CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo...
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![Page 1: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/1.jpg)
CMP Pressure Distribution Study Group
Final Project UpdateBy
Dave BullenAlia Koch
Alicia Scarfo7/30/1999
![Page 2: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/2.jpg)
Overview
• Previous work
• Photos: The Jumbo 1000 in action
• Data collection software redesign
• Final static and dynamic pressure data
• Numerical work on pad deformation
![Page 3: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/3.jpg)
Previous Work
• Manometer Testing– Response was to slow– Could not measure a wide enough range
• Pressure Gage Testing– Adequate response time– Still could not read a wide enough range– Could not be used with a rotating wafer
![Page 4: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/4.jpg)
The Jumbo 1000 in Action
![Page 5: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/5.jpg)
The Jumbo 1000 in Action
![Page 6: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/6.jpg)
The Jumbo 1000 in Action
![Page 7: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/7.jpg)
Data Acquisition
• LabVIEW helped because: – Real Time Data– Very Accurate Data from Transducer– Easier to Read Data– Other Calculations made in Real Time
![Page 8: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/8.jpg)
The Program
• We were able to control:– Scan Rate– Scans per Channel– Total Scan Time– Total Number of Scans
![Page 9: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/9.jpg)
Our Front Panel
![Page 10: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/10.jpg)
Wafer Static PressuresPressure vs. Position: All Taps, Static, Transducer
56789
10111213141516171819202122232425262728
0 30 60 90 120 150 180 210 240 270 300 330
Position (Degrees)
Pre
ss
ure
(p
sia
)
Run details:Date: 7/27/99-7/28/99Wafer: REU-1, StaticPad Speed: 120 RPMConditioning: Yes - 8 oscillations per minuteFluid: Water with Sodium Hydroxide - pH: 11.27 - 11.30Applied Pressure: 3 psiFlow separation: None observed
Tap 6
Tap 5
Tap 4
Tap 1
Tap 3
Tap 2
Atmospheric
Downforce
![Page 11: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/11.jpg)
Wafer Static Pressures
• Pressure distribution is divided into two high pressure regions and two low pressure regions
• There is a wide variation in the pressures from point to point
• There is a vague increasing trend from rim to center
![Page 12: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/12.jpg)
Wafer Dynamic PressuresPressure vs. Position, All Taps, Dynamic Averages
14
15
16
17
18
19
20
21
22
Position
Pre
ssu
re (p
sia)
Tap 1
Tap 2
Tap 3
Tap 4
Tap 5
Tap 6
Note: Tap locations are unknown. This plot is assembled so that all peaks line up. This may not actually be the case.
![Page 13: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/13.jpg)
Wafer Dynamic Pressures
• Pressure distribution structure is similar to the static structure
• Less variation from point to point
• There is a strong increasing trend from rim to center
![Page 14: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/14.jpg)
Accomplished Numerical Goals
• Wrote structural program– modeled pad changes using finite element
methods– wrote program in Fortran 77 compatible with
current Fidap fluid finite element program
![Page 15: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/15.jpg)
Update
• Program now compiles!
• Future changes to structural FEM program– program would benefit from new mesh generator– observe effect of pad deformation on pressure
distribution under the wafer
• Other options– try to incorporate strain program supplied by
Professor Perlman
![Page 16: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/16.jpg)
Project Accomplishments
• Determined the pressure distribution under a static and dynamic wafer via three methods
• Created a system that can monitor film pressure under a rotating wafer
• Used numerical methods to advance the understanding of the pad deformation phenomenon
![Page 17: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/17.jpg)
Future Pressure Detector Work
• Manufacturer the rotating platform and glass wafer as specified.
• Add a position signal to the data stream.
• Upgrade the sliding contact system to transmit several channels.
• Redesign transducer/air purge system to further reduce the response time.
![Page 18: CMP Pressure Distribution Study Group Final Project Update By Dave Bullen Alia Koch Alicia Scarfo 7/30/1999.](https://reader035.fdocuments.in/reader035/viewer/2022062721/56649f1f5503460f94c36ca6/html5/thumbnails/18.jpg)
Thanks
Dewi Bramono
Dr. Jonathan Coppeta
Dr. Livia Racz
James Hoffman
Joe Lu
The whole TAMPL gang