Ceramic Substrates for the Electronics Industry · Ceramic Substrates for the Electronics Industry...
Transcript of Ceramic Substrates for the Electronics Industry · Ceramic Substrates for the Electronics Industry...
Ceramic Substrates for theElectronics Industry
T H E C E R A M I C E X P E R T S
Electronic Applications Division
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Substrates for thick-film
and thin-film technology
- stamped
- laser-machined
- dry-pressed
- green scored
❍
Power electronic materials
Ceramic Competence in Electronic Applications
CeramTec’s experience in manufacturing
ceramic products goes back to the earliest
days of electronics. Since then, our company
has evolved into a leading manufacturer of
aluminum oxide and aluminum nitride sub-
strates. Ceramics made by CeramTec have
found their way into a wide range of elec-
tronic applications, with client industries rang-
ing from automotive engineering, sensors,
optoelectronics, aerospace, navigation, power
electronics, instrumentation, and control
systems, medical equipment, telecommuni-
cations, industrial, and entertainment elec-
tronics. CeramTec’s products are noted for
their dependable performance under demand-
ing day-to-day operating conditions and are
essential to the safe and reliable functioning of
a wide range of systems.
In the manufacture of electronic compo-
nents, uncompromising quality is a first and
foremost requirement. Each material must
meet narrowly defined specifications. Opti-
mum physical properties and a long service life
are as essential as dimensional accuracy for
the use of automated processing lines.
Marktredwitz facility
While we are well aware of the global
nature of the electronics marketplace, our
customers appreciate a supplier with a local
presence. This need has prompted us to build
a worldwide manufacturing base which, in
addition to our Marktredwitz facility, relies on
production sites and lasering facilities in
Europe, North America, and Asia. Advanced
manufacturing processes allow us to supply
volume production parts with very high levels
of consistancy, dimensional accuracy, and pre-
cision. CeramTec also produces a range of
metallized substrates. Please contact us for a
separate brochure.
CeramTec is setting new standards in all
areas of quality management. CeramTec’s
declared goal is corporate-wide quality and
its continuous improvement. Customer satis-
faction is the main objective driving all our
activities. A comprehensive company-wide
quality system allows us to supply products
and services fully in line with your expec-
tations.
In 1996, CeramTec was granted the
“Quality Award for Excellent Corporate
Quality” by the Bavarian State Ministry of
Economics, Transport, and Technology. The
quality management system in force at our
Marktredwitz facility, where our ceramics for
the electronics industry are manufactured, has
been audited and certified to DIN EN ISO 9001
and QS 9001 by an independent institution.
Corporate quality does not only comprise
the consistent verification of product and
manufacturing qualities, but also requires a
continuous effort to improve and redesign
entire processes. Prevention-oriented methods
and systems help to preclude misunderstand-
ings and errors before they occur. Moreover,
each member of our workforce is responsible
for the quality of his or her output. Individual
units and operators are expected to design
and demonstrate viable error prevention
schemes and rugged, statistically stable
processes in their respective areas. The
systems in place are then evaluated against
defined process specifications through in-
house process and system audits.
Naturally, corporate quality also means
that our suppliers, as important partners, are
integrated into the process of delivering
customer satisfaction. For this reason, we do
everything to assure that our suppliers will
consistently support and fulfill CeramTec's
high quality standards.
A New Dimension of Quality
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Bavarian State Ministry's Quality Award
Each member of our workforce carries his or her own
responsibility for job performance
Substrates – the foundation for
innovative solutions
Hybrid microelectronic circuits form the
basis of a wide range of electronic applica-
tions. The growing integration density of elec-
tronic circuits, which is a result of the market's
demand for increasingly miniaturized products,
calls for ever new solutions in the field of sub-
strates. Ceramic components in electronic
devices must resist high mechanical, thermal,
and electrical loads while simultaneously per-
forming with the utmost reliability. Our ad-
vanced high-performance materials are de-
signed to meet these needs.
