Applied Materials Advanced Manufacturing Solutions for · PDF fileApplied Materials Advanced...

Applied Materials External Use

Applied Materials

Advanced Manufacturing Solutions

for Pharma

— From the Semiconductor Fab to the Pharma Plant

IFPAC PR 2016

Amos Dor

Automation Products Group

June 2016


Imagine a toolbox that can help achieve the following…

2

50% Less Inventory Lower capital

cost

60%

Process Cost Savings

$13M

Yield Increase

30%

Process Capability

40% Up

Unscheduled Down Time Reduction

25 hrs

False Alarm

Reduction

90%

Less waste

90%

60% Less manpower

Rework Rate Reduction

(From 3% to 0.8%)

What toolbox is this?

Applied Materials External Use 3

Agenda

Who We Are?

Why go from Semiconductor to Pharma?

What we can offer to Pharma?

How Pharma will benefit from our solutions?

From the Semiconductor Fab to the Biopharmaceutical Plant


Who We Are Applied Materials - Applied Global Services - Automation Products Group

The main provider of automation software to the semiconductor industry

Successful in ensuring quality attributes, improving manufacturing efficiency and reducing cost

Leverage semiconductor automation best practices to help transform pharma


Comprehensive Factory Automation Capabilities

5

Material Controls

Factory Execution Factory Productivity

Planning and Simulation

Process Understanding& Control

Equipment Controls

WORK IN PROCESS, WORKFLOW, EXPERIMENTS,

RECIPE

CAPACITY, MATERIAL STARTS, LAYOUTS,

MULTI-FACTORY

AUTOMATED MATERIAL HANDLING

(INTRA FACTORY & CROSS FACTPRY)

PREVENTATIVE MAINTENANCE, EQUIPMENT AUTOMATION

DATA COLLECTION, BIG DATA, STATISTICAL

PROCESS CONTROL, ADVANCED

PROCESS CONTROL

DISPATCHING, SCHEDULING, REPORTING,

SENSEDECIDERESPONDTM

, Prediction


Automation Products Group (APG a group under AGS)

—Engineering Center

—Service & Support Center

—Dual

—Employees Distributed

Profile • Result of 2 Acquisitions

o Consilium 1998

o Brooks Software 2007

• 400+ Employees Worldwide

• Organized into Service and Engineering Centers


Semiconductor Wafer Processing

Epitaxy

CD SEM Metrology

Manufacture

Wafer

RTP CMP

Ion Implantation

Assembly, Test

Mask Etch

Wafer Cleaning Defect

Inspection & Review

Mask Defect Detection

Deposition

Etching

Manufacturing Automation Software

Fab & Equipment Services

Lithography Technologies

Process M&I

7


Applied Materials Display Products

8

CURRENT PRODUCT PORTFOLIO NEW PRODUCT RELEASE

PVD

EBT

Applications

Array (a-Si, LTPS, MOx)

Thin-film encapsulation

Roll-to-Roll Coating

PECVD

Applications

Array Test

Applications

Array (a-Si, LTPS, MOx)

Color Filter

Touch

Applications

Film Touch

Packaging

Currency

Barriers

OCTOBER 2015

PECVD for Thin Film

Encapsulation

AKT 20K TFE PECVD

AND

AKT 40K TFE PECVD


Why Go from Semiconductor to Pharma?

9

What pressure/goals do both industries have in common?

• Meet quality requirements

• Improve manufacturing efficiency

• Reduce costs…

Enabler: - A high degree of automation, advanced control and optimization in semiconductor!

Measure Semiconductor Pharma

Overall Equipment Effectiveness High (80-90%) Low (10-60%)

First pass yield- zero defects /process capability High (6 to 5 ) Low (2 to 3 )

Production lead time (days) Less (5-10?) More (120-180)

FG Inventory (days) Less (5-50) More (60-90)

Direct/indirect labor ratio Low High


Pharmaceutical OPEX and Quality Initiatives

6 Sigma Lean Mfg RFT QbD/PAT Continued process

verification Continuous mfg

10

Costs Efficiency &

Effectiveness Quality &

Compliance

Improve capability, reduce defects… Reduce waste, lower inventory, increase equipment utilization… Assure quality … Improve mfg efficiency..


