Clean Room Design Ten Easy Steps

Cleanroom HVAC Design in Cleanroom HVAC Design in

Ten Easy StepsTen Easy Steps

By: Vincent A. Sakraida, PE, LEED APBy: Vincent A. Sakraida, PE, LEED AP

PRIMER ONE:PRIMER ONE:

Know Your Starting PointKnow Your Starting Point

How Many Particles are There in How Many Particles are There in Standard Air?Standard Air?

How Many Particles?How Many Particles?

500,000 to 1 Million500,000 to 1 Million

1 Million to 10 Million1 Million to 10 Million

10 Million to 100 Million10 Million to 100 Million

100 Million to 1 Billion100 Million to 1 Billion

1 Billion to 10 Billion1 Billion to 10 Billion

10 Billion to 100 Billion10 Billion to 100 Billion

Lets Narrow it DownLets Narrow it Down

1 Billion to 2.5 Billion1 Billion to 2.5 Billion

2.5 Billion to 5 Billion2.5 Billion to 5 Billion

5 Billion to 7.5 Billion5 Billion to 7.5 Billion

7.5 Billion to 10 Billion7.5 Billion to 10 Billion

Atmosphere Particle DistributionAtmosphere Particle Distribution

PARTICLEPARTICLE AVERAGE QUANTITYAVERAGE QUANTITY PERCENTPERCENT PERCENTPERCENTSIZE (MICRON)SIZE (MICRON) PER CUBIC FOOTPER CUBIC FOOT BY COUNTBY COUNT BY WEIGHTBY WEIGHT0.01 0.01 -- 0.020.02 173,929,613173,929,613 7.287.28 --------------0.02 0.02 -- 0.050.05 338,577,845338,577,845 14.1714.17 0.020.020.05 0.05 0.100.10 395,213,491395,213,491 16.5416.54 0.180.180.10 0.10 0.220.22 906,959,672906,959,672 37.9537.95 4.204.200.22 0.22 0.460.46 501,288,728501,288,728 20.9820.98 23.2223.220.46 0.46 1.001.00 69,890,56469,890,564 2.922.92 32.3832.381.00 1.00 2.152.15 3,801,9733,801,973 0.160.16 17.6017.602.16 2.16 4.644.64 212,705212,705 ---------------- 9.859.854.65 4.65 --10.0010.00 15,23515,235 ---------------- 7.067.0610.01 10.01 21.5421.54 645645 ---------------- 2.982.9821.55+21.55+ 2828 ---------------- 2.512.51

2,389,890,4992,389,890,499 100.00100.00 100.00100.00

PRIMER TWO:PRIMER TWO:

Know Your End PointKnow Your End Point

How Many Particles are Allowed How Many Particles are Allowed in a Class 100 Cleanroom?in a Class 100 Cleanroom?

How Many Particles in a Class 100 How Many Particles in a Class 100 Cleanroom Per Cubic Meter?Cleanroom Per Cubic Meter?

100100

100 to 1,000100 to 1,000

1,000 to 10,0001,000 to 10,000

10,000 to 100,00010,000 to 100,000

100,000 to 500,000100,000 to 500,000

500,000 to 1 Million500,000 to 1 Million

Lets Narrow it DownLets Narrow it Down

100,000 to 200,000100,000 to 200,000

200,000 to 300,000200,000 to 300,000

300,000 to 400,000300,000 to 400,000

400,000 to 500,000400,000 to 500,000

Actually!!!!Actually!!!!

A Cleanroom Cleanliness Class A Cleanroom Cleanliness Class 100 classification will allow 100 classification will allow 138,281138,281 particles per cubic meter.particles per cubic meter.

Airborne Particle Cleanliness ClassAirborne Particle Cleanliness Class

Class NameClass Name 0.1 Microns0.1 Microns 0.2 Microns0.2 Microns 0.3 Microns0.3 Microns 0.5 Microns0.5 Microns 1.0 Microns1.0 Microns 5.0 Microns5.0 Microns

ISO 1ISO 1 1010 22

ISO 2ISO 2 100100 2424 1010 44

ISO 3 (1)ISO 3 (1) 10001000 237237 102102 3535 88

ISO 4 (10)ISO 4 (10) 1000010000 23702370 10201020 352352 8383

ISO 5 (100)ISO 5 (100) 100000100000 2370023700 1020010200 35203520 832832 2929

ISO 6 (1000)ISO 6 (1000) 10000001000000 237000237000 102000102000 3520035200 83208320 293293

ISO 7 (10000)ISO 7 (10000) 352000352000 8320083200 29302930

ISO 8 (100000)ISO 8 (100000) 35200003520000 83200008320000 2930029300

ISO 9ISO 9 3520000035200000 83200008320000 293000293000

Note:Note: Particles are per square meterParticles are per square meter

Table from Institute of Environmental Science Testing IEST standTable from Institute of Environmental Science Testing IEST standard 14644ard 14644

