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Ultrasonic Ceramic Linear Actuators & MotorsSelf Locking, Ultra Stable, High Force, Compact

COMPACT

PREC ISE

HIGH FORCE

W W W . P I . W S

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PILine® linear piezomotors arebased on a novel, patentedultrasonic drive developed byPI. Ultrasonic oscillations of apiezoceramic actuator aretransferred to linear motionalong a friction bar, which isattached to the moving part ofa mechanical setup.

At the heart of the system is amonolithic piezoceramic plate,segmented by two electrodes.Depending on the desireddirection of motion, the left orright electrode of the piezoce-ramic plate is excited to pro-duce high-frequency eigen-mode oscillations at tens tohundreds of kilohertz. An alu-mina friction tip (pusher)attached to the plate movesalong an inclined linear path atthe eigenmode frequency.

The pusher is preloadedagainst the friction bar whichis attached to the slider, turn-table, etc. Through its oscilla-tions, it provides micro-impul-ses that drive the moving partforward or backwards.

With each oscillatory cycle, themechanics executes a step of afew nanometers; the macro-scopic result is smooth motionwith a virtually unlimited travelrange. State-of-the-art ultra-sonic motors can produceaccelerations to 5 g and veloci-ties to 500 mm/s.

PILine® Ultrasonic Piezomotors

Ultrasonic motors cannot pro-vide the unlimited resolution oflinear piezo actuators and flex-ure-guided piezo positioningstages. These motors transfermotion through friction, whichis why their repeatability is lim-ited to about 50 nm. Muchhigher resolution and holdingforces can be achieved withPiezoWalk® piezomotors /drives (see p. 1-3 ff).

PILine® Levels of Integration

PILine® ultrasonic drive prod-ucts are offered in three differ-ent levels of integration. Thedrive electronics and controllercan be chosen accordingly.

� P-661 and P-664 OEM motorsrequire the greatest amountof care at the customer’s site.Motor and friction bar – thelength depends on thedesired travel range – haveto be integrated into amechanical setup. Operationrequires preload of themotor against the frictionbar, guiding and, if neces-sary, the servo-loop.

� M-674 RodDrives can replaceclassical drive elements likerotary motor / leadscrewassemblies, or magnetic lin-ear drives integrated into amicropositioner or handlingdevice. Integration requiresguiding and – if necessary –the servo-loop.

� Linear positioning stagesrepresent the highest level ofmanufacturer integration.The piezomotor is integratedcompletely in a high-qualitymechanical setup includingthe servo-loop with direct-metrology linear encoders.

State-of-the-art PILine® ultrasonic motors are based on asimple construction allowing for the design of low-cost driveunits and extremely compact, high-speed micro-positioningstages smaller than a matchbox

PILine® levels of integration: OEM motor, RodDrive, linear positioning stage

High-Speed Ultrasonic Actuators - Working Principle

Principle design of a PILine® ultrasonic piezomotor-driven translation stage

Features and Advantages

of PILine® Ultrasonic

Piezomotors

� Compact Size: the direct-drive principle allows the de-sign of ultra-compact trans-lation stages. The M-662, forexample, provides 20 mmtravel in a 28 x 28 x 8 mmpackage.

� Low Inertia, High Accelera-tion, Speed and Resolution:PILine® drives achieve veloc-ities to 500 mm/s and accel-erations to 5 g. They are alsovery stiff, a prerequisite fortheir fast step-and-settletimes – on the order of a fewmilliseconds – and provideresolution to 10 nm. The lack

of a leadscrew means nolubricant flow or materialrelaxation to cause submi-cron creep. There is also norotational inertia to limitacceleration and decelera-tion.

� Excellent Power-to-WeightRatio: PILine® drives are opti-mized for high performancein a minimum package. Nocomparable drive can offerthe same combination ofacceleration, speed and pre-cision.

