Conventional SEM Specimen at high vacuum – requires sample fixation and dehydration or freezing....
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Transcript of Conventional SEM Specimen at high vacuum – requires sample fixation and dehydration or freezing....
Conventional SEM
Specimen at high vacuum – requires sample fixation and dehydration or freezing.
Charging is minimized by coating sample with metal or carbon or lowering the operating kV.
Variable Pressure Scanning Electron Microscope
-Vacuum in the sample chamber can range from high vacuum (< 10-6 Pascals) up to 3,000 Pa.
-Environmental- 3,000 Pa/ Variable – 750 Pa
- Gas in the sample chamber allows uncoated and unfixed samples to be imaged.
-Detectors used at higher pressures are backscatter or special secondary detectors.
- Moisture on the sample can be controlled by cooling/heating stage and water injection system.
LV SEM – High Vacuum Mode
LV SEM - Low Vacuum Mode
SEMElectron/Specimen Interactions
When the electron beam strikes a sample, both photon and electron signals are emitted.
Incident Beam
Specimen
X-rays
- composition info
Auger electrons- Surface sensitive compositional
Backscattered electrons- Atomic number and topographical
Cathodoluminescence
- Electrical
Secondary electrons
- Topographical
Specimen CurrentElectrical
Secondary Electron Detector
Backscatter electron detector
Signal Detection in Variable Pressure Mode
Charging is minimized
Peltier stage
Heats to 50 CCools to - 25 C
Control of Water vapor and temperature
Applications
Live centipede
Bacteria on rock
Fresh moss withliquid water
Pattern produced in silica gel
Live Drosophila larva