Cryocoolers catalog ENG

Cryocoolercomprehensive catalog

172E2018041000TLC

Head Office and Factory1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan

TEL:+81-467-85-9366 FAX:+81-467-85-9356

Kyoto Cryogenic Technology R&D Center/Kyoto Factory140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan

TEL:＋81-774-28-5595 FAX:＋81-774-20-2201

Osaka Branch OfficeUemura Nissay Bldg.3-3-31 Miyahara,Yodogawa-Ku,Osaka,532-0003,Japan

TEL:+81-(0)6-6397-0112 FAX:+81-(0)6-6397-0126

www.ulvac-cryo.com

Contact Us

■ The content of this catalog is subject to change without notice for the purpose of performance improvement etc.

e lect ron ics

Low temperature engineering Cryogenic technology

Medical / Physics and chemistry Cryostat

Vacuum technology

Cold maintenance

Superconductivity

Medical

Parametric amplifier

Josephson-junction device

Infrared detection

AcceleratorShield

Liquefaction

Super Insulation

cold trap

Ultra high vacuum

Cryopump

Thin film generationSpace chamber

Specific heat measurement

Material

Spectroscopy

X-ray diffraction

Laser, maser

Surface analysis

electronic microscopeSample cooling

Thermography

MRICryosurgery

Cryopreservation

SQUIDHall effectMossbauer effect

NMRESR

Magneticrefrigerator

SuperconductingMaterial research

Single crystal furnace

Semiconductordevice cooling

Vacuum technologyReliability engineering

Mechanical engineeringMaterial engineering

PhysicsCryogenic engineering

Cryogenic Technology in a Var iety of F ields Our Cryocoolers

ULVAC CRYOGENICS has provided a large number of cryopumps to be mounted on vacuum systems for

semiconductor or LCD manufacturing equipments based on our rich experience and expertise in vacuum

and cryogenic technology.

Recently, G-M refrigerators for cryopumps have been expanding the applications into new fields such as

superconductivity.

As the demand for 4K or pulse-tube cryocoolers expands, we believe that our cryocoolers with proven

technology will respond to the requirements for R&D or in advanced industries.

Cryopumps, CryotrapsVacuum technology

EnvironmentRemote sensing for environmental conservation(Ozone hole, global warming, air pollution, abnormal weather, acid rain, etc.)

Medical Treatment

Magnetic Resonance Imaging (MRI) Thermography Mass Spectrometer

MCZ (magnetic field applied silicon single crystal furnace device)

Magnetically levitated magnet for maglev LHC (superconducting accelerator)

Cooling electron microscope of semiconductor device Cooling infrared detection system of sample

Transmission electricity distributor · generator SMES (energy storage device)

Industry

Millimeter wave measurement optical measurement NMR (nuclear magnetic resonance)

ESR / ERP (electron paramagnetic resonance) X ray diffraction Hall effect

SQUID (superconducting quantum interference device) Mössbauer superconducting material

J - J device magnetic cooling surface analysis radio telescope materials research

Compact refrigerator for satellites

The study

Applicat ion of cryogenic technology

1 2

CRYOCOOLER CRYOCOOLER

3 4

φ40

8-M4(φ56) 8-M4(φ33)

(244)

(126)

1stStage 2ndStage

5

147.5

161.5

16(133)

(442)

8

φ64

φ109

(128)

(309)

Flange2-φ6.5(φ96)

22.5ﾟ

(282)

φ52

618

φ71

495

φ109

346

(146)

165

Flange

1stStage8-M4 (φ65)

2ndStage8-M4 (φ42)

2-φ6.5 (φ96)

22.5ﾟ

84

22.5ﾟ

30゚

8-φ5.2(φ170)Flange

1stStage 2ndStage8-M5(φ110) 6-M5(φ54)

(392.5)

φ64

6

φ125φ90

64189.5

φ180φ88.5

(580)

236.5

156

5(187)

SUPPLY

RETURN

(146)

98180

RETURN

SUPPLY

(304)

6.5

6

SUPPLY

RETURN

(146)

98 RETURN

SUPPLY

(304)

(187)

5156

236.5

(580)

φ180

6

189.5

64

φ90φ125

φ68

(392.5)

6.5

22.5ﾟ

30゚

8-φ5.2(φ170)Flange

2ndStage1stStage8-M5(φ110) 6-M5(φ58)

6

180

φ88.5

4K GM refrigerator HE01

4K GM refrigerator HE05

4K GM refrigerator UHE 10

4K GM refrigerator UHE 15

1 stage temperature（Ｋ）

2 stage temperature （Ｋ）





Examples of Performance curve (coldhead pointing-down)

