All-Metal Control Valve - KVIkremers/AECR2/web-content/manuals equipment/… · 2 BP 805 281 BE...

Operating Instructions

BP 805 281 BE (0203) 1

All-Metal Control ValveThermomechanically and manually actuated

UDV 146

2 BP 805 281 BE (0203) UDV 146.oi

In all communications with Pfeiffer Vacuum, please specify the information on theproduct nameplate. For convenient reference copy that information into the spaceprovided below.

Typ: No: F-No:

Pfeiffer Vacuum, D-35614 Asslar

This document applies to products with part number PFI52034.

The part number (No) can be taken from the nameplate.

We reserve the right to make technical change without prior notice.

All dimensions in mm.

The UDV 146 All-Metal Control Valve is used (in conjunction with a controller) foradmitting a precise and reproducible gas flow into a vacuum system and is suited,for example, for

• gas and surface analysis

• mass spectrometry

• nuclear physics, accelerators

• cathode sputtering

• vacuum and laser technology

• handling of very pure gases

Product Identification

Validity

Intended Use

BP 805 281 BE (0203) UDV 146.oi 3

Contents

Product Identification 2Validity 2Intended Use 2

1 Safety 41.1 Symbols Used 41.2 Personnel Qualifications 41.3 General Safety Instructions 41.4 Liability and Warranty 4

2 Technical Data 5

3 Installation 63.1 Capillary for Precisely Routing the Gas Flow 73.2 Installation in the Vacuum System 73.3 Electrical Connection 8

4 Operation 94.1 Manual Gas Flow Setting 94.2 Thermomechanical Regulation 104.3 Operation at Low Gas Flows 114.4 Compensation of Temperature Variations 114.5 Bakeout 11

5 Deinstallation 125.1 Electrical Connection 125.2 Vacuum Connection 12

6 Maintenance 146.1 Disassembling the Valve Mechanism 146.2 Cleaning the Valve Mechanism 176.3 Replacing the Cup Springs 176.4 Adjusting the Prestress of the Cup Springs 186.5 Assembling the Valve Mechanism 18

7 Troubleshooting 217.1 Valve Does Not Regulate 217.2 Valve Is Not Tight 217.3 Adjusting the Tightness at the Valve Seat 227.4 Adjusting the Lever 257.5 Disassembling the Sealing Elements of the Valve Seat 287.6 Checking and Cleaning the Valve Body and the Sealing Elements of the Valve

Seat 307.7 Assembling the Sealing Elements of the Valve Seat 32

8 Accessories 34

9 Spare Parts 35

10 Returning the Product 36

11 Disposal 36

Declaration of Contamination 37

For cross-references within this document, the symbol (→ XY) is used, for cross-

references to further documents the symbol (→ [Z]).

4 BP 805 281 BE (0203) UDV 146.oi

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions orminor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons whohave suitable technical training and the necessary experience or who have beeninstructed by the end-user of the product.

• Adhere to the applicable regulations and take the necessary precautions for theprocess media used.

Consider possible reactions between the materials (→ 5) and the processmedia.

Consider possible reactions of the process media due to the heat generated bythe product.

• Use protective gloves for actuating the valve at operating temperatures >55 °C(→ 9).

• Adhere to the applicable regulations and take the necessary precautions for allwork you are going to do and consider the safety instructions in this document

(→ 14, 21).

• Before beginning to work, find out whether any vacuum components are con-taminated. Adhere to the relevant regulations and take the necessary precau-tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if theend-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories, options, and add-ons not listed in the corre-sponding product documentation.

