CVD Cu2O and CuO Nanosystems Characterized by XPS

11
CVD Cu 2 O and CuO Nanosystems Characterized by XPS Davide Barreca ISTM-CNR and INSTM - Padova University, Department of Chemistry, Via Marzolo, 1, Padova, 35131, Italy Alberto Gasparotto a and Eugenio Tondello Padova University and INSTM, Department of Chemistry, Via Marzolo, 1, Padova, 35131, Italy Received 14 July 2008; accepted 24 March 2009; published 22 July 2009 In the present investigation, X-ray photoelectron and X-ray excited Auger electron spectroscopy analyses of the principal core levels O1s, Cu 2p, and Cu LMM of Cu 2 O and CuO nanosystems are proposed. The samples were obtained by chemical vapor deposition starting from a novel second-generation copperII precursor, Cuhfa 2 ·TMEDA hfa1,1,1,5,5,5-hexafluoro- 2,4-pentanedionate; TMEDAN,N,N’,N’- tetramethylethylenediamine, under a dry O 2 atmosphere. The obtained route led to pure, homogeneous and single-phase CuI and CuII oxide nanosystems at temperatures of 300 and 500 °C, respectively, whose chemical nature could be conveniently distinguished by analyzing the Cu 2p band shape and position, as well as by evaluating the Auger parameters. The samples were characterized by O/Cu atomic ratios greater than the expected stoichiometric values, due to marked interactions with the outer atmosphere attributed to their high surface-to-volume ratio. © 2006 American Vacuum Society. DOI: 10.1116/11.20080701 Keywords: Cu 2 O; CuO; nanosystems; CVD; X-ray photoelectron spectroscopy PACS: 8116-c, 8115Gh, 7960Jv, 6146-w, 7322-f, 6150Nw Accession #s: 1052 and 1053 Technique: XPS Host Material: #01052: Cu 2 O supported nanosystem; #01053: CuO supported nanosystem Instrument: Perkin-Elmer Physical Electronics, Inc. 5600ci Major Elements in Spectra: C, O, Cu Minor Elements in Spectra: none Published Spectra: 8 Spectra in Electronic Record: 12 Spectral Category: technical INTRODUCTION Cu 2 O and CuO are nontoxic, abundant and inexpensive p-type semiconductors with direct bandgap values of 2.1 and 1.2 eV, respectively Refs. 14. While the former crystallizes in a cubic structure with a lattice parameter of 4.27 Å, CuO is monoclinic with lattice parameters of a4.684 Å, b3.425 Å, c5.129 Å, and 99.28° Ref. 5. To date, both copper oxides represent attractive candidates for applications in various fields, including heterogeneous catalysis, magnetic storage media, thermoelectric, photothermal and photoconductive materials, solar energy conver- sion, gas sensing devices and anodes for Li-ion batteries Refs. 13 and 511. To this regard, a great effort has recently been devoted to devising proper synthetic strategies to nano- or submicrometer-sized Cu 2 O and CuO systems Refs. 2, 3, and 913, since it is well recognized that the size- and shape- dependent properties characterizing nanostructured materials can open broad perspectives for the improvement of functional prop- erties in several of the above applications. In recent years, our research group has devoted several efforts to the sol-gel synthesis of Cu-, Cu 2 O-, and CuO-based nanosys- tems either thin films or composites with tailored characteristics Refs. 4, 13, and 14. Based on previous results, the present work is the first part of a research project aimed at the chemical vapor deposition CVD/Sol-Gel development of Cu-Ti-O nanocompos- ites with tailored characteristics in view of eventual applications as innovative electrodes in lithium-ion batteries. Despite the use of copper oxides in these applications has already been reported Refs. 68 and 15, the use of the above nanosystems opens at- tractive perspectives for forefront research activities in the field. As a part of the ongoing investigation, we first focused our attention on a CVD route towards Cu-O nanosystems with tai- lored structure, composition, and morphology, with the aim of identifying the optimal operating conditions for the preparation of pure Cu 2 O and CuO samples. Cuhfa 2 ·TMEDA, a complex pos- sessing favorable characteristics for CVD use, has been adopted for the first time as a copper molecular source. The obtained samples were characterized by a multitechnique approach, namely by glancing-incidence X-ray diffraction GIXRD, field emission- scanning electron microscopy FE-SEM, Fourier transform infra- red spectroscopy FT-IR, X-ray photoelectron XPS, and X-ray excited Auger electron XE-AES spectroscopies. To this regard, the combined use of XPS and XE-AES was a powerful analytical tool in order to discriminate between copperI and copperII- containing oxides. In this contribution, relevant data pertaining to two representative single-phase specimens deposited on Si100 substrates are analyzed. SPECIMEN DESCRIPTION ACCESSION #01052, 1 OF 2Host Material: Cu 2 O CAS Registry #: 1317-39-1 Host Material Characteristics: homogeneous; solid; polycrystal- line; semiconductor; inorganic compound; see As Received Condition Chemical Name:: copperI oxide Source: sample obtained by chemical vapor deposition CVD on Si100 Host Composition: Cu, O Form: supported nanosystem Lot #: CuO18 Structure: The GIXRD pattern of the sample, recorded at an in- cidence angle of 0.5°, presented two signals located at 2 36.3° and 242.2° that could be attributed to the 111 and 200 reflections of cubic Cu 2 O cupriteRef. 16. The mean a Author to whom correspondence should be addressed. Surface Science Spectra, Vol. 14, 2007 © 2006 American Vacuum Society 41 1055-5269/2007/14(1)/41/11/$23.00

