Benchmarking Charge Trapping Models with NBTI, TDDS...
Transcript of Benchmarking Charge Trapping Models with NBTI, TDDS...
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Benchmarking Charge Trapping Models with NBTI,
TDDS and RTN Experiments
Sharang Bhagdikar and Souvik Mahapatra*
Department of Electrical Engineering
Indian Institute of Technology Bombay
Mumbai 400076, India
*Phone: +91-222-572-0408, Email: [email protected]
Abstract-- A systematic review and comparison of
existing charge trapping models in literature is performed.
A framework for simulating hole trapping/de-trapping
kinetics is established to compute resultant threshold
voltage degradation (∆VHT) and capture-emission time constants (𝝉𝑪 − 𝝉𝑬 ). The models are analyzed by usingdata from Negative Bias Temperature Instability (NBTI),
Random Telegraph Noise (RTN) and Time Dependent
Defect Spectroscopy (TDDS) experiments.
Keywords—NBTI, RTN, TDDS.
I. INTRODUCTION Charge trapping and detrapping in MOS dielectric
contributes to NBTI, RTN, stress-induced leakage currents
(SILC) and time dependent dielectric breakdown (TDDB) [1]-
[5]. It is established that charge (hole in pFETs) trapping
constitutes the overall threshold voltage (∆𝑉𝑡ℎ ) degradationalong with the interface trap (∆𝑉𝑖𝑡 ) and bulk trap (∆𝑉𝑜𝑡 )generation. Although numerous models have been proposed in
an attempt at modelling the charge trapping time kinetics, the
exact physical mechanism governing the process stays
uncertain [6][7]. The four-state Extended Nonradiative
Multiphonon Model (eNMP) [8] is touted to provide the most
complete description of hole trapping kinetics. Capture and
emission time constants of individual defects are modelled
using eNMP [2]. However, the large number of tuning
parameters make eNMP intractable and limit its practical use.
The Two Well Nonradiative Multiphonon Model (2WNMP) is
an abstraction of the eNMP model that treats the neutral and
charged states of a trap as two energy levels represented as
intersecting parabolic potential wells [8]. The macroscopic
implementation of 2WNMP is used to model hole trapping in
pre-existing defects in large area devices [7][9], and the
stochastic implementation is used for NBTI and TDDS kinetics
in small area devices [10]. The double well thermionic (DWT)
model represents the distinct defect states as energy levels
separated by a thermionic barrier. The original model [11] is
altered in [12] by introducing a temperature activated barrier
for modelling BTI kinetics over a range of temperatures. This
Activated Barrier Double Well Thermionic (ABDWT) model
[12] is invoked to model NBTI stress-recovery transients over
a range of biases and temperatures and across different
technologies [13]. The bias and temperature couplings of
capture (C) and emission (E) time constants measured from
TDDS and RTN studies is modelled using ABDWT [14].
II. MODEL FRAMEWORK & SIMULATION SETUPFig.1 depicts a schematic of the NMP model. The neutral
(E1) and charged (E2) defect energy levels are approximated
as quadratic potential wells. Level E2 is pinned to the energy
of the reservoir which supplies the carriers i.e. either the
substrate conduction band edge (for electrons) or the valence
band edge (for holes). The point where the wells intersect
provide the barrier heights 𝜖12 and 𝜖21 for hole capture (𝑘12)and emission (𝑘21) rates respectively. The bias dependencegets accounted in the fact that upon application of a gate
voltage, level E1 undergoes an electrostatic level shift relative
to E2 (substrate) which would revise the barrier heights and,
hence, the reaction rates. The required energy for the
transition is supplied/dissipated entirely via phonons. The
expressions for the reaction rates are rigorously derived in [8]
and are listed in Fig.1.
The ABDWT model provides transition rates for charge (hole
in p-FET) capture and emission within a trap, Fig.2. A
transition from a reference neutral state (E1) to the charged
state (E2) via a thermally activated barrier (EB) constitutes the
hole capture reaction. A backward transition signals the hole
emission reaction. The barrier EB and state E2 lowers when a
gate bias (VG) is applied to account for the bias dependence on
the reaction rates [13]. The parameters for bias-dependent
barrier lowering and thermal lowering are distinct and allows
for decoupling of bias and T dependence on rate constants.