Airborne Particle Cleanliness ClassAirborne Particle Cleanliness Class

Class NameClass Name 0.1 Microns0.1 Microns 0.2 Microns0.2 Microns 0.3 Microns0.3 Microns 0.5 Microns0.5 Microns 5.0 Microns5.0 Microns

M1M1 9.919.91 2.142.14 0.8750.875 0.2830.283

M1.5 (1)M1.5 (1) 3535 7.57.5 33 11M2M2 99,199,1 21.421.4 8.758.75 2.832.83

M2.5 (10)M2.5 (10) 350350 7575 3030 1010M3M3 991991 214214 87.587.5 28.328.3

M3.5 (100)M3.5 (100) 750750 300300 100100M4M4 21402140 875875 283283

M4.5 (1000)M4.5 (1000) 10001000 77

M5M5 28302830 17.517.5

M5.5 (10000)M5.5 (10000) 1000010000 7070

M6M6 2830028300 175175

M6.5 (100000)M6.5 (100000) 100000100000 700700

M7M7 283000283000 17501750

Note:Note: Particles are per square footParticles are per square foot

Federal Standard 209EFederal Standard 209E

PRIMER THREE:PRIMER THREE:

How Do You Get There?How Do You Get There?

We use HEPA FiltersWe use HEPA Filters

What is a HEPA Filter?What is a HEPA Filter?

HEPA stands for High Efficiency Particulate HEPA stands for High Efficiency Particulate Arrestor. A HEPA Filter is a filter that has a Arrestor. A HEPA Filter is a filter that has a minimum efficiency of 99.97% by DOP test minimum efficiency of 99.97% by DOP test method. IEST Standard IESmethod. IEST Standard IES--RPRP--CC001 CC001 provides filter design and construction provides filter design and construction requirements.requirements.

A HEPA filter is typically in a 2A HEPA filter is typically in a 2 by 2by 2 or 2or 2 by 4by 4configuration. The HEPA filter media is configuration. The HEPA filter media is constructed of all constructed of all borositeborosite glass paper which is glass paper which is pleated and sealed into a filter frame with pleated and sealed into a filter frame with urethane.urethane.

How do HEPA Filters Work?How do HEPA Filters Work?

A typical fibrous filter is composed of an extremely large A typical fibrous filter is composed of an extremely large number of randomly oriented fibers, yielding a product number of randomly oriented fibers, yielding a product that does not have a controlled pore size. The filter mat that does not have a controlled pore size. The filter mat resembles a dense jungle with the haphazard spacing resembles a dense jungle with the haphazard spacing and orientation of trees and thicket. The filter is capable and orientation of trees and thicket. The filter is capable of capturing particles that are much smaller than the of capturing particles that are much smaller than the tightest spacing between fibers. How can this be?tightest spacing between fibers. How can this be?

How do HEPA Filters work?How do HEPA Filters work?

There are four mechanisms that a filter utilizes There are four mechanisms that a filter utilizes to capture particles. They are: Straining Effect, to capture particles. They are: Straining Effect, Inertia Effect, Interception Effect, Diffusion Inertia Effect, Interception Effect, Diffusion Effect.Effect.

Straining Effect:Straining Effect:Straining occurs in a filter when particles enter Straining occurs in a filter when particles enter passages between two or more fibers that have passages between two or more fibers that have dimensions less than the particle diameter. dimensions less than the particle diameter.

The least prevalent mechanism of particle The least prevalent mechanism of particle capture. Most effective on larger particles.capture. Most effective on larger particles.


Inertia Effect:Inertia Effect:

An air stream is broken up into many smaller An air stream is broken up into many smaller streams as it travels through the randomly streams as it travels through the randomly oriented fiber filter bed. These streams can oriented fiber filter bed. These streams can bend around the fibers, rejoining on the bend around the fibers, rejoining on the downstream side of the filter. Any particles that downstream side of the filter. Any particles that have sufficient inertia are not capable of have sufficient inertia are not capable of bending around the fibers with the air stream, bending around the fibers with the air stream, and collide with the fibers and are captured.and collide with the fibers and are captured.