� Safe: The minimum inertia ofthe moving platform togeth-er with the “slip clutch”effect of the drive provide

better protection of precision � Custom Solutions / Flexibili-fixtures / devices than lead- ty for OEMs: PILine® drivesscrew-driven stages. Despite are available in open-loopthe high speeds and acceler- and closed-loop translationations, there is a much lower stages and as OEM compo-risk of pinching fingers or nents. PI develops and ma-other injuries than with nufactures all piezo ceramicconventional drives. This components in-house. Thismeans users may not need gives us the flexibility tointerlocks, light curtains or provide custom motorsother measures to keep (size, force, environmentalthem safe. conditions) for OEM and

research applications.� Self-Locking Feature: PILine®

drives create a braking force � Quality, Lifetime, Experien-when not energized without ce: Based on PI’s 4 decadesthe position shift common of experience with piezowith conventional mechani- nanopositioning technolo-cal brakes. Other benefits of gy, PILine® drives offerthe self-locking are the elimi- exceptional precision andnation of servo dither and reliability with an MTBF ofsteady-state heat dissipa- >20,000 hours. Rotatingtion. components such as gears,

shafts and moving cablesVacuum Compatibility: Vacu- that are prone to failure inum compatible versions of conventional motion sys-PILine® drives are available. tems, are not part of the

PILine® design.Negligible EMI: PILine® dri-ves do not create magneticfields nor are they influencedby them, a decisive advanta-ge in many applications.

Settling behavior of a PILine® M-663 linear stage, 100 μm step. A stable position towithin 0.1 μm can be reached in only 10 ms

Custom high-force ultrasonicpiezo motor

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PILine® Ultrasonic Piezomotors

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Self-locking Instead

of Quiescent Current

PILine® piezo motors are basedon a new, patented, ultrasonicdrive principle developed by PI.The core piece of the system isa piezoceramic plate, which isexcited with high-frequency ei-genmode oscillations. A frictiontip attached to the plate movesalong an inclined linear path atthe eigenmode frequency.Through its contact with thefriction bar, the moving part ofthe mechanics drives forward orbackwards. With each oscilla-tory cycle, the mechanicsexecutes a step of a few nano-meters; the macroscopic resultis smooth motion with a virtu-ally unlimited travel range.The ceramic plate is preloadedagainst the runner and thus ge-

Fast and Self-Locking with PILine® Piezomotors

M-272 Linear Actuator / Shaft Motor with Ultrasonic Drive

� Force Generation up to 8 N

� Self Locking at Rest

� Velocity up to 200 mm/s

� 5 μm Encoder Resolution

� Linear Guiding

PILine® piezoceramic ultrasonicdrives offer an affordable alter-native to motor-leadsrew com-binations and electromagneticlinear motors when smalldimensions and/or high speedare important. With velocities ofup to 200 mm/s, these drivesare fast, compact, and are rea-dily integrated. In addition,

PILine® motors are self-lockingwhen at rest with zero heat ge-neration, and doing away withthe need for an additional motorbrake.The novel M-272 closed-looplinear drive combines motor,actuator, linear encoder, guidingsystem and brake functionalityin a very compact package. Dueto the integrated guiding sys-tem a payload can be easily at-tached to the drive rod of theM-272 drive. The drive can alsofunction as a drop-in-replace-ment for motor-leadscrewdrives facilitating assembly andreducing the number of compo-nents significantly. Due to theintegrated linear encoder, posi-tioning can be done preciselyand repeatably.

Ordering Information

M-272

PILine® Linear Actuator with Ultra-sonic Motor and Linear Encoder,50 mm, 8 N

Application Examples

� Automation

� Handling

� Micromanipulation

� Metrology

nerates the holding force whenthe drive is at rest.The products described in thisdocument are in part protectedby the following patents:US Pat. No. 6,765,335German Patent No. 10154526

M-272 Dimensions in mm

Cost-effective combination:M-272 closed-loop linear pusher and C-867.OE controller card

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Technical Data (Preliminary Data)

Model M-272 Tolerance

Active axes X

Motion and positioning

Travel range 50 mm

Integrated sensor Linearencoder

Sensor resolution 5 μm

Design resolution 5 μm typ.

Min. incremental motion 10 μm typ.

Backlash 5 μm typ.

Unidirectional repeatability 10 μm typ.

Velocity 200 mm/s max.

Mechanical properties

Guiding Ball bearings

Push/pull force 8 N max.

Holding force 8 N max.

Lateral force 5 N max.