What We Can Offer to Pharma Integrated solutions to support cost reduction, efficiency and quality assurance in pharma

E3 Pharma APF Pharma Xsite Pharma

Desired Quality & Compliance, Efficiency and Cost

Support 6 Sigma, Lean, QbD, PAT, RTRt, CPV/CQV and smart manufacturing

Equipment Performance

Tracking (EPT)

Fault Detection and

Classification (FDS)

Run-to-run control (R2R)

Statistical Process Control(SPC)

Activity Manager

Real-time Dispatcher/Reporter

Fusion

AutoSched

SmartSched

CMMS

Preventive and predictive

equipment maintenance

Audit and Compliance

Seamless integration with process control system, data historian, MES and ERP, 30 years of experience

Process Scheduling Maintenance

Advanced Platform for

real-time process

analytics and control

Suite for real-time

production planning,

scheduling and

dispatching

System for real-time

equipment maintenance

management


E3 (Enterprise, Equipment& Engineering) Pharma

E3 Pharma™− Integrated automation

modules (Real Time) to maintain

BioPharma operations in a state of control

(Continued Process Verification)

E3 Pharma™ enables plant-wide process

data collection for real-time process

monitoring, control and quality assurance

E3 Pharma™ is designed to enable

advanced control strategy without coding

E3 ™ modules currently operate in 70% of the semiconductor factories world wide

12

Differentiators


CMMS is part of the pharma plant heartbeat

Xsite Pharma - A Complete CMMS Solution

13

Xsite Pharma Maintenance Management

System

Equipment State

Technician Certification

System

Technician Tracking & Scheduling

Spare Parts Inventory

E3

MES WIP

Processing

Enterprise Wide

Reporting

Mobile App

Equipment Cost

Tracking

Predictive Maintenance

Use equipment-centric data to develop optimum maintenance schedules Improve asset availability and performance

Differentiators


APF (Advanced Productivity Family) Pharma

The APF suite provides integrated modules to improve plant productivity

Implementing continuous

productivity improvements

Analyzing, testing, and executing

dispatching and scheduling policies

Automating and optimizing complex

scheduling

Reclaiming hidden capacity within

plants

Debottlenecking

14

Plant Level Data

Plant Planning

Dispatching

Enterprise

Resource

Planning

(ERP)

SAP,

Oracle, etc. Scheduling

Master Planning

Enterprise level

Plant level

Automated & optimal

Execution

Differentiators


E3™ GUI Based Strategy Engine

Completely defined through GUI configuration without coding or scripting, allows process

engineers to easily customize and modify models

15

• Event-Condition-Action is simply the execution of a linear series of items

Data into Action

Event Logic Commands

(Action) Analysis

(Data)


Lactate Accumulation Control Strategy- Glucose Control in E3™

Easily Configured Feedback Control “drag and

drop”

