Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM...

30
Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey

Transcript of Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM...

Page 1: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Bertrand ArdouinThomas Zimmer

 XMOD Technologies:Hicum toolkit & extraction services

HICUM Workshop, September 2002, Monterey

Page 2: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

XMOD: Presentation

How to choose a compact model ?

Measurement, Extraction,

Modelling Services and Consulting

Hicum “Aperitif toolkit” Simple approach

 OUTLINE

HICUM Workshop, September 2002, Monterey

Page 3: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 Where ?

XMOD is here

Laboratoire de Microélectronique IXL

HICUM Workshop, September 2002, Monterey

Page 4: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 What ?

Co-operation and support from : � Technical University Dresden� University Bordeaux

A Start-up company in the Bipolar modelling domain :

� Offering parameter extraction software

� Provide extraction and modelling services

(parameter extraction, on wafer measurements, …)

� Hicum (SGP and VBIC models also supported)

� Single transistor and scaling approach

� Custom models for specific applications (HDL-A)

HICUM Workshop, September 2002, Monterey

Page 5: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 What ?

0

5

10

15

20

25

30

35

40

45

0.0001 0.001 0.01 0.1Ic (A)

f T (

GH

z)

meas

hicum

NWA HP 8510C (HF, CV)

HP 4155B (DC)

C-V meter HP 4284 (C-V)

T controler -60 °C up to 200 °C

0

0.001

0.002

0.003

0 1 2Vce (V)

Ic (

A)

measurehicum

Semi-automatic prober Karl Suss PA200

On wafer measurement capabilities

HICUM Workshop, September 2002, Monterey

Page 6: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 What ?

The “Hicum Aperitif Toolkit”Single transistor methodology

“In House” ICCAP tools for complete parameter extraction

HICUM Workshop, September 2002, Monterey

Page 7: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 Why ?

Efficiency: ability to model complex technologies

Simplicity:Time requirement= save money

VBIC

Gummel-PoonHicum

Mextram

HICUM Workshop, September 2002, Monterey

Page 8: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 Why ?

Efficiency: ability to model complex technologies

Simplicity:Time requirement= save money

VBIC

Gummel-PoonHicum

Mextram

Scalability not taken into account

Single transistor strategy

HICUM Workshop, September 2002, Monterey

Page 9: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

 Why ?

There’s a need for companies in this domain:

� Help to accelerate the FIRST use of Hicum and

help to establish a wide use

� Provide complete extraction services for

companies having no experience in the

bipolar domain (SiGe and III-V HBT’s)

� Provide consulting for modelling of very High

frequency devices, need of scaling, ...

Centralise Bipolar experience

HICUM Workshop, September 2002, Monterey

Page 10: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Goals of the “Hicum Aperitif Toolkit”

? HicumGummel-Poon

Switch

Learn a new model and new tools

Scaling approach can be complex

New test structures on the wafers

HICUM Workshop, September 2002, Monterey

Page 11: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Goals of the “Hicum Aperitif Toolkit”

HicumGummel-Poon

Switch

“Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like)

Decouple Scaling from parameter extraction

No specific test structures

Simplified approach

HICUM Workshop, September 2002, Monterey

Page 12: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Goals of the “Hicum Aperitif Toolkit”

“Hicum Aperitif Toolkit” allows to:

A smooth transition from SGP to Hicum

Obtain efficient and physically meaningful parameter sets for Hicum(from direct extraction)

Evaluate the model without too much effort

Parameters extracted for the single transistor approach will be required for scaling (Transit time)

HICUM Workshop, September 2002, Monterey

Page 13: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Probes

ICCAP measurements

toolkit

Instruments

Standard Bipolar

Measurement Database

Hicum “Aperitif” ToolkitICCAP

Gummel-Poon, VBIC,

MEXTRAMTRADICA and BIPAX

HICUM Workshop, September 2002, Monterey

Page 14: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

ICCAP « Hicum aperitif Toolkit »New GUI interface

HICUM Workshop, September 2002, Monterey

Page 15: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Main window

Import data

Define

Select mdm file + view header

Simply select directory

Import

HICUM Workshop, September 2002, Monterey

Page 16: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Temperature

Comments on technology

Define things

HICUM Workshop, September 2002, Monterey

Page 17: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Extract

Extraction steps

Parameter group Edit parameters

Status

RunHICUM Workshop, September 2002, Monterey

Page 18: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Export Results

Export Directory

Utilities

Create HTML documentationHICUM Workshop, September 2002, Monterey

Page 19: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

Optimize

Get from plots

Tune

HICUM Workshop, September 2002, Monterey

Page 20: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

HICUM Workshop, September 2002, Monterey

Page 21: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

HICUM Workshop, September 2002, Monterey

Page 22: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

HICUM Workshop, September 2002, Monterey

Page 23: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

HICUM Workshop, September 2002, Monterey

Page 24: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Description of the toolkit

HICUM Workshop, September 2002, Monterey

Page 25: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

0

5

10

15

20

25

30

35

40

45

0.0001 0.001 0.01 0.1Ic (A)

f T (

GH

z)

mesures

hicum

BiCMOS SiGe 0.35 µm ST Microelectronics

fT = 45 GHz

0

10

20

30

40

50

60

70

80

90

100

110

120

1.E-08 1.E-06 1.E-04 1.E-02Ic (A)

Be

ta

meas

hicum

Parameter extraction: Results

fT (Ic) (Vce)

HICUM Workshop, September 2002, Monterey

Page 26: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Parameter extraction: Results

Ic (Vce)Ic (Vbe), Ib (Vbe)

0

0.001

0.002

0.003

0 1 2Vce (V)

Ic (

A)

mesurehicum

1E-10

1E-09

1E-08

1E-07

1E-06

1E-05

0.0001

0.001

0.01

0.1

0.4 0.5 0.6 0.7 0.8 0.9 1Vbe (V)

Ic, I

b (A

)

Ic (mesure)

Ic (hicum)Ib (mesure)

Ib (hicum)

BiCMOS SiGe 0.35 µm ST Microelectronics

fT = 45 GHz

HICUM Workshop, September 2002, Monterey

Page 27: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Parameter extraction: Results

BiCMOS SiGe 0.35 µm ST Microelectronics

fT = 45 GHz

1.E-07

1.E-06

1.E-05

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

0 0.5 1 1.5 2 2.5 3VCE (V)

g 0 (

S)

Mesures Hicum

g0 = d IC / dVce

HICUM Workshop, September 2002, Monterey

Page 28: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Parameter extraction: Results

fT (Ic)

0

10

20

30

40

50

60

70

80

0.0001 0.001 0.01 0.1Ic (A)

f T (

GH

z)

mesure

hicum

BiCMOS SiGe 0.25 µm ST Microelectronics

fT = 75 GHz

HICUM Workshop, September 2002, Monterey

Page 29: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Parameter extraction: Results

BiCMOS SiGe 0.25 µm ST Microelectronics

fT = 120 GHz

0

20

40

60

80

100

120

140

1.E-04 1.E-03 1.E-02 1.E-01IC (A)

f T (

GH

z)

HICUM Workshop, September 2002, Monterey

Page 30: Bertrand Ardouin Thomas Zimmer XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, September 2002, Monterey.

Conclusion

XMOD provides Software, Consulting and

Services for Bipolar Modelling community

“Hicum Aperitif Toolkit” is ready for

evaluation

Simplified approach allows to familiarise

with the model and extend its interest

Scaling and statistics planed

HICUM Workshop, September 2002, Monterey