Rubalit® – superior substrate materials
from a global leader
A key prerequisite for CeramTec’s success-
ful partnership with the electronics industry is
the ability to deliver the right materials. The
family of Rubalit® materials developed by
our company has become a byword of quality
among the world's most renowned manu-
facturers of hybrid circuits and has established
itself as the standard choice in many elec-
tronic circuit applications.
High strength and thermal conductivity
are the characterizing features of these sub-
strate materials. Providing an outstanding sur-
face quality on both faces, Rubalit® 708 S
(96% Al2O3) gives outstanding results with
commercially available thick-film pastes and
metallization systems. In addition, this mate-
rial is suitable for both fine line and some-
times thin-film applications. For optimum
results in thin-film technology, Rubalit® 710
(99.6% Al2O3) is the material of choice.
High-Performance Materials for Electronic Applications: Rubalit® Aluminum Oxide Ceramics
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Structure of Rubalit® 708 S10 µm
Structure of Rubalit® 71010 µm
Formats and standard sizes for Rubalit® 708 S and Rubalit® 708 HP
Width Length Thickness min. Thickness max.
115 115 0.20 1.50
138 188 0.25 1.50
203 272 0.50 1.00
all information in mm
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Cool solutions for power electronics
Progressive advances in power electronics
have called for the use of sophisticated cool-
ing systems to dissipate the intense heat
build-up. For example, special heat ex-
changers based on our Alunit® material
allow the use of water as a cooling fluid as a
substitute for environmentally hazardous oil-
cooling systems. Used as mountings for elec-
tronic power components, these heat ex-
changers dissipate heat at its point of origin.
Alunit® for maximum performance
With its extremely high thermal conduc-
tivity of 180 W/mK and outstanding electrical
insulation properties, Alunit® is the high-end
supplement to our Rubalit® range. The ther-
mal expansion coefficient of this material
is comparable to silicon. Its electrical and
mechanical characteristics are similar to alu-
minum oxide. Like Rubalit®, Alunit® is non-
toxic and environmentally compatible, pre-
senting no disposal problems.
These new properties open entirely new
fields of application in advanced circuit en-
gineering. With its enhanced heat dissipation,
Alunit® enables the production of compact
high-performance solutions. It is the preferred
substrate for power hybrid and VLSI-type
MCM circuits. Our product range includes
substrates and dry-pressed components made
to customer’s specifications ready for further
processing, and also products already subjec-
ted to finishing operations such as lasering,
grinding, and polishing.
As-fired Alunit® surface
Ground Alunit® surface
Polished Alunit® surface
Comparison of thermal conductivity levels:
plastics, Al2O3 and AIN
High-Performance Materials for Electronic Applications: Alunit® Aluminum Nitride Ceramics
300
250
200
150
100
50
BeOAlNAl2O3
Glass, polymers
Thermal conductivity
20 oC0
100 oC 200 oC
Formats and standard sizes for Alunit® „as fired“
Width Length Thickness min. Thickness max.