1.1 Symbols Used

1.2 Personnel Qualifications

1.3 General Safety

Instructions

1.4 Liability and Warranty

BP 805 281 BE (0203) UDV 146.oi 5

2 Technical Data

Actuation manualthermomechanical

1)

ConnectionsVacuum side

Inlet side

DN 40 CF-FM5 (capillary)DN 16 CF-R

Mounting orientation any

Tightness of closed valve <10-11

mbar l/s

Pressure range <10-10

mbar … 30 bar (absolute)

Smallest adjustable gas flowAirPure gases

<10-9

mbar l/s<10

-10 mbar l/s

<10-9

mbar l/s 1)

Highest adjustable gas flow 2)

600 mbar l/s

Conductance of open valve 2)

0.7 l/s, molecular flow

TemperatureOperation

With standard cableWith heat-resistantextension cable

BakeoutStorage

≤80 °C

≤200 °C≤350 °C

3)

5 … 45 °C

MaterialHousing, diaphragmValve plateValve seat

stainless steelsapphirecopper alloy

Thermomechanical regulationConnection

VoltageCurrentHeating resistance

socket, 2 pins(W.W. Fischer)0 … 20 VDC≤0.5 A

≈30 ΩWeight 1.4 kg

1)e.g. with RVG 050 C Controller

2)at an inlet pressure of 1 bar

3)cable removed

32.5

85.5

M5

50

DN 40 CF-F

ø46

98.2

DN 16 CF-R

Recommended

flow direction

Power connection

Protective lid

Valve seat side

Dimensions

6 BP 805 281 BE (0203) UDV 146.oi

3 Installation

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures toensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases thedesorption rate.

Always wear clean, lint-free gloves and use clean tools when workingin this area.

RVG 050 CController

DN 16 CF-F

Shut-off valve

Gas s

upply

Accessory

Flange withtube

Accessory

Accessory

Cap

illary

Supplied by end-user

Heating jacket(accessory)

ø1

8

Supplied by end-user

Overview

BP 805 281 BE (0203) UDV 146.oi 7

M5

M5

ø2×0.5

1000

Do not turn the

knurled nut.

• Remove the protective lids and install the valve to the vacuum system.

• Ensure good accessibility of the knurled nut.

Do not turn the

knurled nut.

ø18

Keep the

protective lid.

Gasket (accessory)

Gasket (accessory)

Screws, M4×20 1)

(accessories)

Screws, M6×35 2)

(accessories)

DN 16 CF-F

DN 40 CF-F

Keep the

protective lid.

1)required torque 4 Nm, thread lubricated

2)required torque 10 Nm, thread lubricated

Recommended flow direction

3.1 Capillary for Precisely

Routing the Gas Flow

3.2 Installation in the

Vacuum System

8 BP 805 281 BE (0203) UDV 146.oi

0.50.7A0

set point

valve current

fusepower on

reset time

5

10

3 30 s

20

15

limit

5

0 20 V

15

10

proportional gain

10 100

10001

20 50

2005

2 500

Cable for controller(accessory)

Shut-off valve(supplied by end-user)

RVG 050 CController

Socket

RVG 050 C Controller → BG 805 282 BE.

Further technical data → 5.

3.3 Electrical Connection

BP 805 281 BE (0203) UDV 146.oi 9

4 Operation

°C

DANGER

Caution: hot surface

Touching the hot surface can cause burns.

Wear protective gloves.

55 °C

°C

200 °C

Open the valve by making 3 counter clockwise turns of the knurled nut.

3 turns

Locked

Set the desired gas flow with the knurled nut.

Locked

This setting serves as basic adjustment for the thermomechanicalregulation.

4.1 Manual Gas Flow

Setting

10 BP 805 281 BE (0203) UDV 146.oi

The UDV 146 has a thermomechanical controller. The valve stem is equipped witha bifilar heating coil and is heated according to the heater voltage applied. Theresulting deformation in extension is added to the set basic adjustment of the valve

(→ 9) and thus reduces the conductance value accordingly.

In conjunction with a controller, e.g. the RVG 050 C, the desired gas flow can beset and stabilized.

WARNING

Caution: wrong heating voltage

A wrong heating voltage can damage the heating coil of the valve.

Read the manual of the controller before putting it into operation.

Caution

Caution: damage of valve plate

If heating voltage is applied at gas flows <10-8

mbar l/s or when thevalve is closed, the valve plate (sapphire) can be damaged.

Do not apply heating voltage to the closed valve.

