C15 POD E - istcgroup.com · C15 Contents / General Introduction According to DIN 28400, the term...

vacuum

Ultra-high VacuumComponentsFlange Components, Valves and Feedthroughs

C15

181.01.02Excerpt from theLeybold Vacuum Full Line Catalog 2005Product Section C15Edition May 2005

C15

Contents / General

IntroductionAccording to DIN 28400, the term“Ultra-high Vacuum (UHV)”designates the pressure range below10-7 mbar.

Several physical quantities, such asmean free path, monolayer time, flowdensity of the particles impinging onthe walls, leak rate and the degas-sing rate are of significance in thecharacterization of this pressurerange. For the definitions of thesequantities refer to technicalpublications on this subject.

In order to attain or maintainpressures below 10-7 mbar, thefollowing pre-conditions must be met:

� The vapor pressure of the pumpfluid or lubricant should be in

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.02

ProductsCF Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.03

UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.08

Accessories for UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . C15.11

UHV Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.13

UHV Sapphire Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . C15.14

UHV All-Metal Right-Angle Valves . . . . . . . . . . . . . . . . . . . . . . . . . . C15.15

UHV All-Metal Variable Leak Valves . . . . . . . . . . . . . . . . . . . . . . . . . C15.16

UHV Feedthroughs, Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.17Electric . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.19

Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C15.21

UHV Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.24

Leybold Vacuum Full Line Catalog 20052

Ultra-high Vacuum Components

vacuum apparatus including itsinstallations, are desorbed.Consequently, components for UHVsystems are generally made of stain-less steel. Metal gaskets, ceramicfeedthroughs and bakeable obser-vation windows are used exclusively.

For applications in the extreme UHVrange (XHV) the outgassing rate ofthe CF flanges and the UHV compo-nents can be reduced by about twoorders of magnitude by a specialdegassing process.

The high standard of developmentand manufacture combined with theuse of high quality materials guaran-tee that UHV components fromLeybold are able to meet even themost demanding requirements.

accordance with the desiredultimate pressure

� the leak and degassing rates ofthe entire apparatus including itsinstallations must be extremelylow.

Generally, both leak rate and back-streaming effects through the pumpcan be kept at sufficiently low levelsby using suitable UHV sealingmaterials and pumps.

However, a sufficiently low out-gassing rate can only be achieved bybaking out the entire apparatus attemperatures of about 300 °C for alonger period of time. It is only underthese conditions that the mono-layersof atoms or molecules, which attachquite firmly to the surfaces of the

Advantages to the User� Stabilized Leybold knife-edge

� High reliability

� Special knife edge profiles ensurethe highest degree of leaktightness

� Flange connection can be bakedout up to 450 °C

� Easy to assemble, helium-tight

� For use either with a flat gasketmade of OFHC copper (oxygen-free) or FPM O-ring

� Self-centering

� Fixed and rotary flanges in almostany size

� Symmetrical flange connection

� Equal sealing profiles

� Small outside diameter withrespect to the nominal width

� Can be joined by welding orbrazing using any desiredprocess, also with other nickelchromium steel grades

Leybold Vacuum Full Line Catalog 2005 C15

CF Flanges Ultra-high Vacuum Components

During this process the coppergasket adapts it-self optimally to themicrostructure of the outer knifeedge. This explains the high sealingeffect and the especially low leakrates of CF flange connections. Aradial grove extending right up to thesealing ring is provided for leaktesting of the flange connection. Inorder to ensure that the sealing knifeedge is not damaged during frequentuse of the flanges, the conventionalgeometry of such knife edges for CFflanges has been developed further.By using the Leybold developedobtuse angled knife edge profile the

The CF flange connection consists oftwo identical flanges with a flatgasket made of OFHC copper, bolts,nuts and washers.

CF Flanges

3

Sealing PrincipleWhen assembling the CF flangeconnection, the flat copper gasket fitswith a slight clearance into the outerrecess of the flanges and thusassures good centering of the flangeconnection. If the flange bolts areproperly tightened according to theinstructions, the knife edge of theflanges penetrates into the flat cop-per gasket, whereby the shear actionof the outer face of the cutting edge -as seen from the flange axis -produces a yield pressure on thecopper gasket, while the inner face ofthe edge produces a cutting action.

strength of the sealing knife edgeshas been significantly stabilized. Inaddition to the actual knife edge, theflanges are provided with a con-centric sealing surface for placementof a FPM gasket or a supporting ringwith FPM O-ring, which may bebaked up to 150 °C (does not applyto observation windows).

This design has the advantage, that itis possible to equip the apparatuswith elastomer gaskets prior to finalassembly, so that the system can betested under normal high vacuumconditions.