60Hz50Hz



60Hz50Hz





60Hz50Hz





60Hz50Hz

02468101214161820

35 45 55 650W 3W 4W

1.5W2.0W

2.5W

5W

1.0W0.3W0.1W

1W

0.2W0.5W

0W 2W02468101214161820

35 45 55 65 7070

0.5W1.0W

0.3W0.2W0.1W0W 1W 2W 4W

1.5W

2.0W

3W0W

2.0

2.5

3.0

3.5

4.0

4.5

5.0

10 20 30 40 50 60 70

0.3W

10W

0.5W

0.1W0W0W 5W

0.7W

15W

2.0

2.5

3.0

3.5

4.0

4.5

5.0

10 20 30 40 50 60 70

0.3W

0.5W

0.1W0W

0.7W

10W5W 15W20W

20 30 40 50 60 70

56789101112

80W60W40W20W0W

8W

23456 4W

1W0W

1 stage load

2 stage load

20 30 40 50 60 70 80 90

56789101112

80W60W40W20W0W

23456 4W

1W

0W

8W

1 stage load

2 stage load

1 stage load

2 stage load

1 stage load

2 stage load

1 stage load

2 stage load

1 stage load

2 stage load

20 40 60 80 100 120

5W

1.5W

0W

80W60W40W

20W0W

10W

1112

23456789101112

23

20 40 60 80 1000W

5W

1.5W

80W60W40W20W0W

10W

1112

234567891011

2

1 stage load 1 stage load

2 stage load

2 stage load

50Hz 60HzPower frequency

126(W) x 244(D) x 442(H)mm Dimensions

10,000 hoursMaintenance interval * 2

7.5kgWeight

Ultimate temperature

Cooldown time (4.2 K) * 1

First stage

Second stage

3W/60K

0.1W/4.2K

Second stage

Refrigerationcapacity※1

＜2.7K

5W/60K

140min 120min

* 1 Value at no load. The performance depends on the installation environment of the refrigerator and the cooling object.* 2 Maintenance interval is recommended, not guaranteed time.

Specification


146(W) x 282(D) x 495(H)mm


11kg

10W/45K

0.5W/4.2KRefrigerationcapacity※1

＜2.7K

10W/40K

75min 60min

* 1 Value at no load. The performance depends on the installation environment of the refrigerator and the cooling object.* 2 Maintenance interval is recommended, not guaranteed time.


Dimensions

Weight


First stage

Second stage

Second stage

Specification


180(W) x 304(D) x 578(H)mm


17kg

40W/43K

1.0W/4.2K

＜2.7K

50W/43K

60min

* 1 Value at no load. The performance depends on the installation environment of the refrigerator and the cooling object.* 2 Maintenance interval is recommended, not guaranteed time.※ Flexible hose standard length 20 A × 10 m


Dimensions

Weight


First stage

Second stage

Second stage


Specification


180(W) x 304(D) x 580(H)mm


18kg

35W/50K

1.5W/4.2KRefrigerationcapacity※1

＜2.7K

45W/50K

60min



Dimensions

Weight


First stage

Second stage

Second stageUltimate temperature

Specification



4K GM CRYOCOOLERS 4K GM CRYOCOOLERS

5 6

φ39.7

300.0

185.9

157.2

282.5

468.4

223.8199.9147.7

67.5

φ76.2

8-φ5.5φ141.3

4-M4φ33.3

φ152.4

6-M4φ66.8

347.5

185.9

271.3247.4195.2

67.5

182.0

333.0

518.9

φ57

φ89

φ152.4

8-φ5.5φ141.3

6-M4φ44.5

8-M4φ79

185.9

247.4195.2281.5

182.0

φ57

71.5

φ152.4

φ108.8

357.7

8-φ5.5φ141.3

518.9

333.0

6-M4φ44.5

12-M4φ100.6

347.5

185.9

271.3247.4195.2

67.5

182.0

313.0

499.0

φ57

φ152.4

φ89

8-φ5.5φ141.3

6-M4φ44.5

8-M4φ79

347.5

185.9

67.5

182.0

271.3247.4195.2

367.9

φ152.4

φ89

8-φ5.5φ141.3

8-M4φ79

185.9

247.4195.2281.5

186.3372.2

71.5

φ152.4

357.7

φ108.8

8-φ5.5φ141.3

12-M4φ100.6 φ108.8

φ152.4

264.7281.5316.9

403.1

224.3

12.7(178.8)

