Development of the X-ray Timing and Polarization telescope...

Institute of Precision Optical Engineering2014.12.11

Development of the X-ray Timing and

Polarization telescope optics

Zhanshan Wang, Xin Wang, Zhengxiang Shen, Baozhong Mu, Xinyan

Yang, Li Jiang, Runze Qi, Mingwu Wen, Zhong Zhang, Bin Ma

Institute of Precision Optical Engineering

School of Physics Science and Engineering

Tongji University, Shanghai 200092, China

Outline Fabrication procedure of telescope of XTP

Fabrication of ultrathin glass substrates

Alignment and Integration of telescope

Summary and outlook


The X-ray Timing and Polarization (XTP) mission, proposed

by IHEP, is currently being developed in China to explore

some main physical problems by observing the Black Holes

and other compact objects.

1. X-ray Timing and Polarization(XTP) project


Coat Glass Mount Glass X-ray CharacterizationSlump Glass

① Fabrication of ultrathin glass substrates

② Deposition of depth-graded multilayers

③ Alignment and Integration of telescope

④ X-ray characterization


1. Fabrication procedure of telescope of XTP

2014.12.11

2. Fabrication of ultrathin glass substrates

Direct Slumping Glass Technique

• Internal size of Oven: 60cm×60cm

• Maximum temperature: 1287C

• Uniformity of temperature: ~1°C




Pt release layer Pt film was deposited by magnetron sputtering technique

Thickness of Pt film: 10nm, 15nm, 50nm

Thickness of Pt layer measured by XRD

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Pt release layer

After thermal cycle Pt film was peeled off from the mould

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0 1 2 3 4 5 6 7 8 9 10 11 12 130

100

200

300

400

500

600

500

Tem

pe

ratu

re(C

)

Time(hour)

SP

Thermal cycle for slumping glass

560



Pt/Cr release layer Parameters of Pt/Cr film Pt: 50nm; Cr: 5nm

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0 1 2 3 4 5 6 7 8 9 10 11 12 130

100

200

300

400

500

600

500

Te

mpe

ratu

re(C

)

Time(hour)

SP

Thermal cycle for slumping glass

560



Pt/Cr release layer

Parameters of Pt/Cr film

Pt: 50nm; Cr: 5nm

Before slumping-Mould After slumping-Mould

Before slumping-Glass After slumping-Glass

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Pt/Cr release layer Surface roughness of Pt/Cr mould

Rq/nm Sit1 Sit2 Sit3 Sit4 Sit5 Sit6 average

50×-before 0.65 0.60 0.68 0.57 0.67 0.64 0.64

50×-after 3.35 3.22 3.07 3.03 2.62 3.44 3.12

Before slumping-Mould After slumping-Mould

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Pt/Cr release layer Surface roughness of slumped glass

Before slumping-Glass After slumping-Glass

Rq/nm Sit1 Sit2 Sit3 Sit4 Sit5 Sit6 average

50×-before 0.48 0.47 0.49 0.49 0.48 0.48 0.48

50×-after 6.63 6.6 9.53 8.96 9.09 8.83 8.27

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Pt/Cr release layer Parameters of Pt/Cr film

Pt: 50nm; Cr: 3.5nm, 2.5nm, 1.5nm

Pictures of mould and glass

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Micrographs and roughness of glass after slumping

Cr: 3.5nm Cr: 2.5nm Cr: 1.5nm

Contaminants were reduced obviously by decreasing the thickness of Cr film

0.55nm1.53nm3.70nm

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Pt/Cr release layer

Thickness of thin films

Deposition parameters of thin films

Pt: 50nm; Cr: ~1nm

Working pressure: 6mTorr, 8mTorr, 12mTorr, 15mTorr, 20mTorr

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Interferometry test with CGH compensator

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3D Coordinate Measuring Machine

The accuracy is less than 0.3+L/800 micronThe accuracy is less than 0.3+L/800 micron