Technical Data

DN CF

Outside diameter o. D. inch

Outside diameter o. D. mm

Inside diameter i. D. inch

Inside diameter i. D. mm

Bolt circle diameter k mm

High h mm

Number of holes

Hole diameter mm

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

34.0 69.5 113.5 152.0 202.5 253.0 305.0

0.33" 1.375" 2.50" 4.00" 6.00" 8" 10.00"

16.0 36.8 66.0 104.0 155.0 200.0 250.0

27.0 58.7 92.2 130.3 181.0 231.8 284.0

7.5 13.0 17.5 20.0 22.0 24.5 24.5

6 6 8 16 20 24 32

4.3 6.6 8.4 8.4 8.4 8.4 8.4

Conversion Factors1. Magnetizing field H, unit:

Previously used unit: Oerstedt (Oe)

2. Strength of the magnetic field B, unit:Previously used unit: Gauß (G)

A x m-1

1 Oe = 79,577 (A x m-1)

Vs x m2 = Tesla (T)1 G = 10-4 Vs x m2 = 10-4 T

o.Dk

i.D

h

Dimensional drawing for CF flanges

C15

CF Flanges

These Arguments Prove Leybold’s QUALITY

� The well-proven Leybold geometry for the cutting edges



The stabilized Leybold profile for the cutting edges

Diagrammatic viewPartial view

� Forged steel materials of high tensile strength and density

� Material quality for standard applications DIN 1.4301 corresponds to AISI 304

� Tightly checked, close dimensional tolerances for the entire sealing geometry

� Low degassing rates of the tube material used

Nut

Bolt nut plate

Fixed CF flange

Copper gasket

Copper gasket

Inner part Bolts

Rotatable CF flange

AdvantagesReliable sealing of UHV connections

over hundreds of

heating cycles



5

Technical Data

i.D

d1

h1

Dimensional drawing for the CF bore flanges, fixed

DN CF

Outside diameter inch

Inside diameter mm

d1 mm

h1 mm

For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”

Ordering InformationMaterial: DIN 1.4301

Part No.

CF Bore Flanges, Fixed

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

16.0 36.8 66.0 104.0 155.0 200.0 250.0

18.3 40.3 70.3 108.5 159.5 205.5 256.5

4.2 5.5 9.5 11.0 12.0 12.5 12.5

835 41 835 37 835 38 835 39 835 40 835 47 835 49

Technical Data

i.D

d1

h1

d2

h2

Dimensional drawing for the CF bore flanges, rota-table

DN CF


Inside diameter mm

d1 mm

d2 mm

h1 mm

h2 mm



Part No.

CF Bore Flanges, Rotatable

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

16.0 36.8 66.0 104.0 155.0 200.0 250.0

18.3 40.3 70.3 108.5 159.5 205.5 256.5

18.6 41.0 71.0 109.0 160.0 206.0 257.0

4.2 5.5 9.5 11.0 12.0 12.5 12.5

5.8 7.6 12.6 14.3 15.8 17.1 18.0

835 61 835 58 835 59 835 60 835 69 835 67 835 78

Technical Data

h

i.D

dd

1,4

Dimensional drawing for the CF blank flanges,fixed

DN CF


Inside diameter mm

d mm

h mm



Part No.

CF Blank Flanges, Fixed

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

14 38 66 104 155 205 256

34.0 69.5 113.5 152.0 202.5 253.0 305.0

7.5 13.0 17.5 20.0 22.0 24.5 24.5

835 01 835 03 835 04 835 05 835 06 835 07 835 09

Technical Data

i.D

d1

1,4

h1

Dimensional drawing for the CF blank flanges,rotatable

DN CF


Inside diameter mm

d1 mm

h1 mm



Part No.

CF Blank Flanges, Rotatable

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

14 38 66 104 155 205 256

18.6 41.0 71.0 109.0 160.0 206.0 257.0

5.8 7.6 12.6 14.3 15.8 17.1 18.0

835 21 835 23 835 24 835 25 835 26 835 27 835 29

C15

CF Flanges



Technical Datai.D

s

h

Dimensional drawing for the CF flanges with tubeend; left fixed, right rotatable

DN CF


Inside diameter mm

s mm

h mm



Tube endfixed Part No.rotatable Part No.

CF Flanges with Tube End

16 40 63 100 160

1.33" 2.75" 4.50" 6.00" 8.00"

16.0 36.8 66.0 104.0 155.0

1.0 1.6 2.0 2.0 2.0

38 63 105 135 167

835 51 835 31 835 32 835 33 835 34835 71 835 82 835 74 835 75 835 76

Technical Data

DN

DN1

ødøk

hh1

d1

Dimensional drawing for the CF reducing flanges,fixed

DN CF


DN1 CF

k mm

h mm

h1 mm

d

d1



Part No.

Matching stud boltsPart No.

CF Reducing Flanges

40 63 100 100 160 160

2.75" 4.50" 6.00" 6.00" 8.00" 8.00"

16 40 40 63 40 100

27.0 58.7 58.7 92.2 58.7 130.0

13.0 17.5 20.0 20.0 22.0 22.0

5.5 9.0 9.0 11.0 9.0 11.0

16 39 39 66 39 104

M 4 M 6 M 6 M 8 M 6 M 8

836 85 836 86 836 87 836 89 836 90 836 91

839 10 839 11 839 11 839 13 839 11 839 13

Technical Data

DN

hd

DN1

Dimensional drawing for the CF reducing pieces

DN CF


DN1 CF

h mm

d (tube)



Part No.

CF Reducing Pieces

40 63 100 100 160

2.75" 4.50" 6.00" 6.00" 8.00"

16 40 40 63 100

45 75 75 95 105

18 40 40 70 108

837 10 837 15 837 16 837 19 837 22

Technical Data

DN

hd1

ddDN1

Dimensional drawing for the CF/KF adaptors

DN CF


DN1 CF

d

h mm

d1 (tube)


Part No.

