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Record of Letter Ballot Review by TC Chapter for Procedural Review

Region/Locale: North AmericaGlobal Technical Committee: MetricsTC Chapter Cochairs: David L. Bouldin/Fab Consulting, Mark Frankfurth/ASML-CymerStandards staff: Michael Tran

Scheduled in Background Statement ActualDate 04/01/2015 04/01/2015Location SEMI Headquarters SEMI Headquarters

I. Document Number and Title

Document Number 5750

Document TitleRevision to Add a New Subordinate Standard: Specification for Product Time Measurement for Material Control Systems to SEMI E168-1114, Specification for Product Time Measurement

II. Tally (Standards staff to fill in)

Voting Tally: As-cast tally after close of voting periodA minimum of 60% of the Voting Interests that have TC Members within the global technical committee that issued the Letter Ballot must return Votes. (Regulations ¶ 9.7.1.1)

Voting Tally (with example values):

III. Rejects

There were no reject votes received for document 5750

IV. Other Technical Issues

There were no other technical issues for document 5750

V. Comments

V- (i) Voters’ CommentsCommenter 1 (Christian Hoffman/Peer Group) - Comment 1

Com

ment

*TF/TC Chapter to fill in, if necessary.

paragraph 9.4.2.5.1. announces 5 context variable but actually it lists 7 context variables, which is worth an editorial adjustment.

[TF input: TF agrees that five context variables is incorrect, but that there are actually eight listed, with there being two in the seventh bullet.]

Action

The TC Chapter agreed to do one of the following actions. *No motion is required in this step.

Already addressed by Commenter #, Comment #No further action was taken by the TC Chapter.Refer to the TF for more consideration. New Business

X Editorial Change

Options for

EditorialChange (check one)

Case 1: No vote in this section :To be included and voted on in § VI. Summary of Editorial Changes.Case 2: Voted in this section :Original section number and at least one full sentence are required in “FROM” and “TO” fields.

Editorial Change

1

FROM: Section/Paragraph 9.4.2.5.1

9.4.2.5.1 Because the FICS-MCS interface is not standard, the context data population will depend on the specific MCS implementation. There are five context variables that are considered here: • CarrierID – The identifier of the carrier that holds the product unit(s). This is likely to

appear in most MCS messages. • JobID – The identifier of the carrier job that is currently associated with the carrier • CarrierLocationID – The identifier of the current location of the carrier. This should

consist of two parts: the identifier of the production equipment, stocker, or transport vehicle concatenated with the identifier of the specific location within that equipment, stocker, or vehicle.

• SourceLocationID - The location of the carrier at the start of the command • DestinationLocationID - The intended new location for the carrier as specified in the

command • VehicleID – The identifier of the vehicle currently being used in the carrier job. In some

cases, the VehicleID is the same as the CarrierLocationID associated with the vehicle. • LotID and/or SubstrateID – The identifier of the product unit or group of product units

being transported. The identification of the product unit(s) is typically not available within the MCS or is not populated in the messages.

TO: Section/Paragraph 9.4.2.5.1

9.4.2.5.1 Because the FICS-MCS interface is not standard, the context data population will depend on the specific MCS implementation. There are five eight context variables that are considered here: • CarrierID – The identifier of the carrier that holds the product unit(s). This is likely to appear in most MCS messages. • JobID – The identifier of the carrier job that is currently associated with the carrier • CarrierLocationID – The identifier of the current location of the carrier. This should consist of two parts: the identifier of the production equipment, stocker, or transport vehicle concatenated with the identifier of the specific location within that equipment, stocker, or vehicle. • SourceLocationID - The location of the carrier at the start of the command • DestinationLocationID - The intended new location for the carrier as specified in the command • VehicleID – The identifier of the vehicle currently being used in the carrier job. In some cases, the VehicleID is the same as the CarrierLocationID associated with the vehicle. • LotID and/or SubstrateID – The identifier of the product unit or group of product units being transported. The identification of the product unit(s) is typically not available within the MCS or is not populated in the messages.

Justification (If necessary)Correct the number of context variables. There are actually eight listed and not five.

Motion To approve above editorial change(s)Motion by/2nd by Supika Mashiro (Tokyo Electron) / Vladimir Kraz (BestESD Technical Services)

Discussion None.