Transcript of CVD Cu2O and CuO Nanosystems Characterized by XPS

Page 1: CVD Cu2O and CuO Nanosystems Characterized by XPS

CVD Cu2O and CuO NanosystemsCharacterized by XPSDavide BarrecaISTM-CNR and INSTM - Padova University, Department of Chemistry, Via Marzolo, 1, Padova,35131, Italy

Alberto Gasparottoa� and Eugenio TondelloPadova University and INSTM, Department of Chemistry, Via Marzolo, 1, Padova, 35131, Italy

�Received 14 July 2008; accepted 24 March 2009; published 22 July 2009�

In the present investigation, X-ray photoelectron and X-ray excited Auger electron spectroscopyanalyses of the principal core levels �O 1s, Cu 2p, and Cu LMM� of Cu2O and CuO nanosystemsare proposed. The samples were obtained by chemical vapor deposition starting from a novelsecond-generation copper�II� precursor, Cu�hfa�2·TMEDA �hfa�1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA�N,N,N’,N’- tetramethylethylenediamine�, under a dry O2atmosphere. The obtained route led to pure, homogeneous and single-phase Cu�I� and Cu�II� oxidenanosystems at temperatures of 300 and 500 °C, respectively, whose chemical nature could beconveniently distinguished by analyzing the Cu 2p band shape and position, as well as by evaluatingthe Auger parameters. The samples were characterized by O/Cu atomic ratios greater than theexpected stoichiometric values, due to marked interactions with the outer atmosphere attributed totheir high surface-to-volume ratio. © 2006 American VacuumSociety. �DOI: 10.1116/11.20080701�

Keywords: Cu2O; CuO; nanosystems; CVD; X-ray photoelectron spectroscopy

Accession #s: 1052 and 1053

Technique: XPS

Host Material: #01052: Cu2Osupported nanosystem;#01053: CuO supportednanosystem

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Major Elements in Spectra: C, O,Cu

Minor Elements in Spectra: none

Published Spectra: 8

Spectra in Electronic Record: 12

Spectral Category: technical

PACS: 8116-c, 8115Gh, 7960Jv, 6146-w, 7322-f, 6150Nw

INTRODUCTION

Cu2O and CuO are nontoxic, abundant and inexpensive p-typesemiconductors with direct bandgap values of 2.1 and 1.2 eV,respectively �Refs. 1–4�. While the former crystallizes in a cubicstructure with a lattice parameter of 4.27 Å, CuO is monoclinicwith lattice parameters of a�4.684 Å, b�3.425 Å, c�5.129 Å,and ��99.28° �Ref. 5�. To date, both copper oxides representattractive candidates for applications in various fields, includingheterogeneous catalysis, magnetic storage media, thermoelectric,photothermal and photoconductive materials, solar energy conver-sion, gas sensing devices and anodes for Li-ion batteries �Refs.1–3 and 5–11�. To this regard, a great effort has recently beendevoted to devising proper synthetic strategies to nano- orsubmicrometer-sized Cu2O and CuO systems �Refs. 2, 3, and9–13�, since it is well recognized that the size- and shape-dependent properties characterizing nanostructured materials canopen broad perspectives for the improvement of functional prop-erties in several of the above applications.