UHV CF/KF Adaptors

16 16 40 40 40 63

1.33" 1.33" 2.75" 2.75" 2.75" 4.50"

16 25 16 25 40 40

16 16 16 26 37 41

35 35 30 30 50 35

20 20 20 30 41 45

837 81 837 83 837 82 837 84 837 36 837 86



7

Technical Data

90

DN1

DN

2DN

Dimensional drawing for the CF/ISO-K adaptors

DN CF


DN1 CF

DN2 CF


Part No.

UHV CF/ISO-K Adaptors

63 100 160

4.50" 6.00" 8.00"

63 100 160

66 104 157

837 01 837 02 837 03

C15

UHV Components

UHV Components

UHV components are manufacturedaccording to the requirementsoutlined in the introductory chapter.They are made from selected andcorrosion resistant types of stainlesssteel. Both design and productionmethods are such, that thecomponents meet the requirementsof UHV applications. All componentsare fusion welded from the inside toprevent fissures and pocket holes(virtual leaks which cannot belocated by leak detection methodsfrom the outside). If welding from theoutside cannot be avoided due todesign constraints, the welding seampenetrates to the inner side, the sideof the vacuum.

A carefully implemented cleaningprocess and suitable packaging forthe components are essential pre-requisites for obtaining pressures inthe UHV range within reasonablyshort pump down times afterassembly (providing the remainder ofthe apparatus is clean too).

For applications in the extreme UHVrange (XHV) the outgassing rate ofthe CF flanges and the UHVcomponents can be reduced byabout two orders of magnitude by aspecial degassing process.

Advantages to the User� Low degassing rates

� High degassing temperature

� Leak rates below 1 x 10-11 mbar x l x s-1

� Basic dimensions correspond tothose of the components fromother international manufacturers

� Bolts may be inserted from theside of the body




UHV Components Ultra-high Vacuum Components

9

Technical Data

a

a

Dimensional drawing for the 90° elbows/pipe bends

DN CF


a mm


Ordering InformationElbow 90° with a rotatable flange

Part No.

Elbows 90°; from DN 160 CF Pipe Bend

16 40 63 100 160

1.33" 2.75" 4.50" 6.00" 8.00"

38 63 105 135 167

836 04 836 05 836 06 836 07 836 08

Technical Data

a

a

h

Dimensional drawing for the tees

DN CF


a mm

h mm


Ordering InformationTee with a rotatable flange on each axis Part No.

Tees

16 40 63 100 160

1.33" 2.75" 4.50" 6.00" 8.00"

38 63 105 135 167

76 126 210 270 334

836 14 836 15 836 16 836 17 836 18

Technical Data

a

a

h

Dimensional drawing for the crosses

DN CF


a mm

h mm


Ordering InformationCross with a rotatable flange on each axis Part No.

Crosses

16 40 63 100 160

1.33" 2.75" 4.50" 6.00" 8.00"

38 63 105 135 167

76 126 210 270 334

836 34 836 35 836 36 836 37 836 38

Technical Data

a

a

h

Dimensional drawing for the double crosses

DN CF


a mm

h mm


Ordering InformationDouble cross with a rotatable flange on each axis Part No.

Double Crosses

40 63 100 160

2.75" 4.50" 6.00" 8.00"

63 105 135 167

126 210 270 334

836 45 836 46 836 47 836 48

C15

UHV Components



Technical Data

DN

hdh1 h2

x

Dimensional drawing for the ceramic nipples

DN CF


Breakdown voltage 1) kV

d mm

h mm

h1 mm

h2 (length of the ceramic piece) mm

x (allowed length for the screws) mm

Ordering InformationCaramic nipple with one rotatable flange Part No.

1) With reference to the wall thickness of the ceramic material

Ceramic Nipples (1 rotatable Flange)

40 63

2.75" 4.50"

90 140

25 53

70 90

44 55

30 45

35 45

836 71 836 70

Technical Datah

DN

Dimensional drawing for the CF bellows

DN CF


h mm

Ordering InformationCF bellows with onerotatable flange

Part No.

Flexible Connecting Components (CF Bellows)

16 40 63 100 160

1.33" 2.75" 4.50" 6.00" 8.00"

76 ±1.5 126 ±2.0 139 ±2.0 142 ±2.0 250 ±3.0

880 01 880 02 880 03 880 04 880 05

Technical Data

Dimensional drawing for the CF corrugated hoses

DN CF


A = Length mm

Ordering InformationCF corrugated hose with one rotatable flange

Part No.

Flexible Connecting Components (CF Corrugated Hoses)

16 16 16 16

1.33" 1.33" 1.33" 1.33"

250 500 750 1000

885 56 885 68 885 65 885 73

Technical DataDN CF


A = Length mm

Ordering InformationCF corrugated hose with one rotatable flange

Part No.

40 40 40 40

2.75" 2.75" 2.75" 2.75"

250 500 750 1000

885 57 885 69 885 66 885 75

Dimensions

DN CF 16 40

B mm 23 46

C mm 16.0 36.8

D mm 15.0 40.5

E mm 22.5 53.0

F mm 70 130

G mm 50 100


Accessories for UHV Components Ultra-high Vacuum Components

11

Technical Data

DN

hSW

d1

Dimensional drawing for the compensators

DN (both flanges fixed) CF


Type

d1 (inside dia.) mm

hmax. mm

hmin. mm

SW mm

3 joints individually adjustable

Max. angular deviation, approx. °

Permissible temperature of the hinges °C

Bakeout temperature of the bellows without hinges °C

Ordering InformationPart No.

