Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning...

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www.reading.ac.uk/EMLab Scanning Electron Microscopy Amanpreet Kaur 1

Transcript of Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning...

Page 1: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

www.reading.ac.uk/EMLab

Scanning Electron Microscopy

Amanpreet Kaur

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Page 2: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

EM Workshops 2017

Scanning Electron Microscopy

What is scanning electron microscopy?

Looking at “wet” samples in the high vacuum SEM

Basic features of conventional SEM

Limitations of conventional SEM

Cryo-SEM and Environmental SEM

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Page 3: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

EM Workshops 2017

SEM & TEM

Scanning electron microscope

Electron gun

Specimen

Electron gun

Condenser lens

Objective lens

Specimen

Projector lens

Fluorescent screen

Electron gun

Digital camera

Condenser lens

Objective lens

Specimen

Projector lens

Fluorescent screen

Electron gun

Digital camera

Transmission electron microscope

Workshop: 31st October

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SEM

Scanning electron microscope

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Page 5: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

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Electron sources for SEM

Tungsten thermionic source

Schottky Field Emission Source

Low brightness

Energy spread ~ 1-2eV

High brightness

Energy spread < 0.5 eV

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Page 6: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

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SEM

Scanning electron microscope

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Interaction of high-energy electrons with specimen

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Page 8: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

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Interaction of electrons with specimen

• S = secondary

• B = backscattered

• (A are auger)

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Page 9: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

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Secondary and backscattered electrons

• What are backscattered electrons?

• They are primary electrons that have entered the sample and then escaped back out.

• What are secondary electrons?

• They are electrons dislodged from the specimen itself.

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Page 10: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

EM Workshops 2017

Detectors for SEM

Everhart Thornley detector (ETD): Scintillator – photomultiplier system.

Secondary electrons

Everhart Thornley or solid state detector (silicon diode).

Usually positioned around the final lens or inside.

Backscattered electrons

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◊ Secondary electrons Topographic

information

◊ Backscattered electrons

◊ X-rays

Compositional

information

- Spectra

- Maps

Session on X-ray analysis and Elemental Mapping: 21st November

Information given by different signals

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Page 12: Centre for Advanced Microscopy · 2017-11-03 · Amanpreet Kaur 1 . EM Workshops 2017 Scanning Electron Microscopy ... final lens or inside. Backscattered electrons 10 . EM Workshops

EM Workshops 2017

Origin of topographic contrast

Everhart

Thornley

detector

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Detector efficiency contrast

pseudo-octahedral crystal of the compound [NC6H8][GaGe3S8]

a mixed Germanium and Gallium Sulphide framework material

50%

collected – somewhat

bright

100% collected -

Bright

10% collected -

Dark

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Early history of SEM

1942, Zworykin et al., RCA Laboratories, USA - first working SEM.

1950s, C.W. Oatley et al., Engineering Department, Cambridge - major improvements in electron optics

and system, and secondary electron detection (Everhart - Thornley detector). First backscattered

detector.

1965: first commercial SEM, Cambridge Instrument Company, Stereoscan Mark 1.

1935, M. Knoll, Germany – proposed concept of a scanning electron microscope.

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EM Lab’s high vacuum SEM

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Conventional SEM images

Compact

disc

Polypropylene spherulites

Integrated circuit

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Problems with conventional SEM

No wet samples

Surface must be electrically conducting

Non-conducting samples have to be coated

Can only operate at low pressure (10-5 Torr)

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Looking at “wet” samples in the high vacuum SEM

Animal and plant tissues up to 98% water.

Options for examining these materials in the high vacuum SEM:

Freeze drying

Chemical fixation, critical point drying

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Critical point drying

Specimen prepared by CPD: Hyphae and spores in Stilton cheese

Evaporative drying of specimens can cause collapse of structures, mainly due to effects of surface tension.

Effect can be reduced by substitution of water with a liquid with a lower surface tension

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Sample prepared by fixation & critical point drying

Euphorbia seed. Amal Al Hasan, SBS.

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Cryo - SEM

Workshop: 7th November

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Cryo – SEM of food

Probiotic yoghurt with bacteria. Scale bar 5μm

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Potato showing starch grains Scale bar 100 μm

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Environmental SEM

Workshop: 7th November

Cooled specimen

• Special pumping system allows water vapour to be introduced into chamber.

• Cooled specimen to retain moisture.

• New (backscattered) electron detector.

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Introducing water vapour into the chamber enables uncoated samples to be examined

Positively charged water molecules are attracted to negatively charged sample.

Negative charge at sample surface is neutralized..

Secondary electrons from sample strike water molecules.

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EM Lab’s FEI Quanta 600 ESEM

Pressures up to 20 Torr - samples typically cooled to 5oC.

Gaseous secondary electron detector – fits on objective lens.

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Environmental SEM

• Raspberry buds : Hiroyuki Imanishi, Plant Sciences

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Becoming an EMLab user

Sherrie Foo

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Booking system

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EM Workshops 2017

Remaining workshops

Date

Topic

31 October 2017 Transmission Electron

Microscopy

7 November 2017 Environmental & Cryo

SEM

14 November 2017 Biological specimen

preparation for SEM

21 November 2017 X-ray Analysis and

Elemental Mapping

28 November 2017 Biological specimen

preparation for TEM

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► Questions?

Electron Microscopy Laboratory

► Demo

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