Vote 4-0, Motion passed

Commenter 1 (Christian Hoffman/Peer Group) - Comment 2

Co *TF/TC Chapter to fill in, if necessary.

mm

ent

In paragraph 9.4.2.5.1. there the CarrierLocationID is specified as a concatenation without describing how to concatenate or how to delimit the two part concatenated. This adds ambiguity and shall be eliminated (note, the same is now in SEMi E90, where the carrier substrate location is defined as a concatenation or carrierID and slot number. There is a zoo of implementations for this concatenation, which is not desirable for a standards specification like this.

[TF input: Recommend no change for now, but may be item for future improvement. Note that E90 also has this similar problem, where this issue also needs to be addressed.]

Action


Already addressed by Commenter #, Comment #No further action was taken by the TC Chapter.

X Refer to the TF for more consideration. New BusinessEditorial Change

Commenter 2 (David Bouldin/Fab Consulting) - Comments 1 and 8

Com

ment

*TF/TC Chapter to fill in, if necessary.

Comment 1: 3.4: Should “material handling system” be replaced with “semiconductor AMHS” as it is used in 1.1 for consistency of terminology?

[TF input: No, change should not be done.]

Comment 8: RQ-00031 both bullets: Change the bullet symbol to the solid dot one used for 1st level bullets per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).

[TF input: This Comment duplicates exactly of the content of Comment 7, which will be handled in § VI.]

Action


Already addressed by Commenter #, Comment #X No further action was taken by the TC Chapter.

Refer to the TF for more consideration. New BusinessEditorial Change

Commenter 2 (David Bouldin/Fab Consulting) - Comments 2 to 7 and 9 to 23

C *TF/TC Chapter to fill in, if necessary.

omm

ent

Comments 2 to 7

Comment 24.3 footnote 2: The “http://” should also be shown underlined and in blue as the rest of the URL.

Comment 3RQ-00004: Insert a comma after “e.g.”. Change comma at end of second sentence to a period.

Comment 48.2.4: Change “material control systems” to “MCSs” to use the acronym (in plural form) defined in 5.2.1/5.3.5 and first used in 1.1.

Comment 5RQ-00015: Insert “an” before “MCS” for improved grammar.

Comment 69.4.2.5.1 4th and 5th bullets: Change the dash to an en dash for consistency with the rest of the bullets in this list.

Comment 7RQ-00031 both bullets: Change the bullet symbol to the solid dot one used for 1st level bullets per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).

Comments 9 to 23

Comment 9RQ-00032 both bullets: Change the bullet symbol to the solid dot one used for 1st level bullets per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).

Comment 10RQ-00040 2nd and 5th bullets: Change the hanging indent (to make the second line align with the first) per SM 1-10(4). Also, move “[/RQ]” to end of 5th bullet for consistency with how other RQs are done (e.g., RQ-00031).

Comment 11Comment row/line following RQ-00050: This Note should be flush left (i.e., not indented). Also, please con-firm that it is 9 pt font size per SM 1-12(1) as it appears to be 10 pt.

Comment 12R1-3/R1-4: There is a misnumbering of the section number where there are two sets of R1-3 and R1-4 (the second set follows the first one where the numbers should have continued on as R1-5, R1-6, etc.

Comment 13R1-3.1, Table R1-1: This table appears to extend too far left to just into the heavy black ballot border unlike other earlier tables where the right-hand border is still visible. May need to either shift it left to left margin and/or narrow it.


Comment 152nd R1-3.1, Table R1-3: This table appears to extend too far left to just into the heavy black ballot border un-like other earlier tables where the right-hand border is still visible. May need to either shift it left to left mar-gin and/or narrow it.

Comment 162nd R1-4.1, Table R1-4: This table appears to extend too far left to just past the heavy black ballot border. May need to either shift it left to left margin and/or narrow it. Note that part of the text in row 11 is covered up by the black ballot border.




Comment 20R1-7.4, Table R1-8: This table appears to extend too far left to just past into the heavy black ballot border un-like other earlier tables where the right-hand border is still visible. May need to either shift it left to left mar-gin and/or narrow it. Also, row - appears to extend well into the black border as compared to the other rows.