Compensators

40 63 100

2.75" 4.50" 6.00"

bellows bellows bellows

36.8 62.0 92.0

130 150 157

120 130 127

10 13 13

x x x

10 12 12

200 200 200

400 400 400

880 11 880 12 880 13

Technical Data

1

d

d

2

Dimensional drawing for the copper gaskets for CF flanges

DN CF


d mm

d1 mm

Set of 5

Set of 10

Ordering InformationQualität: Standard

Part No.

Copper Gaskets for CF Flanges (OFHC Copper – Oxygen-Free)

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

16.2 39.0 63.6 101.8 152.6 203.4 254.0

21.3 48.1 82.4 120.5 171.3 222.1 272.7

– – – – – – x

x x x x x x –

839 41 839 43 839 44 839 45 839 46 839 47 839 48

Technical Data

d

d

DN 16 CF DN 40 CF

DN 63 - 200 CF

Dimensional drawing for the profiled gaskets without support ring

DN CF


d mm

Bakeout temperature mm

Set of 2

Set of 5


FPM Profiled Gasket without Support Ring

16 40 63 100 160 200

1.33" 2.75" 4.50" 6.00" 8.00" 10.00"

16.0 42.0 69.7 107.8 156.0 206.0

160 160 160 160 160 160

– – x x x x

x x – – – –

839 21 839 23 839 34 839 35 839 36 839 37

Technical Data

d

Dimensional drawing for the FPM O-rings withsupport ring

DN CF


d mm

Bakeout temperature °C


FPM O-ring with Support Ring

250

12.00"

248,3

160

839 03

C15

Accessories for UHV Components



Technical Data

l

d

Dimensional drawing for the hexagon bolts for CFflanges

DN CF


Dimensions (d x l) mm

Sealing torque 1) Nm(lbf-in)

Quantity per setBoltsNutsWashers

Ordering informationSet Part No.

1) With separating agent2) 2 sets are required

Hexagon Bolts, Set for CF Flanges

16 40 63 100 160 200 250

1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"

M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 50 M 8 x 55 M 8 x 60 M 8 x 60

4 10 20 20 20 20 2035.40 88.51 177.02 177.02 177.02 177.02 177.02

25 25 25 25 25 25 2525 25 25 25 25 25 2525 25 25 25 25 25 25

839 00 839 01 838 81 839 04 839 05 839 07 839 07 2)

Technical Data

d

ls

Dimensional drawing for the set screws, nuts andwashers for CF flanges

DN CF


s mm


Quantity per setBoltsNutsWashers


1) With separating agent

Set Screws, Nuts and Washers for CF Flanges

16 40 63 - 100

M 4 x 20 M 6 x 35 M 8 x 45

2 3 4

4 10 2035.40 88.51 177.02

6 6 166 6 166 6 16

839 10 839 11 839 13

Technical Data

Dimensional drawing for the bolts with bolt nutplate and washers

DN CF



A mm

B mm

C mm


Quantity per setBoltsBolt nut plateWashers


1) With separating agent

Bolts with Bolt Nut Plate and Washers

16 40 63 100/160

1.33" 2.75" 4.50" 6.00"/8.00"

M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 55

20 35 45 55

7 10 12 12

4 5 8 8

4 10 20 2035.40 88.51 177.02 177.02

6 6 8 203 3 4 106 6 8 20

838 87 838 88 838 89 838 91

Technical DataTemperature

Ordering informationLubricant for threads, 28 g tube Part No.

Lubricant for Threads

up to 1000 °C

839 99

This thread lubricant is preferablyapplied to stainless steel joints and isused to prevent bolts from seizingdue to high temperatures or highmechanical stresses.


UHV Observation Windows Ultra-high Vacuum Components

UHV Observation Windows

13

All UHV observation windows with CFflanges are of a flat and embeddeddesign (Zero-length design). Thisdesign provides a much widerviewing angle compared to -observation windows manufacturedaccording to a pot-type design.

Standard types of glass are normallyused for visual observations, fortaking photographs of experimentaldetails and, among other things, forpyrometric measurements.

Advantages to the User� Embedded design

� Optically plane-parallel almost upto the glass/metal seal

� Flange offering a wide viewingangle

Optical transmissivity for the UHV observation windows

Wavelength [nm]

Tran

smis

sivi

ty [%

][%]

––––– Sapphire–– · –– Kodial - - - - - Borosilicate

α

s

50d

h

Dimensional drawing for UHV observation windows

Technical DataDN CF

Thickness of the glass (s) mm

Diameter of viewing area (d) mm

Viewing angle (a) °

Spacing of the glass (h), approx. mm

Viewing distance mm

Wavelength range nm

Material

Mean transmission ratio %

Type of glass

Max. heating ratemin

Max. bakeout temperature °C

Ordering informationUHV observation window

Part No.