In recent years, our research group has devoted several effortsto the sol-gel synthesis of Cu-, Cu2O-, and CuO-based nanosys-tems �either thin films or composites� with tailored characteristics�Refs. 4, 13, and 14�. Based on previous results, the present workis the first part of a research project aimed at the chemical vapordeposition �CVD�/Sol-Gel development of Cu-Ti-O nanocompos-ites with tailored characteristics in view of eventual applicationsas innovative electrodes in lithium-ion batteries. Despite the useof copper oxides in these applications has already been reported�Refs. 6–8 and 15�, the use of the above nanosystems opens at-tractive perspectives for forefront research activities in the field.

As a part of the ongoing investigation, we first focused ourattention on a CVD route towards Cu-O nanosystems with tai-

a�

Author to whom correspondence should be addressed.

Surface Science Spectra, Vol. 14, 2007 1055-5269/2007/14(1)

lored structure, composition, and morphology, with the aim ofidentifying the optimal operating conditions for the preparation ofpure Cu2O and CuO samples. Cu�hfa�2·TMEDA, a complex pos-sessing favorable characteristics for CVD use, has been adoptedfor the first time as a copper molecular source. The obtainedsamples were characterized by a multitechnique approach, namelyby glancing-incidence X-ray diffraction �GIXRD�, field emission-scanning electron microscopy �FE-SEM�, Fourier transform infra-red spectroscopy �FT-IR�, X-ray photoelectron �XPS�, and X-rayexcited Auger electron �XE-AES� spectroscopies. To this regard,the combined use of XPS and XE-AES was a powerful analyticaltool in order to discriminate between copper�I� and copper�II�-containing oxides. In this contribution, relevant data pertaining totwo representative single-phase specimens deposited on Si�100�substrates are analyzed.

SPECIMEN DESCRIPTION „ACCESSION #01052, 1 OF 2…

Host Material: Cu2O

CAS Registry #: 1317-39-1

Host Material Characteristics: homogeneous; solid; polycrystal-line; semiconductor; inorganic compound; see As ReceivedCondition

Chemical Name:: copper�I� oxide

Source: sample obtained by chemical vapor deposition �CVD� onSi�100�

Host Composition: Cu, O

Form: supported nanosystem

Lot #: CuO18

Structure: The GIXRD pattern of the sample, recorded at an in-cidence angle of 0.5°, presented two signals located at 2��36.3° and 2��42.2° that could be attributed to the �111� and

�200� reflections of cubic Cu2O �cuprite� �Ref. 16�. The mean

© 2006 American Vacuum Society 41/41/11/$23.00

Page 2: CVD Cu2O and CuO Nanosystems Characterized by XPS

crystallite size was �10 nm. No appreciable preferential ori-entations were detected.

History & Significance: The synthesis of the Cu�hfa�2·TMEDAcomplex used as precursor for the Cu-O nanostructures�99.99%� has been performed based on a previous literatureprocedure �Ref. 17�.

The sample was grown in an electronic grade O2 atmo-sphere by means of a cold-wall reduced pressure CVD appa-ratus. The custom-built reaction system �Refs. 18 and 19� con-sisted of a quartz chamber, equipped with a resistively heatedsusceptor and an external reservoir for the precursor vaporiza-tion. Mass transport of the precursor vapors to the depositionzone was performed by a 100 � 1 sccm O2 flow, while asupplementary oxygen flow of 100 � 1 sccm was introducedin the vicinity of the substrate surface. The deposition wasperformed on p-type Si�100� �MEMC®, Merano, Italy� at300 °C. Prior to the experiment, the substrate wafer was de-greased in dichloromethane, rinsed in 2-propanol and finallyetched in an aqueous HF solution �2%� for 3 min, in order toremove the native oxide layer from its surface. The precursorvaporization temperature, total pressure and experiment dura-tion were set at 70 °C, 10 mbar, and 120 min, respectively. Toavoid undesired condensation phenomena, the gas lines con-necting the water and precursor reservoirs to the reactionchamber were heated to 120 °C.

The obtained specimen was homogeneous, with a pink-bluish color.