Defects are distributed uniformly spatially in the dielectric for
performing macroscopic simulations using 2WNMP.
Appropriate model parameters (mean + spread) are assigned
to be consistent with experimental data. Only the defects (E1)
that transition above or below the Fermi level upon application
of bias may take part in the capture-emission reaction and are
otherwise assumed to remain in equilibrium . The setup for the
ABDWT model is similar except that the defects are situated
at the dielectric-substrate interface owing to the fact that
spatial dependence is implicitly captured by its parameters.
For replication of defect-centric data (RTN, TDDS), an
individual defect is placed in the dielectric and assigned
unique model parameters to generate 𝑘12 and 𝑘21, which yield𝜏𝐶 and 𝜏𝐸 respectively.
III. NBTI MODELLING Fig.3-4 shows experimental VHT stress and recovery data
from Gate First HKMG planar MOSFETs [15]. The hole
trapping component VHT is isolated from the measured mean
VTH data using the macroscopic BAT framework [1], which
uses an empirical relation to compute VHT. The VHT is thus
extracted over a range of temperatures and biases using the
6-3
© 2020 The Japan Society of Applied Physics117
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BAT framework. The ABDWT model simulations are shown
to map the T activation over the entire range (Fig.5). ABDWT
is shown to accurately model VHT stress data over a range of
VGSTR (Fig.6). Appropriate parameters for 2WNMP are
selected to reproduce the stress data over the entire
temperature range in Fig.7. It is observed that when the same
parameters are used to model VHT stress data over a range of
VGSTR, 2WNMP predicts a stronger bias (VGSTR) activation and
the dataset cannot be matched (Fig.8). In Fig.9, suitable
2WNMP parameters are chosen to model the bias activation.
The same parameters predict a weaker T activation and cannot
map the entire T dataset (Fig.10). Similar analysis is carried
out for VHT extracted from RMG HKMG SOI FinFETs [16].
ABDWT is shown to model ∆𝑉𝐻𝑇 data in Figs.11-12 whereassimultaneous realization of bias and T activation cannot be
achieved using 2WNMP, Figs.13-14. Comparison of VHT
recovery curves over different VGREC (Figs.15-16) and
different stress times (Figs.17-18) is performed. It is observed
that, for concurrent stress curves, the 2WNMP model predicts
consistently slower recovery than ABDWT.
IV. RTN AND TDDS VALIDATION Fig.19(a)-(d) list the distinct types of bias couplings (types
A-D) for capture and emission time constants obtained from
RTN studies [17]. All the different VG couplings can be
reproduced by the ABDWT model upon selection of suitable
parameters. The type-A and type-B bias couplings are
reproduced by 2WNMP. The presence of a bias-dependent
pre-factor (p) in the 2WNMP capture rate expression prevents
C from being bias agnostic. In Fig.19(c), 2WNMP predicts a
weak negative coupling of C as opposed to the zero coupling
observed. A negative coupling of E, as observed in Fig.19(d),
is realized in the weak electron-phonon coupling regime [8] of
2WNMP. C in this regime is also negatively coupled with bias
and it is not possible to achieve type-D coupling using
2WNMP. The dependence of 𝜏𝐶 and 𝜏𝐸 on 𝑉𝐺 at differenttemperatures is recorded from RTN experiments in [18] and
reproduced in Fig. 20. In Fig.21, ABDWT is shown to capture
similar temperature activation trends across all 𝑉𝐺, owing tothe fact that the 𝜏𝐶 and 𝜏𝐸 are not strongly coupled and can betuned independently unlike in 2WNMP.
Fig.22 illustrates the bias dependence of 𝜏C and 𝜏E acquiredfrom TDDS measurements for a non-switching trap [2]. The
bias dependence is reproduced by ABDWT across two
different T using appropriate parameters. The time constants
for the non-switching trap are also modelled using 2WNMP.
Figs.23-24 show TDDS time constants for switching trap with
weak [2] and strong [19] bias activation of 𝜏𝐸 in thesubthreshold region respectively. 2WNMP cannot replicate
the switching behavior i.e. positive coupling of 𝜏E belowthreshold voltage.