40 63 100 160

3.0 3.5 6.0 8.0

38 65 90 135

38 57 71 92

11.0 16.4 8.0 10.0

50 50 50 50

400 to 3000 400 to 3000 400 to 3000 400 to 3000

Vacon Vacon Vacon Vacon(compen- (compen- (compen- (compen-

sation ring) sation ring) sation ring) sation ring)

93 in the 93 in the 93 in the 93 in thevisible range visible range visible range visible range

Kodial Kodial Kodial Kodial

5 5 5 5

400 400 400 400

210 112 210 114 210 115 210 116

C15

UHV Observation Windows



UHV Sapphire Observation Windows

All UHV observation windows with CFflanges are of a flat and embeddeddesign (Zero-length design). Thisdesign provides a much widerviewing angle compared toobservation windows manufacturedaccording to a pot-type design.

The transmission range of sapphirelies between 250 nm and 5500 nm.The infrared limit is shifted far into theinfrared range. Therefore theseobservation windows are used, forexample, in solar simulation tests,laser experiments, high-temperatureplasma research and spectro-photometric measurements.

Standard types of glass are normallyused for visual observations, fortaking photographs of experimentaldetails and, among other things, forpyrometric measurements.

Advantages to the User� Embedded design

� Optically plane-parallel almost upto the glass/metal seal

� Flange offering a wide viewingangle

Optical transmissivity for the UHV Sapphire observation windows

Wavelength [nm]

Tran

smis

sivi

ty [%

]

d

h

50

s

α

Dimensional drawing for the UHV sapphire obser-vation windows

Technical DataDN CF

Thickness of the glass (s) mm

Diameter of viewing area (d) mm

Viewing angle (a) °

Spacing of the glass (h), approx. mm

Viewing distance mm

Wavelength range nm

Mean transmission ratio %

Verwendete Glassorte

Max. heating rate min

Max. bakeout temperature °C

Ordering informationUHV sapphire observation windows Part No.

40

3.0

23

23

10

50

250 to 5500

> 80

Sapphire

5

400

210 122

––––– Sapphire–– · –– Kodial - - - - - Borosilicate


Valves Ultra-high Vacuum Components

15

UHV All-Metal Right-Angle Valves

The all-metal right-angle valves are ofa fully welded design. The valve diskmay be exchanged through the sideflange.

Due to the selection of suitablematerials, the valve stem need not belubricated after every bake-out cycle.

The drive spindle of the valvestransfers the motion via a pressureplate onto the sleeve-guided valvestem carrying the screwed-on valvedisk. The valve disk consists of acopper plate.

Due to the specific properties ofcopper (ductility) this design offersgreat advantages over othermaterials: long service life and lowclosing forces when operating thevalve.

A very high leak tightness achieved,even with a low closing force.

The compact design offers goodoperational characteristics also inview of temperature changes, offers ashort flow path and hence improvedconductance.

Advantages to the User� Leak rate at the valve seat below

10-11 mbar x l x s-1

� Absolutely reliable sealing of valveseat

Technical Data

Dimensional drawing for the UHV all-metal right-angle valve

DN CF

Connection flange rotatable DN

Service life cycles

Conductance for molecularflow l/ s

Pressure, absolutemin. mbarmax. bar

Mounting orientation mm

Bake out temperature without handwheel °C

Bake out temperature with handwheel °C

Max. heating and cooling rate °C/min

Bellows Material

Housing Material

Valve disk Material

Valve disk seal Material

Weight kg (lbs)

Ordering informationUHV all-metal right-angle valves

Spare valve disk, 2 pieces

Spare hand wheel, plastic

1) = AISI Type 3162) = AISI Type 304

UHV All-Metal Right-Angle Valves, with Rotatable Flanges on Both Sides

16 40 63

16 CF-R 40 CF-R 63 CF-R

1000 1000 1000

3 38 100

1 x 10-11 1 x 10-11 1 x 10-11

4 4 4

any any any

300 300 300

80 80 80

4 4 2

Stainless steel Stainless steel Stainless steel1.4541 1) 1.4541 1) 1.4541 1)

Stainless steel Stainless steel Stainless steel1.4301 2) 1.4301 2) 1.4301 2)

welded welded welded

Copper Copper Copper

Copper Copper Copper

0.4 (0.88) 2.0 (4.42) 5.0 (11.04)

Part No. 289 80 Part No. 289 81 Part No. 289 82Part No. 215 410 Part No. 215 440 Part No. 215 470

Part No. 215 412 Part No. 215 442 Part No. 215 472

� Simplest operation

� No lubrication of the spindle isnecessary after bakeout

� Large removable handwheel foreasy operation

DimensionsDN A B C SW

16 CF-R 88.0 38.0 15.5 8.0

40 CF-R 140 63 26 17

63 CF-R 211.0 105.0 36.4 22.0

C15

Valves



UHV All-Metal Variable Leak Valves

85,5 (3.37") 50 (2")

ø46(1.81")

DN 40 CF-F

DN

16

CF

-R32

,5(1

.28"

) 98,2

(3.

