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[105]-Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array
Capacitive Micromachined Ultrasonic Transducers_ Technology and Application - Journal of Medical...
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Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventionalpiezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, efficiency, andsensitivity.
Transcript of Capacitive Micromachined Ultrasonic Transducers_ Technology and Application - Journal of Medical...
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4/7/2015 CapacitiveMicromachinedUltrasonicTransducers:TechnologyandApplicationJournalofMedicalUltrasound
http://www.jmuonline.com/article/S09296441(12)000094/abstract 1/2
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CapacitiveMicromachinedUltrasonicTransducers:TechnologyandApplication
, , , ,Received:July22,2011Accepted:February9,2012PublishedOnline:March29,2012
DOI:http://dx.doi.org/10.1016/j.jmu.2012.02.001
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Abstract FullText Images References
Capacitivemicromachinedultrasonictranducers(cMUTs)haverecentlyemergedasanalternativetoconventionalpiezoelectrictransducers.Theyoffermanyadvantagesintermsofbandwidth,fabricationoflayerarrays,efficiency,andsensitivity.Thisresearchpresentstheprinciplesofoperation,fabricationprocesssteps,andapplicationofthecapacitivemicromachinedultrasoundtransducer.ThestudyalsodemonstratesindetailthecollapsevoltagedesignparameterofacMUTmembrane.SeveralimportantapplicationsarepresentedtoshowthefeasibilityofusingcMUTswhicharedemonstratedbyimagingexamplesinimmersionandairduetothecMUTcapabilityofproducinglargebandwidth(123%fractionalbandwidth)andlowerimpedancemismatch.Finally,theadvantagesofthreedimensionalechographicimagesbasedonmovingultrasoundlineararrayitstechniquearediscussedindetailandcomparedwiththoseoftwodimensionalopticalhandgeometry.
Keywords:capacitivemicromachinedultrasonictransducer,fabrication,imagesensor,ultrasonography
2012PublishedbyElsevierInc.
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March2012Volume20,Issue1,Pages831
MuhammedSabriSalim M.F.AbdMalek R.B.W.Heng K.M.Juni NaseerSabri
AccessthisarticleonScienceDirect
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4/7/2015 CapacitiveMicromachinedUltrasonicTransducers:TechnologyandApplicationJournalofMedicalUltrasound
http://www.jmuonline.com/article/S09296441(12)000094/abstract 2/2
Copyright2015ElsevierInc.Allrightsreserved.|PrivacyPolicy|Terms&Conditions|AboutUs|Help&ContactThecontentonthissiteisintendedforhealthprofessionals.Advertisementsonthissitedonotconstituteaguaranteeorendorsementbythejournal,Association,orpublisherofthequalityorvalueofsuchproductoroftheclaimsmadeforitbyitsmanufacturer.
March2012Volume20,Issue1,Pages831