Drive properties

Motor type U-164 PILine® ultrasonic piezomotor

Current 800 mA

Reference switch Hall-effect

Miscellaneous

Operating temperature range -20 to +50 °C

Material Aluminum

Dimensions

Mass 0.5 kg ± 5%

Cable length 0.5 m ± 10 mm

Connector MDR, 14-pin

Recommended controller/driver: C-867.OE* Power for the motor is supplied by the drive electronics, which requires 12 VDC.

** For drive electronics

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RodDrives may replace classicdrive elements like motor / lead-screw assemblies or magneticlinear drives, whereby the ultra-sonic piezo linear motors reachsignificantly higher velocities.They consist of a rod whichis preloaded by PILine® piezolinear motors from two sides.Depending on the way of inte-gration, either the rod or themotor block is coupled to themoving platform.

Variable Travel Ranges

and Forces

The maximum travel range ofthe RodDrive is determined bythe length of the rod and isbasically unlimited. Customizedadaptations in terms of operat-ing and holding forces arefeasible by varying type andnumber of the motors used.

RodDrives represent a level ofintegration between PILine®

OEM piezo linear motors suchas the U-164 and guided mi-cropositioning systems suchas the M-683-series stages (s. p.4-32).

Advantages of PILine®

Micro Positioning Systems

RodDrives employ a patentedultrasonic drive developed byPI. The highly compact, inte-grated piezo motors can pro-

vide velocities of up to 0.5 m/stogether with high resolution.The ceramic motors are pre-loaded against the rod, thusproviding a holding force atrest. The result is a very highposition stability, without theheat dissipation common withconventional linear motors.There are no gears, leadscrewsor other mechanical compo-nents to contribute play orbacklash.

Optimized Drive Electronics

PILine® piezo motors require aspecial drive electronics to gen-erate the ultrasonic oscillationsfor piezo ceramic elements. Thedrive electronics is available aslow-priced OEM board, stand-alone device or integrated in-side a controller and thereforenot included in the delivery.

Patented Technology

The products described in thisdocument are in part protectedby the following patent:US Pat. No. 6,765,335

RodDrive Ultrasonic Piezo Linear Actuator


� System integration formicropositioning products

� Automation

� Handling


� Biotechnology

� Metrology

� Drive Component for Integration

� Travel Ranges up to 150 mm

� Forces up to 10 N

� Min. Incremental Motion to 50 Nm

� Velocity up to 0.5 m/s


M-674 PILine® RodDrive with up to10 N generated force anddifferent travel ranges


PILine® RodDrive

Piezo Linear Drive

For more information, contact us!

The M-674 integrated into amicropositioning stage

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PILine® Linear Motors –

Small, Fast, Highly Effective

Despite their small size, PILine®

linear motors generate highdriving and holding forces.

PILine® motors have a new,patented, ultrasonic drive de-veloped by PI. The core pieceof the system is a piezoceram-ic plate, which is excited toproduce high-frequency eigen-mode oscillations. A friction tipattached to the plate movesalong an inclined linear path atthe eigenmode frequency.Through its contact with thefriction bar, the moving part ofthe mechanics drives forwardor backwards. With each oscil-latory cycle, the mechanicsexecutes a step of a few nano-meters; the macroscopic resultis smooth motion with a virtu-ally unlimited travel range.

High Speed and Acceleration

PILine® piezomotor drives canprovide accelerations of up to5 g and speeds of up to500 mm/s, together with highresolution and high holding

force. Because the ceramic sta-tor is pressed against the slid-er, holding forces are generat-ed when the motor ist powereddown. The result is very highposition stability without theheat dissipation common inconventional linear motors.

Accessories for Easy

Integration

PILine® piezomotors require aspecial drive electronics togenerate the ultrasonic oscilla-tions for the piezoceramic ele-ment. The drive electronics isavailable as OEM board, stand-alone device or integrated con-troller and therefore notinclued in the delivery. PI offersfriction bars with differentlengths.

Long Lifetime

PI has over 30 years experiencewith piezo technology andnanopositioning. PILine® drivesoffer high precision and relia-bility, with over 20,000 hoursMTBF. This is because PILine®

piezo linear motor drives haveno mechanical componentssuch as shafts and gears whichcan cause failures in conven-tional motors.