110 127 0.50 1.27
138 188 0.50 1.27
all information in mm
Material Characteristics of Rubalit®
and Alunit®
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Property Units Rubalit® 708 S Rubalit® 710 Alunit® Test per
96% Al2O3 99.6% Al2O3 AlN
Color – white white translucent –
medium gray
Medium grain size d50 µm 3 –5 2 4 –5 –
Surface roughness Ra µm 0.6 max 0.1 0.6 max Profilometer
(0.8 mm cutoff)
Bulk density kg/m3 3780 3900 3330 ASTM C 20
Water absorption capacity % 0 0 0 ASTM C 373
Bending strength
- 4-point method (40 x 4 x 3 mm3) MPa 400 360 ASTM F 417
- dual-ring method MPa 500 400 DIN 52292
(0.63 mm substrate thickness)
Modulus of elasticity GPa 340 350 320 ASTM F 417
Thermal conductivity 20–100 ºC W/m ºK 24 28 180 ASTM C 408
Specific heat J/kg ºK 800 800 738
Coefficient of linear expansion 10-6/ºK ASTM C 372
20 – 300 ºC 6.8 6.8 4.7
20 – 600 ºC 7.3 7.5 5.2
20 – 1000 ºC 8.0 8.5 5.6
Dielectric constant ASTM C 150
- 1 MHz 9.8 ± 10% 10.1 ± 10% 9.0 ± 10%
- 1 GHz 10.0 ± 10% 10.1 ± 10%
Dielectric loss factor (1 MHz) 10-3 0.3 0.2 0.4 ASTM D 150
Breakdown voltage KV/mm ASTM D 149
- 1 mm substrate thickness 15 16
- 0.63 mm substrate thickness 20 >10
- 0.25 mm substrate thickness 28
Volume resistivity Ohm x cm ASTM D 257
- 20 °C 1013 1013 1013
- 200 ºC 1012 1013
- 400 ºC 1011 1012
- 600 ºC 108 109
Indexes and parameters for ceramic substancesIn order to profile ceramic substances certain parameters are indicated. The crystalline nature of these substances, statistical fluctuations in the composition of the substances and in the factors that impact on the production processes indicate that the figures quoted are typically mean values and hence the substance para-meters quoted in this brochure are only standard, recommended or guide values that might differ given dissimilar dimensions and production processes.
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Manufacturing Perfection
Raw materialsincoming inspection
Feedstock preparation
In-process inspection
In-process inspection In-process inspection
In-process inspection In-process inspection
In-process inspection
In-process inspection
In-process inspection
In-process inspection Quality certification
Quality certification
Quality certification
Tape casting
Stamping Firing
Firing
In-process inspection
In-process inspection
In-process inspection
Tape casting
Stamping
Firing Machining
Laser cutting Packaging
Packaging
Packaging Shipping
Shipping
Shipping
Machining
Machining
Dry pressing
The production and machining steps per-
formed on substrates and electronic materials
are as diverse as their range of applications.
Over the decades, CeramTec has refined these
individual processes and methods to near
perfection. Quality-monitored operating se-
quences conforming to DIN ISO 9000 form the
basis of a manufacturing process which pro-
vides customer specific parts with the same
precision and reliability as volume-produced
standard parts. Our improvement manage-
ment assures continuous process refinement
and ongoing increased efficiency. The result is
a range of cost-effective, reliable manufac-
turing processes that benefit your products.
The substrates used for hybrid circuits are
primarily of the tape-cast type. This enables
quality efficient casting of various thicknesses
of “green” tapes which are then stamped
and sintered, and in some cases, subsequently
lasered.
Tape casting – the key to quality
substrates
The production of thin substrates relies on
a special technology referred to as tape
casting. Substrates are produced from a spe-
cially formulated slurry which is cast into
various thicknesses. CeramTec is a leader in
tape casting. Globally, tape casting is the
dominant technology for processing hybrid
substrates.
Geometries
The stamping process of the “green” tape
yields substrates of various geometries, cut-
outs, and hole patterns produced to cus-
tomer’s specifications. Stamping is the ideal
volume production method, allowing even
complex structures and geometries to be made
in a cost-effective manner by the use of single
or multi-up arrays.
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Special Production Technology for Ultimate Quality
Tape casting
Stamping
0.60 1.20 1.80 2.40 3.00 3.60 4.20
0Ka MgKa SiKa AuMa CaKa
Lasering of the sintered substrates allows
us to produce small diameter holes, cut-outs,
and diverse geometries to very close toler-
ances. Since lasering does not require fabri-
cation of tools, it shortens production cycles
and reduces costs.
Substrates with a thickness of 1 mm or
more are particularly suitable for production
by the dry-pressing method. The high-preci-
sion press tools used in this process are made
at low cost in our own toolmaking depart-
ment. This allows CeramTec to produce sub-
strates with holes, snap-lines of various
thicknesses, and irregular edge contours
quickly and in large numbers.