Inertia impaction is less prevalent and most Inertia impaction is less prevalent and most effective against particles larger than 1 micron.effective against particles larger than 1 micron.


Interception Effect:Interception Effect:Unlike larger, more massive particles subject Unlike larger, more massive particles subject to inertia impaction, smaller diameter to inertia impaction, smaller diameter particles will alter their path along with the particles will alter their path along with the flow lines around the filter fiber. Should the flow lines around the filter fiber. Should the particle follow a path which would cause it to particle follow a path which would cause it to make contact with the fiber, it is captured and make contact with the fiber, it is captured and retained. retained.

The interception effect is a primary method of The interception effect is a primary method of particle capture for particles over 0.1 micron.particle capture for particles over 0.1 micron.


Diffusion Effect:Diffusion Effect:

The diffusion effect is based on the kinetic theory which The diffusion effect is based on the kinetic theory which says that an ideal gas is composed of a very large says that an ideal gas is composed of a very large number of particles called molecules, and that these number of particles called molecules, and that these molecules are in random motion. The random motion, molecules are in random motion. The random motion, Brownian Motion, increases the probability of collision Brownian Motion, increases the probability of collision with a filter fiber. Once a particle collides with a fiber, it with a filter fiber. Once a particle collides with a fiber, it is retained by strong intermolecular forces.is retained by strong intermolecular forces.

The diffusion effect is primary capture mechanism for The diffusion effect is primary capture mechanism for particles under 0.1 microns.particles under 0.1 microns.


Filtration Efficiency Curve:Filtration Efficiency Curve:Straining and inertia effects are more favorable Straining and inertia effects are more favorable for particles over 1 micron. Interception and for particles over 1 micron. Interception and diffusion effects are more favorable for particles diffusion effects are more favorable for particles less than 1 micron. A wide range of particle less than 1 micron. A wide range of particle diameters is usually present in the air being diameters is usually present in the air being filtered.filtered.There is a particle size that is slightly to large to There is a particle size that is slightly to large to be efficiently captured by diffusion and slightly be efficiently captured by diffusion and slightly too small to be effectively captured by one of too small to be effectively captured by one of the other mechanism. The particles in the ?? to the other mechanism. The particles in the ?? to ?? micron size are least effectively filtered.?? micron size are least effectively filtered.

Are All HEPA Filters Created Are All HEPA Filters Created Equally?Equally?

Not exactly, there are six different types of Not exactly, there are six different types of HEPA filters with various efficiency ratings and HEPA filters with various efficiency ratings and testing methods for certain types of applications. testing methods for certain types of applications. The different types of HEPA filters include:The different types of HEPA filters include:

Filter TypeFilter Type Filter EfficiencyFilter Efficiency Penetration TestPenetration Test Scan TestScan TestAA 99.97% @ 0.399.97% @ 0.3 MilMil--STD 282STD 282 NoneNoneBB 99.97% @ 0.399.97% @ 0.3 MilMil--STD 282 *STD 282 * NoneNoneCC 99.99% @ 0.399.99% @ 0.3 MilMil--STD 282 STD 282 PhotometerPhotometerDD 99.999% @ 0.399.999% @ 0.3 MilMil--STD 282 STD 282 PhotometerPhotometerEE 99.97% @ 0.399.97% @ 0.3 MilMil--STD 282 *STD 282 * PhotometerPhotometerFF 99.999% @ 0.199.999% @ 0.1 IESTIEST--RPRP--CC007CC007 Particle CounterParticle Counter

** Two Flow Leak TestTwo Flow Leak Test

What Are These HEPA Filters Used What Are These HEPA Filters Used For?For?

Filter TypeFilter Type ApplicationApplicationAA Industrial, Hospitals, Food, PlasticsIndustrial, Hospitals, Food, PlasticsBB Nuclear FacilitiesNuclear FacilitiesCC Laminar Flow for Semiconductors and Drug ManufacturingLaminar Flow for Semiconductors and Drug ManufacturingDD Semiconductors and Drug ManufacturingSemiconductors and Drug ManufacturingEE Hazardous Biological Containment FacilitiesHazardous Biological Containment FacilitiesFF SemiconductorSemiconductor

STEP ONE:STEP ONE:

Evaluate Layout for People/Material FlowEvaluate Layout for People/Material Flow

Must take people flow into consideration.Must take people flow into consideration.

Must take process flow into consideration.Must take process flow into consideration.