As Received Condition: as grown

Analyzed Region: same as host material

Ex Situ Preparation/Mounting: sample mounted as received witha metallic clip to grounded sample holder and introduced intothe analysis chamber through a fast entry lock system

In Situ Preparation: none

Pre-Analysis Beam Exposure: The analyzed region was exposedto X-ray irradiation for alignment for a period no longer than 5min.

Charge Control: none

Temp. During Analysis: 298 K

Pressure During Analysis: �1 � 10�7 Pa

SPECIMEN DESCRIPTION „ACCESSION #01053, 2 OF 2…

Host Material: CuO

CAS Registry #: 1317-38-0

Host Material Characteristics: homogeneous; solid; polycrystal-line; semiconductor; inorganic compound; see As ReceivedCondition

Chemical Name:: copper�II� oxide

Source: sample obtained by chemical vapor deposition �CVD� onSi�100�

Host Composition: Cu, O

Form: supported nanosystem

Lot #: CuO14

Structure: The GIXRD pattern of the sample, recorded at an in-cidence angle of 0.5°, was characterized by reflections cen-tered at 2��35.5°, 38.7° and 48.8°, related respectively to the

¯ ¯

�002�/�111�, �111� and �202� planes of monoclinic CuO �teno-

42 Surface Science Spectra, Vol. 14, 2007

rite� �Ref. 20�. The average crystallite size was �10 nm. Simi-larly to the previous specimen, no appreciable preferential ori-entations were detected.

History & Significance: The sample was deposited by CVD start-ing from Cu�hfa�2·TMEDA under an oxygen atmosphere, inthe same conditions as the previous one �see description forAccession #1052�, except for the growth temperature that waskept at 500 °C. A uniform, brown-black and opaque depositwas obtained.

As Received Condition: as grown

Analyzed Region: same as host material

Ex Situ Preparation/Mounting: sample mounted as received witha metallic clip to grounded sample holder and introduced intothe analysis chamber through a fast entry lock system

In Situ Preparation: none

Pre-Analysis Beam Exposure: The analyzed region was exposedto X-ray irradiation for alignment for a period no longer than 5min.

Charge Control: none

Temp. During Analysis: 298 K

Pressure During Analysis: �1 � 10�7 Pa

INSTRUMENT DESCRIPTION

Manufacturer and Model: Perkin-Elmer Physical Electronics,Inc. 5600ci

Analyzer Type: spherical sector

Detector: multi-channel detector, part number 619103

Number of Detector Elements: 16

INSTRUMENT PARAMETERS COMMON TO ALLSPECTRA

� Spectrometer

Analyzer Mode: constant pass energy

Throughput „T�E N…: 0

Excitation Source Window: 1.5 µm Al window

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Beam Size: 25000 µm �25000 µm

Signal Mode: multichannel direct

� Geometry

Incident Angle: 9°

Source to Analyzer Angle: 53.8°

Emission Angle: 45°

Specimen Azimuthal Angle: 0°

Acceptance Angle from Analyzer Axis: 0°

Analyzer Angular Acceptance Width: 14° � 14°

� Ion Gun

Manufacturer and Model: PHI 04-303A

Cu2O and CuO Nanosystems by XPS

Page 3: CVD Cu2O and CuO Nanosystems Characterized by XPS

Energy: 3000 eV

Current: 0.4 mA/cm2

Current Measurement Method: Faraday Cup

Sputtering Species: Ar

Spot Size „unrastered…: 250 µm

Raster Size: 2000 µm � 2000 µm

Incident Angle: 40°

Polar Angle: 45°

Azimuthal Angle: 111°

Comment: differentially pumped ion gun

DATA ANALYSIS METHOD

Energy Scale Correction: For both samples, no charging phe-nomena were detected.

Recommended Energy Scale Shift: 0

Peak Shape and Background Method: After a Shirley-typebackground subtraction �Ref. 26�, peak positions and widthswere determined from a least-square fitting procedure, adopt-ing Gaussian/Lorentzian functions.

Quantitation Method: The atomic concentrations were calculatedby using sensitivity factors taken from standard PHI V5.4Asoftware. The peak areas were measured above an integratedbackground.

