Assembly and Packaging (Part 1) - Personal webpages at...

42
1 TFE4180 Semiconductor Manufacturing Technology Assembly and Packaging (Part 1) Chapter 20 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda Saroj Kumar Patra, TFE4180 Semiconductor Technology, Norwegian University of Science and Technology ( NTNU )

Transcript of Assembly and Packaging (Part 1) - Personal webpages at...

Page 1: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

1

TFE4180 Semiconductor Manufacturing Technology

Assembly and Packaging (Part 1)Chapter 20 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda

Saroj Kumar Patra,TFE4180 Semiconductor Technology,

Norwegian University of Science and Technology ( NTNU )

Page 2: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

2

Objectives

• Describe the general trends and design constraints ofassembly and packaging.

• State and discuss the traditional assembly methods.

• Describe the different traditional packaging options.

TFE4180 Semiconductor Manufacturing Technology

Page 3: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

3

• Final assembly and packaging, the back-end of the IC manufacturing process

• Two distinct processes

TFE4180 Semiconductor Manufacturing Technology

Introduction

Page 4: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

4 Traditional Final Assembly and Packaging Process (Encapsulation)

Wafer test and sort

Wire bond

Die Separation

Plastic packaging Final packaging and test

Die Attach

TFE4180 Semiconductor Manufacturing Technology

Page 5: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

5

Four Important Functions of IC Packaging

1. Protection from environment and handling damage2. Interconnections for signals into and out of the chip3. Physical support of the chip4. Heat dissipation

TFE4180 Semiconductor Manufacturing Technology

Page 6: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

6

Quad flat pack(QFP)

Leadless chip carrier(LCC)

Plastic leaded chip carrier(PLCC)

Dual in-line package(DIP)

Thin small outline package(TSOP)

Single in-line package(SIP)

TFE4180 Semiconductor Manufacturing Technology

Page 7: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

7

Design Constraints for IC Packaging

TFE4180 Semiconductor Manufacturing Technology

Page 8: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

8

Levels of IC Packaging

Main electronics assembly board

2nd level packaging: Printed circuit board (PCB) assembly

1st level packaging: IC-packaging

Final product assembly: Final assembly of circuit boards into system

Metal leads for mounting onto printed circuit board

Pins

Pins are inserted into holes then soldered on rear of PCB.

Surface mount chips are soldered

on top of copper pads

ont the PCB.

Edge connector plugs into main system

PCB subassembly

Leads

TFE4180 Semiconductor Manufacturing Technology

Page 9: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

9

Traditional Assembly

TFE4180 Semiconductor Manufacturing Technology

Page 10: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

10

Four Steps of Traditional Assembly

• Backgrind• Die separation• Die attach• Wire bonding

TFE4180 Semiconductor Manufacturing Technology

Page 11: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

11

Backgrind

Rotating and oscillating spindle

Wafer on rotating chuck

Downforce

Table rotates only during indexing of wafers

TFE4180 Semiconductor Manufacturing Technology

Page 12: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

12

Advantages of Thinning Wafers

• Thinner wafers are easier to dice into chips• Improved thermal dissipation• Reduces thermal stresses in thin ULSI packages• Thinner chips reduce the size profile and weight of