16

Applied Materials External Use 17 APPLIED GLOBAL SERVICES

Increasing Product Yield & Quality

Data Growth & Integration

Data Collection

SPC

Advanced Process Control

Recipe Mgmt

Fault Detection

High Speed Data

Trend Discovery

Big Data

Integrated Data & Rules

Prediction

Chamber Matching

Applied Materials External Use 18 APPLIED GLOBAL SERVICES

Increasing Output / Reducing Cycle Time

Master Planning

Prediction

Expert Analysis

Reporting

Layout Planning

Material Controls WIP Tracking

Capacity Planning

Data Collection

Dispatching

Automated Resolution

Short Interval Scheduling

Optimization

Data / Rule Orchestration

ＤＰＳポリ廃棄ウェハ推移

0

10

20

30

40

50

60

70

80

90

100

04.４

月

04.５

月

04.６

月

04.７

月

04.８

月

04.９

月

04.１

０月

04.１

１月

04.１

２月

05.１

月

05.２

月

05.３

月

05.４

月

05.５

月

05.６

月

05.７

月

05.８

月

05.９

月

05.１

０月

05.１

１月

05.１

２月

06.１

月

06.２

月

06.３

月

06.４

月

06.５

月

廃棄

枚数

全台

＃４０９Ｂｃｈ

＃４０９Ａｃｈ

＃４０８Ｂｃｈ

＃４０８Ａｃｈ

＃４０７Ｂｃｈ

＃４０７Ａｃｈ

＃４０６Ｂｃｈ

＃４０６Ａｃｈ

＃４０４Ｂｃｈ

＃４０４Ａｃｈ

＃４０３Ｂｃｈ

＃４０３Ａｃｈ

＃４０２Ｂｃｈ

＃４０２Ａｃｈ

＃４０１Ｂｃｈ

＃４０１Ａｃｈ

＃３０８Ｂｃｈ

＃３０８Ａｃｈ

＃３０７Ｂｃｈ

＃３０７Ａｃｈ

＃３０３Ｂｃｈ

＃３０３Ａｃｈ

目標＜10枚/月以下　　　　：12月度

（BM：74.3枚/月・05Ｑ１）

eDSA start

8/4/2005EPD optimize

8/25 /2005add Stab Step

11/3 /2005ESC exchange

In the middle of December

DPS Poly scrap wafer trend GOAL< 10wafers/Month

Scr

ap w

afer

Tool-1

Tool-1

Tool-2

Tool-2

Tool-3

Tool-3

Tool-4

Tool-4

Tool-5

Tool-5

Tool-6

Tool-6

Tool-7

Tool-7

Tool-8

Tool-8

Tool-9

Tool-9

Tool-10

Toll-10

Tool-11

Tool-11

11/１６ /2005Preset optimize

ＤＰＳポリ廃棄ウェハ推移

0

10

20

30

40

50

60

70

80

90

100

04.４

月

04.５

月

04.６

月

04.７

月

04.８

月

04.９

月

04.１

０月

04.１

１月

04.１

２月

05.１

月

05.２

月

05.３

月

05.４

月

05.５

月

05.６

月

05.７

月

05.８

月

05.９

月

05.１

０月

05.１

１月

05.１

２月

06.１

月

06.２

月

06.３

月

06.４

月

06.５

月

廃棄

枚数

全台

＃４０９Ｂｃｈ

＃４０９Ａｃｈ

＃４０８Ｂｃｈ

＃４０８Ａｃｈ

＃４０７Ｂｃｈ

＃４０７Ａｃｈ

＃４０６Ｂｃｈ

＃４０６Ａｃｈ

＃４０４Ｂｃｈ

＃４０４Ａｃｈ

＃４０３Ｂｃｈ

＃４０３Ａｃｈ

＃４０２Ｂｃｈ

＃４０２Ａｃｈ

＃４０１Ｂｃｈ

＃４０１Ａｃｈ

＃３０８Ｂｃｈ

＃３０８Ａｃｈ

＃３０７Ｂｃｈ

＃３０７Ａｃｈ

＃３０３Ｂｃｈ

＃３０３Ａｃｈ

目標＜10枚/月以下　　　　：12月度

（BM：74.3枚/月・05Ｑ１）

eDSA start

8/4/2005EPD optimize

8/25 /2005add Stab Step

11/3 /2005ESC exchange

In the middle of December

DPS Poly scrap wafer trend GOAL< 10wafers/Month

Scr

ap w

afer

Tool-1

Tool-1

Tool-2

Tool-2

Tool-3

Tool-3

Tool-4

Tool-4

Tool-5

Tool-5

Tool-6

Tool-6

Tool-7

Tool-7

Tool-8

Tool-8

Tool-9

Tool-9

Tool-10

Toll-10

Tool-11

Tool-11

11/１６ /2005Preset optimize

Data Growth & Integration


APF Pharma

E3 Pharma

Equipment

A Total Solution to Productivity Improvement and Quality Assurance

ERP CRM

SCM Asset Mgmt

Planning

Manufacturing

Event Automation

Equip Variance

Factory Workflow

Recipe Mgmt

Eng. Data Collection

Experiment Mgmt

Operator Client

WIP Mgmt

Equip Strategies

Durables Mgmt

Data Mining

Statistical Proc. Ctrl.

Run to Run Fault

Detection Eq. Perf. Tracking

Eq/Sensor Interfaces

ERP CRM

SCM Asset Mgmt

Planning

Manufacturing

Manufacturing

Equipment

Recipe Mgmt

Planning & Scheduling

Advanced Reporting

Dispatching

Capacity Planning

Factory Simulation

Integrated Simulation

Material Control

PAT/Sensors Tracking

Equip

Xsite Pharma Maintenance Management

MES

SCADA/PLC Process

Equipment

Analytical Equipment

LIMS

Data Historian

Third-party


Solutions

Work flows

Unit monitoring - SPC, UVA, MVA

Close Loop Control - APC, R2R

Virtual metrology

Soft sensors

Real time Scheduling

Planning

Maintenance management

Predictive maintenance


Glossary of Terms

22

E3 – Enterprise Equipment Engineering

PAT – Process Analytical Technology

QbD – Quality by Design

CPV- Continued Process Validation

PLC – Programmable Logic Controller

SCADA – Supervisory Control And Data Acquisition

MVA- Multivariate Analysis

SPC – Statistical Process Control

APC – Advanced Process Control

Suite - Collection of E3 Applications

Core – Common infrastructure for data access, logging, security, message routing, load balancing etc.

EPT – PCS Compliant Equipment Performance Tracking Engine

Controller – Handles start up/shut down and system diagnostics

Studio –All E3 user interface applications

Designer Studio – E3 strategy editor

Dashboard – User configurable data viewer

Collector – Equipment integration software drivers

Adapter – Application integration component

R2R – PCS Compliant Run 2 Run Engine

FD – PCS Compliant Fault Detection Engine

E3 SPC – E3 SPC module including SAWS and statistical engine

Applied Materials Advanced Manufacturing Solutions for · PDF fileApplied Materials Advanced...

Documents

Transcript of Applied Materials Advanced Manufacturing Solutions for · PDF fileApplied Materials Advanced...