Fast, Compact OEM Ultrasonic Linear Motor

P-661 PILine® Ultrasonic Piezo Linear Drive


� Biotechnology

� R&D

� Semiconductor testing

� Mass storage devicetesting

� Metrology


� Microscopy

� Photonics packaging

� Quality assurance testing


P-661.P01

PILine® Miniature LinearPiezomotor, 2 N

Accessories:

P-661.B01

Friction Bar for P-661 PILine®

Miniature Linear Piezomotor,15 mm

P-661.B02



P-661.B05



C-184.161

Analog OEM Driver Board forPILine® P-661 Motors

C-185.161

Analog Stand-Alone DriveElectronics with Power Supply forPILine® P-661 Motors

Controller for closed-loop operationare available as C-867 s. p. 4-116.

� Patented Principle Features with High Forces in Small Space

� Max. Velocity 500 mm/s

� Acceleration to 5 g

� Min. Incremental Motion to 0.05 μm

� Self-Locking to 1.5 N

� No Electro-Magnetic Fields

� MTBF 20,000 h

� Integrated Actuators & Positioning Systems Also Available

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PILine® P-661 OEM piezo linear motor

Dimensions of the P-661 in mm

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Technical Data

Model P-661.P01 Units Tolerance


Travel range No limit* mm

Minimum incremental motion, open-loop 0.05** μm typ.

Max. velocity 500 mm/s2


Stiffness when powered down 0.7 N/μm ±10%

Holding force when powered down 1.5 N max.

Push / pull force 2 N max.

Preload on friction bar 9 N ±10%

Drive properties

Resonant frequency 210 kHz typ.

Motor voltage range 120 (peak-peak) V

42 (RMS)

Operating voltage drive electronics 12 V

Electrical power drive electronics 5 W

Miscellaneous


Body material Al (black anodized)

Mass 0.01 kg ±5%

Cable length 1.6 m ±10 mm

Connector Open leads

Recommended controller/driver C-184.161 OEM boardC-185.161 in box

Dimensions 14 x 35 x 6 mm

MTBF >20,000 h

* The travel range of piezo linear motors is virtually unlimited and depends on the length of the friction bar, which is available separately.** The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to

follow the mounting guidelines of the OEM-motors.

Note

The products described in thisdocument are in part protectedby the following patents:US Pat. No. 6,765,335German Patent No. 10154526

0.3 μm steps performed by P-661 piezomotorintegrated in an M-662 translation stage

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M-661 and M-662 PILine® trans-lation stages offer acceler - ations to 5 g with millisecondresponse and velocities to 500 mm/sec in an extremelycompact package. Providingtravel ranges to 20 mm, they

are among the smallest motor-ized translation stages current-ly on the market. Both modelsare designed for open-loopoperation (a similar closed-loop stage with linear encoderis available as model M-663.The M-662, with its squarefootprint, is also suitable foruse in XY confi gurations. Forappli ca tions where the small-est dimensions are essential,the P-652 micro stage isoffered.

Working Principle

PILine® piezo motors use anew, patented, ultrasonic drivedeveloped by PI. A the heart ofthe system is a piezo ceramicplate, which is excited withhigh-frequency eigen modeoscillations. A friction tipattached to the plate moves

along an inclined linear path atthe eigenmode frequency.Through its contact with thefriction bar, the moving part ofthe mechanics drives forwardor backwards. With each oscil-latory cycle, the mech anicsexecute a step of a fewnanometers; the macro scopicresult is smooth motion with avirtually unlimited travel range.


Micropositioning Systems

The ultrasonic piezoceramicdrives used in PILine® micro po-sitioners have a number ofadvantages over classicaldrives:

� Higher Accelerations, up to 5 g

� Speeds up to 500 mm/s� Small Form Factor� Self-Locking When Powered

Down� No Shafts, Gears or Other

Rotating Parts� Non-Magnetic and Vacuum-

Compatible Drive Principle

Choice of Drive Electronics

Special driver electronics arerequired to create the ultrason-ic oscillations for PILine® piezo-

motors. The driver controls themotor speed as a function ofan analog ±10 V signal. Thedriver is not included, as it isavailable in different versions,from the low-priced C-184.161OEM-board to the C-185.161bench-top unit. The stage andthe driver electronics, how ever,must be ordered together, sothat they can be tuned to one-another for optimum perform-ance.