V. CONCLUSION Macroscopic frameworks of ABDWT and 2WNMP are
used to model experimental NBTI data over a range of stress
biases, recovery biases and temperatures. The 2WNMP model
in its present form cannot predict T and VGSTR activation as
ABDWT, and is unable to model extended stress dataset.
2WNMP predicts slower VHT recovery than ABDWT.
2WNMP cannot reproduce the available capture and emission
time constant bias couplings observed in RTN experiments.
Switching trap time constants obtained using TDDS are not
modelled by 2WNMP. 𝜏𝐸 and 𝜏𝐶 exhibit weaker correlationcoming from ABDWT as compared to 2WNMP, which makes
the former more versatile in modelling defect-centric data.
REFERENCES [1] N. Parihar, N. Goel, S. Mukhopadhyay and S. Mahapatra, "BTI Analysis
Tool-Modeling of NBTI DC, AC Stress and Recovery Time Kinetics,
Nitrogen Impact, and EOL Estimation," in IEEE Trans. Electron
Devices, vol. 65, no. 2, pp. 392-403, Feb.2018. [2] T. Grasser, et al, “On the Microscopic Origin of the Frequency
Dependence of Hole Trapping in pMOSFETs”, IEDM, Dec. 2012, pp.
19.6.4. [3] A. Kerber, A. Vayshenker, D. Lipp, T. Nigam and E. Cartier, "Impact of
charge trapping on the voltage acceleration of TDDB in metal gate/high-
k n-channel MOSFETs," 2010 IEEE International Reliability Physics Symposium, Anaheim, CA, 2010, pp. 369-372.
[4] W. Goes, M. Waltl, Y. Wimmer, G. Rzepa and T. Grasser, "Advanced
modeling of charge trapping: RTN, 1/f noise, SILC, and BTI," 2014SISPAD, Yokohama, 2014, pp. 77-80.
[5] N. Tega et al., "Increasing threshold voltage variation due to random
telegraph noise in FETs as gate lengths scale to 20 nm," 2009 Symposium on VLSI Technology, Honolulu, HI, 2009, pp. 50-51.
[6] S. Mahapatra and Narendra Parihar, “A review of NBTI mechanisms
and models,” Microelectron. Reliab, Volume 81, 2018, Pages 127-135. [7] Rzepa, G. et al. “Comphy - A compact-physics framework for unified
modeling of BTI.” Microelectron. Reliab. 85 (2018): 49-65.
[8] Grasser, T.. “Stochastic charge trapping in oxides: From random telegraph noise to bias temperature instabilities.” Microelectron.
Reliab. 52 (2012): 39-70.
[9] G. Rzepa et al., "Efficient physical defect model applied to PBTI in high-κ stacks," 2017 IEEE International Reliability Physics Symposium
(IRPS), Monterey, CA, 2017, pp. XT-11.1-XT-11.6.
[10] Anandkrishnan R, et al, “A Stochastic Modeling Framework for NBTI and TDDS in Small Area p-MOSFETs”, Simulation of Semiconductor
Processes and Devices (SISPAD) , Austin TX, Sep. 2018, pp. 181.
[11] D. Ielmini, et al, "A unified model for permanent and recoverable NBTI based on hole trapping and structure relaxation," 2009 IEEE
International Reliability Physics Symposium, Montreal, QC, 2009, pp.
26-32.
[12] S. Desai, et al, "A comprehensive AC / DC NBTI model: Stress,
recovery, frequency, duty cycle and process dependence," 2013 IEEE
International Reliability Physics Symposium (IRPS), Anaheim, CA, 2013, pp. XT.2.1-XT.2.11.
[13] N. Choudhury, N. Parihar, N. Goel, A. Thirunavukkarasu and S.
Mahapatra, "A Model for Hole Trapping-Detrapping Kinetics During NBTI in p-Channel FETs: (Invited paper)," 2020 4th IEEE Electron
Devices Technology & Manufacturing Conference (EDTM), Penang,
Malaysia, 2020, pp. 1-4. [14] S. Bhagdikar and S. Mahapatra, "A Stochastic Hole Trapping-
Detrapping Framework for NBTI, TDDS and RTN," SISPAD, Udine,
Italy, 2019, pp. 1-4. [15] N. Parihar, R. Anandkrishnan, A. Chaudhary and S. Mahapatra, "A
Comparative Analysis of NBTI Variability and TDDS in GF HKMG Planar p-MOSFETs and RMG HKMG p-FinFETs," in IEEE
Transactions on Electron Devices, vol. 66, no. 8, pp. 3273-3278, Aug.