ACKNOWLEDGMENTS

This work was financially supported by CNR-INSTM PROMOand CARIPARO Foundation within the project “Multi-layer opti-cal devices based on inorganic and hybrid materials by innovativesynthetic strategies”. Thanks are due to Mr. Loris Calore, Dr. Rob-erta Saini �Padova University� and Mr. Antonio Ravazzolo�ISTM-CNR� for valuable help in the synthesis and characteriza-tion of the precursor compound.

REFERENCES

1. Y. C. Zhang, J. Y. Tang, G. L. Wang, M. Zhang, and X. Y.Hu, J. Cryst. Growth 294, 278 �2006�.

2. M. Yang and J. -J. Zhu, J. Cryst. Growth 256, 134 �2003�.3. X. Wang, G. Xi, S. Xiong, Y. Liu, B. Xi, Y. Yu, and Y. Qian,

Cryst. Growth Des. 7, 930 �2007�.4. L. Armelao, D. Barreca, M. Bertapelle, G. Bottaro, C. Sada,

and E. Tondello, Thin Solid Films 442, 48 �2003�.

Surface Science Spectra, Vol. 14, 2007

5. D. Chauan, V. R. Satsangi, S. Dass, and R. Shrivastav, Bull.Mater. Sci. 29, 709 �2006�.

6. J. Morales, L. Sànchez, F. Martìn, J. R. Ramos-Barrado, andM. Sànchez, Thin Solid Films 474, 133 �2005�.

7. J. Morales, L. Sànchez, S. Bijani, L. Martínez, M. Gabás, andJ. R. Ramos-Barrado, Electrochem. Solid State Lett. 8, A159�2005�.

8. S. Bijani, M. Gabás, L. Martínez, J. R. Ramos-Barrado, J.Morales, and L. Sànchez, Thin Solid Films 515, 5505�2007�.

9. Y. Liu, L. Liao, J. Li, and C. Pan, J. Phys. Chem. C 111,5050 �2007�.

10. W. -T. Yao, S. -H. Yu, Y. Zhou, J. Jiang, Q. -S. Wu, L. Zhang,and J. Jiang, J. Phys. Chem B 109, 14011 �2005�.

11. M. Kaur, P. Muthe, S. K. Despande, S. Choudhury, J. B.Singh, N. Verma, S. K. Gupta, and J. V. Yakhami, J. Cryst.Growth 289, 670 �2006�.

12. U. S. Chen, Y. L. Chueh, S. H. Lai, L. J. Chou, and H. S.Shih, J. Vac. Sci. Technol. B 24, 139 �2006�.

13. L. Armelao, D. Barreca, G. Bottaro, G. Mattei, C. Sada, andE. Tondello, Chem. Mater. 17, 1450 �2005�.

14. L. Armelao, D. Barreca, M. Bertapelle, G. Bottaro, C. Sada,and E. Tondello, Mater. Res. Soc. Symp. Proc. 737, F8.27.1�2003�.

15. J. Morales, L. Sànchez, F. Martìn, J. R. Ramos-Barrado, andM. Sànchez, Electrochim. Acta 49, 4589 �2004�.

16. Pattern No. 5-667, JCPDS �2000�.17. S. Delgado, A. Muñoz, M. E. Medina, and C. J. Pastor, In-

org. Chim. Acta 359, 109 �2006�.18. D. Barreca, A. Gasparotto, C. Maragno, E. Tondello, and C.

Sada, Chem. Vap. Deposition 10, 229 �2004�.19. D. Barreca, A. Gasparotto, C. Maragno, E. Tondello, E. Bon-

tempi, L. E. Depero, and C. Sada, Chem. Vap. Deposition11, 426 �2005�.

20. Pattern No. 45-937, JCPDS �2000�.21. R. P. Vasquez, Surf. Sci. Spectra 5, 257 �1998�.22. http://srdata.nist.gov/xps23. J. F. Moulder, W. F. Stickle, and K. D. Bomben, Handbook of

X-ray Photoelectron Spectroscopy �Perkin Elmer Corpora-tion, Eden Prairie, MN, 1992�.

24. R. P. Vasquez, Surf. Sci. Spectra 5, 262 �1998�.25. D. Briggs and M. P. Seah, Practical Surface Analysis: Auger

and X-ray Photoelectron Spectroscopy �Wiley, New York,1990�.

