.72894529672.011.091.78433685461.9449271715
0.1040752760.19247213620.1063681780.09307350890.07480443640.07817924611.991.11.74885252481.9237377773
asphrightwidth0.04622006140.06633777120.0452178831.930.9621.94903679591.8749733977
651.7289452.01371.127631.840.9141.9560351051.787816086
751.7672982.113751.1607191.90.9271.99309083071.8475952001
851.7457792.14691.2079232.113751.160718751.7672978419
951.532.21.440.10397735490.09675250580.0842191389
0.04919094260.08335568440.0476541853
temptimeetched at 40% TMAH
955
908
8511.25
7518.33
6531.25
Sheet1
Sheet2
Temperature (oC)
Emitter Height and Width (mm) and Aspect Ratio
Sheet3
- Effect of Oxidation Sharpening30 min.60 min.120 min.240 min.Extended oxidation (>60 min.)No appreciable change in tip radiusTip height decreasesShort time oxidation (
-
Diamond Film GrowthArrayClose-upNanocrystal diamond slurry seeding 0.5-2% CH4 in H2 1 kW microwave power 35 Torr chamber pressure 600oC substrate temperature 5-30 minutes growth timeOptimized process conditions:IV. Results and Discussion
-
Diamond film grown for 30 minutes without bias using various methane (CH4) concentrations0.5% CH41% CH42% CH4IV. Results and Discussion
-
0.5% CH41% CH42% CH4IV. Results and DiscussionDiamond film grown for 30 minutes with -150 V bias using various methane (CH4) concentrations
-
Diamond Growth RateHigh CH4 concentration increasesdiamond growth rate
Negative bias reduces diamond growth rateWithout biasWith biasIV. Results and Discussion
Chart1
00
0.20.2
0.760.655
10.82
1.51.1
44
88
1010
CH4 concentration (%)
Diamond growth rate (mm/hour)
Sheet1
CH4 (%)size (30 min)size (30 min)
0
0.2
0.50.760.6550.380.3275
110.820.50.41
21.51.10.750.55
4
8
10
NO biasBias (-150)NO biasBias (-150)
d9232d9241
d9231d9240
d9233d9239
Sheet1
CH4 concentration (%)
Diamond growth rate (mm/hour)
Sheet2
Sheet3
-
Raman SpectroscopyDiamond film grown withoutbias shows a diamond peakat 1332 cm-1 and sp2 non-diamond carbon around 1500 cm-1
0.5% CH41% CH42% CH4Diamond film grown with -150 V bias shows no diamond peak but a broad band amorphous carbon signal
0.5% CH41% CH42% CH41332 cm-1IV. Results and Discussion
Chart2
149901603318286
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