Must take contamination proximity to sensitive areas Must take contamination proximity to sensitive areas into consideration.into consideration.

Must take facility limitations into consideration.Must take facility limitations into consideration.

STEP TWO:STEP TWO:

Determine Space Cleanliness Determine Space Cleanliness ClassificationClassification

The more sensitive the process, the lower the The more sensitive the process, the lower the cleanliness classification needs to be.cleanliness classification needs to be.No more than a two order of magnitude No more than a two order of magnitude difference between two adjoining spaces that difference between two adjoining spaces that have access to each other. IE. A class 100,000 have access to each other. IE. A class 100,000 cleanroom opening into a class 100 cleanroom is cleanroom opening into a class 100 cleanroom is not good, but a class 100,000 cleanroom opening not good, but a class 100,000 cleanroom opening into a class 1,000 cleanroom is OK.into a class 1,000 cleanroom is OK.

Determine Space PressurizationDetermine Space Pressurization

Space Pressurization prevents contaminants from Space Pressurization prevents contaminants from entering the cleanroom through infiltration. Typically, entering the cleanroom through infiltration. Typically, a pressure differential of 0.03 IN WG to 0.05 IN WG is a pressure differential of 0.03 IN WG to 0.05 IN WG is standard between cleanroom and uncontrolled standard between cleanroom and uncontrolled environment.environment.

Try not to have a pressure differential of more than Try not to have a pressure differential of more than 0.10 IN WG between two spaces that open to each 0.10 IN WG between two spaces that open to each other.other.

Airlocks do not need to have their own pressure.Airlocks do not need to have their own pressure.

Try to reduce extensive pressurization cascade.Try to reduce extensive pressurization cascade.

Determine Space Supply Air FlowDetermine Space Supply Air Flow

Primarily based upon the space cleanliness Primarily based upon the space cleanliness classification.classification.

Need consider process.Need consider process.

Need to consider activity within the space.Need to consider activity within the space.

CleanroomCleanroom Air Change Rate RangesAir Change Rate Ranges

CleanroomCleanroom Air Flow Air Flow Air ChangesAir Changes

ClassificationClassification VelocityVelocity per Hourper HourISO 4 Class 10ISO 4 Class 10 50 50 90 fpm90 fpm 360 360 -- 600 600

ISO 5 Class 100ISO 5 Class 100 40 40 -- 80 fpm80 fpm 240 240 -- 480480

ISO 6 Class 1000ISO 6 Class 1000 25 25 40 fpm40 fpm 150 150 240240

ISO 7 Class 10000ISO 7 Class 10000 10 10 15 fpm15 fpm 40 40 60 60

ISO 8 Class 100000ISO 8 Class 100000 1 1 8 fpm8 fpm 5 5 -- 2020

STEP FIVE:STEP FIVE:

Determine Space Air Determine Space Air ExfiltrationExfiltration FlowFlow

Primarily based upon the pressure differential between Primarily based upon the pressure differential between connected spaces.connected spaces.

Need to consider process exhaust.Need to consider process exhaust.

Need to consider architectural construction.Need to consider architectural construction.

STEP SIX:STEP SIX:

Determine Space Air BalanceDetermine Space Air Balance

Primarily based upon the supply air plus air infiltration Primarily based upon the supply air plus air infiltration minus minus exfiltrationexfiltration, exhaust, and return air., exhaust, and return air.

Air flows may need to change to accommodate Air flows may need to change to accommodate infiltration, infiltration, exfiltrationexfiltration, and exhaust air flows., and exhaust air flows.

Need to track where the Need to track where the exfiltrationexfiltration air goes to and air goes to and where the infiltration air comes from.where the infiltration air comes from.

STEP SEVEN:STEP SEVEN:

What variables need to be evaluated?What variables need to be evaluated?

Temperature (66 F to 72 F)Temperature (66 F to 72 F)Humidity (45 % +/Humidity (45 % +/-- 5%)5%)Space PressurizationSpace PressurizationCleanroom ClassificationCleanroom ClassificationLaminarityLaminarityElectrostatic Discharge RequirementElectrostatic Discharge RequirementNoise LevelNoise LevelVibrationVibration

STEP EIGHT:STEP EIGHT:

Determine Mechanical System to be UsedDetermine Mechanical System to be Used

Main variable affecting mechanical system selection is Main variable affecting mechanical system selection is cleanliness classification.cleanliness classification.