87")

M5

Dimensional drawing for the all-metal variable leakvalves

Technical Data UHV Al l-Metal Var iable Leak Valves

Ordering information

Part No. 289 90

Part No. 289 87

Part No. 289 88

Part No. 290 97

Connection flanges

Input DN

Output DN

Gas flow, min. for

Pure gas mbar x l x s-1

Air mbar x l x s-1

Gas flow

max. mbar x l x s-1

adjustable, max. mbar x l x s-1

Tightness mbar x l x s-1

Pressure absolute

min. mbar

max. bar

Conductance for molecular flow l x s-1

Operating temperature °C


Valve seat Material

Valve plate Material

Housing Material

Weight kg (lbs)

UHV all-metal variable leak valve

Spare valve plate

Spare valve seat

Tool kit for valve seat

UHV Al l-Metal Var iable Leak Valves

16 CF-R

40 CF-R

10-10

10-9

600

100

1 x 10-11

1 x 10-10

30

0,7

200

350

Copper alloy

Sapphire

Stainless steel

1.4 (3.09)


Feedthroughs Ultra-high Vacuum Components

UHV Feedthroughs

17

Abbreviations used in

connection with

feedthroughs:F Feedthrough

E Electric

L Liquid

N Normal

P Precision

F Frequency

HC Current

HV Voltage

L Linear

R Rotary

A stainless steel bellows is used toseal off the UHV linear, rotary andmulti-motion feedthroughs against theatmosphere.

All feedthroughs can be installed inthe vacuum systems in anyorientation.

UHV feedthroughs are available in avariety of field-proven designs,specifically:

� Linear motion mechanical feed-throughs,

� Rotary motion mechanical feed-throughs,

Dimensional drawing for the FNL 16/25 linearmotion feedthrough

Linear Motion Mechanical Feedthroughs

15

5077

,510

5,5

ø33

M6x10

ø10 0 -0.1

183

Dimensional drawing for the FNL 40/50 linearmotion feedthrough

Technical Data FNL 16/25 FNL 40/50


Part No. 210 250 Part No. 210 251

Nominal width DN

Shaft connection mm

Feedthrough/seal

Actuator

Travel mm

Scale division mm

Shaft loadRadial at max. displacement NAxial, against vacuum NAxial, against vatmoshere NTorsion Nm (lbf-in)


Pressure absolute

Bakeout temperatureFeedthrough °C

Weight kg (lbs)

Materials exposed to process media

Linear motion feedthrough

FNL 16/25 FNL 40/50

16 CF-R 40 CF-R

M 4 x 16 M 6 x 10, ˇ 10

bellow bellow

manually manually

25 50

5 10

20 20085 140100 200

0.2 (1.77) 0.5 (4.43)

1 x 10-10 1 x 10-10

1 x 10-9 mbar to 2 bar 1 x 10-9 mbar to 2 bar

300 300

0.15 (0.33) 0.75 (1.66)

Stainless steel Stainless steel

C15

Feedthroughs



Dimensional drawing for the FPR 16/5 N rotaryfeedthrough

Linear Motion Mechanical Feedthroughs

Dimensional drawing for the FNR 40/20 N rotaryfeedthrough

Technical Data FPR 16/5 N FNR 40/20 N


Part No. 210 154 Part No. 210 155

Nominal width DN

Shaft connection mm

Feedthrough/seal

Transferable torque

Dynamic Nm (lbf-in)

Dynamic, at 300 °C Nm (lbf-in)

Static Nm (lbf-in)

Rotational speed rpm

at max. torque rpm

Scale division mm

Shaft load

Radial N

Axial N


Pressure absolute

Operating temperature °C


Weight kg (lbs)

Materials exposed to process media

Rotary feedthrough

FPR 16/5 N FNR 40/20 N

16 CF-F 40 CF-F

ˇ 4 ˇ 8

bellow bellow

0.4 (3.54) 4.0 (35.40)

0.2 (1.77) 2.0 (17.70)

0.2 (1.77) 3.0 (26.55)

200 1000

– 500

10° –

10 60

5 20

1 x 10-10 1 x 10-10

1 x 10-9 mbar to 2 bar 1 x 10-9 mbar to 2 bar

300 300

300 300

0.3 (0.66) 1.5 (3.31)

Stainless steel Stainless steel

The rotation of the drive knob istranslated via a gearless drivesystem to the shaft on the vacuumside. This shaft runs on ball bearingswhich do not require any mainte-nance during the entire service life.



19

Electrical FeedthroughsThe electric UHV feedthroughscomply with the relevant VDEregulations.

Concerning the air gaps andcreepage paths, they have beendesigned in accordance with VDE 0100, i.e. both sides of thefeedthrough are tested underatmospheric pressure conditions.

Technical NoteAll electric specifications of thedescribed voltage and current feed-throughs are rated in accordancewith overvoltage class 1 and conta-mination grade 2.

Dimensional drawing for the electrical feeedthrough FE 40/4 (left), FE 40/9 (middle) and FEHC 16/1(right)

Technical Data FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/1 FEHC 40/2


Part No. Part No. Part No. Part No. Part No.210 310 210 313 210 335 210 338 210 342Part No. Part No. Part No. Part No. Part No.210 312 2x 210 312 210 337 210 340 210 337

Part No. Part No. Part No. Part No. Part No.210 311 2x 210 311 210 336 210 339 210 336

Part No.– – – 210 341 –

Nominal width DN

Number of feedthroughs

Number of connection piecesvacuum side (set)atmospheric side (set)

Voltage per pole 1) kV

Current per pole 1) A


Temperature rise at max. current °C/min


Pressure absolute

Flange

Conductor

Insulator

Weight kg (lbs)

Current feedthrough

Connection piece, vacuum side (set)

Connector, atmospheric side (set)

