Analytical Resolution vs. Detection - EAG Laboratories€¦ · ensure quality and safety,...
Transcript of Analytical Resolution vs. Detection - EAG Laboratories€¦ · ensure quality and safety,...
Dynamic SIMS
TOF-SIMS
TXRF
STEM/EELS
STEM/EDS
Chemical bonding/molecular information
Elemental information
Imaging information
Thickness and density information only(no composition information)
Physical properties
Copyright ©2016 EAG, Inc. M-006916
Auger SEM/EDS
LA-ICPMS
Raman XPS/ESCA
FTIRXRF RBS
XRD
XRR
GD
MS
ICP
te
chn
iqu
es
IGA
ICT
GA
/DTA
/DS
C
NM
R
GP
C
RTXSEM
TEM/STEM
FIB
AFM
EBIC
OP
Imaging Techniques
Physical limit for 0.3nm Sampling Depth
Physical limit for 3nm Sampling Depth
Physical limit for 30nm Sampling Depth
BulkTechniques
Analytical Spot Size
Det
ectio
n R
ange
Atom
s/cm
3
5E22
1E22
1E21
1E20
1E19
1E18
1E17
1E16
1E15
1E14
1E13
1E12
100 at%
10 at%
1 at%
0.1 at%
100 ppm
10 ppm
1 ppm
100 ppb
10 ppb
1 ppb
100 ppt
10 ppt
0.1 nm 1 nm 10 nm 100 nm 1 µm 10 µm 100 µm 1 mm 1 cm
EAG Laboratories is a global scientific services company serving clients across a vast array of technology-related industries. Through multi-disciplinary expertise in the materials, engineering and life sciences, EAG helps companies innovate and improve products, ensure quality and safety, strengthen supply chains, protect intellectual property and comply with evolving global regulations.
EAG.COM
Analytical Resolutionvs. DetectionLimit
GC
-MS
, LC
-MS
Typical Analysis Depths for Techniques +1 800.366.3867EAG.COM