26. D. A. Shirley, Phys. Rev. B 5, 4709 �1972�.

Cu2O and CuO Nanosystems by XPS 43

Page 4: CVD Cu2O and CuO Nanosystems Characterized by XPS

SPECTRAL FEATURES TABLE

SpectrumID # Element/

Transition

PeakEnergy„eV…

Peak WidthFWHM„eV…

Peak Area„eV-cts/s…

SensitivityFactor

Concen-tration„at. %…

PeakAssignment

01052-02 C 1s 284.8 2.0 54574 0.296 47.6 advent. surface contamination

01052-03 a O 1s 530.2 1.8 47153 0.711 17.1 lattice oxygen in Cu2O

01052-03 a O 1s 531.6 1.8 38424 0.711 13.9 Adsorbed -OH groups/carbonates

01052-04 Cu 2p3/2 932.3 1.9 ··· ··· ··· Cu�I� in Cu2O

01052-04 Cu 2p1/2 952.2 1.9 ··· ··· ··· Cu�I� in Cu2O

01052-04 Cu 2p ··· ··· 440341 5.321 21.4 Cu�I� in Cu2O

01052-05 b Cu L3M45M45 916.8 ··· ··· ··· ··· Cu�I� in Cu2O

01053-02 C 1s 284.8 2.2 6399 0.296 22.4 advent. surface contamination

01053-03 a O 1s 529.7 1.7 21485 0.711 31.4 lattice oxygen in CuO

01053-03 a O 1s 531.6 2.1 12296 0.711 17.9 Adsorbed -OH groups/carbonates

01053-04 c Cu 2p3/2 933.9 3.2 ··· ··· ··· Cu�II� in CuO

01053-04 c Cu 2p1/2 953.9 3.2 ··· ··· ··· Cu�II� in CuO

01053-04 Cu 2p ··· ··· 145385 5.321 28.3 Cu�II� in CuO

01053-05 b Cu L3M45M45 917.9 ··· ··· ··· ··· Cu�II� in CuO

a The sensitivity factor is referred to the whole O 1s signal.b The peak position is given in KE.c The BE value is referred to the most intense spin-orbit split component.

Footnote to Spectrum 01052-02: While the main C1s component was assigned to adventitious hydrocarbon contamination, the shoulderlocated at Binding Energy �BE��288.5 eV was assigned to surface carbonates �Refs. 23 and 24�, whose presence likely arose by interaction withthe outer atmosphere. The surface C 1s photoelectron signal disappeared after 5’ Ar erosion, suggesting thus that carbon presence could be

attributed to atmospheric contamination and that the precursor had a clean decomposition pattern under the adopted conditions.

Footnote to Spectrum 01052-03: The O 1s surface peak presented a rather broad shape, suggesting the coexistence of different species.Indeed, the signal was fitted by two different bands, located at BE�530.2 eV �full width at half maximum �FWHM��1.8 eV, 55.1% of the totaloxygen� and 531.6 eV �FWHM�1.8 eV, 44.9% of the total oxygen�. While the former can be unequivocally ascribed to lattice oxygen in copper�I�oxide �Refs. 1, 6, 15, and 21–23�, the attribution of the second has been the object of controversy. Many authors assigned the high BE O 1scomponents to oxygen adsorbed on copper oxides �Refs. 2, 3, 9, 10, and 12�, despite contributions from surface -OH groups and carbonatespecies could not be unambiguously ruled out �Refs. 15 and 21–23�. In particular, the presence of carbonates was confirmed by the high BEcomponent of the C 1s peak �see comment to Accession #1052-2�. As a result, the surface O/Cu atomic ratio calculated considering the overalloxygen was 1.4, an appreciably higher value than the one expected for copper�I� oxide, while the O/Cu ratio obtained taking into account the sole

O lattice component at BE�530.2 eV yielded 0.80, a closer value to that pertaining to stoichiometric Cu2O.

Footnote to Spectrum 01052-04: The Cu 2p photoelectron peak was characterized by the absence of well detectable shake-up satellites,that enabled to exclude the presence of Cu�II� in appreciable amounts, suggesting the occurrence of copper�I� oxide �d10, a closed-shell system�

as the dominant specie �Refs. 7, 8, and 25�. Indeed, the Cu 2p3/2 BE value �932.3 eV; FWHM�1.9 eV� was in agreement with previous literaturereports for Cu2O �Refs. 1, 2, 7, 8, 15, and 21�. In addition, its presence could be verified by the evaluation of the Auger alpha parameter,calculated by the sum of Cu 2p3/2 BE and the Cu LMM Auger peak kinetic energy �KE� �alpha�BE�Cu 2p3/2� KE�Cu LMM��1849.1 eV�, that

agreed to a good extent with literature values for copper�I� oxide �Refs. 1, 4, 7, 8, and 21�.