SUPPLY

70.3

30ﾟ

30ﾟ

30ﾟ

30ﾟ

8-φ5.5φ141.3

393.1

12-M4φ100.6

300.0

185.9

157.2343.1

223.8199.9147.7

67.5

φ152.4

φ76.2

8-φ5.5φ141.3

φ66.86-M4

φ152.4

φ106φ68

50

50.5

φ52

6

5

173.6

φ180

347.5

200

147.5

6.5

(324)

(189)

(537)

(148)

(183)

Flange8-φ5(φ170)

2ndStage6-M5(φ44)

1stStage8-M5(φ98)

6.1

22.5ﾟ

22.5ﾟ

30ﾟ

4K GM refrigerator UR4K0420T GM refrigerator RM series

GM Refrigerator RMS Series





60Hz50Hz

2.0

2.5

3.0

3.5

4.0

4.5

5.0

10 20 30 40 50 60 70 80 90 100 110

0.3W

35W

15W

0.45W

0.15W

0W

0.6W

25W0W

2 stage load

1 stage load

2.0

2.5

3.0

3.5

4.0

4.5

5.0

10 20 30 40 50 60 70 80 90

0.3W

10W

0.45W

0.15W

0W0W

0.6W

40W20W 30W

2 stage load

1 stage load

50Hz 60Hz

183(W) x 324(D) x 537(H)mm

10,000 hours

13kg

15W/40K

0.45W/4.2K

＜3.5K

20W/40K

70min 60min


12K

CRM80TCRM50CRM20CRM10100W / 77K65W / 77K35W / 77K13W / 77K8W / 20K7W / 20K12W / 20K3.5W / 20K

12K 12K 12K

11kg 14kg 14kg16,000 hours

16kg40min 30min 40min 35min

Specification

* Refrigerating capacity, reachable temperature, cooling down time are the combination when the refrigerator and compressor are 1: 1 / ambient temperature: value at 24 ° C / no load. * When the power frequency is 60 Hz.

RM series (2 stage type) RM10 RM20 RM50 RM80TRefrigerator system

Refrigeration capacity

Ultimate temperatureCooldown timeWeight (refrigerator)Maintenance interval

First stageSecond stage

30K

CRMS150TCRMS80TCRMS50CRMS10165W / 77K130W / 77K85W / 77K35W / 77K

30K 35K 40K

10kg 13kg 15kg16,000 hours 20,000 hours 10,000 hours

20kg30min 20min 18min 13min

Specification

* Refrigerating capacity, reachable temperature, cooling down time are the combination when the refrigerator and compressor are 1: 1 / ambient temperature: value at 24 ° C / no load. * When the power frequency is 60 Hz.

RMS10 RMS50 RMS80T RMS150TRefrigerator systemRefrigeration capacity

Maintenance interval

First stageUltimate temperatureCooldown timeWeight (refrigerator)

RM series (１stage type)


Power frequency

Dimensions

Maintenance interval * 2

Weight



First stage

Second stage

Second stage


4K GM CRYOCOOLERS GM CRYOCOOLERS RM/RMS SERIES

11 12

Solvay refrigerator S 050 Compressor unit

Dimensions

Maintenance interval * 2

Weight

Cooldown time (77K) * 1

* 1 Value at no load. The performance depends on the installation　 environment of the refrigerator and the cooling object.* 2 Maintenance interval is recommended, not guaranteed time.

Power frequency

Ultimate temperature *1

First stage

First stageRefrigeratingcapacity * 1

Specification

10,000 hours

Specification

Model Power supply(ACV ×Φ×Hz)

Power consumption(kw)(50/60Hz)

Breaker capacity(Recommendation)

Dimensions(mm) Weight(Kg)Cooling methodwater quantity(L/min)(20℃)

Adsorberexchange time(H)

SOLVAY CRYOCOOLERS MINI S-TYPE COMPRESSOR UNIT

water

water

water

water

water

water

water

water

air

air

air

13 14

Refrigerator / compressor combination table 1/3



Pulse-Tube Solvay

PDC08 PD016 D105 D510 S010N

50Hz 8 W @ 77 K 12 W @ 77 K 4.0 W @ 77 K 9 W @ 77 K 10 W @ 77 K

60Hz 8 W @ 77 K 4.5 W @ 77 K

1 W @ 20 K

1 W @ 20 K

5 W @ 20 K

5 W @ 20 K

9 W @ 77 K 10 W @ 77 K

50Hz -

-

-

-

-

12 W @ 77 K

-

10 K

60Hz

50Hz 40 K 40 K

40 K

10 K

10 K

10 K

30 K

30 K

60Hz 40 K

50Hz <30 min (20K) <45 min (20K)

60Hz <30 min (20K) <50 min (20K)

<20 min (77K) <30 min (77K)

<20 min (77K) <30 min (77K)