Connector, atmospheric side, H2O cooled

1) Local safety regulations must be met2) with water-cooling

FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/1 FEHC 40/2

CF 40-F CF 40-F CF 16-F CF 40-F CF 40-F

4 9 1 1 2

5 10 2 1 25 10 2 1 2

1 1 4 1 4

8 1 150 250/1000 2) 150

400 400 400 400 400

5 5 5 4 4

1 x 10-10 1 x 10-10 1 x 10-10 1 x 10-10 1 x 10-10

1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbarto 2 bar to 2 bar to 2 bar to 2 bar to 2 bar

Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel

Stainless steel Stainless steel Copper Copper Copper

Al2O3 Al2O3 Al2O3 Al2O3 Al2O3

0.3 (0.66) 0.4 (0.88) 0.15 (0.33) 0.5 (1.10) 0.45 (0.91)

Dimensional drawing for the electrical feeedthrough FEHC 40/1 (left) and FEHC 40/2 (right)

C15

Feedthroughs



Electrical FeedthroughsThe electric UHV feedthroughscomply with the relevant VDEregulations.

Concerning the air gaps andcreepage paths, they have beendesigned in accordance with VDE 0100, i.e. both sides of thefeedthrough are tested under atmos-pheric pressure conditions.

Technical NoteAll electric specifications of thedescribed voltage and current feed-throughs are rated in accordancewith overvoltage class 1 andcontamination grade 2.Dimensional drawing for the electrical feeedthrough FEF 16/1 (left), FEHV 16/1 (middle) und FEHV 40/3 (right)

Technical Data FEF 16/1 FEHC 16/1 FEHV 40/3


Part No. 210 404 Part No. 210 402 Part No. 210 403Part No. 846 47 Part No. 846 47 Part No. 846 47

BNC MHV MHVU6 88/U U6 932/U U6 932/U

Nominal width DN

Number of feedthroughs

VoltageAC, 50 Hz kVDC kV

Current A

Frequency MHz

Impedance Ö

Insulation resistance at 20 °C Ö

Bakeout temperaturewith connector °Cwithout connector °C

Temperature rise at max. current °C/min


Pressure absolute

Housing, flange, conductor

Feedthrough, seal

Weight kg (lbs)

Current feedthrough

Inside plug

Outside plug

1) with elastomer seal up to 150 °C

FEF 16/1 FEHC 16/1 FEHV 40/3

CF 16-F CF 16-F CF 40-F

1 1 3

0.35 3.5 3.50.5 5.0 5.0

3 3 3

150 – –

50 - 60 – –

10-10 10-10 10-10

50 50 50400 400 400

5 5 5

1 x 10-10 1 x 10-10 1 x 10-10

1 x 10-8 mbar – 10 bar 1 x 10-8 mbar – 10 bar 1 x 10-8 mbar – 10 bar

Stainless steel Stainless steel Stainless steel

Al2O3 Al2O3 Al2O3

0.14 (0.31) 0.14 (0.31) 0.5 (1.10)



21

Dimensional drawing for the connector used on FE 40/4 / FE 40/9

Connectors, vacuum side

Dimensional drawing for the connector used on FEHC 40/1

Dimensional drawing for the connector used on FE 16/1, FEHC 40/2 and FEHC 16/1

12

863

M3

2,4

Dimensional drawing for the connector used on FEHV 16/1, FEHV 40/3 and FEF 16/1

Technical Data


Part No. Part No.– – 210 340 846 47

Part No. 210 312 – – –

Part No.– 210 337 – –

Connector for feedthrough

Current max. A


Material

Connector, vacuum side


(Set of 5)


(Set of 2)

Connectors, Vacuum Side

FE 40/4 / FE 40/9 FE 16/1 / FEHC 40/1 FEHV 16/1 / FEHV 40/3

FEHC 40/2 / FEHC 16/1 FEF 16/1

12 90 1000 3

400 400 400 350

Stainless steel Stainless steel Copper Copper

Connectors, Vacuum Side

C15

Feedthroughs



Dimensional drawing for the outside plug used on FE 40 /4 and FE 40/9

Connectors, atmospheric side

M6

SW

819

,5

25

53

ø10

Dimensional drawing for the outside plug used on FE 16/1, FEHC 40/2 and FEHC 16/1

Dimensional drawing for the outside plug used on FEHC 40/1

Technical Data Connectors, Atmospheric Side


Part No. – – 210 339

2 xPart No. 210 311 – –

– Part No. 210 336 –


Current max. A

Not insulated, for use up to V


Material

Connector, atmospheric side


(Set of 5 )


(Set of 2 )

Connectors, Atmospheric Side

FE 40/4 / FE 40/9 FE 16/1 / FEHC 40/2 / FEHC 16/1 FEHC 40/1

12 90 250

50 50 50

50 150 150

gold-plated brass silver-plated brass silver-plated brass



23

Dimensional drawing for the connectorused on FEHC 40/1

Connectors, atmospheric side, H2O cooled

Technical Data Connectors, Atmospheric Side


Part No. 210 341


Current max. A

Not insulated, for use up to V


Material

Connector, atmospheric side,

with water-cooling

Connectors, Atmospheric Side

FEHC 40/1

1000

24

120

silver-plated brass

C15

Feedthroughs



UHV Liquid FeedthroughsThe thermally insulated UHV liquidfeedthroughs are used to conveycold or hot gases, liquids or liquidnitrogen.