Notes


Miniature Ultrasonic Motorized Linear Positioning Stage

M-662 dimensions in mm


� Biotechnology


� Microscopy


� Semiconductor testing

� Metrology


� R&D



M-661.370

PILine® Translation Stage, 18 mm,Open-Loop

M-662.470

PILine® Translation Stage, 20 mm,Open-Loop, XY Mountable

Accessories:

C-184.161

Analog OEM Driver Board forPILine® P-661 Motors

C-185.161


� Smallest Translation Stages with Linear Motor Drive

� Travel Ranges to 20 mm


� Acceleration to 5 g

� Incremental Motion to 50 nm


� XY-Combination Possible

� MTBF 20.000 h

� Vacuum Versions to 10-7 hPa

With Ultrasonic Piezo Linear Drives

PILine® M-662 (left side) and M-661 stages are the smallest piezo-motor-driven trans-lation stages available on the market that achieve speeds of up to 500 mm/s

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Technical Data

Model M-661.370 M-662.470 Units Tolerance


Travel range 18 20 mm

Min. incremental motion 0.05* 0.05* µm typ.

Max. velocity 500 500 mm/s


Max. load 5 5 N

Max. push/pull force 1 1 N

Max. holding force 2 2 N

Drive properties

Motor type P-661 PILine® P-661 PILine®

ultrasonic piezomotor drive ultrasonic piezomotor drive

Operating voltage 120 (Peak-Peak)** 120 (Peak-Peak)** V

42 (RMS)** 42 (RMS)**

Electrical power 5*** 5*** W nominal

Current 400*** 400*** mA

Miscellaneous

Operating temperature range -20 to +50 -20 to +50 ˚C

Material AI (black anodized) AI (black anodized)

Dimensions 30 x 23 x 10 28 x 28 x 8

Mass 0.03 0.03 kg ±5 %

Cable length 1.5 1.5 m ±10 mm

Connector LEMO connector LEMO connector

Recommended controller/driver C-184.161 OEM board C-184.161 OEM board C-185.161 Bench-top C-185.161 Bench-top (p. 1-36)

*The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To obtain it, it is important to follow the mounting guidelines in the motor documentation.

**The stage supply power is drawn from the drive electronics, which runs on 12 VDC.***For drive electronics.

50 nm steps created with a system incorporating an M-662.470 open-loop piezo linear motor stageM-661 dimensions in mm


M-663.465

PILine® Translation Stage, 19 mm,Linear Encoder, 0.1 μm Resolution

M-663.Y65

PILine® Translation Stage, 19 mm,Linear Encoder, 0.1 μm Resolution,turned cable outlet, XY mountable

M-663.46V

PILine® Translation Stage, 19 mm,Linear Encoder, 0.1 μm Resolution,Vacuum Compatible to 10-6 hPa

Accessories:

C-867.161

Piezomotor Controller with DriveElectronics, 1 Channel, for PILine®

Systems with P-661 Motors

Driver for use with separate con-troller:

C-185.161


� Smallest Translation Stage with Closed-Loop Linear Motor

and Encoder

� Travel Range 19 mm


� Acceleration up to 10 g

� Direct Metrology Linear Encoder

� 0.1 μm Resolution

� XY Combination Possible

� Vacuum-Compatible Versions Available


� Biotechnology


� Microscopy


� Metrology

� Mass storage device te-sting

� R&D


PILine® M-663 micropositioning stages with integrated linear encoder

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PILine® M-663 micropositioningsystems offer high velocities ofup to 400 mm/s and travelranges of 19 mm in a compactpackage. The M-663 is thesmallest closed-loop trans-

lation stage with piezomotordrives currently on the market.Its square footprint makes itsuitable for use in compact XYconfigurations.

Working Principle

PILine® motors have a new,patented, ultrasonic drivedeveloped by PI. The corepiece of the system is a piezo-ceramic plate, which is excitedto produce high-frequencyeigenmode oscillations. A fric-tion tip attached to the platemoves along an inclined linearpath at the eigenmode fre-quency. Through its contactwith the friction bar, the movingpart of the mechanics drivesforward or backwards.

