“Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect...

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Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus “Non-traditional methods of material properties and defect parameters measurement Juozas Vaitkus on behalf of a few Vilnius groups Vilnius University, Lithuania

Transcript of “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect...

Page 1: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

“Non-traditional methods of material properties and defect parameters

measurement

Juozas Vaitkus on behalf of a few Vilnius groups

Vilnius University, Lithuania

Page 2: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Outline:• Definition of aims• Photoconductivity kinetics• Free carrier diffusion and capture process

measurement • Photo-Hall and magnetoresistance• Photo-ionization spectroscopy

Page 3: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

A few general words:

• Profile of our group “self-formed” 40 years ago as: “measurement of properties of high resistivity and wide bandgap materials”.

• These materials have many different type of local levels and, usually, different non-uniformities.

• Therefore it was developed or modified a few of methods for exclusion or activation of a definite level or non-uniformity.

• The modification of methods was oriented on:– Exclusion of an origins of nonlinearities;– Avoiding an influence of contacts;– Creation of scenario that allows to understand the process.

Page 4: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Free carrier kinetics

Page 5: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Direct measurement of trapping and recombination:photoconductivity decay (short pulse excitation)

1 23

4

EC

EV

EM

ER

1 τM=1/γnM(M-m)2 τN=1/γnMΝCM

ΘI = 1/[γnMΝCM + γnM(M-m)]ΘII = 1/[γnMΝCM]

3 τR=1/γnR(R-r)4 τP=1/γpR r

( ) ⎟⎟⎠

⎞⎜⎜⎝

+−

+= 20

01nN

mM

CMRasymp ττ

Measurement of this dependence:

E.Gaubas talk!

Page 6: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Limitations and possibilities

• Excitation pulse duration: ~10 ps, ~10 ns and longer pulses or mosulated dc light.

• Generation of carriers – direct band-band or extrinsic (via deep levels or from/to deep level)

• Problems appears in high quality samples due to influence of the recombination at the surface (if the diffusion is significant)

Page 7: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Transient gratings

• Free carriers change the refractive index of semiconductor, therefore if the excitation is by the light interference pattern, then semiconductor become as a periodical grating.

• The incident or probe beam pulse will diffract in it.

Page 8: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Transient gratings - contactless, non-destructive semiconductor

homogeneity controlparameters (D, S, τ and etc.) measurement method

Iλ sampleI-1

I

Λ I+1

I0

Also allows to indicate the internal electric field related to impurities if the optical symmetry allows the effect.

Page 9: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Page 10: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Two step excitation spectroscopy: generation of carriers via deep centers

0 50 100 150 200 250 300

10-5

10-4

10-3

10-2

10-1

Ι0 = 0.7 mJ/cm2

-p 17 (irradiated) -p 17 Reference

Ι0 = 0.7 mJ/cm2

-p 17 (irradiated) -p 17 Reference

Diff

. Eff

icie

ncy

a. u

.

Temperature, K

SiG.G.Macfarlane et al, J.Phys.Chem.Solids8,(1959) 388-392.

Identification if the centre is localized or Hydrogen-type

Page 11: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Free carrier lifetime (trapping time and diffusion) measurement by transient grating method

Iλ sampleI-1

I

Λ I+1

I0

DRG

⋅Λ⋅

+= 2

2411 πττ

Page 12: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

0 500 1000 1500

10-2

10-1

100

0 500 1000 1500Delay (ps)

Λ = 4.0 µmτ

G = 1900 ps

Λ = 4.4 µmτ

G = 740 ps

Λ = 4.9 µmτ

G = 480 ps

Λ = 5.8 µmτ

G = 400 ps

Λ = 9.5 µmτ

G = 300 ps

Iexcitation = 5 mJ/cm2

Diff

ract

ion

effic

ienc

y (a

. u.)

