GeneralSpecifications

Clean-room Gas MonitorModel CM505 (Impinger)

Yokogawa Electric Corporation2-9-32, Nakacho, Musashino-shi, Tokyo, 180-8750 JapanTel.: 81-422-52-5617 Fax.: 81-422-52-6792

GS 12Y04F03-01E

GS 12Y04F03-01E©Copyright Jul. 2007

3rd Edition Oct. 10, 2008

n GENERALAs the degree of integration of LSI increases as well as large scaled FPD production is driving forward, removal of gaseous contaminants such as ammonia and acid gases in clean room has become an impor-tant issue. To cope with this requirement, monitoring of air borne contaminants and periodic check of chemi-cal performance is vital measure. Typical test method conducted for this purpose is impinger method. How-ever, conventional impinger method has problem of long measuring time and cross contamination by the operator. The CM505 Clean room gas monitor realize contamination-free, on-line air borne monitoring with impinger method with measuring time of 1 hour. Op-tional multi-stream type (16 points) is also available. The system can monitor both Ammonia (or cations) and Acid gases (Anions) depend on the requirement.

n FEATURES●Gascollectionisdonebyimpingerthusbothgaseous

and particle/mist contaminants are collected● Ammonia gas is measured at a sensitivity of 0.01

µg/m3.● Acidic gases (hydrogen chloride, sulfur dioxide,

nitrogen dioxide, etc.) are measured at a sensitivity of 0.02 µg/m3

●ThesystemcanmonitorCations(sodium,calcium,etc.), Fluoride and organic acid (formic acid, acetic acid), and Boron depend on the requirement.

● Fully automated system and un-manned measure-ment

●Ionchromatography,ahighlyreliableanalyzingtech-nique is used

● The results are monitored on a trend graph from a work station. Optional communication output is avail-able

●Chemicalfilterlifeproductionsoftwareisavailable● Optional multi-stream switching type (up to 16) is available

n SYSTEM CONFIGURATIONThis system consists of a gas collection unit with a im-pinger unit, an ion chromatograph unit and a worksta-tion (personal computer) as human interface.

1. GasCollectionUnitThe gas collection unit is composed of a stream se-lector (optional) and a gas collector (Impinger)

StreamSelector(optional)Thestreamselectorfor16pointsisavailable.Sam-plingtimeisselectable.Maximumsupplytubelengthis 50 m.Tominimize"memoryeffect"duetoabsorptionofsamplestothesurfaceofthetube,thesystemisprovidedwithafunctiontowashthetubefromthestream selector valve to the impinger with pure water. Thesystemalsoprovides"fastloop"tominimizethedelay in measuring time for the case where sample tubeislong.

GasCollector(Impinger)Sample gas is introduced into impinger and those contaminantsinthesample,bothingaseousandparticle/mistformareabsorbedinthepurewater.Afterbubbling(gascollection),thewholeamountof water in the impinger and washing water used is introduced to Ion-chromatograph.

2. IonChromatographUnit(Pi501)The ion chromatograph unit traps the collected ions in the concentration column. After that, those ions are forwardedtotheseparationcolumnbyoperatingtheswitching valve.Theseparationcolumnisfilledwithapackingmate-rial with ion exchanger. The ion components entering thecolumnwillbeseparatedbyitselectrical/physicalcharacteristicsrespectivelyandthenflowistothede-tector. The detector measures concentration of those respective ions separated.

3. Workstation(PC)The workstation is used for operation and data displays, such as system running and operation commands, running status display, chromatogram in-dication,displayofhistoryofanalyzedvalues,alarmindication, a function notifying remaining service life offilter(optional),settingofvariousparameters,etc.

2

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E Oct. 10, 2008-00

Gas collection unit

Stream selector (option)

Stream

selector valve

Stream valveGas introduction pump Eluent

Eluent pump

Sampling pump Concentrationcolumn

Ion ChromatographUnit

Separation columnDetector

Switching valve

Oven

To another impinger unit and ion chromatography

Impinger

Effluent pump

Impinger unit

Gascollection

pump

Pure water

Minimum detection limit*: 0.01μg/m3 for F– and Cl– 0.05μg/m3 for HCOO– 0.10μg/m3 for CH3COO–Measurement cycle: Less than 60 min (at overlap

measurement)(5) Boron measurement

Measurablecomponents: BMeasuring range: 0 to 100 ng/m3Minimum detection limit*: 10 ng/m3Measurement cycle: 140 min