Footnote to Spectrum 01053-02: The C 1s peak tailing towards the high binding energy �BE� side was assigned to the presence of surfacecarbonates �Refs. 23 and 24� arising by interaction with the outer atmosphere. The surface C 1s photoelectron signal fell to noise level after 5’

Ar erosion, suggesting thus that the precursor had a clean decomposition pattern under the adopted conditions.

Footnote to Spectrum 01053-03: Similarly to the results reported for the Cu2O specimen �compare spectrum #1053-03�, the O 1s surfacesignal was fitted by two different bands, located at BE�529.7 eV �FWHM�1.7 eV, 63.6% of the total oxygen� and 531.6 eV �FWHM�2.1 eV,36.4% of the total oxygen�. The former was due to lattice O in CuO �Refs. 6, 14, 15, and 22–24�. As regards the second, it has been ascribed tooxygen adsorbed on copper oxides �Refs. 2, 3, 9, 10, and 12�, despite contributions from surface -OH groups and carbonate species could notbe ruled out �Refs. 14 and 21–24�. In particular, the presence of carbonates was confirmed by the high BE component of the C 1s peak �seecomments to spectra #1052-2 and 1053-2�. As a result, the surface O/Cu atomic ratio calculated considering the overall oxygen was 1.7, a highervalue than the one expected for copper�II� oxide. A similar phenomenon has already been documented for CuO films obtained by spray pyrolisis�Refs. 6 and 15�. Conversely, the O/Cu ratio obtained taking into account the sole O lattice component at BE�529.7 eV yielded 1.1, a closer

value to that pertaining to stoichiometric CuO.

Footnote to Spectrum 01053-04: The Cu 2p photoelectron peak displayed the presence of intense shake-up satellites centered at BE

44 Surface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS

Page 5: CVD Cu2O and CuO Nanosystems Characterized by XPS

values ca. 9.0 eV higher than the main spin-orbit split componentsconfiguration interaction in the final state due to relaxation phenomespecies �Ref. 4, 11–13, and 25�. In addition, the presence of CuO�BE�Cu 2p3/2��933.9 eV; FWHM�3.2 eV� and the Auger alpha paratent with previous reports on copper�II� oxide �Refs. 1, 3, 6, 9, 10, 1

ANALYZER CALIBRATION TABLE

SpectrumID # Element/

Transition

PeakEnergy„eV…

Peak WidthFWHM„eV…

Peak Area„eV-cts/s…

SensitivityFactor

Concen-tration„at. %…

PeakAssignment

01054-01 a Au 4f7/2 84.0 1.4 186403 3.536 ··· metallic gold

01055-01 a Cu 2p3/2 932.7 1.6 86973 3.547 ··· metallic copper

a

The peak was acquired after Ar erosion.

GUIDE TO FIGURES

Spectrum„Accession… #

SpectralRegion

VoltageShift* Multiplier Baseline Comment #

1052-1 survey 0 0 0 1

1052-2 C 1s 0 0 0 1

1052-3 O 1s 0 0 0 1

1052-4 Cu 2p 0 0 0 1

1053-1 survey 0 0 0 2

1053-2 C 1s 0 0 0 2

1053-3 O 1s 0 0 0 2

1053-4 Cu 2p 0 0 0 2

1052-5 �NP�** Cu LMM 0 0 0 1

1053-5 �NP� Cu LMM 0 0 0 2

1054-1 �NP� Au 4f7/2 0 0 0 3

1055-1 �NP� Cu 2p3/2 0 0 0 3

* Voltage shift of the archived �as-measured� spectrum relative to the printed figure. The figure reflects the recommended energy scale correctiondue to a calibration correction, sample charging, flood gun, or other phenomenon.** �NP� signifies not published; digital spectra are archived in SSS database but not reproduced in the printed journal.1. Cu2O2. CuO

. Such satellites, that have been attributed to the occurrence of a strongna, have a diagnostic value as a fingerprint for the presence of d9 copper�II�as the dominant Cu-O phase was further confirmed by the peak positionmeter �alpha�BE�Cu 2p3/2� KE�Cu LMM��1851.8 eV�, that were consis-2, 14, 15, and 24�.