Comment 21R1-7.4, Table R1-8, row -: The “N/A” is not defined, but needs to be. Note that in RQ-90002, NA is defined as “not applicable”, but this is as a compliance code, which does not seem to be the case here.

Comment 22R2-3.1 2nd sentence: Change “use” to “used” for correct grammar. Also, the “or for context data” seems re-dundant to “are used for context data” at the end of the sentence so one or the other should be deleted.

Comment 23Fig. R3-1: The term “ZFS” is undefined. I noted in the background statement for the 1/28/15 changes that “ZFS” was supposed to have been changed to “storage buffer” throughout, but it appears that this was missed in this figure. The best correction is to update the figure to the standard terminology used through-out, which I believe can be done editorially since this is an RI and you documented this as an intended change in the background statement. Otherwise, if ZFS is left in the figure, a Note should be added (can be done editorially since this is an RI) to explain what ZFS means and that it is the same as ““storage buffer” used throughout the rest of the Document.

Action


Already addressed by Commenter #, Comment #No further action was taken by the TC Chapter.Refer to the TF for more consideration. New Business

X Editorial ChangeOptions

for X Case 1: No vote in this section :

To be included and voted on in § VI. Summary of Editorial Changes.

EditorialChange (check

Case 2: Voted in this section :

Original section number and at least one full sentence are required in “FROM” and “TO” fields.

V-(ii) Comments Created by Handling NegativeThere were no comments created to handle negatives as there were no negatives.

VI. Editorial Changes Other than Those Dealt with in Section V. Note: Original section/paragraph number and at least one full sentence are required in “FROM” and “TO” fields.

1

FROM: Section/Paragraph 4.2 footnote 2(Bouldin Comment 2: 4.2 footnote 2: The “http://” should also be shown underlined and in blue as the rest of the URL.)

1 Internet Society (ISOC), 1775 Wiehle Avenue, Suite 201, Reston, VA 20190, USA, http://www.internetsociety.org

TO: Section/Paragraph 4.2 footnote 2

1 Internet Society (ISOC), 1775 Wiehle Avenue, Suite 201, Reston, VA 20190, USA, http:// www.internetsociety.org

Justification: (If necessary) Entire URL needs to be underlined (see examples in Style Manual (SM) 1-18).

2

FROM: Section/Paragraph 8.2.1, Table 1, RQ-0004 (Bouldin Comment 3: RQ-00004: Insert a comma after “e.g.”. Change comma at end of second sentence to a period.)

Affirmative response from the MCS to accept a job request/command. This event is used only to provide context (e.g. JobID),

TO: Section/Paragraph 8.2.1, Table 1, RQ-0004

Affirmative response from the MCS to accept a job request/command. This event is used only to provide context (e.g., JobID).Justification: (If necessary) Correct punctuation.

3 FROM: Section/Paragraph 8.2.4(Bouldin Comment 4: 8.2.4: Change “material control systems” to “MCSs” to use the acronym (in plural form) defined in 5.2.1/5.3.5 and first used in 1.1.)

8.2.4 Note that if the factory utilizes multiple material control systems, a carrier might be transferred by multiple such systems during its factory cycle time. When employing the PTM method, it may be necessary to include communication logs from multiple FICS-MCS interfaces to ensure that all time elements during the selected time period for a given carrier are included in the output.

TO: Section/Paragraph 8.2.48.2.4 Note that if the factory utilizes multiple material control systems MCSs, a carrier might be transferred by multiple such systems during its factory cycle time. When employing the PTM method, it may be necessary to include communication logs from multiple FICS-MCS interfaces to ensure that all time elements during the selected time period for a given carrier are included in the output.

Justification: (If necessary) Use the acronym because it was previously defined in the document.

4

FROM: Section/Paragraph 9.4.1 RQ-00015(Bouldin Comment 5: RQ-00015: Insert “an” before “MCS” for improved grammar.)

[E168.ss-RQ-00015-00] In order to support PTM for MCS, the data specified in Table 2 shall be provided. [/RQ]

TO: Section/Paragraph 9.4.1 RQ-00015

[E168.ss-RQ-00015-00] In order to support PTM for an MCS, the data specified in Table 2 shall be provided. [/RQ]

Justification: (If necessary) Improved grammar and clarity.

