Characterization of MEMS Devices - Mechanical …gandhi/me645/05L31_Charct_basics.pdf · 3...
Transcript of Characterization of MEMS Devices - Mechanical …gandhi/me645/05L31_Charct_basics.pdf · 3...
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Characterization of MEMS Devices
Prasanna S. GandhiAssistant Professor,Department of Mechanical Engineering,Indian Institute of Technology, Bombay,
MEMS: Characterization
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Recap
Fabrication of MEMSConventional VLSI fabricationNonconventional methods
Design and analysis of MEMS
Characterization of MEMS
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Today’s Class
Why characterization?? Why optics?? Principles of optics useful in characterizationTools for optical characterization
ProfilometerMicroscope
Methods for characterization of mechanical propertiesSPM based tools: STM and AFM
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Why Characterization?
Material properties change at micro-scale, different from bulk properties due to grain boundary effectSuccessful design/manufacturing of MEMS devices need reliable knowledge of MEMS material propertiesVerification of design and validation of models proposedCalibration of devices and signalsElectronic analysis: noise vs signalResearch various new effects: example Biosensor devices
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Why Optics for Characterization?
Noninvasive techniqueDoes not disturb sensitive MEMS deviceVery high resolutions possibleHigher measurement range possibleSeveral optical phenomenon can be made use of
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Principles of Optics
InterferenceWave divisionAmplitude division
Diffraction + Diffr. gratingMoire interferenceHolography
Wave nature of light
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Principles of Optics
InterferenceWave divisionAmplitude division
Beam splitter
Michaelsons InterferometerAnalysis??
Young’s double slit
Referencemirror
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Principles of Optics
Used for laser-doppler vibrometer
Mach-Zehnder Interferometer
Testdevice
Interference
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Polarization
Concept of polarization of light
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Principles of Optics
Another method for interference
Febry-Parot Interferometer
Partially Reflecting Mirrors
Lens
Screen
Source
Interference
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Principles of OpticsDiffraction grating
Diffraction Fringes
Source
Diffraction Grating
Diffraction Grating Fringes
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Principles of OpticsMoire Fringes
Rotational Mismatch
Specimen Grating
FringesMaster Grating
Translational Mismatch
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Profilometer
Laser-photodetectorcombinationAs the scanning of sample is done the laser spot moves on the photodetector (PSD) because of bending of cantilever over asperitiesThe movement results in differential voltage output from the PSD
Profilometer principle
BA
D C
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Profilometer
630 Wavelength [nm]<0,08Linearity [%]
Class ILaser diode2 or 5Stand off [mm]
10,000Measurement frequency [Hz]
0,6x0,8
Field of view [mm]0,020Vertical resolution [µm]
Integrated in-axis camera1,5 Spot size [µm]
CameraSensor
Another technology
copyright © Solarius Development Inc. 2003-04
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ProfilometerAnother technology
copyright © Solarius Development Inc. 2003-04
670Wavelength [nm]±0.5Linearity [%]
Class IILaser5Stand off [mm]
1400Measurement frequency [Hz]
200xMagnification 0,1 Vertical resolution [µm]
Integrated off-axis camera2Spot size [µm]
CameraSensor
All contents copyright © Solarius Development Inc. 2003-04
Home | Technology | Products | Applications | Customer Support | Company | Contact
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Microscope for Measurement of Dimensions
Taking image on CCD camera and processing with precalibration for measurement of MEMS device dimensionsVarious types of microscopesGrating used in CD ROM
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Limitations of Microscope
Q: is it possible to increase the magnification of microscope indefinitely and expect improved resolution??
Minimum resolution possible is comparable with wavelength of light
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SPM: STM and AFM
STM invented in early 80s by Binnigand Rohrer.Real limitations: only used to image conducting materials. Cannot distinguish between atoms of different elements within a compound material.
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Atomic Force Microscope
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AFM Image
Kriptan- polymer surface characteristics using AFM
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Conclusions
Various optical principles Characterization tools
MicroscopeEllipsometerProfilometer
Various methods of characterization of mechanical properties
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Fundamentals of Ellipsometry
Grating used in CD ROM
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Fundamentals of Ellipsometry
Change in polarization properties after reflection
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Ellipsometer
Surface
Q
P
Laser
A
Detector
θAn ellipsometer measures the changes in the polarization state of light when it is reflected from a sample. If the sample undergoes a change, for example a thin film on the surface changes its thickness, then its reflection properties will also change. Measuring these changes in the reflection properties can allow us to deduce the actual change in the film's thickness.
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Ellipsometer: Advantages
Non destructive character, High sensitivity due to the measurement of the phase of the reflected light, Large measurement range (from fractions of monolayers to micrometers ), The possibilities to control in real time complex processes.
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Next class
AFM technique and details of measurment
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Next class
Polytec Laser Doppler Vibrometer [2]
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Characterization of Mechanical Properties
Properties: E, ν, internal stress etc. Various Techniques
Bending testCantileverBeam
Bulge testResonance methodM-TestNanoindentation
Application of techniques
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Bending Test
Cantilever
( ) 32
3
14 lEbtkν−
=
k is the stiffness, E is the elastic modulus, b is the cantilever width,v is Poisson’s ratio,t is thickness, andl is the length of cantilever at the point of contact,
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Bending Test
Fixed-fixed Beam
E is the elastic modulus, b is the cantilever width,v is Poisson’s ratio,t is thickness, andl is the length of cantilever at the point of contact,
F = kbending z + kstress z + kstretching z3
33
420
3
34
826z
LtEwz
Ltwz
LtEw
⋅+⋅+⋅=ππσπ
bending, stress, and stretching components:Small loads: - bending and stressLarge loads: - Stretching
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Bulge Test
Pressure on circular membrane
342
0
1384 hErth
rtp
νσ
−+=
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Resonance method
Vibrating cantilever2
1
2
2
0 34
=
ρπλ E
ltf i
i
Where E, ρ, l and t are the Young’s modulus, density, length and thickness of the cantilever. λi is the eigen value, where i is an integer that describes the resonance mode number;for the first mode λ =1.875
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Profilometer
Laser-photodetectorcombinationAs the scanning of sample is done the laser spot moves on the photodetector(PSD)The movement results in differential voltage output from the PSD
Profilometer principle
BA
D C