CAD data transfer
A special service offered to our customers
is the transfer of CAD data via a remote data
transmission line. This assures maximum relia-
bility and precision, in addition to reduced
delivery times.
Sophisticated test and inspection
methods
The quality of your products is assured by
the use of advanced test and inspection
methods. Substrates are automatically checked
for missing or obstructed holes and specified
hole diameters with the aid of optoelectronic
equipment.
EDX microanalysis greatly enhances the
capabilities of the scanning microscope. This
method allows engineers to identify micro-
scopically small surface areas, phases, and
inhomogeneities by chemical analysis.
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Lasering
Optoelectronic inspection
Element analysis
Stamped substrates, whether made to
standard formats or volume-produced to cus-
tomer’s specifications, are characterized by
their smooth and highly regular edges. Even
complex geometries and sophisticated struc-
tures involving cut-outs and holes can be ef-
ficiently manufactured by single and multiple
unit techniques in large volumes. Stamped
multiple unit substrates in standard machine
formats from 2"x 2" through 4"x 4" provide
an extremely cost-effective basis for further
processing. Similarly, substrates for chip resis-
tors can be made as snapstrates (e.g. 3500
up) by the multiple unit technique, classified
according to the required tolerances, again
assuring low downstream processing costs.
Stamped Substrates with High Array Densities
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Snap-lines
Hole
Stamped edge
Resistor networks and chip resistors
Complex geometries
Substrates with holes and snap-lines
Standard formats
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Standard tolerances Special tolerances*
Length and width as-fired ± 0.8%1 ± 0.5%2
Thickness ± 10% ± 7%
Distance between snap-lines ± 0.8%1 ± 0.5%2
After breaking ± 0.8% ± 0.5%
plus additional tolerance for
break-off projections
nominal thickness ≤ 0.635 mm + 0.1 mm (0.0039“) } per edge+ 0.1 mm (0.0039“) } per edge
> 0.635 mm + 0.15 mm (0.0059“) + 0.15 mm (0.0059“)
Hole diameter
under 2 mm ± 0.05 mm (0.002“) ± 0.05 mm (0.002“)
2–10 mm ± 0.10 mm (0.0039“) ± 0.076 mm (0.003“)
over 10 mm ± 0.8% ± 0.5%
Distance between holes
center distance ± 0.8%1 ± 0.5%3
Overall camber
(measured between parallel plates, 45°)
nominal thickness ≥ 0.635 mm 0.3% of length (.003“/“) 0.2% of length (.002“/“)
< 0.635 mm quoted upon request quoted upon request
Perpendicularity ± 0.4% of outside dimension1 ± 0.3% of outside dimension1
Parallelism ± 0.4% of outside dimension ± 0.3% of outside dimension
Radii and corners 0.2 mm (0.0079“) 0.2 mm (0.0079“)
1 but not less than ± 0.1 mm (0.0039“) 2 but not less than ± 0.05 mm (0.002“) 3 but not less than ± 0.076 mm (0.003“)
Stamped Tolerances
*If tight tolerances are required in high
volume production of stamped substrates,
the length and width can be measured
automatically. In this way, the substrates
are ranked into different classes which
have been pre-determined with the cus-
tomer. Within each class, tolerances of up
to ± 0.05 mm are possible.
Diagram showing individual measurements
Computer-controlled CO2-lasers are used
for scribing, cutting, and drilling substrates to
very small tolerances (minimum hole dia-
meter: 0.10 mm). Eliminating the time-con-
suming and costly tool fabrication stage, this
method allows CeramTec to produce sub-
strates with various outside contour geome-
tries, hole patterns, cut-outs, and snape-lines.
For the cost-effective use of highly-com-
plex individual substrates in multiple printing
lines, laser-scribed multiple substrates can be
supplied in all common machine formats
from 2"x 2" to 5"x 6". Each large-size card
(4"x 6") may accommodate up to 13,872
individual substrates measuring 0.75 mm x
1.50 mm. Optimum laser programming for
each application assures the appropriate sin-
gulation results. Under our Quick Service pro-
gram, lasered substrates can be supplied
within 48 hours.