5

FROM: Section/Paragraph 9.4.2.5.1 4th and 5th bullets(Bouldin Comment 6: 9.4.2.5.1 4th and 5th bullets: Change the dash to an en dash for consistency with the rest of the bullets in this list.)

9.4.2.5.1 Key context data variables include the following:… • CarrierLocationID – The identifier of the current location of the carrier. This should consist of two

parts: the identifier of the production equipment, stocker, or transport vehicle concatenated with the identifier of the specific location within that equipment, stocker, or vehicle.

• SourceLocationID - The location of the carrier at the start of the command • DestinationLocationID - The intended new location for the carrier as specified in the command • VehicleID – The identifier of the transport vehicle associated with the command. In some cases,

the VehicleID is the same as the CarrierLocationID associated with the vehicle.…TO: Section/Paragraph 9.4.2.5.1 4th and 5th bullets

9.4.2.5.1 Key context data variables include the following:… • CarrierLocationID – The identifier of the current location of the carrier. This should consist of two

parts: the identifier of the production equipment, stocker, or transport vehicle concatenated with the identifier of the specific location within that equipment, stocker, or vehicle.

• SourceLocationID – The location of the carrier at the start of the command • DestinationLocationID – The intended new location for the carrier as specified in the command • VehicleID – The identifier of the transport vehicle associated with the command. In some cases,

the VehicleID is the same as the CarrierLocationID associated with the vehicle.…Justification: (If necessary) Use en dash for consistency with the rest of the bullets in this list.

6

FROM: Section/Paragraph 9.5.2.1 RQ-00031 both bullets(Bouldin Comment 7: RQ-00031 both bullets: Change the bullet symbol to the solid dot one used for 1st level bullets per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).)

[E168.ss-RQ-00031-00] The Level 3 time elements that are subcategories of Wait Time are: o Wait for System o Wait for Factory Personnel [/RQ]

TO: Section/Paragraph 9.5.2.1 RQ-00031 both bullets

[E168.ss-RQ-00031-00] The Level 3 time elements that are subcategories of Wait Time are: o• Wait for System o• Wait for Factory Personnel [/RQ]

Justification: (If necessary) Comply per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).

7

FROM: Section/Paragraph 9.5.2.1 RQ-00032 both bullets(Bouldin Comment 9: RQ-00031 both bullets: Change the bullet symbol to the solid dot one used for 1st level bullets per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).)

[E168.ss-RQ-00032-00] The Level 3 time elements that are subcategories of Active Time are: o Active Time for MCS o Active Time for Production Equipment [/RQ]

TO: Section/Paragraph 9.5.2.1 RQ-00032 both bullets

[E168.ss-RQ-00032-00] The Level 3 time elements that are subcategories of Active Time are: o• Active Time for MCS o• Active Time for Production Equipment [/RQ]

Justification: (If necessary) Comply per SM 1-10(3) and for consistency with how other RQs are done (e.g., RQ-00040).

8FROM: Section/Paragraph 9.5.4.2.2 RQ-00040 2nd and 5th bullets(Bouldin Comment 10: RQ-00040 2nd and 5th bullets: Change the hanging indent (to make the second line align with the first) per SM 1-10(4). Also, move “[/RQ]” to end of 5th bullet for consistency with how other RQs are done (e.g., RQ-00031).)

[E168.ss-RQ-00040-00] Carrier locations visible within the FICS-MCS communication logs shall be categorized into carrier location types. All carrier locations corresponding to the carrier location types listed in this requirement shall be categorized according to those carrier location types.• Storage – a storage location is located within a stocker or storage buffer• Production Equipment – the carrier location that is associated with the transfer port for a production equipment in the factory. This is typically an equipment load port. • Vehicle – a carrier location on a vehicle within a transport system. This location is not fixed within the factory.• Manual Input Port – a port on a stocker where factory personnel can place a carrier for input into the AMHS.• Manual Output Port – a port on a stocker where factory personnel can pick up a carrier that is output from the AMHS. [/RQ]