Other factors affecting mechanical system selection Other factors affecting mechanical system selection include:include:

Space AvailabilitySpace Availability

Available fundingAvailable funding

Process RequirementsProcess Requirements

Space OrientationSpace Orientation

System Air FlowSystem Air Flow

Required ReliabilityRequired Reliability

Energy CostEnergy Cost

Local ClimateLocal Climate

STEP NINE:STEP NINE:

Perform Heating/Cooling CalculationsPerform Heating/Cooling Calculations

Use the most conservative climate conditions (99.6% Use the most conservative climate conditions (99.6% heating design, 0.4% DB/MWB cooling design and heating design, 0.4% DB/MWB cooling design and 0.4% WB/MDB cooling design.0.4% WB/MDB cooling design.

Include infiltration into your calculations.Include infiltration into your calculations.

Include humidifier manifold heat into calculations.Include humidifier manifold heat into calculations.

Include process loads into calculations.Include process loads into calculations.

DonDon t forget to include recirculation fan heat into t forget to include recirculation fan heat into calculations.calculations.

STEP TEN:STEP TEN:

Fight for Mechanical Room SpaceFight for Mechanical Room Space

If you have a 1,000 square feet cleanroom, the If you have a 1,000 square feet cleanroom, the approximate total facility square footage range approximate total facility square footage range needed for each cleanroom classification is as needed for each cleanroom classification is as follows:follows:

Class 100,000 (ISO8)Class 100,000 (ISO8) 1,250 SF to 1,500 SF1,250 SF to 1,500 SF



Class 100 (ISO5)Class 100 (ISO5) 1,750 SF to 2,500 SF1,750 SF to 2,500 SF

EXTRA CREDITEXTRA CREDIT

Saving EnergySaving Energy

CleanroomsCleanrooms are highly energy intensive. The are highly energy intensive. The primary ways to save energy is by:primary ways to save energy is by:

Reducing Air FlowReducing Air Flow

Reducing Static Pressure Drop in SystemReducing Static Pressure Drop in System

HEPA FILTER ENERGY SAVINGSHEPA FILTER ENERGY SAVINGS

Filter Media DepthFilter Media Depth

99.97% @ 0.3 99.97% @ 0.3 Micrometers Micrometers EfficiencyEfficiency

2424 by 48by 48 Gasketed Gasketed Filter.Filter.

Pressure Drops are in Pressure Drops are in Inches Water Inches Water Column.Column.

0.5570.5570.1850.1850.7420.742900900

0.4400.4400.1460.1460.5860.586800800

0.3370.3370.1120.1120.4490.449700700

0.2480.2480.0820.0820.3300.330600600

0.1720.172.057.0570.2290.229500500

0.1110.1110.0360.0360.1470.147400400

Press Press DiffDiff

1212depthdepth

66depthdepth

CFMCFM



99.99% @ 0.3 99.99% @ 0.3 Micrometers EfficiencyMicrometers Efficiency


Pressure Drops are in Pressure Drops are in Inches Water Column.Inches Water Column.

0.2980.2980.7000.7000.9980.998900900

0.2350.2350.5540.5540.7890.789800800

0.1800.1800.4240.4240.6040.604700700

0.1320.1320.3120.3120.4440.444600600

0.0920.0920.2160.2160.3080.308500500

0.0590.0590.1380.1380.1970.197400400


44depthdepth

22depthdepth

CFMCFM






0.4030.4030.7880.7881.1911.191900900

0.3180.3180.6230.6230.9410.941800800

0.2440.2440.4770.4770.7210.721700700

0.1790.1790.3500.3500.5290.529600600

0.1240.1240.2440.2440.3680.368500500

0.0790.0790.1560.1560.2350.235400400


44depthdepth

22depthdepth

CFMCFM



99.97% filter had a 75% drop in static pressure 99.97% filter had a 75% drop in static pressure when filter depth was increased from 6when filter depth was increased from 6 to 12to 12 ..





Using a fan efficiency of 70%, motor efficiency Using a fan efficiency of 70%, motor efficiency of 90% and electrical cost of 0.10 $/kwh, the of 90% and electrical cost of 0.10 $/kwh, the energy savings per 24energy savings per 24 by 48by 48 HEPA filter is:HEPA filter is:

For 99.97% filter, $38.48/year.For 99.97% filter, $38.48/year.





Other advantageous of using deeper filter media Other advantageous of using deeper filter media include following:include following:

Lower electrical construction cost due to smaller Lower electrical construction cost due to smaller fan motor and electrical service.fan motor and electrical service.