For improved edge properties, CeramTec
offers the following finishing options:
• Lasered substrates
• Edge treated
• Perfect Edge
Lasered Substrates with Tight Tolerances
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Complex geometries
Drilled and scribed
Scribed
Lasered substrates
Perfect Edge
Edge treated
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Lasered substrates Edge treated Perfect Edge PE
Length and widthnominal thickness ≤ 0.635 mm + 0.20 mm (0.0079“)
– 0.05 mm (0.002“) + 0.15 mm (0.0059“) + 0.10 mm (0.0039“)> 0.635 mm ≤ 0.76 mm + 0.25 mm (0.0098“) – 0.05 mm (0.002“) – 0.05 mm (0.002“)
– 0.05 mm (0.002“)> 0.76 mm ≤ 1.0 mm + 0.30 mm (0.0118“)
– 0.10 mm (0.0039“)
Distance from edge to snap-linenominal thickness ≤ 0.635 mm + 0.15 mm (0.0059“)
– 0.05 mm (0.002“)> 0.635 mm ≤ 0.76 mm + 0.20 mm (0.0079“) + 0.10 mm (0.0039“) + 0.075 mm (0.003“)
– 0.05 mm (0.002“) – 0.05 mm (0.002“) – 0.05 mm (0.002“)> 0.76 mm ≤ 1.0 mm + 0.25 mm (0.0098“)
– 0.10 mm (0.0039“)
Distance between snap-lines ± 0.05 mm (0.002“) ± 0.05 mm (0.002“) ± 0,05 mm (0.002“)
Hole spacingdistance from edge to hole center + 0.15 mm (0.0059“) ± 0.05 mm (0.002“)nominal thickness ≤ 0.635 mm – 0.05 mm (0.002“)
+ 0.20 mm (0.0079“) ± 0.05 mm (0.002“) ± 0.05 mm (0.002“)> 0.635 mm ≤ 0.76 mm – 0.05 mm (0.002“)
+ 0.25 mm (0.0098“) ± 0.075 mm (0.003“)> 0.76 mm ≤ 1.0 mm – 0.10 mm (0.0039“)center hole distance ± 0.05 mm (0.002“) ± 0.05 mm (0.002“)
Hole diameterhole diameter at nominal thickness≤ 3 mm ≤ 0.63 mm ± 0.05 mm (0.002“) ± 0.05 mm (0.002“) ± 0.05 mm (0.002“)
> 0.63 mm ± 0.075 mm (0.003“) ± 0.075 mm (0.003“) ± 0.075 mm (0.003“)> 3 mm ≤ 0.63 mm ± 0.075 mm (0.003“) ± 0.075 mm (0.003“) ± 0.075 mm (0.003“)
> 0.63 mm ± 0.10 mm (0.0039“) ± 0.10 mm (0.0039“) ± 0.10 mm (0.0039“)
Thickness ± 10%1 ± 10%1 ± 10%1
Overall camber (measured between parallel plates, 45°)nominal thickness ≥ 0.635 mm 0.3% of length (standard) 0.3% of length (standard) 0.3% of length (standard)
0.2% of length (special) 0.2% of length (special) 0.2% of length (special)< 0.635 mm quoted upon request quoted upon request quoted upon request
Perpendicularity within outside 0.015 mm/25.4 mm 0.0125 mm/25.4 mmdimension tolerance (0.006“/10“) (0.005“/10“)
Parallelism within outside within outside within outsidedimension tolerance dimension tolerance dimension tolerance
Test criteria per agreed specification 1 but not less than ± 0.05 mm (0.002“)
Laser Tolerances
Using production lines with a very high
degree of automation and custom-built tool-
ing, CeramTec produces dry-pressed sub-
strates to customer’s specification in large pro-
duction volumes. Standard dimensions range
up to 88.9 x 88.9 mm (3.5"x 3.5"). In special
cases, substrates up to 115 mm x 115 mm
(4.5"x 4.5") can be produced upon request.
