Data Analysis for Semiconductor Manufacturing
-
Upload
puwen-ning -
Category
Documents
-
view
226 -
download
0
Transcript of Data Analysis for Semiconductor Manufacturing
Puwen Ning
Data Analysis for Semiconductor Manufacturing
2SMIC Confidential
All copyrights and IP belong to SMIC. For reference only and may not be copied or distributed without written permission from SMIC. SMIC shall not be responsible for any party’s reliance on these materials.
Semiconductor Manufacturing In A Nutshell1. Silicon
4. Chip
5. Product3. Wafer2. Manufacturing
3SMIC Confidential
All copyrights and IP belong to SMIC. For reference only and may not be copied or distributed without written permission from SMIC. SMIC shall not be responsible for any party’s reliance on these materials.
Semiconductor Manufacturing Data Sources
WIP: Product Visibility
• Wafer fab, Probe, FM and Test WIP• Foundry, Subcon and In-transit WIP• Starts/Ships/Inventory/History• Wafer Slot Tracking• Cycle time/planning Information• Process Flow
Equipment: Performance Optimization
• Equipment State Changes• Alarms and Events• Process Data Detail and Summary• Chamber Wafer Tracking• Maintenance Events
Measurement: Yield Acceleration
• In-process Metrology Readings• Class Probe Results• Unit Probe Results• Final Test Results• Coordinate Mapping
Data Presentation: •Information Integration
Enterprise Data Warehouse
AIM Extract/Transform/Load Integration Layer
AIM Manufacturing Data Distribution Layer
Wafer fab Probe Final Assembly Test
4SMIC Confidential
All copyrights and IP belong to SMIC. For reference only and may not be copied or distributed without written permission from SMIC. SMIC shall not be responsible for any party’s reliance on these materials.
Data Analysis for Yield Improvement• The ideal goal of the semiconductor manufacturing processes is to make each individual
integrated circuit perform to specification• However, physical defects induced during processing and variation in processing
causes some individual integrated circuits to fail to perform to specification• The ratio of individual integrated circuits that perform to specification, “good”, to the total
number of circuits is called “yield”
• In addition to monitoring and controlling processing, Yield Analysis Engineering is key to identifying why integrated circuits do not perform to specification
Low Yield Wafer AnalysisLow Yield Wafer Map
5SMIC Confidential
All copyrights and IP belong to SMIC. For reference only and may not be copied or distributed without written permission from SMIC. SMIC shall not be responsible for any party’s reliance on these materials.
Benefit
Yield Improvement translates to Cost Savings, and Revenue Increasing
Thank You