Deeper filter can contain more contaminants Deeper filter can contain more contaminants resulting in less frequent filter changes resulting resulting in less frequent filter changes resulting in maintenance cost savings and filter in maintenance cost savings and filter replacement cost savings.replacement cost savings.


Filter FrameFilter Frame

99.99% @ 0.3 99.99% @ 0.3 Micrometers Micrometers EfficiencyEfficiency

2424 by 48by 48 FilterFilter

with 2with 2 media depth.media depth.

Pressure Drops are Pressure Drops are in Inches Water in Inches Water Column.Column.

0.0470.0471.0451.0450.9980.998900900

0.0370.0370.8260.8260.7890.789800800

0.0280.0280.6320.6320.6040.604700700

0.0210.0210.4650.4650.4440.444600600

0.0140.0140.3220.3220.3080.308500500

0.0090.0090.2060.2060.1970.197400400


Gel Gel SealSeal

GaskGask--etedeted

CFMCFM




2424 by 48by 48 Filter with 2Filter with 2media depth.media depth.


0.0780.0781.2691.2691.1911.191900900

0.0590.0591.0001.0000.9410.941800800

0.0470.0470.7680.7680.7210.721700700

0.0350.0350.5640.5640.5290.529600600

0.0240.0240.3920.3920.3680.368500500

0.0150.0150.2500.2500.2350.235400400


Gel Gel SealSeal

GaskGask--etedeted

CFMCFM



99.99% filter had a 5% 99.99% filter had a 5% increaseincrease in static in static pressure when filter was changed from pressure when filter was changed from gasketed to gel seal.gasketed to gel seal.

99.995% filter had a 6% 99.995% filter had a 6% increaseincrease in static in static pressure when filter was changed from pressure when filter was changed from gasketed to gel seal.gasketed to gel seal.



Using a fan efficiency of 70%, motor efficiency Using a fan efficiency of 70%, motor efficiency of 90% and electrical cost of 0.10 $/kwh, the of 90% and electrical cost of 0.10 $/kwh, the energy savings per 24energy savings per 24 by 48by 48 HEPA filter is:HEPA filter is:




Other Filter Criteria To ConsiderOther Filter Criteria To Consider

In a hooded filter, duct connections come in 10In a hooded filter, duct connections come in 10and 12and 12 diameters. Using the 12diameters. Using the 12 will reduce will reduce duct pressure drop and hood turbulence.duct pressure drop and hood turbulence.

DonDon t use separators. Filter pressure drop t use separators. Filter pressure drop increases faster with separators.increases faster with separators.

Filter screens have minimal impact on filter Filter screens have minimal impact on filter pressure drop.pressure drop.

FAN ENERGY SAVINGSFAN ENERGY SAVINGS

Fan TypeFan Type

There are number of fan types available for There are number of fan types available for recirculation units. As an example, we are going recirculation units. As an example, we are going to compare the required brake horsepower for to compare the required brake horsepower for each fan type to supply 18,000 CFM at 4.0 IN each fan type to supply 18,000 CFM at 4.0 IN WG. The optimum fan size was selected for each WG. The optimum fan size was selected for each type.type.


Fan TypeFan Type

Tube Axial FanTube Axial Fan 25.3 BHP25.3 BHP

Vane Axial FanVane Axial Fan 22.7 BHP22.7 BHP

Plenum Fan (Quiet)Plenum Fan (Quiet) 17.3 BHP17.3 BHP

Plenum FanPlenum Fan 16.6 BHP16.6 BHP

Plug Fan (BI)Plug Fan (BI) 15.6 BHP15.6 BHP

Centrifugal (BI, SWSI)Centrifugal (BI, SWSI) 15.6 BHP15.6 BHP


Fan TypeFan Type

Centrifugal Fan (AF,DWDI)Centrifugal Fan (AF,DWDI) 15.1 BHP15.1 BHP

Plug Fan (AF)Plug Fan (AF) 14.5 BHP14.5 BHP

Centrifugal Fan (AF,SWSI)Centrifugal Fan (AF,SWSI) 13.9 BHP13.9 BHP


Fan TypeFan Type

The horsepower difference between the most The horsepower difference between the most and least efficient fan is 11.4 BHP which and least efficient fan is 11.4 BHP which translates into translates into $7,447/year$7,447/year difference in fan difference in fan energy cost.energy cost.Even between the most efficient and second Even between the most efficient and second most efficient fan, there is a 0.6 BHP difference most efficient fan, there is a 0.6 BHP difference which translates into which translates into $392/year$392/year difference in fan difference in fan energy cost.energy cost.


