DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on...
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![Page 1: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/1.jpg)
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DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES
Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon
Membranes
12/10/2014 CERN PH-DT-EO
![Page 2: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/2.jpg)
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Measurement devices
• displacement measurement
• load measurement
• optical table
12/10/2014 CERN PH-DT-EO
![Page 3: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/3.jpg)
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12/10/2014 CERN PH-DT-EO
![Page 4: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/4.jpg)
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CSEM Machine
• PI linear stage
• 17 mm travel• ~ 1 um accuracy
• Load cell
• 2N range, 0.1mN accuracy• 20N range, 1mN accuracy
12/10/2014 CERN PH-DT-EO
![Page 5: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/5.jpg)
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New Machine
• Linear measurement
• travel range : > 1 mm• resolution/incremental motion: 0.1 um
• Load cell
• ~ 1-25 N range• 0.5 mN accuracy
12/10/2014 CERN PH-DT-EO
![Page 6: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/6.jpg)
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Displacement
• type of test : apply displacement, measure load.
• type of devices
• linear actuator
• linear stage
12/10/2014 CERN PH-DT-EO
![Page 7: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/7.jpg)
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Linear actuator
12/10/2014 CERN PH-DT-EO
Advantages
• Simple geometry
• Allows an on-axis motion at all times
• Have good enough specifics
• Easy to mount
• Easy to replace
• Reasonable prices
Price ~ 3’000 CHF
![Page 8: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/8.jpg)
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Linear Actuator• Drawbacks
• More compliance in fixing method
• Compliance in mounting device
• Alignment problem (angular)
• Smaller travel ranges
• 50 N might introduce bending forces
• None linear encoder : backlash
12/10/2014 CERN PH-DT-EO
![Page 9: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/9.jpg)
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Linear Actuator• Solutions
• Hole
• “Meplas”
BUT
• Feasible?
• Loses precision?
12/10/2014 CERN PH-DT-EO
![Page 10: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/10.jpg)
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Linear Actuator• Solutions
• external device
• Feasible
• Compliance
• Small alignment error
12/10/2014 CERN PH-DT-EO
![Page 11: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/11.jpg)
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Piezo actuators
• very good precision
• good temperature ranges
• easy to mount and use
• price ranges affordable
BUT
• travel range NOT enough (10s of microns)
12/10/2014 CERN PH-DT-EO
Price ~ 2-4’000 CHF
![Page 12: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/12.jpg)
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Micro positioning stages
• some avoid the alignment problem
• very easy to mount
• stiffness
BUT
• load just not enough
12/10/2014 CERN PH-DT-EO
Price ~ 15’000 CHF
![Page 13: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/13.jpg)
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Piezo scanning stages
• Very good precision
• Possible to mount them on axis
BUT
• Travel range too small (38 um)
12/10/2014 CERN PH-DT-EO
Price ~ 9’000 CHF
![Page 14: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/14.jpg)
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Nano positioning stages
• Very good precision
• Easy to mount, or re-use
• Stiffness and “high loads”
• Long travel ranges
BUT
• Out-of-axis loading problem
12/10/2014 CERN PH-DT-EO
Price ~ 10’000 CHF
![Page 15: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/15.jpg)
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Nano positioning stage
• How to deal with the out of axis load?
• external device
• compliance
• adds weight to the load
12/10/2014 CERN PH-DT-EO
![Page 16: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/16.jpg)
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Load Cells
• Positioning of the load cell
• on the actuator side non alignment problem again
• on the support :
• easy to fix• easy to align• easily changeable
12/10/2014 CERN PH-DT-EO
![Page 17: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/17.jpg)
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Load Cells
• Type of load cell
• “donut type”
• avoids alignment problems
• Easy to fix
• stiffer than others
12/10/2014 CERN PH-DT-EO
![Page 18: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/18.jpg)
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Optical Tables
• Gives a high flexibility in positioning
• Not too expensive (so far)
• Probably better than rails
12/10/2014 CERN PH-DT-EO
![Page 19: DESIGN OF A TESTING MACHINE FOR MICRO-DEVICES Follow up to Clément Gabry’s master thesis on Structural Resistance of Silicon Membranes 1 12/10/2014CERN.](https://reader035.fdocuments.in/reader035/viewer/2022062716/56649dc65503460f94aba134/html5/thumbnails/19.jpg)
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Next step
• Modeling and analysis of errors
• influence of the notch-load non alignment
• influence of the out of axis load
• influence of the importance of symmetry
• influence of temperature on (optical) table and devices
12/10/2014 CERN PH-DT-EO