Delay (ps)

Λ = 4.0 µmτ

G = 1310 ps

Λ = 4.4 µmτ

G = 640 ps

Λ = 4.9 µmτ

G = 440 ps

Λ = 5.8 µmτ

G = 370 ps

Λ = 9.5 µmτ

G = 300 ps

Si (CE2419) Si (CH2259)Iexcitation = 5 mJ/cm2

Page 13: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Page 14: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

200 400 600 800 1000 1200

0,1

1

200 400 600 800 1000 1200

0,1

1

CE 2419, ( phi_p [cm-2] 1.06 x 1014), τR > 15 ns

CE 2437, ( phi_p [cm-2] 1.84 x 1014), τR > 15 ns

CE 2458, ( phi_p [cm-2] 4.25 x 1014), τR = 11 ns

Delay time (ps)

Diff

ract

ion

effic

ienc

y. (a

. u.)

Delay time (ps)

CE 2459, ( phi_p [cm-2] 6.36 x 1014), τR = 9 ns CH 2259, ( phi_p [cm-2] 9.80 x 1014), τR = 6 ns

CH 2253, ( phi_p [cm-2] 6.36 x 1014), τR = 7 ns

CH 2237, ( phi_p [cm-2] 4.25 x 1014), τR = 9 ns

CH 2219, ( phi_p [cm-2] 1.84 x 1014), τR > 15 ns

CH 2210, ( phi_p [cm-2] 1.06 x 1014), τR > 15 ns

I0 = 0.2 mJ/cm2, grating period Λ = 60 µm (decay time ~ recombination (trapping) time)

Page 15: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

200 300 400 500 600 700

0,01

0,1

1

200 300 400 500 600 700 800 900 1000 1100 1200

1E-3

0,01

0,1

1

CE 2419,( phi_p [cm-2] 1.06 x 1014),τG = 370 ps, D = 17.6 cm2/s

CE 2437,( phi_p [cm-2] 1.84 x 1014),τG = 395 ps, D = 16.5 cm2/s

CE 2458,( phi_p [cm-2] 4.25 x 1014),τG = 390 ps, D = 16.3 cm2/s

Delay time (ps)

Diff

ract

ion

effic

ienc

y. (a

. u.)

Delay time (ps)

CE 2459,( phi_p [cm-2] 6.36 x 1014),τG = 390 ps, D = 16.2 cm2/s

I0 = 0.12 mJ/cm2 I0 = 0.25 mJ/cm2

CE 2419,( phi_p [cm-2] 1.06 x 1014),τ

G = 450 ps, D = 14.4 cm2/s

CE 2437,( phi_p [cm-2] 1.84 x 1014),τG = 455 ps, D = 14.2 cm2/s

CE 2458,( phi_p [cm-2] 4.25 x 1014),τG = 445 ps, D = 14.2 cm2/s

CE 2459,( phi_p [cm-2] 6.36 x 1014),τG = 440 ps, D = 14.2 cm2/s

200 300 400 500 600 700 800

1E-3

0,01

0,1

1

100 200 300 400 500 600 700 800 900 1000 1100 1200 1300

1E-3

0,01

0,1

1

I0 = 0.12 mJ/cm2

Delay time (ps)

Diff

ract

ion

effic

ienc

y. (a

. u.)

Delay time (ps)

I0 = 0.25 mJ/cm2

CH 2259,( phi_p [cm-2] 9.80 x 1014),τG = 380 ps, D = 16.2 cm2/s

CH 2253,( phi_p [cm-2] 6.36 x 1014),τG = 360 ps, D = 17.4 cm2/s

CH 2237,( phi_p [cm-2] 4.25 x 1014),τG = 385 ps, D = 16.4 cm2/s

CH 2219,( phi_p [cm-2] 1.84 x 1014),τG = 400 ps, D = 16.2 cm2/s

CH 2210,( phi_p [cm-2] 1.06 x 1014),τG = 400 ps, D = 16.3 cm2/s

CH 2259,( phi_p [cm-2] 9.80 x 1014),τG = 440 ps, D = 13.9 cm2/s

CH 2253,( phi_p [cm-2] 6.36 x 1014),τG = 430 ps, D = 14.4 cm2/s

CH 2237,( phi_p [cm-2] 4.25 x 1014),τG = 445 ps, D = 14.1 cm2/s

CH 2219,( phi_p [cm-2] 1.84 x 1014),τG = 470 ps, D = 13.7 cm2/s

CH 2210,( phi_p [cm-2] 1.06 x 1014),τG = 460 ps, D = 14.1 cm2/s

Grating period Λ = 5 µm (diffusion influence).