Fan SizingFan Sizing

For a particular type fan, there are usually For a particular type fan, there are usually several fan sizes that can meet the specific several fan sizes that can meet the specific system operating criteria. As an example, we system operating criteria. As an example, we are going to look at the required brake are going to look at the required brake horsepower for different sized centrifugal fans horsepower for different sized centrifugal fans with single width single inlet, air foil, and with single width single inlet, air foil, and meeting 18,000 CFM at 40. IN WG.meeting 18,000 CFM at 40. IN WG.



Size 27 (27Size 27 (27 DiaDia. Wheel). Wheel) 20.4 BHP20.4 BHP







The horsepower difference between the most The horsepower difference between the most and least efficient fan is 6.5 BHP which and least efficient fan is 6.5 BHP which translates into translates into $4,246/year$4,246/year difference in fan difference in fan energy cost.energy cost.


Other Energy Saving MeasuresOther Energy Saving Measures

Use variable frequency drive and modulate air flow to Use variable frequency drive and modulate air flow to maintain specific particle level.maintain specific particle level.

Use isolation technology. A room does not have to be all Use isolation technology. A room does not have to be all of one cleanliness classification.of one cleanliness classification.

Reduce space pressure differential and keep pressure Reduce space pressure differential and keep pressure cascading to a minimum.cascading to a minimum.

Cleanroom Codes and StandardsCleanroom Codes and Standards

List of Cleanroom StandardsList of Cleanroom StandardsIEST STANDARDSIEST STANDARDS

IESTIEST--RPRP--CC001CC001 HEPA and ULPA FiltersHEPA and ULPA Filters

IESTIEST--RPRP--CC002CC002 UnidirectionalUnidirectional--Flow CleanFlow Clean--Air Air DevicesDevices

IESTIEST--RPRP--CC003CC003 Garment System Considerations forGarment System Considerations for

Cleanrooms and other ControlledCleanrooms and other Controlled

EnvironmentsEnvironments

IESTIEST--RPRP--CC004CC004 Evaluating Wiping Materials Used in Evaluating Wiping Materials Used in

Cleanrooms and Other ControlledCleanrooms and Other Controlled

EnvironmentsEnvironments

IESTIEST--RPRP--CC005CC005 Cleanroom Gloves and Finger Cots Used in Cleanroom Gloves and Finger Cots Used in Cleanrooms and Other Controlled Cleanrooms and Other Controlled EnvironmentsEnvironments



IESTIEST--RPRP--CC006CC006 Testing CleanroomsTesting Cleanrooms

IESTIEST--RPRP--CC007CC007 Testing ULPA FiltersTesting ULPA Filters

IESTIEST--RPRP--CC008CC008 GasGas--Phase Adsorber CellsPhase Adsorber Cells

IESTIEST--RPRP--CC011CC011 A Glossary of Terms and Definitions Relating A Glossary of Terms and Definitions Relating to Contamination Controlto Contamination Control

IESTIEST--RPRP--CC012CC012 Considerations in Cleanroom DesignConsiderations in Cleanroom Design

IESTIEST--RPRP--CC013CC013 Equipment Calibration or ValidationEquipment Calibration or Validation

ProcedureProcedure

IESTIEST--RPRP--CC016CC016 The Rate of Deposition of NonvolatileThe Rate of Deposition of Nonvolatile

Residue in CleanroomsResidue in Cleanrooms

IEStIESt--RPRP--CC018CC018 Cleanroom Housekeeping Cleanroom Housekeeping -- OperatingOperating

and Monitoring Proceduresand Monitoring Procedures



IESTIEST--RPRP--CC019CC019 Qualifications for Organizations Engaged in Qualifications for Organizations Engaged in the Testing and Certification of Cleanrooms the Testing and Certification of Cleanrooms and Cleanand Clean--Air DevicesAir Devices

IESTIEST--RPRP--CC020CC020 Substrates and Forms for Documentation Substrates and Forms for Documentation

IESTIEST--RPRP--CC021CC021 Testing HEPA and ULPA Filter MediaTesting HEPA and ULPA Filter Media

IESTIEST--RPRP--CC022CC022 Electrostatic Charge in CleanroomsElectrostatic Charge in Cleanrooms

And Other Controlled EnvironmentsAnd Other Controlled Environments

IESTIEST--RPRP--CC023CC023 Microorganisms in CleanroomsMicroorganisms in Cleanrooms