TO: Section/Paragraph 9.5.4.2.2 RQ-00040 2nd and 5th bullets

[E168.ss-RQ-00040-00] Carrier locations visible within the FICS-MCS communication logs shall be categorized into carrier location types. All carrier locations corresponding to the carrier location types listed in this requirement shall be categorized according to those carrier location types.• Storage – a storage location is located within a stocker or storage buffer• Production Equipment – the carrier location that is associated with the transfer port for a production equipment in the factory. This is typically an equipment load port. • Vehicle – a carrier location on a vehicle within a transport system. This location is not fixed within the factory.• Manual Input Port – a port on a stocker where factory personnel can place a carrier for input into the AMHS.• Manual Output Port – a port on a stocker where factory personnel can pick up a carrier that is output from the AMHS. [/RQ]

Justification: (If necessary) Correct spacing per SM 1-10(4). Also, move “[/RQ]” to end of 5th bullet for consistency with how other RQs are done (e.g., RQ-00031)

7

FROM: Section/Paragraph 9.5.5.5 3rd bullet(Bouldin Comment 9: 9.5.5.5 3rd bullet: Delete the extra space before “The”.)

9.5.5.5 The third column contains the definition of each time element. This includes:…• The identifier of each event that will start this time element• The identifier of each event that will end this time element

TO: Section/Paragraph 9.5.5.5 3rd bullet

9.5.5.5 The third column contains the definition of each time element. This includes:…• The identifier of each event that will start this time element• The identifier of each event that will end this time element

Justification: (If necessary) Comply with SM 1-10(3) and for consistency of alignment and spacing.

8

FROM: Section/Paragraph 9.5.5.7, Table 7, Comment row/line following RQ-00046(Bouldin Comment 10: Comment row/line following RQ-00046: Remove the italics for consistency with a similar comment line/row in Table 2. Note a similar row/line in 5750 after RQ-00044 is not italicized.)

The last four end events for Wait for Job Cleanup indicate the continued transfer of the carrier on another vehicle. It may mean the continuation of the current transfer command or the start of a queued transfer command that has begun before the previous one has completed. See also § 7.1.8.

TO: Section/Paragraph 9.5.5.7, Table 7, Comment row/line following RQ-00046

The last four end events for Wait for Job Cleanup indicate the continued transfer of the carrier on another vehicle. It may mean the continuation of the current transfer command or the start of a queued transfer command that has begun before the previous one has completed. See also § 7.1.8.

Justification: (If necessary) For consistency with a similar comment line/row in Table 2. Note a similar row/line in balloted Draft Document 5750 after RQ-00044 is not italicized.

9

FROM: Section/Paragraph 9.5.5.7, Table 8, Comment row/line following RQ-00050(Bouldin Comment 11: Comment row/line following RQ-00050: This Note should be flush left (i.e., not indented). Also, please confirm that it is 9 pt font size per SM 1-12(1) as it appears to be 10 pt.)

NOTE 4: See Related Information 1, Table R1-8 for an example that illustrates the reason for the special case for the CarrierJob-Storage event above.

TO: Section/Paragraph 9.5.5.7, Table 8, Comment row/line following RQ-00050

NOTE 4: See Related Information 1, Table R1-8 for an example that illustrates the reason for the special case for the CarrierJob-Storage event above.

Justification: (If necessary) Use standard flush left Note alignment. Verify font size is 9 pt.

10

FROM: Section/Paragraph R1-3 and R1-4 (both sets)(Bouldin Comment 12: R1-3/R1-4: There is a misnumbering of the section number where there are two sets of R1-3 and R1-4 (the second set follows the first one where the numbers should have continued on as R1-5, R1-6, etc.)

R1-3 MCS Example 1 – Stocker-to-Production Equipment

R1-4 MCS Example 2 – Production Equipment-to-Stocker

R1-3 MCS Example 3 – Carrier Manual Output and Return

R1-4 MCS Example 4 – Carrier Manual Input To Location Outside The Stocker

TO: Section/Paragraph R1-3 and R1-4 (both sets)

R1-3 MCS Example 1 – Stocker-to-Production Equipment

R1-4 MCS Example 2 – Production Equipment-to-Stocker

R1-35 MCS Example 3 – Carrier Manual Output and Return

R1-46 MCS Example 4 – Carrier Manual Input To Location Outside The StockerJustification: (If necessary) Correct the numbering.

11

FROM: Section/Paragraph R1-3.1, Table R1-1(Bouldin Comment 13: R1-3.1, Table R1-1: This table appears to extend too far left to just into the heavy black ballot border unlike other earlier tables where the right-hand border is still visible. May need to either shift it left to left margin and/or narrow it.)