2019. [16] N. Parihar, U. Sharma, R. G. Southwick, M. Wang, J. H. Stathis and S.
Mahapatra, "Ultrafast Measurements and Physical Modeling of NBTI
Stress and Recovery in RMG FinFETs Under Diverse DC–AC Experimental Conditions," in IEEE Transactions on Electron Devices,
vol. 65, no. 1, pp. 23-30, Jan. 2018.
[17] H. Miki, et al, “Understanding short-term BTI behavior through comprehensive observation of gate-voltage dependence of RTN in
highly scaled high-κ / metal-gate pFETs”, Symposium on VLSI
Technology - Digest of Technical Papers, June 2011, pp. 149. [18] H. Miki, et al, “Voltage and temperature dependence of random
telegraph noise in highly scaled HKMG ETSOI nFETs and its impact on
logic delay uncertainty”, in Symposium on VLSI Technology (VLSIT),pp. 138, June 2012.
[19] T. Grasser et al., "Advanced characterization of oxide traps: The
dynamic time-dependent defect spectroscopy," 2013 IEEE International Reliability Physics Symposium (IRPS), Anaheim, CA, 2013, pp. 2D.2.1-
2D.2.7.
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Fig.1. Schematic of 2WNMP model depicting
potential wells of the neutral (𝑞1) and charged (𝑞2) states.
Fig.2. Schematic of ABDWT model. 𝐸1, 𝐸2 and 𝐸𝑏determine the energetic configuration of the trap.
Fig.5. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines) over a range of temperatures.
GF HKMG planar MOSFETs
Fig.6. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines) for a range of stress
biases.
Fig.10. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters of Fig.9.
2WNMP predicts weaker T activation.
Fig.8. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters of Fig.7.
2WNMP predicts stronger bias
activation.
Fig.9. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)
for a range of biases.
Fig.7. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)
over a range of temperatures.
10-7 10-5 10-3 10-1 101 1030.1
1
10
100
V
HT (
mV
)
Time (s)
VSTR = -1.2 V VSTR = -1.45 V
VSTR = -1.7 V VSTR = -1.9 V
2WNMP
10-7 10-5 10-3 10-1 101 103
0.1
1
10
100
V
HT (
mV
)
Time (s)
-40°C 0°C 25°C
65°C 100°C 125°C
2WNMP
10-7 10-5 10-3 10-1 101 1030.1
1
10
100
V
HT (
mV
)
Time (s)
VSTR = -1.2 V VSTR = -1.45 V
VSTR = -1.7 V VSTR = -1.9 V
2WNMP
10-7 10-5 10-3 10-1 101 1030.01
0.1
1
10
100
V
HT (
mV
)
Time (s)
-40°C 0°C 25°C
65°C 100°C 125°C
2WNMP
10-5
10-4
10-3
10-2
10-1
100
101
102
103
104
10-3
10-2
10-1
VGSTR
/VMEAS
= -1.45/-0.4
T=1250C
W=90nm x 70nm
VT> V
T
VHT
VIT
V
T (
V)
Time (s)
10-7 10-5 10-3 10-1 101 103
0.1
1
10
100
V
HT (
mV
)
Time (s)
-40°C 0°C 25°C
65°C 100°C 125°C
ABDWT
10-7 10-5 10-3 10-1 101 103
1
10
100 VSTR = 1.2 V VSTR = 1.45 V
VSTR = 1.7 V VSTR = 1.9 V
V
HT (
mV
)
Time (s)
T = 125°C
ABDWT
10-6
10-5
10-4
10-3
10-2
10-1
100
101
102
103
104
0.00
0.02
0.04
0.06
0.08
0.10
0.12
V
T (
V)
Time (s)
VSTR
/VMEAS
= -1.45/-0.4
tSTR
=1Ks
T=1250C
W=90nm x 70nm
VT> V
T
VHT
VIT
10-7 10-5 10-3 10-1 101 103
0.1
1
10
100
10-7 10-5 10-3 10-1 101 103
0.1
1
10
100
V
HT (
mV
)
Time (s)
-40°C 0°C 25°C
65°C 100°C 125°C
V
HT (
mV
)
Time (s)
10-7 10-5 10-3 10-1 101 103
1
10
V
HT (
mV
)
Time (s)
1.3 V 1.4 V 1.5 V 1.6 V 1.7 V
10-7 10-5 10-3 10-1 101 103
1
10
V
HT (
mV
)
Time (s)
1.3 V 1.4 V 1.5 V 1.6 V 1.7 V
10-7 10-5 10-3 10-1 101 103
0.1
1
10
10-7 10-5 10-3 10-1 101 103
0.1
1
10
V
HT (
mV
)
Time (s)
-40°C 0°C 25°C
65°C 100°C 125°C
V
HT (
mV
)
Time (s)
Fig.3. Individual (gray) and mean (black) measured
∆𝑉𝑇 traces during stress along with model calculatedmean (red) and decomposition into subcomponents.