*: Minimum detection limit means the calculated valuebythesenseandnoise(S/N>2)

Measurement accuracy:Range Co-relationwithmanualimpinger

< 0.5 ***0.5 to 1.0 Less than ±40 %

1.0 to 5.0 Less than ±20 %

5.0 to 50 Less than ±15 % ***: Depend on the variation of manual impinger

Measuring points: One point or up to 16 points (optional)Measurement method: Overlap measurement , series measure-

mentCalibration: Calibrationusingstandardsolutions,auto-

maticcalibrationExternal contact input: Measuring stream skip signal, external

alarm signal, and external alarm reset signal

External output: Abnormalconcentrationsignal(forevery

stream, relay contact), system alarm signal (relay contact), measuring stream signal(binary,relaycontact),re-measure-ment signal (relay contact), liquid leakage signal(relaycontact),alarmbuzzersignal,and alarm light signal

nSTANDARDSPECIFICATIONSModel: CM505 Clean Room Gas Monitor

● SystemSpecificationsGas collection: Impinger methodAnalysis method: Ion chromatography Measurement:(1) Ammonia measurement:

Measurablecomponent: NH3Measuringrange: 0to50μg/m3Minimumdetectionlimit*: 0.01μg/m3Measurement cycle: Minimum 40 min (at overlap

measurement)(2) Cations measurement

Measurablecomponents: Na+, NH3, K+, Ca2+, Mg2+Measuringrange: 0to50μg/m3Minimumdetectionlimit*: 0.01μg/m3Measurement cycle: Minimum 40 min (at overlap

measurement)(3) Anion measurement

Measurablecomponents: Cl-, Br-, NO2-, NO3-, SO32-, SO42-,

PO43-, (SO2 amount is calculated from SO32- and SO42-)

PO43-measurementissubjecttosam-ple test

Measuringrange: 0to50μg/m3Minimum detection limit*: 0.02μg/m3forAcidgasand0.05μg/

m3 for PO43-Measurement cycle: Minimum 40 min (at overlap

measurement)(4) Fluoride/organic acids measurement

Measurablecomponents: F–, HCOO–, CH3COO–, Cl–Measuring range: 0 to 5μg/m3 for F– and Cl– 0to30μg/m3 for HCOO– and

CH3COO–

3

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation GS 12Y04F03-01E

UtilityPower supply: 100Vto120VAC,50/60Hzor200Vto

240VAC,50/60HzPower consumption: CM505; 0.5 kVA ForPersonalcomputer(notebookPC),

a power line in separate power source is required.

Wiring material: 3-wireshieldedcableofouterdiameter

12.5 to 14.5 mmGrounding: Independent grounding (grounding resist-

ance 100 ohm or less)

PureWater• ForExternalpurewaterinlettype

Purity: 18 Mohm/cm or morePressure: 0.2 to 0.3 MPaFlowrate: 1 to 2 L/min.Connection port: SUPER type Pillar Fitting,Tubesize: OD 6.35 mm, ID 4.35 mm

• ForPurewatersupplysystemPurity: 18 Mohm /cm or more

Water supply: Pure water (18 Mohm /cm or more)Operating temperature range: 5 °C to 40 °CPure water tank: 20 L come with low level sensor

Reagent(EluentandRegenerant)(1) Ammonia measurement

1 mmol/L nitric acid (HNO3), 0.2 ml/min.Supply frequency: Approx. once a month, replacement

(2) Cation measurement11 mmol/L Sulfuric acid (H2SO4), 0.2 ml/min.Supply frequency: Approx. once a month, replacement

(3) Anion measurement4.5mmol/Lsodiumcarbonate(Na2CO3), 0.2 ml/min.Supply frequency: Once a month, replacement

(4) Fluoride/organic acids measurement7 mmol/L of sodium hydroxide, 0.2 ml/min.Supply frequency: Once a month, replacement

(5) Boron measurementEluent:

1 mmol/L sulfuric acid plus 7.5 mmol/L mannitol, 0.5 ml/min.Supply frequency: Once every 12 days, replacement

Regenerant:25 mmol/L tetramethylammonium hydroxide plus 7.5 mmol/L mannitol, 0.5 ml/min.Supply frequency: Once every 12 days, replacement

Oct. 10, 2008-00

WasteWater• Chemicaleffluent

(1) Ammonia measurementNitric acid solution, approx. pH 5, 2.2 ml/min.