the final IC package

TFE4180 Semiconductor Manufacturing Technology

Page 13: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

13

Wafer

Stage

Blade

Die Separation

TFE4180 Semiconductor Manufacturing Technology

Page 14: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

14

Die AttachDieLeadLead Frame

Plastic DIP

http://www.youtube.com/watch?v=syMdS02P3_w

- Selected die is attached- Automated process

TFE4180 Semiconductor Manufacturing Technology

Page 15: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

15

Different Methods of Die Attaching

• Epoxy attach• Eutectic Au-Si attach• Glass frit attach

15

TFE4180 Semiconductor Manufacturing Technology

Page 16: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

16

Epoxy Attach

Chip

Epoxy

Lead Frame

TFE4180 Semiconductor Manufacturing Technology

Page 17: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

17

Eutectic Au-Si Attach

Silicon

Gold Film

Gold/Silicon eutectic alloy

Lead Frame

TFE4180 Semiconductor Manufacturing Technology

Page 18: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

18

Glass Frit Attach

Mixture of silver and glass particles suspended in an organic medium

TFE4180 Semiconductor Manufacturing Technology

Page 19: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

19

Wire Bonding

Electrical connection from chip surface to inner lead terminal

http://www.youtube.com/watch?v=VwOEQodkBrY

TFE4180 Semiconductor Manufacturing Technology

Page 20: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

20

Wire Connection Between Bonding Pad and Lead Frame

Moulding compound

LeadframeBonding pad

Die

Bond wire

Pin Tip

TFE4180 Semiconductor Manufacturing Technology

Page 21: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

21

Different Methods of Wire Bonding

• Thermocompression bonding

• Ultrasonic bonding

• Thermosonic ball bonding

21

TFE4180 Semiconductor Manufacturing Technology

Page 22: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

22

Thermocompression Wedge Bonding

Lead-terminal

Wedge bondDevice Bond pad

Heat

Pressure

TFE4180 Semiconductor Manufacturing Technology

Page 23: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

23

Ultrasonic Bonding

Wire

Wedge tool

(1)

Tool moves upward

Wire fed

(3)

Ultrasonic energy

Pressure

Lead Frame

(4)

Tool moves upward

Wire Breaks

(5)

(2)

Al bonding pad

Ultrasonic energy

Pressure

Die

TFE4180 Semiconductor Manufacturing Technology

Page 24: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

24

Ball Bonding

(2)

H2 TorchBall

(1)

Gold WireCapillary tool

(5)

Pressure and heat

Lead Frame

(6)

Tool moves upward

Wire Breaks at the bond

Bonding ball onpad

Pressure + Ultrasonic energy

Die

(3)

Tool moves upWire Fed

Die(4)

TFE4180 Semiconductor Manufacturing Technology

Page 25: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

25

Comparison Among Methods

Al, AuAuYes100-150 oCLowBall bonding

Al, AuAu, AlYes25 oCLowUltrasonic

Al, AuAu,No300-500 oCHighThermo Compression

PadWireUltrasonic energyTemperaturePressureType

TFE4180 Semiconductor Manufacturing Technology

Page 26: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

26

Wirebond Quality Measuring

• Visual inspection

• Pull test

TFE4180 Semiconductor Manufacturing Technology

Page 27: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

27

Visual Inspection

27

Wire broken Wire missing Ball short circuit

• Used to detect wirebonding failures

TFE4180 Semiconductor Manufacturing Technology

Page 28: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

28

Pull Test

TerminalDevice

Chip under test

Hook

Holder

• Quantitative assessment of wirebond quality

TFE4180 Semiconductor Manufacturing Technology

Page 29: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

29

Traditional Packaging

• Metal packaging

• Plastic packaging

• Ceramic packaging

TFE4180 Semiconductor Manufacturing Technology

Page 30: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

30

Metal Packaging• Was common in early history of Semiconductor industry

• Still used today in special cases

Die

Gold‐plated header

Wirebonds

Leads

TFE4180 Semiconductor Manufacturing Technology

Page 31: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

31

Transistor Outline (TO) Type Metal Package

Used for packaging this type of devices:

• Semiconductor lasers, solid-state lasers with a diode pumping • Photodetectors, matrix photodetectors (CCD, FPA) • X-Ray detectors• Transistors, operational amplifiers, etc.

Voltage regulatorin TO3 package [2]

Laser diodein TO39 package [1]

TFE4180 Semiconductor Manufacturing Technology

Page 32: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

32

Plastic Packaging• Industry mainstay since its introduction• Highly popular due to:

o flexibility of the lead shape (gull-wings, J-leads, PIH) o high volume production techniques

DieLeadframe

Tie bar

Tie bar removallines

Leadframe [3]

TFE4180 Semiconductor Manufacturing Technology

Page 33: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

33

Packaging procedure• Molding • Deflashing• Component lead forming• Lead finish

TFE4180 Semiconductor Manufacturing Technology

Plastic Packaging

Page 34: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

34

Plastic Dual In-Line Package (DIP)A type of through-hole mount package with lead pins protruding from both sides of the package.

Used for packaging this type of devices:

Microcontrollers, logic elements, memory, operational amplifiers, buffers, optocouplers, timers, signal generators, etc.

DIP20 package [4] DIP6 package [5]

TFE4180 Semiconductor Manufacturing Technology

Page 35: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

35

Single In-Line Package (SIP)

A single row of leads protruding from the bottom of its body.