Manual opening

Gas flo

w Q

[m

bar

l/s] 102

101

100

10-1

10-2

10-3

10-4

10-5

10-6

10-7

10-8

10-9

10-10

Qmanual

Qx

Qmin

Vmax

Vx

Typical relationship between gas flow andheater voltage (inlet pressure 1 bar)

The gas flow Qmanual is the result of manual adjustment of the valve opening. Thisvalue limits the range of regulation and thus the gas flow in the event of a powerfailure. By preselecting a desired value on the controller and by applying thecorresponding heater voltage Vx, any desired gas flow Qx between Qmanual and Qmin

may be set and kept constant.

4.2 Thermomechanical

Regulation

BP 805 281 BE (0203) UDV 146.oi 11

When operating the valve at gas flows ≤10-9

mbar l/s, the orifice can be contami-nated by condensable vapors. Adsorbed vapors can be removed by baking thevalve in open position (at approx. 200 ºC for 30 minutes). Such adsorption can beprevented by heating the valve during operation, for example with a heating jacket

(→ 34).

At gas flows <3×10-10

mbar l/s, in addition to heating, make sure the admitted gasis free of condensable vapors. If necessary, the inlet gas can be admitted via adrying device (e.g. liquid nitrogen cold trap).

Rapid changes in the environment such as draughts of air and sun irradiation caninfluence the gas flow too strongly for certain experiments. To avoid this, operate

the valve at a controlled temperature ≤200 °C using for example a heating jacket

(→ 34) in conjunction with a thermocouple.

Changes in the gas flow can be compensated by operating the valve in conjunction

with the RVG 050 C Controller (→ 10).

Oxidation occurs (interfering on sealing surfaces) when the valve is baked atatmospheric pressure at temperatures above 300 ºC. This can be avoided, forexample, by using a protective gas atmosphere or an auxiliary vacuum.

Caution

Consider the information on lubricating the valve

(→ 14).

Caution

Caution: bakeout temperature

Consider the temperature rating of the cables.

Bakeout temperature >80 °C: remove the standard cable.Bakeout temperature >200 °C: remove the heat-resistant extensioncable.

4.3 Operation at Low Gas

Flows

4.4 Compensation of Tem-

perature Variations

4.5 Bakeout

12 BP 805 281 BE (0203) UDV 146.oi

5 Deinstallation

The vacuum system must be vented, the gas inlet closed and the valve

cooled down to <55 °C.

Before connecting or disconnecting the product turn off the controlsystem.

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated.Adhere to the relevant regulations and take the necessary precautionswhen handling contaminated parts.

Caution




Caution




5.1 Electrical Connection

5.2 Vacuum Connection

BP 805 281 BE (0203) UDV 146.oi 13

Detach the flanges and put the protective lids in place.

Protective lid

Protective lidGasket

Gasket

Use new gaskets when reinstalling the valve (→ 35).

14 BP 805 281 BE (0203) UDV 146.oi

6 Maintenance

DANGER




Caution




The valve is free of maintenance if it is operated according to the specifications.However, we suggest that after

25× heating to temperatures above 250 ºC

you disassemble the valve mechanism, clean and lubricate it.

Valve deinstalled (→ 12).

Turn the ball pin 4 turns counter clockwise in order to relieve the lever.

Size 4

4 turns

Maintenance cycle

6.1 Disassembling the Valve

Mechanism

BP 805 281 BE (0203) UDV 146.oi 15

Remove the screws and lift off the cap.

Size 4

Screw the screws one turn into the link bolts. Remove the cap screw.

Size 6

Remove the link bolts by pulling the screws.

16 BP 805 281 BE (0203) UDV 146.oi

Lift the lever off and carefully remove the bolt.

Pull out carefully

Remove the hexagon nut and the cup springs.

BP 805 281 BE (0203) UDV 146.oi 17

DANGER

Caution: cleaning agents

Cleaning agents can be detrimental to health and environment.

Adhere to the relevant regulations and take the necessary precautionswhen handling and disposing of cleaning agents. Consider possible

reactions with the product materials (→ 5).

Clean the valve mechanism with a lint-free cloth moistened with alcohol.

Repeated baking at temperatures above 200 °C can result in loss of tension in thecup springs. This leads to a reduced sensitivity of control at high gas flow rates.