Dimensional drawing for the FL 40C/2 UHV liquidfeedthrough

Technical Data FL 40C/2


Part No. 210 276

Nominal width DN

Feedthrough / seal

Connection mm

Number of tubes


Pressure absolute

Temperature range °C

Material

Weight kg (lbs)

UHV liquid feedthrough

FL 40C/2

40 CF-F

welded / brazed

ˇ 8 x 1

2

1 x 10-10

10-9 mbar to 10 bar (at 400 °C max. 2 bar)

-400 to +400

Stainless steel

0.4 (0.88)

Technical NoteThe ends of the tubes are longenough that they may be bent apartso that an UHV compatibleconnection can be provided.



25

Notes

vacuumLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-221 347-0Fax: +49-221 [email protected] w w w . l e y b o l d . c o m

P.R. China

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin)Equipment Manufacturing Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaPhone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004, ChinaSales and Service:Phone: +86-10-6590-7607Fax: +86-10-6590-7622

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Shanghai Branch:Add: No. 33, 76 Futedong SanRd., Waigaoqiao FTZ , Shanghai 200131, ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]

Leybold Vacuum (Tianjin)Guangzhou Branch:Add: G/F,#301 Building, 110 Dongguangzhuang Rd.Tianhe District, Guangzhou 510610, ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: [email protected]

India

Leybold Vacuum India Pvt Ltd.A-215 Road No. 30MIDC Wagle Industrial EstateThane(W) - 400 604 MaharashtraIndiaSales and Service:Phone: +91-22-2581 2929Fax: +91-22-2581 [email protected]

Netherlands

Leybold Vacuum Nederland B.V.Computerweg 7NL-3542 DP UtrechtSales and Service: Phone: +31-346-58 39 99 Fax: +31-346-58 39 90 [email protected]@leybold.com

Spain

Leybold Vacuum España S.A.C/. Huelva, 7E-08940 Cornella de Llobregat (Barcelona)Sales: Phone: +34-93-666 46 16Fax: +34-93-666 43 [email protected] Service: Phone: +34-93-666 49 51Fax: +34-93-685 40 10

Sweden

Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 [email protected]/delivery address:Datavägen 57BSE-43632 Askim

Switzerland

Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 [email protected]: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60

USA

Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA [email protected]: Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service: Phone: +1-724-327-5700Fax: +1-724-733-3799

Belgium

Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 [email protected]: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 [email protected]

France

Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. de Courtaboeuf, B.P. 42F-91942 Courtaboeuf CedexSales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]

Leybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107 F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 [email protected]

Great Britain

Leybold Vacuum UK Ltd.Waterside Way, Plough LaneGB-London SW17 0HBSales: Phone: +44-20-8971 7000 Fax: +44-20-8971 7001 [email protected]: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected]

Italy

Leybold Vacuum Italia S.p.A.8, Via Trasimeno I-20128 MilanoSales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]:Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]

Field Service BaseZ.I.Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 [email protected]

Leybold Vacuum GmbHBonner Strasse 498 D-50968 ColognePhone: +49-221-347 1234 Fax: +49-221-347 1245 [email protected]

Leybold Vacuum GmbHSales Area North/EastBranch office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-30-435 609 0 Fax: +49-30-435 609 10 [email protected]

Leybold Vacuum GmbHSales Area South/SouthwestBranch office MunicKarl-Hammerschmidt-Strasse 38D-85609 Aschheim/DornachPhone: +49-89-357 33 90 Fax: +49-89-357 33 933 [email protected]@leybold.com

Leybold Vacuum GmbHSales Area WestBranch office CologneEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1270 Fax: +49-221-347 1291 [email protected]

Leybold Vacuum GmbHService CenterEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1439 Fax: +49-221-347 1945 [email protected]

Leybold Vacuum GmbHMobile after sales serviceEmil-Hoffmann-Straße 43 D-50996 Cologne-SuerthPhone: +49-221-347 1765 Fax: +49-221-347 1944 [email protected]

Leybold Vacuum Dresden GmbHZur Wetterwarte 50, Haus 304D-01109 DresdenService: Phone: +49-351-88 55 00 Fax: +49-351-88 55 041 [email protected]

Japan

Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-4713330Fax: +81-45-4713323

Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg. 7F2-7-53, Nihi-MiyaharaYodogawa-ku Osaka-shi 532-0004Sales:Phone: +81-6-6393-5211Fax: +81-6-6393-5215

Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298-89-2841Fax: +81-298-89-2838

Korea

Leybold Vacuum Korea Ltd.#761-4, Yulkeum-ri,SungHwan-eup, Cheonan-CityChoongchung-Namdo,330-807, KoreaSales:Phone: +82-41-580-4420Fax: +82-41-588-3737Service:Phone: +82-41-580-4415Fax: +82-41-588-3737

Singapore

Leybold Vacuum Singapore Pte Ltd.No.1, International Business Park,B1-20B, The SynergySingapore 609917Sales and Service:Phone: +65-66652910Fax: [email protected]

Taiwan

Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-5833988Fax: +886-3-5833999

Germany Europe Asia

America

HotlineSales: +49-221-347 1234Service: +49-221-347 [email protected]@leybold.com

LV_0

7322

_200

5

05

.05

Sales and Service Net Worldwide

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