IESTIEST--RPRP--CC024CC024 Measuring and Reporting Vibration inMeasuring and Reporting Vibration in

Microelectronics FacilitiesMicroelectronics Facilities

IESTIEST--RPRP--CC026CC026 Cleanroom OperationsCleanroom Operations



IESTIEST--RPRP--CC027CC027 Personnel Practice and Procedures in Personnel Practice and Procedures in Cleanrooms and Controlled EnvironmentsCleanrooms and Controlled Environments

IESTIEST--RPRP--CC028CC028 MinienvironmentsMinienvironmentsIESTIEST--RPRP--CC029CC029 Automotive Paint Spray ApplicationsAutomotive Paint Spray ApplicationsIESTIEST--RPRP--CC031CC031 Method for Characterizing Method for Characterizing OutgassedOutgassed Organic Organic

Compounds from Cleanroom Materials and Compounds from Cleanroom Materials and ComponentsComponents

IESTIEST--RPRP--CC034CC034 HEPA and ULPA Filter Leak TestsHEPA and ULPA Filter Leak TestsIESTIEST--GG--CC1001CC1001 Counting Airborne Particles for Classification Counting Airborne Particles for Classification

and Monitoring of Cleanrooms and Clean and Monitoring of Cleanrooms and Clean Zones.Zones.

IESTIEST--GG--CC1002CC1002 Determination of the Concentration of Determination of the Concentration of Airborne Ultra ParticlesAirborne Ultra Particles



IESTIEST--GG--CC1003CC1003 Measurement of Airborne Measurement of Airborne MacroparticleMacroparticle SizeSize

IESTIEST--GG--CC1004CC1004 Sequencing Sampling Plan for Use in Sequencing Sampling Plan for Use in Classification of the Particulate Cleanliness of Classification of the Particulate Cleanliness of Air in Cleanrooms and Clean ZonesAir in Cleanrooms and Clean Zones

Fed Std. 209EFed Std. 209E Airborne Particulate CleanlinessAirborne Particulate Cleanliness

Classes in Cleanrooms and CleanClasses in Cleanrooms and Clean

ZonesZones

SMACNASMACNA Ductwork Construction StandardsDuctwork Construction Standards

NEBBNEBB Air Balancing StandardAir Balancing Standard


List of Cleanroom StandardsList of Cleanroom StandardsISO STANDARDSISO STANDARDS

ISO 14644ISO 14644--11 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 1 Classification of Air Part 1 Classification of Air CleanlinessCleanliness

ISO 14644ISO 14644--22 Cleanrooms and Associate Controlled Cleanrooms and Associate Controlled Environments Environments Part 2 Specifications for Part 2 Specifications for Testing and Monitoring to Prove Testing and Monitoring to Prove Continued Compliance W/ ISO 14644Continued Compliance W/ ISO 14644--11

ISO 14644ISO 14644--33 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 3 Test MethodsPart 3 Test Methods



ISO 14644ISO 14644--44 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 4 Design, Part 4 Design, Construction and StartConstruction and Start--upup

ISO 14644ISO 14644--55 Cleanrooms and Associate Controlled Cleanrooms and Associate Controlled Environments Environments Part 5 OperationsPart 5 Operations

ISO 14644ISO 14644--66 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 6 VocabularyPart 6 Vocabulary

ISO 14644ISO 14644--77 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 7 Part 7 SeparativeSeparative Devices Devices (Clean Air Hoods, (Clean Air Hoods, GloveboxesGloveboxes, Isolators, , Isolators, MinienvironmentsMinienvironments))



ISO 14644ISO 14644--88 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 8 Classification of Part 8 Classification of Airborne Molecular ContaminationAirborne Molecular Contamination

ISO 14698ISO 14698--11 Cleanrooms and Associate Controlled Cleanrooms and Associate Controlled Environments Environments Part 1 General Principles Part 1 General Principles and Methodsand Methods

ISO 14698ISO 14698--22 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments BiocontaminationBiocontamination ControlControl--Evaluation & Interpretation of Evaluation & Interpretation of BiocontaminationBiocontamination DataData

ISO 14644ISO 14644--33 Cleanrooms and Associated Controlled Cleanrooms and Associated Controlled Environments Environments Part 3 Measurement of Part 3 Measurement of the Efficiency of Processes of Cleaningthe Efficiency of Processes of Cleaning

Clean Room Design Ten Easy Steps

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Transcript of Clean Room Design Ten Easy Steps