TO: Section/Paragraph R1-3.1, Table R1-1

Justification: (If necessary) Comply with SM 3-1(2).

12




13

FROM: Section/Paragraph 2nd R1-3.1, Table R1-3(Bouldin Comment 15: 2nd R1-3.1, Table R1-3: This table appears to extend too far left to just into the heavy black ballot border unlike other earlier tables where the right-hand border is still visible. May need to either shift it left to left margin and/or narrow it.)

TO: Section/Paragraph 2nd R1-3.1, Table R1-3


14

FROM: Section/Paragraph 2nd R1-4.1, Table R1-4(Bouldin Comment 16: 2nd R1-4.1, Table R1-4: This table appears to extend too far left to just past the heavy black ballot border. May need to either shift it left to left margin and/or narrow it. Note that part of the text in row 11 is covered up by the black ballot border.)

TO: Section/Paragraph 2nd R1-4.1, Table R1-4


15




16




17 FROM: Section/Paragraph R1-7.2, Table R1-7(Bouldin Comment 19: R1-7.2, Table R1-7: This table appears to extend too far left to just into the heavy black ballot border unlike other earlier tables where the right-hand border is still visible. May need to either shift it left to left margin and/or narrow it.)



18

FROM: Section/Paragraph R1-7.4, Table R1-8(Bouldin Comment 20: R1-7.4, Table R1-8: This table appears to extend too far left to just past into the heavy black ballot border unlike other earlier tables where the right-hand border is still visible. May need to either shift it left to left margin and/or narrow it. Also, row - appears to extend well into the black border as compared to the other rows.)



19

FROM: Section/Paragraph R1-7.4, Table R1-8, row -(Bouldin Comment 21: R1-7.4, Table R1-8, row -: The “N/A” is not defined, but needs to be. Note that in RQ-90002, NA is defined as “not applicable”, but this is as a compliance code, which does not seem to be the case here.)

Wait Time at Storage LocationN/A TO: Section/Paragraph R1-7.4, Table R1-8, row -

Wait Time at Storage LocationN/ANot Applicable

Justification: (If necessary) Correct undefined abbreviation.

20

FROM: Section/Paragraph R2-3.1 2nd sentence(Bouldin Comment 22: R2-3.1 2nd sentence: Change “use” to “used” for correct grammar. Also, the “or for context data” seems redundant to “are used for context data” at the end of the sentence so one or the other should be deleted.)

R2-3.1 The two carrier job events used in the Level 4 time elements are CarrierJob-Executing and CarrierJob-Aborted. Four others are use as carrier reroute indicator events or for context data: CarrierJob-Rerouted, CarrierJob-Aborted, CarrierJob-Request, and CarrierJob-Accepted are used for context data. Other carrier job states may be reported (see ¶ 7.1.4.2). Such events may vary from one MCS implementation to another.

TO: Section/Paragraph R2-3.1 2nd sentence

R2-3.1 The two carrier job events used in the Level 4 time elements are CarrierJob-Executing and CarrierJob-Aborted. Four others are used as carrier reroute indicator events or for context data: CarrierJob-Rerouted, CarrierJob-Aborted, CarrierJob-Request, and CarrierJob-Accepted are used for context data. Other carrier job states may be reported (see ¶ 7.1.4.2). Such events may vary from one MCS implementation to another.

Justification: (If necessary) Correct grammar and reword to eliminate redundancy and improve clarity.

21

FROM: Section/Paragraph Fig. R3-1(Bouldin Comment 23: Fig. R3-1: The term “ZFS” is undefined. I noted in the background statement for the 1/28/15 changes that “ZFS” was supposed to have been changed to “storage buffer” throughout, but it appears that this was missed in this figure. The best correction is to update the figure to the standard terminology used throughout, which I believe can be done editorially since this is an RI and you documented this as an intended change in the background statement. Otherwise, if ZFS is left in the figure, a Note should be added (can be done editorially since this is an RI) to explain what ZFS means and that it is the same as ““storage buffer” used throughout the rest of the Document.)