Disassemble the valve mechanism (→ 14, steps … ).

Clean the hexagon nut. Lubricate its thread with high temperature lubricant

(e.g. Hi-Temp C100).

Insert 5 new cup springs. Tighten the hexagon nut by hand.

Make sure to correctly position the cup springs.

C100

Adjust prestress

Adjust the prestress of the cup springs (→ 18).

6.2 Cleaning the Valve

Mechanism

6.3 Replacing the Cup

Springs

18 BP 805 281 BE (0203) UDV 146.oi

Disassemble the valve mechanism (→ 14, steps … ).

Unfasten the hexagon nut.

Tighten the hexagon nut play-free.

Prestress 1 turns.

We recommend using the high temperature lubricant Hi-Temp C100

(→ 34). A thin coat of lubricant is sufficient.

Insert the bolt and carefully connect the heating coil.

C100

Plug in carefully.

6.4 Adjusting the Prestress

of the Cup Springs

6.5 Assembling the Valve

Mechanism

BP 805 281 BE (0203) UDV 146.oi 19

Insert the lever into the housing and fasten it with the link bolts.

C100

Carefully turn in the cap screw until the mechanical stop can be felt.

C100

Size 6

Screw in carefully

until the mechanical

stop can be felt.

20 BP 805 281 BE (0203) UDV 146.oi

Mount the cap and fasten it with the screws.

Size 4

C100

Lubricate the ball pin.

C100

• Connect the valve to a leak detector

• Close the valve.

Close.

Locked

Set the desired gas flow (→ 9).

BP 805 281 BE (0203) UDV 146.oi 21

7 Troubleshooting

We recommend returning the product to your local Pfeiffer Vacuum service centerfor repair.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if anyrepair work is carried out by the end-user or third parties.

DANGER




Caution




Possible cause: Heating coil is defective or not connected internally.

• Check the heating resistance at the valve connector with an ohmmeter. It

should be ≈30 Ω.

If it is NOT:

• Disassemble the valve mechanism (→ 14). Check the connections and theheating resistance of the heating coil.

If the heating coil is defective, please contact your local Pfeiffer Vacuumservice center.

See the documentation of your controller for further information (RVG 050 C Con-

troller → BG 805 282 BE).

Possible cause

Valve seat is deformed → 22

Sealing elements at the valve seat are contaminated → 28

Valve seat is damaged → 28

Valve plate (sapphire) is damaged → 28

Cup springs have been prestressed too much → 18

7.1 Valve Does Not Regulate

Procedure

7.2 Valve Is Not Tight

22 BP 805 281 BE (0203) UDV 146.oi


Connect the valve to a leak detector.

Leak detector

Knurled nut

Lock nut

Unfasten the lock nut and turn it 5 turns counter clockwise.

5 turns

Hold stationary.

Lock the knurled nut.

Hold stationary.

Turn to mechanical stop.

7.3 Adjusting the Tightness

at the Valve Seat

BP 805 281 BE (0203) UDV 146.oi 23

Adjust to the required tightness.

Locked

Turn the knurled nut 2 turns clockwise in order to prestress the valve lever.

Locked

2 turns

Unlock the knurled nut.

Hold stationary.

Unfasten.

Turn the knurled nut to the mechanical stop.

Released


24 BP 805 281 BE (0203) UDV 146.oi


Turn to

mechanical stop.

Hold stationary.

BP 805 281 BE (0203) UDV 146.oi 25

After the tightness of the valve has been adjusted a number of times, it may benecessary to adjust the lever.

Adjust the lever if α ≥ 5° (a ≥ 64.5 mm) while the valve is closed.

(a)

α

Valve closed


Turn the knurled nut counter clockwise until α = 0° (a = 59 mm).

Locked

Turn until α = 0° (a = 59 mm).

(a)

Hold the lock nut stationary and turn the knurled nut clockwise to the

mechanical stop.

Hold stationary.


7.4 Adjusting the Lever

26 BP 805 281 BE (0203) UDV 146.oi

Unfasten the hexagon socket set screw and adjust the scale ring to "0".