<30 min (77K)

<30 min (77K)

1.5 kg 4.5 kg 2.5 kg 6.3 kg 3 kg

○

○

○

○

○

○

○

○

○

○

SA112

SW112

SA115

SW115

UW404

Type expression

C30HVRT

C30HMVRT-380

C30VR

C30PVRT

C10

First stagerefrigerationcapacity

Second stagerefrigerationcapacity

Cooldown time

Reachingtemperature

Weight

GM (RM Series)

RM20 RM50 RM80T RMS10 RMS50 RMS80T RMS150T

50Hz 150 W @ 77 K

60Hz 165 W @ 77 K

50Hz -

-

40 K

40 K

60Hz

50Hz

60Hz

50Hz

60Hz

<15 min (77K)

<13 min (77K)

20 kg

30 W @ 77 K 55 W @ 77 K 80 W @ 77 K 29 W @ 77 K 67 W @ 77 K 120 W @ 77 K

35 W @ 77 K 65 W @ 77 K 100 W @ 77 K 35 W @ 77 K 85 W @ 77 K 130 W @ 77 K

10 W @ 20 K 5 W @ 20 K 8 W @ 20 K ---

---

35 K30 K30 K

35 K30 K30 K

12 W @ 20 K 7 W @ 20 K 8 W @ 20 K

12 K 12 K 12 K

12 K 12 K 12 K

<35 min (20K) <45 min (20K) <40 min (20K) <35 min (77K) <25 min (77K)

<30 min (20K) <40 min (20K) <35 min (20K) <30 min (77K) <20 min (77K)

<20 min (77K)

<18 min (77K)

14 kg 14 kg 16 kg 10 kg 13 kg 15 kg

○ ○

○

○

○

○ ○

SA112

SW112

SA115

SW115

UW404

Type expression

C30HVRT

C30HMVRT-380

C30VR

C30PVRT

C10



Cooldown time

Reachingtemperature

Weight

4K GM 20K GM GM (RM Series)

HE01 HE05 UHE10 UHE15 UR4K0420T RSC50T RM10

50Hz 3 W @ 60 K 10 W @ 45 K 40 W @ 43 K 35 W @ 50 K 15 W @ 40 K 40 W @ 20 K 10 W @ 77 K

60Hz 5 W @ 60 K 10 W @ 40 K 50 W @ 43 K 45 W @ 50 K 20 W @ 40 K 45 W @ 20 K 13 W @ 77 K

3 W @ 20 K

3.5 W @ 20 K

50Hz 0.1 W @ 4.2 K 0.5 W @ 4.2 K 1.0 W @ 4.2 K 1.5 W @ 4.2 K 0.45 W @ 4.2 K -

60Hz 0.1 W @ 4.2 K 0.5 W @ 4.2 K 1.0 W @ 4.2 K 1.5 W @ 4.2 K 0.45 W @ 4.2 K -

50Hz 2.7 K 2.7 K 2.7 K 2.7 K 3.5 K 13 K 12 K

60Hz 2.7 K 2.7 K 2.7 K 2.7 K 3.5 K 13 K 12 K

50Hz <140 min (4.2K) <75 min (4.2K) <60 min (4.2K) <60 min (4.2K) <70 min (4.2K)

60Hz <120 min (4.2K) <60 min (4.2K) <60 min (4.2K) <60 min (4.2K) <60 min (4.2K)

<35 min (20K)

<40 min (20K)

<50 min (20K)

<40 min (20K)

7.5 kg 11 kg 17 kg 18 kg 13 kg 23 kg 11 kg

○

○

○ ○

○ ○ ○

○

○



Cooldown time

SA112

SW112

SA115

SW115

UW404

Type expression

C30HVRT

C30HMVRT-380

C30VR

C30PVRT

C10

Reachingtemperature

Weight

■When applying our refrigerator to a cryocooler for optical sensors, the cryocooler falls under row 6.A.2.d.2 of the control list established by The Wassenaar Arrangement, which is equal to row 10(2) of appended table 1 of Japan’s Export Trade Control Order. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting our refrigerators.

S030 S050

30 W @ 77 K 60 W @ 77 K

33 W @ 77 K 62 W @ 77 K

-

-

-

-

22 K

22 K

25 K

25 K

<25 min (77K)

<25 min (77K)

<20 min (77K)

<20 min (77K)

5.9 kg 6.5 kg

○

○

○

○

○

※1

※1

※2

※2

* 1 Using M501 motor unit * 2 Using M502 motor unit

CRYOCOOLER SPECIFICATIONS CRYOCOOLER SPECIFICATIONS

Cryocoolers catalog ENG

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