By: Joaquin Gabriels November 24 th, 2008. Overview of CMOS CMOS Fabrication Process Overview ...

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By: Joaquin Gabriels November 24 th , 2008

Transcript of By: Joaquin Gabriels November 24 th, 2008. Overview of CMOS CMOS Fabrication Process Overview ...

Page 1: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

By: Joaquin GabrielsNovember 24th, 2008

Page 2: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

Overview of CMOS CMOS Fabrication Process Overview CMOS Fabrication Process Problems with Current CMOS Fabrication Future Changes in CMOS Fabrication

Page 3: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

Complementary metal–oxide–semiconductor (CMOS) Has many different uses:

Integrated Circuits Data converters Integrated transceivers Image sensors Logic circuits

http://en.wikipedia.org/wiki/CMOS

Page 4: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

NAND Circuit

Page 5: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

http://lsmwww.epfl.ch/Education/former/2002-2003/VLSIDesign/ch02/ch02.html

Page 6: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

1. Create a pattern.2. Oxidize small layer,

about 1µm thick.3. Place photoresist on

top of SiO2

4. Place mask(pattern) above photoresist and expose it to UV light.

Page 7: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 8: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 9: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

1. Etch away SiO2 using HF acid or plasma.

2. Remove remaining photoresist with acids.

Page 10: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

To create a n well: Diffusion

Heat wafer in Arsenic gas chamber until diffusion occurs. Ion Implantation

Arsenic or phosphorous are implanted in window.

n well

SiO2

Page 11: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 12: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

A thin layer of oxide is deposited.

A thin layer of polysilicon is deposited using Chemical Vapor Deposition (CVD) .

p substraten well

Page 13: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

http://en.wikipedia.org/wiki/Chemical_vapor_deposition

Page 14: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

Remove oxide layer using acid.

Dope open area using Ion implantation or diffusion.

p substraten well

n+n+ n+p+p+p+

Page 15: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

p substrate

Metal

Thick field oxide

n well

n+n+ n+p+p+p+

Page 16: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 17: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

Optical lithography is limited by the light frequency.

Material limitations Yield limitations Space limitations

Page 18: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

Material changes like using high-k materials.

Design changes SOI(Silicon On Insulator) Double Gate (Finfet) Twin-Tub Process

Page 19: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 20: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 21: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 22: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.
Page 23: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

http://www.fujitsu.com/downloads/MAG/vol39-1/paper02.pdf

Page 24: By: Joaquin Gabriels November 24 th, 2008.  Overview of CMOS  CMOS Fabrication Process Overview  CMOS Fabrication Process  Problems with Current CMOS.

CMOS Digital Integrated Circuit Design - Analysis and Design by S.M. Kang and Y. Leblebici

http://www.fujitsu.com/downloads/MAG/vol39-1/paper02.pdf “Introduction to VLSI Circuits and Systems,” John Wiley and

Sons, 2002 http://lsmwww.epfl.ch/Education/former/2002-2003/VLSIDesign/

ch02/ch02.html http://en.wikipedia.org/wiki/Chemical_vapor_deposition users.ece.utexas.edu/~adnan/vlsi-05/lec0Fab.ppt http://en.wikipedia.org/wiki/CMOS www.usna.edu/EE/ee452/LectureNotes/02-

_CMOS_Process_Steps/08_Simple_CMOS_Fab.ppt http://en.wikipedia.org/wiki/Silicon_on_insulator access.ee.ntu.edu.tw/course/VLSI_design_90second/data/

Chapter%203%20Part2%2003-20-2002.doc