Size 2

510 0

Adjust scale ringto "0".

Afterwards tighten the hexagon socket set screw.


Turn to

mechanical stop.

Hold stationary.

Connect the valve to a leak detector.

Leak detector

BP 805 281 BE (0203) UDV 146.oi 27

Turn the knurled nut 2 turns counter clockwise.

Locked

2 turns

Carefully screw in the cap screw until a mechanical stop can be felt.

Size 6

Check that the valve is tight.

Valve still not

tight

Max.

5 Nm

noValve tight?

yes

Leak detectorHe

→ 28.

28 BP 805 281 BE (0203) UDV 146.oi

Turn the knurled nut 2 turns clockwise.

Locked

2 turns

Caution





Turn the knurled nut 4 turns counter clockwise.

Locked

4 turns

Unfasten the cap screw.

Size 62 turns

7.5 Disassembling the

Sealing Elements of the

Valve Seat

BP 805 281 BE (0203) UDV 146.oi 29

Remove the valve seat.

Approx. 40 NmSize 8

Remove the valve plate.

Special tool

30 BP 805 281 BE (0203) UDV 146.oi

DANGER

Caution: cleaning agents

Cleaning agents can be detrimental to health and environment.

Adhere to the relevant regulations and take the necessary precautionswhen handling and disposing of cleaning agents. Consider possible

reactions with the product materials (→ 5).

Caution




Sealing elements at the valve seat disassembled (→ 28).

DANGER

Caution: cleaning with pressure gas

Flying particles can cause eye injuries.

Wear protective glasses.

p

DANGER

Caution: pressure gas

Unprofessionally handling pressure gas can cause physical injury.

Adhere to the relevant regulations and take the necessary precautionswhen handling pressure gas.

DANGER

Caution: asphyxiation hazard

Using gases in closed rooms may cause asphyxiation.

When using gases, make sure the room is properly ventilated, adhereto the relevant regulations and take the necessary precautions.

7.6 Checking and Cleaning

the Valve Body and the

Sealing Elements of the

Valve Seat

Valve body

BP 805 281 BE (0203) UDV 146.oi 31

Visual check:

• Scratches or strong abrasion on the sealing surface?

yes: polish concentrically with a polishing cloth (grain size 240 … 400).

• Rinse the inlet and vacuum side of the valve body with alcohol andsubsequently blow out with dry particle-free gas (e.g. nitrogen).

Sealing surfaceInlet

Visual check:

• Cracks or chipping etc. on the sealing surface (sapphire)?

yes: replace valve plate

Clean the valve plate with a lint-free cloth moistened with alcohol.

Sealing surfaceSapphire

Visual check:

• Scratches on the sealing surface?

yes: replace valve seat

• Copper gasket extends less than 0.2 mm above metal washer?

yes: replace valve seat

• Oxidized parts?

yes: polish concentrically with a polishing cloth (grain size ≤400)

Clean the valve seat with a lint-free cloth moistened with alcohol.

Copper gasket

Sealing surface

Min

. 0.2

Metal washer

Valve plate

Valve seat

32 BP 805 281 BE (0203) UDV 146.oi

Caution

Caution: lubricants

Lubricants can contaminate the vacuum area.

Do not use any lubricants (the threads need not be lubricated).

Caution




Screw in the valve plate.

Special tool

Tighten slightly.

7.7 Assembling the Sealing

Elements of the Valve

Seat

BP 805 281 BE (0203) UDV 146.oi 33

Screw in the valve seat.

Approx. 40 Nm

Size 8

Check that the valve is tight.

If it is not, repeat section 7.4 to 7.7.