Device is GF HKMG planar MOSFET.
Fig.4. Individual (gray) and mean (black) measured ∆𝑉𝑇traces during recovery along with model calculated
mean (red) and decomposition into subcomponents
Fig.11. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines)
over a range of temperatures.
Measurements are from RMG HKMG
SOI FinFET.
Fig.12. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines)
over a range of stress biases.
Fig.13. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)
for a range of biases.
Fig.14. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters used in
Fig.13. 2WNMP predicts much weaker T
activation.
119
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𝝉𝑒
𝝉𝒄
Fig.16. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using 2WNMP (solid
lines) for a range of recovery biases.
Fig.17. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using ABDWT (solid
lines) for a range of stress times.
Fig.18. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using 2WNMP (solid lines)
for a range of recovery biases.
-
- - - -
Fig.15. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using ABDWT (solid
lines) for a range of recovery biases..
0.88 0.96 1.04 1.120.1
1
10
tE tC
Tim
e c
onsta
nt (s
)
-Vg (V)
0.80 0.84 0.88 0.921
10
100
te tc
Tim
e c
onsta
nt (s
)
-Vg (V)0.88 0.96 1.04 1.12
0.01
1
100
te tc
Tim
e c
onsta
nt (s
)
Vg (V)0.60 0.65 0.70
1
10
te tc
Tim
e c
onsta
nt (s
)
-Vg (V)
10-7 10-5 10-3 10-1 101 103
0
10
20
30
V
HT (
mV
)
Time (s)
VREC= -0.4 V
VREC= -0.8 V
VREC= -1.2 V
2WNMP
10-7 10-5 10-3 10-1 101 103
0
10
20
30
V
HT (
mV
)
Time (s)
tSTR=100ms
tSTR=1s
tSTR=10s
tSTR=100s
2WNMP
10-7 10-5 10-3 10-1 101 103
0
10
20
30
V
HT (
mV
)
Time (s)
tSTR=100ms
tSTR=1s
tSTR=10s
tSTR=100s
VSTR = -1.45 V, VREC = 0 V
T = 125°C
ABDWT
10-7 10-5 10-3 10-1 101 103
0
10
20
30
V
HT (
mV
)
Time (s)
VREC= -0.4 V
VREC= -0.8 V
VREC= -1.2 V
VSTR = -1.45 V, tSTR = 1000s
T = 125°C
ABDWT
Fig.19(a)-(d). Panels depict various couplings of time constants to VG extracted from RTN data (symbols) [12]. (A) 𝜏𝑐 < 0, 𝜏𝑒~0, (B) 𝜏𝑐 < 0, 𝜏𝑒 > 0, (C) 𝜏𝑐~0, 𝜏𝑒~0, (D) 𝜏𝑐~0, 𝜏𝑒 <
0. All the different couplings are reproduced using ABDWT model simulations (solid lines). 2WNMP simulations (dashed lines) can model type A and type B coupling upon selection
of appropriate parameters. Zero coupling of 𝜏𝐶 with bias cannot be reproduced using 2WNMP and a negative coupling is observed in (c) and in (d) where 𝜏𝑐 is not shown (out of
bounds, 𝜏𝐶 ≫ 𝜏𝐸).