The dry-press process allows the manufacture
of substrates with holes, snap-lines, or irregu-
lar outside contours in almost any thickness
from 0.63 mm to approx. 10 mm. Even differ-
ent thicknesses within the same substrate can
be produced. The dry-pressing method is suit-
able for making substrates of highly complex
geometries, including through-holes and blind
holes of 0.4 mm minimum diameter.
Dry-pressed parts are given their final
shape after the sintering (firing) stage. Various
machining methods such as grinding and
lapping can be employed to achieve superior
surface finishes and tolerances.
Volume Produced Dry-Pressed Substrates
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Multiple parts
Blind holes, downsets, cavities
Precision small pressed parts
Snapped edge and snap-line
Downsets and holes
Edges and recesses
Average peak-to-valley surfaceroughness Ra
of Rubalit® and Alunit®
Dry-pressed and tape-cast substrates
as-fired ≤ 0.6 µm
lapped/ground ≤ 0.8 µm
polished ≤ 0.1 µm
Other surface data (e.g., Rz, Rmax) may be specifiedupon request.
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Standard tolerances Special tolerances
Length and width as-fired ± 1%1 ± 0.7%2
Thickness ± 10% ± 7%
Distance between snap-lines ± 1%1 ± 0.7%2
After singulation ± 1% ± 0.7%
plus additional tolerance for + 0.1 mm (0.0039“) per snapped edge
breakoff projections
Hole diameter
under 2 mm ± 0.05 mm (0.002“) ± 0.05 mm (0.002“)
2–10 mm ± 0.10 mm (0.0039“) ± 0.076 mm (0.003“)
over 10 mm ± 1% ± 0.7%
Distance between holes
center distance ± 1%1 ± 0.7%3
Overall camber
(measured between parallel plates, 45°) 0.4% of length 0.3% of length
Perpendicularity ± 0.5%1
Parallelism within outside dimension tolerance
Radii and corners ≤ 0.2 mm
1 but not less than ± 0.1 mm (0.0039“) 2 but not less than ± 0.05 mm (0.002“) 3 but not less than ± 0.076 mm (0.003“)
1. Cracks (penetrating separation)
2. Chips
3. Scratches, score marks
4. Lumps
5. Burr
6. Ridges
7. Pin holes
8. Waviness
Cracks are defects
≤ 0.02" (0.5 mm)into the surface (t)
≤ 0.0007" (0.018 mm) depth
≤ 0.001" (0.025 mm) height
≤ 0.0008" (0.02 mm) height
≤ 0.001" (0.025 mm) height
≤ 0.007" (0.18 mm) diameter
≤ 0.0024"/ 0.400"(0.06 mm / 10 mm)
Dry-Pressing Tolerances
General substrate visual characteristics (stamped, lasered, and dry-pressed)
T H E C E R A M I C E X P E R T S
CeramTec AG
Innovative Ceramic Engineering
Electronic Applications Division
Lorenzreuther Strasse 2
D-95615 Marktredwitz
Phone: +49 92 31/69-3 84
Fax: +49 92 31/6 24 09
www.ceramtec.deA company of the mg chemical group Dynamit Nobel EL
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This brochure is a general overview of our present state of knowledge and is intended to provide general information and general recommendations regarding ourproducts and their uses. It is subject to change. It is expressly not a guarantee or warrantee of any specific properties of the products and/or materials described or theirsuitability for a particular application. Any existing industrial property rights must be observed. The quality of our products is assured under our Conditions of Sale.
Czech RepublicCeramTec Czech Republic s.r.o.Zerotínova 62CZ-78701 SumperkPhone: +42 05 83/36 91 11Fax: +42 05 83/36 91 90e-mail: [email protected]
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CeramTec Italia S.r.I.Innovative Ceramic EngineeringVia Treviglio, 8I-24043 Caravaggio (BG)Phone: +39 03 63/35 91Fax: +39 03 63/35 92 20e-mail: [email protected]
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