Rubber plug

Leak detector

He

Sealing surface

34 BP 805 281 BE (0203) UDV 146.oi

8 Accessories

DN 16 CF-F

Shut-off valve

Gas s

upply

Accessory

Flange withtube

Accessory

Accessory

Cap

illary

Supplied byend-user

Supplied byend-user

Heating jacket(accessory)

Cable for controller(accessory)

Tool kit(accessory)

ø18

C100

High temperaturelubricantHi-Temp C100(accessory)

RVG 050 CController

Description Ordering number

Flange with tube, inlet side, DN 16 CF-F PF517202-X

Capillary complete, vacuum side, length 1 m PT418976-T

Heating jacket, max. 200 ºC, 115/230 VAC, 50/60 Hz PT420376-T

RVG 050 C Controller PFI00795

Cable to controllerStandard cable (≤80 °C), 3 mStandard cable (≤80 °C), 12 m

Heat-resistant extension cable(≤200 °C), 2 m

PT519178-TPT519343-T

PT519953-T

Tool kit, comprisingHexagon head wrench, 8 mmHexagon head wrench, 6 mmHexagon head wrench, 2 mmSpecial tool for valve plateHigh temperature lubricant Hi-Temp C100 (28 g)

BP414624-T

High-temperature lubricant Hi-Temp C100 (28 g) B2751050CA

Hex cap screw kit:

Nominaldiameter

Comprising Pieces Ordering number

DN 16 CF screw, washer, nut 25 PF505000-T

DN 40 CF screw, washer, nut 25 PF505001-T

BP 805 281 BE (0203) UDV 146.oi 35

Copper gaskets, premium qualitydiamond surface finish, individual packaging:

Nominal diameter Attributes Pieces Ordering number

DN 40 CF 10 PF501404-T

DN 40 CF silver-plated 10 PF501504-T

DN 40 CF gold-plated 5 BN845930-T

DN 16 CF 10 PF501401-T

DN 16 CF silver-plated 10 PF501501-T

DN 16 CF gold-plated 5 BN845929-T

9 Spare Parts

When ordering spare parts, always indicate:

• all information on the product nameplate

• item number, description and ordering number according to the spare parts list

Description

Valve plate, sapphire

Ordering number

BP414656-X

Description Ordering number

Valve seat complete, standard

BP414950Valve seat complete, gold plated

BP414652-X

36 BP 805 281 BE (0203) UDV 146.oi

10 Returning the Product

WARNING

Caution: forwarding contaminated products

Contaminated products (e.g. radioactive, toxic, caustic or biologicalhazard) can be detrimental to health and environment.

Products returned to Pfeiffer Vacuum should preferably be free ofharmful substances. Adhere to the forwarding regulations of allinvolved countries and forwarding companies and enclose a duly

completed declaration of contamination (→ 37).

Products that are not clearly declared as "free of harmful substances" are decon-taminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination arereturned to the sender at his own expense.

11 Disposal

DANGER




After disassembling the product, separate its components according to the follow-ing criteria:

Contaminated components (radioactive, toxic, caustic or biological hazard etc.)must be decontaminated in accordance with the relevant national regulations,separated according to their materials, and disposed of.

Such components must be separated according to their materials and recycled.

Separating the components

Contaminated components

Other components

BP 805 281 BE (0203) UDV 146.oi 37

Declaration of Contamination

Legally binding declaration:

We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may

arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

E-mail

Name

Date and legally binding signature Company stamp

1) or not containing any amount of hazardous residues that exceed the permissible ex- posure limits

Process related contamination of product

toxic no 1) yes

caustic no 1) yes

biological hazard no yes 2)

explosive no yes 2)

radioactive no yes 2)

other harmful substances no 1) yes

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay.

This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product nameManufacturer

Chemical name(preferably with formula)

Precautions associatedwith substance

Action in case of humancontact

Description of product

Type

Part number

Serial number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub-stances which are damaging tohealth yes

This form can be downloaded from our website.

2) Products thus contaminated will not be ac- cepted without written evidence of decontami- nation!

38 BP 805 281 BE (0203) UDV 146.oi

Notes

BP 805 281 BE (0203) UDV 146.oi 39

Notes

Berliner Strasse 43D–35614 AsslarDeutschlandTel +49 (0) 6441 802-0Fax +49 (0) 6441 802-202

Original: German BP 805 281 BD (0203) [email protected]

bp805281be www.pfeiffer-vacuum.de

All-Metal Control Valve - KVIkremers/AECR2/web-content/manuals equipment/… · 2 BP 805 281 BE...

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