3. Calibration spectrum

Surface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS 45

Page 6: CVD Cu2O and CuO Nanosystems Characterized by XPS

Accession# 01052–01

Host Material Cu2O supported nanosystem

Technique XPS

Spectral Region survey

Instrument Perkin-Elmer Physical Electronics, Inc. 5600ci

Excitation Source Al K�

Source Energy 1486.6 eV

Source Strength 250 W

Source Size 25000 µm �25000 µm

Analyzer Type spherical sector

Incident Angle 9°

Emission Angle 45°

Analyzer Pass Energy: 187.85 eV

Analyzer Resolution 1.9 eV

Total Signal Accumulation Time 101.3 s

Total Elapsed Time 111.5 s

Number of Scans 3

Effective Detector Width 1.9 eV

46 Surface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS

Page 7: CVD Cu2O and CuO Nanosystems Characterized by XPS

� Accession #: 01052–02

� Host Material: Cu2O supportednanosystem

� Technique: XPS

� Spectral Region: C 1s

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:160.8 s

Total Elapsed Time: 176.9 s

Number of Scans: 16

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

� Accession #: 01052–03

� Host Material: Cu2O supportednanosystem

� Technique: XPS

� Spectral Region: O 1s

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:160.8 s

Total Elapsed Time: 176.9 s

Number of Scans: 16

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

Surface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS 47

Page 8: CVD Cu2O and CuO Nanosystems Characterized by XPS

� Accession #: 01052–04

� Host Material: Cu2O supportednanosystem

� Technique: XPS

� Spectral Region: Cu 2p

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:400.8 s

Total Elapsed Time: 440.9 s

Number of Scans: 16

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

48 Surface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS

Page 9: CVD Cu2O and CuO Nanosystems Characterized by XPS

Surface Science Spectra, Vol. 14, 2007

01053–01

CuO supported nanosystem

XPS

survey

Perkin-Elmer Physical Electronics, Inc. 5600ci

Al K�

1486.6 eV

250 W

25000 µm �25000 µm

spherical sector

45°

187.85 eV

1.9 eV

135.1 s

148.6 s

4

1.9 eV

Accession#

Host Material

Technique

Spectral Region

Instrument

Excitation Source

Source Energy

Source Strength

Source Size

Analyzer Type

Incident Angle

Emission Angle

Analyzer Pass Energy:

Analyzer Resolution

Total Signal Accumulation Time

Total Elapsed Time

Number of Scans

Effective Detector Width

Cu2O and CuO Nanosystems by XPS 49

Page 10: CVD Cu2O and CuO Nanosystems Characterized by XPS

50 Su

� Accession #: 01053–02

� Host Material: CuO supportednanosystem

� Technique: XPS

� Spectral Region: C 1s

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:120.6 s

Total Elapsed Time: 132.7 s

Number of Scans: 12

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

� Accession #: 01053–03

� Host Material: CuO supportednanosystem

� Technique: XPS

� Spectral Region: O 1s

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:120.6 s

Total Elapsed Time: 132.7 s

Number of Scans: 12

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

rface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS

Page 11: CVD Cu2O and CuO Nanosystems Characterized by XPS

S

� Accession #: 01053–04

� Host Material: CuO supportednanosystem

� Technique: XPS

� Spectral Region: Cu 2p

Instrument: Perkin-Elmer PhysicalElectronics, Inc. 5600ci

Excitation Source: Al K�

Source Energy: 1486.6 eV

Source Strength: 250 W

Source Size:25000 µm �25000µm

Analyzer Type: spherical sector

Incident Angle: 9°

Emission Angle: 45°

Analyzer Pass Energy: 58.7 eV

Analyzer Resolution: 0.6 eV

Total Signal Accumulation Time:300.6 s

Total Elapsed Time: 330.7 s

Number of Scans: 12

Effective Detector Width: 0.6 eV

Comment: See footnote below theSpectral Features Table.

urface Science Spectra, Vol. 14, 2007 Cu2O and CuO Nanosystems by XPS 51