(2) Cation measurementSulfuric acid, approx. pH 4, 2.2 ml/min.

(3) Anion measurementSodium-carbonatesolution,approx.pH10,2.2ml/min.

(4) Fluoride/organic acids measurementSodium hydroxide solution, approx. pH 10, 2.2 ml/min.

(5) Boron measurementSulfuric acid, tetramethylammonium hydroxide and mannitol mixed solution approx. 3 ml/min.

• FordirectconnectiontofactorywastewaterlineEffluent: MixtureofChemicaleffluentandpure

waterdrainage(about1to2L/min.)Piping: Thewastewaterisnotpressurizedandso

thewastewaterpipemustbepositionedbelowtheanalyzer

Piping material: Corrosion-resistant material such as stain-

less steelConnection port: Rc 1/2

• ForPurewatersupplysystemFrequency of tank discharge: Once every two days, discharge from the

20 L tank.InstallationEnvironmentMustbeinstalledinthecleanroomorinaplacewhichisascleanaspossibleSamplegasisdischargeddownwardfromthebackoftheCM505.Anexhaustsystemmayberequiredseparately.Ambienttemperature: 10 °C to 30 °C. Temperature changes dur-

ingmeasurementshouldbeminimal.Ambienthumidity: 20 to 80 % RH, no vapor condensationAltitude: 2000mabovesealevelorlessOthers: Nodust,Novibration,Notilting,Noexpo-

suretodirectsunlight,Nodirectairblownfrom an air conditioner, No corrosive or explosiveatmosphere,Mustbefixedasan anti-seismic measure.

SampleGasconditionsUpper detection limit: 100 µg/m3Measuring port pressure: -0.05 MPa or moreFlowrate: 1or2L/min.(peranalyzer)Tube: Tobepreparedbycustomers TubematerialPE TubesizeOD6.0mm,ID4.0mm,length

up to 50 m.Theinsideofthetubemustbecleanedwithpure

water.

4

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E

● CabinetSpecificationsConstruction: Stand-alonenon-closedtype(fixedtothe

floorwithanchorbolts)withfrontdoorandkey, for indoor installation

External dimensions: 860 (W) X 730 (D) X 1060 (H) mmMaterial: Body; Steel plate, Door; Steel plateCoating: EpoxyresinbakedfinishCoating color: Roof; Munsell N-3.5-0, semi-gloss, Front

and side plates; Munsell 2.5Y 7/4, semi-gloss

Weight: Approx. 150 to 180 kg depend on the specifications

• Purewatersupplysystemspecifications(comewithpurewatersupplysystem,20Lwatertank,20Leffluenttankontrolley)

External dimensions: 555 (W) X 840 (D) X 810 (H) mmWeight: approx.23kgexcludingwaterandefflu-

ent

● MainComponentUnitSpecifications• GasCollectionUnit

Stream selector valve (optional): 16-points selectionSelectionperiod: VariablePure water washing function: SettingforeverystreampossibleGas introduction pump: 2pumps,FlowrateAbout10L/min.Impinger: 2units(1analyzertype),or4units(2

Analyzertype)Gas collection pump: 1 or 2 units depend on the application,

Flowrate range 0.1 to 2 L/min. (practical flowrate1L/min.)

• IonChromatographUnitModel: Pi501Eluent feeding pump: 1setofdoubleplunger,activedamper

systemSuppressor: Used except Ammonia measurementSampling pump: With cleaning mechanism, 1 setOven: Temperature 45 °CElectrical conductivity detector: 1 unit, measuring range 0 to 5 mS/cmAutomatic switching valve: 1 unitMain column: 1 columnConcentration column: 1 columnDimensions: 370 (W) X 460 (D) X 230 (H) mm without

suppressor 410 (W) X 460 (D) X 230 (H) mm with

suppressorWeight: Approx. 24 kg without suppressor, Approx.