AtZFS

TO: Section/Paragraph Fig. R3-1

AtZFSAtStorageBuffer

Justification: (If necessary) The term “ZFS” is undefined. It was noted in the background statement for the 1/28/15 changes that “ZFS” was supposed to have been changed to “storage buffer” throughout, but it appears that this was missed in this figure.

Motion To approve the above editorial change(s).Motion by/2nd by Supika Mashiro (Tokyo Electron) / Vladimir Kraz (BestESD Technical Services)

Discussion None.Vote 4-0, Motion passed

VII. Approval Conditions Check

VII-(i). Approval RateAPPROVAL CONDITION 1: All Negatives have been discussed and were withdrawn, found not related, found not persuasive, or addressed by a Technical Change. (Regulations ¶ 9.7.1.2)APPROVAL CONDITION 2: At least 90% of the sum of valid Voting Interest Accept and Voting Interest Reject Votes must be Accept. (Regulations ¶ 9.7.1.3)

Note: If both approval conditions are not satisfied, the Document fails.

VII-(ii). Approval Level (check one)See § 9.7.2 of the Regulations for further information

The Letter Ballot meets the Letter Ballot Approval Conditions for the global technical committee.

The Letter Ballot meets the Letter Ballot Approval Conditions for the TC Chapter and a Ratification Ballot will be issued to verify Technical Changes.

VIII. Safety CheckThis Safety check applies to the entire Standard or Safety Guideline. See § 15 of the Regulations for further information.

Motion:

X This is not a Safety Document, when all safety-related information is removed, the Document is still technically sound and complete. (Regulations ¶ 8.7.1)This is a Safety Document, when all safety-related information is removed, the Document is not technically sound and complete. (Regulations ¶ 8.7.2)

Safety Checklist (Regulations ¶ 15.3) is complete and has been included with the Document throughout the balloting process. (Regulations ¶¶ 15.1.2)

Motion by/2nd by David Busing (Consultant) / Vladimir Kraz (BestESD Technical Services)Discussion None.

Vote 4-0, Motion passed

IX. Intellectual Property (IP) CheckNote: This IP check applies to the entire Standard or Safety Guideline. See § 16 of the Regulations for further information.

X The TC Chapter meeting chair asked those participating, if they were aware of any potentially material patented technology or copyrighted items* in the Standard or Guideline. (Regulations ¶ 8.8.1)

No potentially material patented technology or reproduction of copyrighted items are known. GO TO SECTION X

Potentially material patented technology or reproduction of copyrighted items are known, but a Letter of Assurance (LOA) or copyright release letter for such items has been obtained or presented to the TC Chapter.

GO TO SECTION X

XPotentially material patented technology or reproduction of copyrighted items are known and use of such materials is technically justified by the TC Chapter, but an LOA or copyright release letter for some of the item(s) has NOT been obtained or presented to the TC Chapter.

MO

TION

Ask ISC for special permission to publish.

Quit activity.

X Wait for LOA for patented technology or release of copyrighted items.

Motion by/2nd by Supika Mashiro (Tokyo Electron) / David Busing (Consultant)

Discussion None.

Vote 4-0

Final ActionX Motion Passed

Motion Failed* Note: Such potentially material patented technology or copyrighted items might have become known since the Standard or Safety Guideline was last reviewed, or might become relevant due to this Letter Ballot.

X. Action for This Document

Motion

This Document passed TC Chapter review as balloted and will be forwarded to the A&R SC for procedural review.

X This Document passed TC Chapter review with editorial changes and will be forwarded to the A&R SC for procedural review.This Document passed TC Chapter review with Technical Changes and with or without editorial changes and will be forwarded to the A&R SC for procedural review. A Ratification Ballot will be issued to verify the Technical Changes.This Document failed TC Chapter review and will be returned to the TF for rework.This Document failed TC Chapter review and work will be discontinued.

Motion by/2nd by David Busing (Consultant) / Vladimir Kraz (BestESD Technical Services)Discussion None.

Vote 4-0

Final Action X Motion passedMotion failed

Standards staff to record the result of the A&R procedural review here:

A&RResult

Approved for publicationApproved pending for acceptance of the Ratification BallotNot approved

Reason:

A&R Template 4.4 - SEMIdownloads.semi.org/.../$FILE/5750ProceduralReview.docx · Web viewRevision...

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