Fig.22. Modelling of TDDS capture and emission time constants (symbols) for non-
switching trap [2] using ABDWT (left) and 2WNMP (right). Switching behavior is
evident by the positive bias coupling of 𝜏𝑒 with 𝑉𝐺 .2WNMP in its present form isunable to replicate said coupling.
Fig.21. Modelling of TDDS capture and emission time constants (symbols) for
non-switching trap [2] using ABDWT (left) and 2WNMP (right). Non-switching
nature is evident by the bias agnostic 𝜏𝐸 in the subthreshold regime.
0.0 0.5 1.0 1.5 2.0 2.510-7
10-5
10-3
10-1
101
103 te 125°C
te 175°C
tc 125°C
tc 175°C
Tim
e c
on
sta
nt
(s)
-Vg (V)0.0 0.5 1.0 1.5 2.0 2.5
10-7
10-5
10-3
10-1
101
103 te 125°C
te 175°C
tc 125°C
tc 175°C
Tim
e c
on
sta
nt
(s)
-Vg (V)
0.0 0.5 1.0 1.5 2.0 2.510-7
10-5
10-3
10-1
101
103
Tim
e c
on
sta
nt
(s)
-Vg (V)
te 125°C
te 175°C
tc 125°C
tc 175°C
0.0 0.5 1.0 1.5 2.0 2.510-7
10-5
10-3
10-1
101
103
Tim
e c
on
sta
nt
(s)
-Vg (V)
te 125°C
te 175°C
tc 125°C
tc 175°C
0.5 0.6 0.710-5
10-4
10-3
10-2
10-1
100
Tim
e c
onsta
nts
(s)
VG (V)
0.45 0.50 0.55 0.60 0.65 0.7010-5
10-4
10-3
10-2
10-1
100
tc
Tim
e c
onsta
nt
(s)
Vg (V)
te
-1.0 -0.5 0.0 0.5 1.0 1.5 2.010-7
10-5
10-3
10-1
101
103
Tim
e c
on
sta
nt
(s)
-Vg (V)
te125°C
te175°C
tc125°C
tc175°C
-1.0 -0.5 0.0 0.5 1.0 1.5 2.010-7
10-5
10-3
10-1
101
103 te125°C
te175°C
tc125°C
tc175°C
Tim
e c
on
sta
nt
(s)
-Vg (V)
Fig.23. Modelling of TDDS capture and emission time constants (symbols) for
switching trap B3 [19] using ABDWT (left) and 2WNMP (right).
Fig.20. Time constants as a function of
VG at various temperatures from RTN
experiments [18].
Fig.21. ABDWT model simulated time
constants as a function of VG at various
temperatures.
rap [2] using ABDWT (left) and
2WNMP (right).
120
TitleCopyrightForewordCommitteeCOMMITTEE MEMBERSOrganization:International Steering Committee:Technical Program Committee:
TimeTableProgramAbstracts01 Plenary01-101-201-3
02 Band Structure02-102-202-302-402-502-6
03 Computational Methodology03-103-203-303-403-503-603-7
04 Nanowire04-104-204-304-404-5
05 Material and Geometry Impact05-105-205-305-405-505-6
06 Reliability06-106-206-306-406-5
07 Power and Optoelectronic Devices07-107-207-307-407-507-607-707-8
08 Non-Volatile Memory I08-108-2I. IntroductionII. Simulation MethodIII. Bias Optimization for Read-Out CurrentIV. Impact of Variation on Read-Out CurrentV. ConclusionAcknowledgmentReferences
08-308-4
09 Transport09-1INTRODUCTIONALGORITHMRESULTSCONCLUSIONS
09-209-309-409-5
10 Non-Volatile Memory II10-110-210-310-410-510-6
11 High Speed Switching Devices11-111-211-311-411-511-611-711-8
12 Emerging Devices12-112-212-312-412-512-612-7
13 2D and Nano System I13-113-213-313-413-5
14 FET Devices and Design Technology Co-Optimization14-114-214-314-414-514-614-714-8
15 Machine Learning15-115-215-315-415-515-6
16 2D and Nano System II16-116-216-316-416-515-7
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/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice
/ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False
/CreateJDFFile false /Description >>> setdistillerparams> setpagedevice