27 kg with suppressor

● Workstation(notebookPC)Tobepreparedbycustomer.Weightshouldbeunder10kg,whenitisputonCM505.Recommendedspecificationsare,

ItemOS

MIcrosoftWindows2000SP4,MicrosoftWindowsXPSP2

MicrosoftWindowsVistaBusinessEdition

PC IBMPC/ATcompatible

CPU PentiumII300MHzor higher 1GHzor higher

HDD 4 GB or more 15 GB or more for OS10 GB or more for ApplicationRAM 256 MB or more 1 GB or more

Language English or Japanese

Display800 x 600 VGA or higher,andbeviewablewithequaltoormorethan256colors

Serial port

OneRS-232Cportforconnectiontoeachanalyzer;oneportforthesingleanalyzereditionofPI500Workstation,andtwoforthedual-analyzeredition.

I/O: D-Sub9pinRS-232-Cport(male),2portsfor2analyzertype

UseUSB-SerialtransfercableatthecaseofinstallmoreportssuchasnotebookPC.

Therecommendedtransfercable: ELECOM CO., LTD. USB PC to Serial

CableUC-SGTCable: RS-232-Ccrosscable

● WorkstationSoftwarePIWSFor operation and display of CM505NumberofIonchromatograph: Choice of 1 or 2Languagetobedisplayed: Choice of English or JapaneseMedia of software: CD-ROM

Oct. 10, 2008-00

5

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation GS 12Y04F03-01E

nPRODUCTMODELCODES● ModelCM505Clean-roomGasMonitor

Model BasicCode OptionCode Descriptions

CM505 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Clean-room Gas Monitor (with Impinger)Measurement -1

-2- - - - - - - - - -- - - - - - - - - -

1analyzertype2analyzertype

Anions -NN-A2

- - - - - - - - - -- - - - - - - - - -

NoneAnion measurement (with suppressor)

Cations -NN-C1-C2

- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -

NoneAmmonia measurementCation measurement (with suppressor)

Display language -E-J

- - - - - - - - - -- - - - - - - - - -

EnglishJapanese

--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”Option /EX

/W16-streams measurementWith pure water supply system *1

*1: Comewithpurewatersystem,water/effluenttankontrolley.

● ModelPi501ProcessIonChromatograph

Model BasicCode OptionCode Descriptions

PI501 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Process Ion ChromatographEL pump -P1 - - - - - - - - - - Always"-P1"Oven -V1 - - - - - - - - - - Always"-V1"Measurement -A1-A-B

-C1-N-A-C2-A-D-Y1-A-B

- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -

Anion measurementAmmonia measurementCation measurementFluoride/organic acids measurementor Boron measurement

Display language -E-J

- - - - - - - - - -- - - - - - - - - -

EnglishJapanese

--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”Option /T Withterminalboard

● ModelPIWSWorkstationSoftware

Model BasicCode OptionCode Descriptions

PIWS - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Workstation software for Pi500Display language -E

-J- - - - - - - - - -- - - - - - - - - -

EnglishJapanese

Numberofanalyzer 12

- - - - - - - - - -- - - - - - - - - -

12

--- -0 - - - - - - - - - - Always"0"--- 1 - - - - - - - - - - Always “1”--- -N - - - - - - - - - - Always “-N”--- N - - - - - - - - - - Always “N”--- N - - - - - - - - - - Always “N”

Oct. 10, 2008-00

6

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E

nACCESSORIESANDSPARES1. Standardaccessories

Name Partnumber Qty Description

Ammonia

Eluent *1 --- Please purchase it from chemical company.

Standard solution *1 K9601LB 1 NH4+ 10 mg/L, 50 ml

System check solution *1 K9601LC 1 NH4+ 1 mg/L, 100 ml

CationEluent *1 --- Please purchase it from chemical company.Standard solutionSystem check solution *1 J9735BD 2

Standard solution 50mL (mg/L)Li+:0.5, Na+:2, NH4+:2, K+:5, Ca2+:5, Mg2+:5 (mg/L)

Anion

Eluent *1 --- Please purchase it from chemical company.

Standard solutionSystem check solution *1 K9601LG 2

Standard solution 50mL (mg/L)F-:5, Cl-:10, NO2-:15, Br-:10, NO3-:30, PO43-:30, SO42-:40 (mg/L)

Fluoride and

organic acid

Eluent *1 --- Please purchase it from chemical company.

Standard solution *1 --- Please purchase it from chemical company.

BoronEluent *1 --- Please purchase it from chemical company.

Standard solution *1 --- Please purchase it from chemical company.