SIP's are often used in packaging:• networks of multiple resistors• single on chip amplifier solutions• voltage regulators

Power controller in SIP package [6]

Audio power amplifier in SIP package [7]

Resistor network in SIP package [8]

TFE4180 Semiconductor Manufacturing Technology

Page 36: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

36

TSOP with Gull Wings

• Low profile• Tight lead spacing• High pin count• Used for surface mount

TSOPs are often used in packaging memory modules (SRAM, Flash memory, FSRAM and E2PROM)

SDRAM [9] DRAM [10]

TSOP - Thin Small Outline PackageGull Wings – shape of the pins

TFE4180 Semiconductor Manufacturing Technology

Page 37: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

37

QFP with Gull Wing andSurface Mount Leads

• QFP – Quad Flat Pack

• Socketing such packages is rare and through-hole mounting is not possible.

• Used for packaging memory, processors, controllers, ASIC, DSP, etc.

80‐pin Microprocessor in TQFP package [12]

TQFP ‐ Thermally Enhancedpackage [11]

TFE4180 Semiconductor Manufacturing Technology

Page 38: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

38

PLCC with J-Leads

• PLCC - Plastic Leaded Chip Carrier

• Used for surface mount

• Used for packaging memory, processors, controllers, ASIC, DSP

EEPROM from ALTERA [13]

PAL from TIin 28 pin package [14]

TFE4180 Semiconductor Manufacturing Technology

Page 39: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

39

Leadless Chip Carrier (LCC)

LCC from Tektronics [15]

• Used for packaging CMOS image sensors, MEMS,crystal oscillator filters, antenna switch modules

• Available in plastic and ceramic packaging

TFE4180 Semiconductor Manufacturing Technology

Page 40: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

40 Ceramic PackagingUsed for the state of the art devices that require:• maximum reliability • high-power• hermetic seal

Two main methods of ceramic packaging: • Refractory ceramic (used for high performance IC packaging)• Laminated ceramic (low cost approach used to create CerDIP package)

CPGA [16]

OpAmp from AD in CerDIP package for use in harsh environment [17]

TFE4180 Semiconductor Manufacturing Technology

Page 41: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

41

g{tÇ~ lÉâ

TFE4180 Semiconductor Manufacturing Technology

Page 42: Assembly and Packaging (Part 1) - Personal webpages at …folk.ntnu.no/jonathrg/fag/TFE4180/slides/Ch20 Assembly and... · TFE4180 Semiconductor Manufacturing Technology Assembly

42

42

References[1] http://www.thorlabs.com/images/large/21973‐lrg.jpg[2] http://media.digikey.com/photos/Texas%20Instr%20Photos/296‐TO‐3‐8.jpg[3] http://www.ue.com.hk/index.php/SOIC_%28Small_Outline_Integrated_Circuit_Packages%29[4] http://www.chinaicmart.com/uploadfile/ic‐doc/261‐20‐DIP.jpg[5] http://media.digikey.com/photos/Fairchild%20Semi%20Photos/46‐6‐DIP%20WHITE.jpg[6] http://www.infineon.com/cms/en/corporate/press/news/releases/2009/INFXX200906‐063.html[7] http://sjostromaudio.com/pages/hifi‐projects/36‐hifi‐projects/82‐qrp01‐the‐gainclone‐high‐performance‐power‐

amplifier?showall=1[8] http://www.emartee.com/product/41417/Resistor%20Network%2010K%20OHM%209P%208RES%20SIP[9] http://rocky.digikey.com/weblib/Micron/Web%20photos/557‐86‐TSOP.jpg[10] http://s.eeweb.com/resized/images/remote/http_s.eeweb.com/quizzes/2011/02/22/dram‐tsop‐

1298440075_500_327.png[11] http://www.analog.com/en/technical‐library/packages/qfp‐quad‐flat‐pack/tqfp‐thermally‐enhanced/index.html[12] http://en.wikipedia.org/wiki/File:PIC18F8720.jpg[13] http://ca.digikey.com/1/1/1042179‐ic‐max‐7000‐cpld‐64‐68‐plcc‐epm7064lc68‐15.html[14] http://media.digikey.com/photos/Texas%20Instr%20Photos/296‐28‐PLCC.jpg[15] http://component‐solutions.tek.com/services/ic‐packaging/packaging‐tech/#leadless‐chip‐carrier[16] http://www.interfacebus.com/ic‐package‐Ceramic‐PGA‐package‐dimensions.html[17] http://www.analog.com/en/technical‐library/packages/dip‐dual‐inline‐package/cerdip‐side‐or‐bottom‐

brazed/index.html

TFE4180 Semiconductor Manufacturing Technology