Page 16: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

1 2 3 4 5 60

1

2

3

1/τ G

(ps-1

)

1/Λ (µm-2)

Si (CE2419) D = 13.6 cm2/s (∆D = 0.1 cm2/s) τR > 30 ns

Si (CH2259) D = 12.5 cm2/s (∆D = 0.1 cm2/s) τR = 5.7 ns (∆τR = 0.3 ns)

Iexcitation = 5 mJ/cm2

Excitation Si (CE2419) Si (CE2459) Si (CH2259) (mJ/cm2) 1.06 1014cm-2 6.36 1014cm-2 9.80 1014cm-2

0.7 D (cm2/s) 16 (± 0.1) 15.7 (± 0.1) 17.2 (± 0.1)

τR (ns) > 30 >30 20 (± 2)

5.0 D (cm2/s) 13.6 (± 0.1) 13.1 (± 0.1) 12.5 (± 0.3)

τR (ns) > 30 > 30 5.7 (± 0.3)

Page 17: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Photo-Hall effect• An influence of impurities on free

carrier mobility.• The indications of scattering on

impurities, clusters and etc.:– According the scattering

coefficient value– According the different

dependence on temperature

I

t

Digital processing:High input impedance, small capacitance !

BMagnetic field up to 2 T

Intense laser pulse

Page 18: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

( ) x

iiii

iiiii

H BEttne

tAtnetE

∑∑ −

=)()(

)()()1( 2

µ

µ

( ) ( )[ ] wEBrBtEEwtU HHHH ⋅∆=−=∆ µ0

1. Basic relationships:

(3)(5)

(6)

(1)

(2)

(4)

Transient Photo-Hall and photo-magnetoresistance effects

2

2

><><

=ττ m

Hr

2)()( BTt MB

B µρρ

=∆

4

223

><><−>><<

=m

mmmMT

ττττ

eff

m

me ><

=τµ

( ) ( ) ( )tNtvStH

βµµ

+=0

11∑ ><>=<

i imm ττ11

Matthiessen’s rule

(7) (8)

Page 19: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Transient Photo-Hall and photo-magnetoresistance effects

2. Practical considerations:

( ) ( ) ( )tNtvStH

βµµ

+=0

11

( ) ( )

10

0000 1111

⎟⎟⎠

⎞⎜⎜⎝

⎛∆±

+=⎟⎟⎠

⎞⎜⎜⎝

⎛−∆=−=∆

H

H

H UU

vUwBE

tvSNNSSN

βµµβ ( )1

01−

⎟⎟⎠

⎞⎜⎜⎝

⎛∆

+=H

H

UUtY

( ) ( )[ ] ( )tYconsttNtS ⋅=∆ (12)

(9)(10) (11)

(8)

Further analyze depends on the model and a number of re-chargeable centers

23

.. ~ Tiionµ

( ) 12/1*2−

⎥⎦⎤

⎢⎣⎡= SkTmNe ss

µ

1. ~ −Tbarrµ

Page 20: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Page 21: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Photo-Hall effect

• If the sample has micro/nano non-uniformities, then the signal is more complex dependent on parameters.

(That should be in a case of change of conductivity type)

• It changes an effective active volume therefore changes the effective Hall-mobility (a lot of models, quite complicated expressions)

Page 22: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Photo-ionization spectrumMeasurement of photoconductivity (possible effect also: quenching of

photoconductivity, if additional excitation is used), photo-voltage, short circuit current.

Possible regime of constant signal: varying of excitation. It excludes different non-linearities.

Determination of defect optical ionization energy.

Page 23: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Si photoconductivity spectrumSample from Hamburg:

Example of data from literature:

0,8 1,0 1,2 1,4 1,6 1,810-9

10-8

10-7

10-6

I (A

)

ε (eV)

Si CH22374,25e+14pT=79K

2006.06.24

Page 24: “Non-traditional methods of material properties and defect ...€¦ · Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Workshop on Defect Analysis in Radiation Damaged Silicon Detectors, Hamburg, 23./24. August 2006 J. Vaitkus

Conclusions:

1. It exists additional (time consuming)methods for carrier capture processes and defect parameters measurement.2. It is most important to have the samples, that are interesting for supplier.

Thank You for Your attention!