Anchorboltset K9613MA 1

TUBEworkingjig K9613MC 1 Toolfortubeconnection

Tank 10 L K9603ZJ 1 or 2 *1 Eluent tank

Fuse S9517VK 2 3 A

Fuse A1288EF 2 1 A

Fuse L9019EF 2 or 4 *1 3 A, for Pi501

Fuse A1174EF 2 1.25 A

Ferrite core K9607MU 7 For CM505 power supply (2) and DO (5)

Ferrite core K9607MV 2 or 4 *1 Between PC and Pi501

Tank 20 L *2 K9603RF 1 For pure water

Accessories kit *2 K9601BG 1 For pure water

Insert tool for regenerant pump *3 J9734QY 1 For only Boron measurementUser's manualCM505 Clean-room Gas Monitor IM 12Y04F03-01E 1

*1: Dependonthesystemspecifications*2: Provided when pure water system is ordered*3: Providedwhenboronmeasurementsystemisordered

Oct. 10, 2008-00

7

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation GS 12Y04F03-01E

2. Sparepartsandconsumables

Recom-mendedreplace-mentInterval

Item PartNumber

Qty

Ammonia Cation AnionFluorideand

organicacid

Boron

1 month Fluoride/organicacidmeasurement:filterunit*4 9933-11-102 2

3 months

Ammonia measurement: concentration column *1*2 K9601GA 1

Ammonia measurement: separation column *1*2 K9601FA 1

Cation measurement: concentration column *1*3 J9732AN 1

Cation measurement: separation column *1*3 J9732AX 1

Cation measurement: suppressor *1*3 J9732DV 1

Anion measurement: concentration column *1*3 J9732DX 1

Anion measurement: separation column *1*2 J9732DF 1Anion/fluoride/organicacid/boron measurement: suppressor *1*3 J9732DU 1 1 1Fluoride/organic acid measurement: concentration column *1*2 J9732QV 1

Fluoride/organic acid measurement: separation column *1*2 J9732QU 1

Boron measurement: concentration column *1*2 J9732QR 1

Boron measurement: separation column *1*2 J9732QS 1

Linefilter K9601DC 1 1 1 1 1

4 months Diaphragmforeffluentpump K9601BH 1*5 1*5 1*5 1*5 1

6 months

Plunger seal for eluent pump K9600HZ 2 2 2 2 2

Plunger seal for sample pump: for reagent line K9600NY 2 2 2 2 2

Plunger seal for sample pump: for wash line K9600NZ 2 2 2 2 2

Plunger seal for regenerant pump: for reagent line J9734QM 1

Plunger seal for regenerant pump: for wash line J9734QR 1

1 year

Rotor seal for concentration valve K9600QC 1 1 1 1 1Plungerforeluentpump(forammonia/anion/fluoride/organicacid/boron measurement) *1 K9600HY 2 2 2

Plunger for eluent pump (for cation measurement) *1 K9600HE 2 2

Check valve for eluent pump: pump inlet *1 K9600HA 1 1 1 1 1

Check valve for eluent pump: pump outlet *1 K9600GV 1 1 1 1 1

Plunger for sample pump *1 L9869DJ 2 2 2 2 2

Check valve for sample pump: pump inlet *1 K9600NG 1 1 1 1 1

Check valve for sample pump: pump outlet *1 K9600NB 1 1 1 1 1

Plunger for regenerant pump *1 J9734QV 1

Check valve for regenerant pump: pump inlet *1 J9734QK 1

Check valve for regenerant pump: pump outlet *1 J9734QJ 1

Gas collection pump *1 K9608GJ 1 1 1 1 1

Degassing module *1 K9603PB 1 1 1 1 1Cartridge for pure water supply system:Q Guard TL *6 QGARDTL01 1

*1: Replacementintervalmayvarydependingonoperatingcondition.Shouldbereplacedasneeded.*2: Shelflifeis6monthswhenstoredinacleanplace,outofdirectsunlight,attemperaturesbetween15and28°C.*3: Shelflifeis3monthswhenstoredinacleanplace,outofdirectsunlight,attemperaturesbetween15and28°C.*4: Usedtopreventcarbondioxidegasintheairfromenteringtheeluentforfluoridemeasurement.Requiresreplacement

onceamonth.ShouldbepurchaseddirectlyfromParkerHannifinCo..ListedpartnumberisthecataloguenumberofBolston Filter.

*5: Only with pure water supply system.*6: Only with pure water supply system. ShouldbepurchaseddirectlyfromNihonMilliporeK.K.ListedpartnumbersarethecataloguenumbersofNihonMillipore

K.K.

