Chemical Vapor Infiltration Systems - CVD Equipment for R ... · • Hydride Vapor Phase Epitaxy...
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enabling tomorrow’s technologies™ www.cvdequipment.com The systems have applicaon configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ soſtware. Operated through our CVDWinPrC™ process control soſtware, the systems automacally log data and graphically show me- dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check and create new recipes, and view realme or saved process data. powered by Safety Protocols Chemical Vapor Infiltraon Systems Advanced process tools for coang the internal surfaces of porous/fibrous materials Chemical vapor infiltraon (CVI) is a chemical vapor deposion (CVD) process that is performed at low pressures to allow for coang the internal surfaces of a porous material. Using heat and low pressure, precursor vapors penetrate the pores / fibers of the material and deposit to form a conformal coang on the internal surfaces. Our CVI plaorm is used to coat the internal surfaces of porous materials having complex shapes and geometries. Mulple systems are in producon for coang biocompable porous material used in medical implants and aerospace components. Metal coated foam Fibers
Transcript of Chemical Vapor Infiltration Systems - CVD Equipment for R ... · • Hydride Vapor Phase Epitaxy...
enabling tomorrow’s technologies™
www.cvdequipment.com
The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
Operated through our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check and create new recipes, and view realtime or saved process data.
powered by
Safety Protocols
Chemical Vapor Infiltration SystemsAdvanced process tools for coating the internal surfaces of porous/fibrous materials
Chemical vapor infiltration (CVI) is a chemical vapor deposition (CVD) process that is performed at low pressures to allow for coating the internal surfaces of a porous material. Using heat and low pressure, precursor vapors penetrate the pores / fibers of the material and deposit to form a conformal coating on the internal surfaces.
Our CVI platform is used to coat the internal surfaces of porous materials having complex shapes and geometries. Multiple systems are in production for coating biocompatible porous material used in medical implants and aerospace components.
Metal coated foamFibers
enabling tomorrow’s technologies™
CVD Equipment Corporation355 South Technology Drive, Central Islip, NY 11722Tel: +1 631-981-7081 | Fax: +1 631-981-7095E-mail: [email protected]
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Call us at +1 631-981-7081 to discuss a product solution for your project.We can also be reached at [email protected] or visit our website.
Images of CVI Coated Materials
3D graphene on nickel foam (SEM)
CVI metal foam (SEM)
100 µm
100 µm
3D graphene on nickel foam (SEM)
CVD Equipment Corporation offers CVD processing systems with support equipment such as gas cabinets and exhaust gas conditioning systems. All
major components from one vendor makes component interfacing seamless.
3D graphene on nickel foam (Macro Photograph)
Our Other System Capabilities• Atomic Layer Deposition (ALD)• Atmospheric Pressure CVD (APCVD)• Crystal Growth• Chemical Vapor Infiltration (CVI)• High Temperature Annealing (HTA)• Hydride Vapor Phase Epitaxy (HVPE)• Low Pressure CVD (LPCVD)• Liquid Phase Epitaxy (LPE)
• Metal Organic CVD (MOCVD)• Plasma Enhanced CVD (PECVD)• Rapid Thermal Processing / Annealing
(RTP/A)• Selenization and Sulfurization (SAS)• Ultra-High Vacuum CVD (UHVCVD)• Ceramic Matrix Composites (CMCs)
Selected Core Expertise• Automation• Cluster Tools• Dry Etching• Exhaust Abatement/Scrubbing• Multi-Chamber Tools• Reel-to-Reel Processing• High Vacuum / UHV Systems
100 µm
CVI metal foam (SEM) CVI metal foam (SEM)
100 µm 200 µm