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New Magnetron Sputtering Coater for XTP

Substrate holder

target

Deposition on slumping glass, or deposition on cylindrical glass mandrel

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High quality multilayers + fast production

Small interface roughness High deposition rate/ uniformity

Opening width

Smaller opening width - smaller roughness

Sample plate

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4 6 8 10 12 14 16 183

4

5

6

7

8

9

10

Rou

ghness

(A

)

opening width (cm)



Target mask: further reduce the sputtering width

Reasonable roughness with <6.5cm width

Sample positions

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0 1 2 3 4

100

101

102

103

104 Measured fitting

Ref

ectivi

ty

theta

dw=3.18nm, roughness=0.45nmdsi=3.71nm, roughness=0.38nm



5% thickness uniformity within 32cm area

Opening width (sample plate)<12cmdeposition speed drops dramatically

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4 6 8 10 12 14 16 18

0.5

0.6

0.7

0.8

0.9

1.0

1.1

1.2

depo

sitio

n (r

otat

ion)

spe

ed

opening width (cm)

0 40 80 120 160 200

0.70

0.75

0.80

0.85

0.90

0.95

1.00

norm

aliz

ed d

L(mm)

mask width 2.4cm 3.5cm 4.5cm 6.5cm 8.7cm



W/Si depth-graded multilayer, N=200150mm x ~70mm (opening angle 60d)

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0.0 0.5 1.0 1.5 2.010-4

10-3

10-2

10-1

100

R

theta

G0.4d 10keV design 10keVmeasured

0.0 0.5 1.0 1.5 2.0

10-4

10-3

10-2

10-1

100

R

theta

G0.4d 8keV design 8keVmeasured

0.0 0.2 0.4 0.6 0.8 1.0

10-3

10-2

10-1

100

R

theta

G0.4d 18keV design 18keV measured



Uniform coating for 30deg angular area

Chi=0d

Chi=15d

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0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.410-5

10-4

10-3

10-2

10-1

100

Refec

tivity

theta

D2 18keV Chi-0 deg Chi-5 deg Chi-10 deg Chi-15 deg

3 Alignment and Integration of telescope

Integration method Integration machine


1. Mandrel Fabrication and Test

1. Mandrel Fabrication and Test

2. Epoxy degassing and mixture

2. Epoxy degassing and mixture

3. Put the epoxy into a syringe

3. Put the epoxy into a syringe

4. Put the graphite rod into guiding shoes

4. Put the graphite rod into guiding shoes

5. Paste epoxy on the graphite rod


6. Glue the graphite rod to slumping glass

6. Glue the graphite rod to slumping glass

7. Cure the epoxy7. Cure the epoxy 8. Machining the graphite rod

8. Machining the graphite rod



10. Put the slumping glass on the graphite rod

10. Put the slumping glass on the graphite rod11. Cure the epoxy11. Cure the epoxy12. Measure the

performance of the glass12. Measure the

performance of the glass


The process of integration of telescope



Device of epoxy degassing and mixture

Pasting device of epoxy Glass rods with same thickness



Graphite rods with same thickness



4. Summary and outlook

Ultrathin glass substrates for XTP telescopes have been primarily fabricated.

Plane telescope has been assembled.

Depth graded multilayers has been made.

Improvement should be done for making ultrathin glass substrates, depth graded multilayers.

The prototype XTP telescope should be fabricated soon.

Characterization of substrates, multilayers and prototype telescope.

2014.12.11

Thanks for your attention!

• IPOE multilayer group, Tongji University, China• Zhang Shuannan, Lu Fangjun, Dong Yongwei in IHEP • BSRF, SSRF, NSRL

Acknowledgements

Natural Science Foundation of China

National 863 High Technology Program

Strategic Priority Research Program on Space Science, the Chinese Academy of Sciences


Development of the X-ray Timing and Polarization telescope...

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