Oct. 10, 2008-00

8

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E

3. ReagentsReagentsshouldbepurchaseddirectlyfromKantoChemicalCo.,Inc.and/orWakoPureChemicalIndustries,Ltd.

Measurement Item Description Size PartNumber*1QuantityConsumed

Ammonia

Eluent HNO3, 1 mmol/L 10 L14701-84 (Kanto) 1bottle/month

Standard solution NH4+, 10 mg/L 50 ml38107-96 (Kanto) 1bottle/month

System check solution NH4+, 1 mg/L 100 ml38108-96 (Kanto) 1bottle/month

Cation

Eluent H2SO4, 10 mol/L 250 ml37993-13 (Kanto) 1bottle/month

Standard solution Mixed cation standard solution (mg/L)Li+: 0.5, Na+: 2, NH4+: 2, K+: 5, Ca2+: 5, Mg2+: 5

50 ml 07197-96 (Kanto)1bottleeach/monthSystem check solution

Anion

Eluent Na2CO3, 4.5 mmol/L 10 L38085-84 (Kanto) 1bottle/month

Standard solution Mixed anion standard solution (mg/L)F-: 5, Cl-: 10, NO2-: 15, Br-: 10, NO3-: 30, PO43-: 30, SO42-: 40

50 ml 01856-96 (Kanto)1bottleeach/monthSystem check solution

Fluorideandorganicacid

Eluent NaOH, 1 mol/L 500 ml 37847-08 (Kanto) 1bottle/month

Standard solution

Fluoride ion standard solution, 1000 mg/L 100 ml 14613-23 (Kanto) 1bottle/month

Sodium formate 25 g 37175-30 (Kanto) 1bottle/year

Sodium acetate 25 g 37093-30 (Kanto) 1bottle/year

Boron

Eluent H2SO4, 10 mol/L, for ion chromatography 250 ml37993-13 (Kanto) 1bottle/month

Eluent, regenerant D(–)-mannitol, M.W.=182.17 500 g 133-00845 (Wako) 1bottle/month

Regenerant 25% tetramethylammonium hydroxide 500 ml 206-15035 (Wako) 1bottle/month

Standard solution H3BO3 (analytical reagent grade), M.W.=61.83 500 g04232-00 (Kanto) 1bottle/month

*1: ProductnumbersofKantoChemicalCo.,Inc.orWakoPureChemicalIndustries,Ltd.

Unopenedreagentsarestablefor6months.

Oct. 10, 2008-00

9

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation GS 12Y04F03-01E

nEXTERNALDIMENSIONS,INSTALLATIONSPACEANDEXTERNALINPUT/OUTPUT

730

1060

860

820

100

115

135

4-ø15 holes

380

165

185

710 8070

720 7070

↑Front side

Bottom (anchor bolt position)

Power cable inlet

Main beraker

* With pure water supply system (/W)** 16-streams measurement (/EX)

Drain tube inlet *

Sample inlet **Unit: mm

Wiring connectorfor water supplysystem *

Drain

Pure waterinlet173 90 85

135

CM505 top

CM505 front side

1000 860

1000

1000

1000

730

Maintenance spacePlease secure the installation space of the trolly separately for with pure water supply system (/W).

Band

Trolley

Cartridge for pure water

Pure water tank (20L)Drain tank (20L)

Unit: mmSwitch box

App

rox.

810

840555

Purewatersupplysystem(Optioncode:/W)

Oct. 10, 2008-00

10

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E

ExternalInput/OutputTerminalArrangement

#1#2#3#4#5#6#7#8#9

#10#11#12#13#14#15#16

Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9

#10#11#12#13#14#15#16

D/O (*2)

D/O (*2)

D/O Common

D/O Common

D/O (*2)

D/O (*2)

Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16

Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16

Streamnumber

369

121518212427303336394245485154576063666972757881848790939699

102105108111114117120123126129132135138141144

A BNo Connection

Normally Close (*1)No Connection

D/O (*2)

D/O (*2)

123456789

101112131415161718192021222324252627

Terminalnumber

#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16

Streamnumber

258111417202326293235384144475053565962656871747780838689929598101104107110113116119122125128131134137140143

Terminalnumber

Streamnumber

147101316192225283134374043464952555861646770737679828588919497100103106109112115118121124127130133136139142

