DC & CV Lab.DC & CV Lab.CSIE NTU

AOI

Automatic Optical Inspection Supports quality control objectives through

in-process inspection that identifies critical defects

Helps prevent recurrence of critical defects by indicating possible process-related sources of error

DC & CV Lab.DC & CV Lab.CSIE NTU

Basic Structure of AOI Platform

DC & CV Lab.DC & CV Lab.CSIE NTU

Basic Steps

Alignment Observed object moves along the path at constant

speed CCD (Charge Coupled Device) cameras scan the

object Analyze the image data, calculate the size, position,

and the type of the defects on the object Move review cameras to the defect and get the

detail

DC & CV Lab.DC & CV Lab.CSIE NTU

DC & CV Lab.DC & CV Lab.CSIE NTU

InVision

An in-line AOI platform by Orbotech

http://www.orbotech.com In-line: seamless with the product line

DC & CV Lab.DC & CV Lab.CSIE NTU

Spec.

DC & CV Lab.DC & CV Lab.CSIE NTU

Standard Features

Auto stack comparison Real time classification Video classification system Video image grabbing

DC & CV Lab.DC & CV Lab.CSIE NTU

Inspection Methods

Periodic area/periodic connector area: comparison of pixel with neighboring pixels

Non-periodic connector area: die-to-die

DC & CV Lab.DC & CV Lab.CSIE NTU

Illumination

Solid-state LED (Light-Emitting Diode)-based system

Why LED? Long life and reliability Provides different levels of intensity and

evenness of illumination

DC & CV Lab.DC & CV Lab.CSIE NTU

Classification

Based on a sub-micron-resolution real RGB (Red, Green, Blue) video image

Can do go/no-go testing to different channels

DC & CV Lab.DC & CV Lab.CSIE NTU

Contactless Transport Mechanism

The glass is floated at a stable height on a layer of air above the table, avoiding all backside contact

Minimizes contamination, scratching and electrostatic damage

Results in much smoother motion than conventional transport mechanisms