With each oscillatory cycle, themechanics executes a step of afew nanometers; the macro-scopic result is smooth motionwith a virtually unlimited travelrange.


Micropositioning Systems

The ultrasonic piezoceramicdrives used in PILine® micropo-sitioners have a number of ad-vantages over classical drives:

� Higher Accelerations,up to 5 g

� Speeds up to 500 mm/s� Small Form Factor� Self-Locking When Powered


Rotating Parts� Non-Magnetic and Vacuum-

Compatible Drive Principle

Optimized Controller and

Drive Electronics

PILine® motors require a specialdrive electronics to generatethe ultrasonic oscillations forpiezoceramic element. For opti-mum performance the highlyspecialized C-867 (see p. 4-116)motion controller is recom-mended. This sophisticatedcontroller also inte-grates thedrive electronics. Furthermore,the controller has a number ofspecial features, including dy-namic parameter switching foran optimized high-speed mo-tion and settling behavior totake into account the motioncharacteristics typical ofpiezomotors. The broad-bandencoder input (50 MHz) sup-ports the outstanding high ac-celerations and velocities ofPILine® drives at high resolu-tions.

Optionally, for use with thirdparty servo controllers, theC-185 analog drive electronics(stand-alone unit) is available.It controls the motor speed byan analog ±10 V signal. For

optimum performance thedriver must be tuned togetherwith the mechanics and shouldbe ordered at the same time asthe motor/stage.

Compact, Fast, with Ultrasonic Piezo Linear Drives, Direct Position Measurement

M-663 Closed-Loop Ultrasonic Linear Motor-Driven Stage

Note


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M-663dimensions in mm

XY combination of two M-663s; CD for size comparison

An M-663 with 100 g load settles to 0.1 μm accuracy in 10 ms after a100 μm step, measured with C-867 controller/driver

A 1 mm step performed by an M-663 stage with 300 g load controlledby a C-867 controller/driver reaches the end position in less than40 ms

Technical Data

Model M-663.465 Units Tolerance

Active axes X


Travel range 19 mm

Integrated sensor Linear encoder

Sensor resolution 0.1 μm

Min. incremental motion 0.3 μm typ.

Bidirectional repatability ±0.3 μm typ.

Unidirectional repeatability 0.2 μm typ.

Pitch 300 μrad typ.

Yaw 300 μrad typ.

Max. velocity 400 mm/s

Reference switch repeatability 1 μm typ.


Max. load 5 N

Max. push/pull force 2 N

Max. holding force 2 N

Drive properties

Motor type P-661 PILine®

ultrasonic piezomotor

Motor voltage range 120 (peak-peak)*42 (RMS)* V

Electrical power 5** W nominal

Current 400** mA

Reference switch Hall-effect

Miscellaneous


Material Al (black anodized)


Mass 40 g ±5%



Recommended controller/driver C-867.161 Single-axiscontroller/driver (p. 4-116)C-185.161 Drive electronics (p. 1-36)

*Power is supplied by the drive electronics which runs on 12 V DC**For drive electronics

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M-664 Closed-Loop Ultrasonic Linear Motor-Driven StageLow-Profile High-Speed with Ultrasonic Piezo Linear Drives & Direct Position Measurement

M-664 micropositioning sys-tems are low-profile, high-accu-racy translation stages withlinear encoders. TheM-664 stage is next-larger inthe series of piezomotor-drivenstages of which the M-663 (seep. 4-28) is the smallest. For

improved guiding accuracy, theM-664 uses two crossed rollerbearings mounted on groundaluminum profiles. The inte-grated P-664 PILine® linearmotor can generate forces up to4 N and maximum closed-loopvelocities to 400 mm/s over a 25mm travel range.

Advantages of PILine® Micro-

positioning Systems

The ultrasonic piezoceramicdrives used in PILine® micro-positioners have a numberof advantages over classicaldrives:� Higher Accelerations,

up to 5 g� Speeds up to 500 mm/s� Small Form Factor� Self-Locking When Powered


Rotating Parts

� Non-Magnetic and Vacuum-Compatible Drive Principle

Optimized Controller and

Drive Electronics

PILine® motors require a spe-cial drive electronics to gener-ate the ultrasonic oscillationsfor the piezoceramic element.For optimum performance thehighly specialized C-867 mo-tion controller (see p. 4-116) isrecommended. This sophisti-cated controller also inte-grates the drive electronics.Furthermore, the controllerhas a number of special fea-tures, including dynamicparameter switching for anoptimized high-speed motionand settling behavior to takeinto account the motion char-acteristics typical of piezomo-tors. The broad-band encoderinput (50 MHz) supports theoutstanding high accelera-tions and velocities of PILine®

drives at high resolutions.