Terminalnumber

Terminal board sw

itch number

AA

Normally Open (*1)GNDGND

D/O (*2)

D/O (*2)

BB

Common+24V+24V

D/O Common

D/O Common

Measurement Strream Skip Input

Alarm InputAlarm Reset InputLeakage Water Alarm OutputAlarm Buzzer OutputAlarm Light OutputRetry Measurement Output

Alarm Output

Measurement Stream Bit Output

Stream Alarm Output

terminal board switch A 101 and 102Power Off

Without eventWith event

OpenOpenClose

*1 :*2 : Select either terminal board switch A or B

Power Off Open Common CloseFor A Without event Open Common Close

With event Close Common OpenPower Off Open Common Close

For B Without event Close Common OpenWith event Open Common Close

When power is turned off: Open Common Close

Contact input

ResistancebetweenA and B

200 Ω or less100 kΩ or more200 Ω to100 kΩ

ONOFF

No operation garanteed

Contact outputAlarm Buzzer, Alarm Light

Use the contact at 30V DC, 0.5A or less expect forAlarm Buzzer, Alarm Light.

Power OffWithout eventWith event

0VLess than +1V

+24VProtection circuit is not provided.

Oct. 10, 2008-00

11

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation GS 12Y04F03-01E

● MeasurementStreamSkipInputUsed when any stream measurement is skipped.

● RetryMeasurementOutputOutputs from the relay contact when the same streamismeasuredagainduetoanabnormalityinthe measured result. (No output at overlap measure-ment)

● AlarmBuzzerOutputTheterminalforsoundingthebuzzerwhenanalarmis generated. Power of +24 V DC is applied. The buzzerisprovidedasstandard.

● AlarmLightOutputThe terminal for lighting a rotating warning light and the like when an alarm is generated. Power of +24 V DC is applied. Normally, the light is not mounted. The user should not use this terminal.

● LeakageWaterAlarmOutputWhen liquid leakage occurs in the CM505 (except within Pi501), an alarm is output from a relay contact.

● AlarmOutputWhen a high level alarm occurs, alarm is output from relay contacts (5 points).

● MeasurementStreamBitOutputMeasurementstreamsareexpressedandidentifiedwithbitsandareoutputfromrelaycontacts.Measurement

Stream Bit0 Bit1 Bit2 Bit3 Bit4

1 1 0 0 0 0

2 0 1 0 0 0

3 1 1 0 0 0

4 0 0 1 0 0

5 1 0 1 0 0

6 0 1 1 0 0

7 1 1 1 0 0

8 0 0 0 1 0

9 1 0 0 1 0

10 0 1 0 1 0

11 1 1 0 1 0

12 0 0 1 1 0

13 1 0 1 1 0

14 0 1 1 1 0

15 1 1 1 1 0

16 0 0 0 0 1

● StreamAlarmOutputTheabnormalconcentrationsignalforeachmeasure-ment stream is output from a relay contact.

Oct. 10, 2008-00

12

All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation

GS 12Y04F03-01E Oct. 10, 2008-00

Clean-roomGasMonitorInquirySpecificationsForanyinquiriesconcerningtheYokogawaClean-roomGasMonitor,enterthecheckmarks(√)inrelevantboxes,andintheunderlinedparts,writetheprescribeditems.

1. General(1)Nameofyourfirm:________________________________________________________________________(2)Personincharge:_____________________Department:__________________Phone:_________________(3)Nameofthefactory:_______________________________________________________________________(4)Measuringpoint(s):________________________________________________________________________(5)Powersupply:___________VAC,___________Hz

2. Measuring Condition(1) Gastobemeasured:__________________________________(2)Numberofmeasuringpoints:____________________________Point(s)(3)Gasconcentration: ____________________________________µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb)(4)Others:____________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________

3. Location of Installation(1) Environment: □ In a clean room, □Sub-cleanroom,□ Outside a clean room(2)Ambienttemperature:__________to____________°C(3)Others:____________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________

4.OtherRequirements:_____________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________

CautionForsafeandcorrectuseofthisproductbesuretothoroughlyreadtheinstructionmanuals.“Windows”,"WindowsXP"and"WindowsVista"are registered trademarks of Microsoft Corporation.“Pentium” is a registered trademark of Intel Corporation.Other product names and the like are registered trademarks or trademarks of each company concerned.

Subjecttochangewithoutnotice.