Optionally, for use with thirdparty servo controllers, theC-185 analog drive electronics(stand-alone unit, see p. 1-36)is available. It controls themotor speed by an analog±10 V signal. For optimum per-formance this driver must betuned together with the stageand should be ordered at thesame time as the motor/stage.

Notes


� Travel Range 25 mm


� Ultra-Low Profile, 15 mm

� Direct Metrology Linear Encoder with 0.1 μm Resolution

� High Guiding Accuracy with Crossed Roller Bearings

� Compact XY Combinations

� Piezo Linear Motor with 4 N Drive Force



� Biotechnology


� Microscopy


� Metrology


� R&D



M-664.164

PILine® Micro Positioning Stagewith P-664 Piezo Linear Motor,25 mm, 4 N

M-664.AP1

Adapter plate for XY-mounting ofM-664, 4 mm high

Ask about custom designs!

M-664 dimensions in mm

Fast and compact M-664 piezo translation stage with linear encoder

http://www.pi.ws

http://www.pi.ws

http://www.pi.ws

Technical Data

Model M-664.164 Tolerance

Active axes X


Travel range 25 mm

Integrated sensor Linear encoder

Sensor resolution 0.1 μm

Min. incremental motion 0.3 μm typ.

Bidirectional repeatability 0.2 μm typ.

Unidirectional repeatability 0.2 μm typ.

Pitch ±50 μrad typ.

Yaw ±50 μrad typ.

Max. velocity 400 mm/s

Reference switch repeatability 1 μm typ.


Max. load 25 N

Max. push/pull force 4 N

Max. holding force 3 N

Drive properties

Motor type P-664 PILine® ultrasonic piezo drive

Operating voltage 168 V (peak-to-peak) *60 V (RMS) *

Electrical power 10 W ** nominal

Current 800 mA **

Limit and reference switches Hall-effect

Miscellaneous


Material Al (black anodized)


Mass 0.190 kg ±5%



Recommended controller/driver C-867.164 single-axis controller/driver

C-185.164 drive electronics

*The stage supply power is drawn from the drive electronics, which runs on 12 V.**For drive electronics

PILine® Micropositioning stages: M-682, M-664 and M-663 (from left)

USA (East) & CANADA USA (West) & MEXICO

PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P.16 Albert St. 5420 Trabuco Rd., Suite 100 Auburn, MA 01501 Irvine, CA 92620Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191Fax: +1 (508) 832 0506 Fax: +1 (949) 679 [email protected] [email protected] www.pi-usa.us

JAPAN

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CHINA UK & IRELAND

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ITALY

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FRANCE

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GERMANY

Physik Instrumente (PI)GmbH & Co. KGAuf der Römerstr. 1D-76228 Karlsruhe/PalmbachTel: +49 (721) 4846-0 Fax: +49 (721) [email protected] · www.pi.ws

Program Overview

� Piezo Ceramic Actuators & Motors

� Piezo Nanopositioning Systems and Scanners

� Active Optics / Tip-Tilt Platforms

� Capacitive Nanometrology Sensors

� Piezo Electronics: Amplifiers and Controllers

� Hexapod 6-Axis Positioners / Robots

� Micropositioning Stages & Actuators

� Photonics Alignment Systems, Solutions forTelecommunications

� Motor Controllers

� Ultrasonic Linear Motors

Request or download the completePI Nanopositioning & Piezo ActuatorCatalog

[email protected]

http://www.physikinstrumente.com/en/solutions/index_E_PDF_catalog.php

mailto:[email protected]


http://www.pi-usa.us

http://www.pi-usa.us


http://www.pi-japan.jp


http://www.pi-japan.jp


http://www.pi-china.cn


http://www.physikinstrumente.co.uk


http://www.pionline.it


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