AGILENT TURBO PUMPS - Ideal Vac · a. the roughing time b. the minimum recommended backing pump of...

AGILENT TURBO PUMPS

2-5 Introduction6-7 Molecular Drag Technology8-9 Agilent Floating Suspension10-11 Turbo Pump Technology12-13 Turbo Pump Technology for Instrumentation14-17 Typical Applications18-45 Turbo Pump Models46 Accessories47-49 Technical Notes50-52 Service and Support Plans

2

INTRODUCTION

The Agilent AdvantageA complete family of Turbo Pumps including the innovative break-through TwisTorr FS pumps.● Agilent turbo pumps are designed for reliability and optimum performance in real world applications to meet

highest quality standard

● Our pump range also includes integrated pumping systems, multiflow pump solutions for scientific instruments, and dedicated solutions for vibration-sensitive applications in nanotechnologies

2015 ●Agilent expands the TwisTorr family with the new 84 FS

2013 ●AgilentlaunchestheTwisTorr304FSwithFloatingSuspension,thepatentedinnovative,mostreliableandhighperforming300l/spumpinthemarket

2010●AgilentTechnologies,havingacquiredVarian,presentsthenewTwisTorrmoleculardragtechnologybased

onitswell-knownhybridTurboMolecularPumpdesign,introducingaspiraldragsectionthatachievesunmatchedperformanceinbothpumpingspeedandcompressionratiointhemostcompactspaceavailable.Newstate-of-the-artelectronicscompletethisindustryleadingTurbomolecularPumpinnovation

2004 ●VariandevelopsadedicatedrangeofSEMproductsthatmeetsthemoststringentrequirementsoftheindustry

2003 ●WiththeTurbo-V2K-GVarian,nowAgilent,introducesafullyintegratedTurbopumpingsystem

1996 ●IntroductionbyVarianofmicroprocessor-basedon-boardcontrollerunits:Navigatorline,forcomputerdrivenplug-and-pumpoperation

1991●VarianintroducesanewhybridtypeTurboMolecularPump:onemonolythicrotorprovidesboth

highspeed(Turbostages)andhighforelinetolerance(MacroTorrstages)●Useofceramicballbearingswithlife-timelubricationusingaproprietarydrysolidlubricant

1986 ●VarianbeginscollaborationwithElettroravaforturbomolecularpumptechnologyandknow-howtransfer

Turbopump Operating PrinciplesTurbomolecularpumpsconsistofaseriesofbladedimpellersrotatingathighspeedandfixedbladedstators.Theseimpellersandstatorsarealternatelyspacedandareinclinedinoppositedirections.Thepumpingactionisbasedonmomentumtransferfromthefastmovingimpellersurfacetothegasmolecules.Thespeedofthemovingsurfacemustbeashighaspossibletoachieveoptimumpumpingefficiencyintermsofpumpingspeedandcompressionratio.Whenthismechanismtakesplaceseveraltimesinapumpapumpingactioniscreated.Thesequenceofalternatingrotorsandstatorstypicalofaconventional

turbomolecularpumpdevelopsthecompressionratio.Turbomoleculardragpumpsoperateaccordingtothesameprinciple,butwithadifferentgeometryinthepumpingstages.Gasmoleculescollideagainstafastmovingwallandaredraggedintoachanneltowardthehighpressureregion.Conventionalturbomolecularpumpshavehighpumpingspeedbutlowcompressionratioatforelinepressureshigherthan10-1mbar.Moleculardragpumpshavelowpumpingspeedbuthighcompressionratiosuptoforelinepressuresofmorethan20mbar.Whenthetwotypesofstagesarecombinedtogetherinonepump,extendedoperationalpressurerangescanbeachieved.

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TURBO PUMPS

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Turbomolecular Pump Parameters and DefinitionsThroughput“Throughput”istheflowrateofpumpedgasthroughtheturbomolecularpump(andforelinepump).Throughput(Q)ismeasuredinmbarl/s1/60standardcm3/min.Themaximumthroughputapumpingsystemcanhandleis,ingeneral,dependentuponthesizeofitsforelinepumpratherthantheturbomolecularpump.Pumping Speed“Pumpingspeed”(S)(volumetricflowrate)ofaturbomolecularpumpistheratiobetweenthroughputandinletpressure(forelinepumpsizemustbetherecommendedoneasaminimum).

S=Q/p

Thepumpingspeedofaturbomolecularpumpisconstantoverawidepressurerangeanddependsupongeometricfactorssuchasdiameterandrotationalspeed.Formostturbomolecularpumps,pumpingspeedisnearlyindependentfromgasspecies(molecularweight).Compression Ratio“CompressionRatio”istheratiobetweenforeline(partial)pressureandinlet(partial)pressureforagivenprocessgas,measuredin“zeroflow”conditions(performedbyinjectingtheprocessgasinthepumpforelinewhilethehighvacuumportisblankedoff).Compressionratioisgenerallyindicatedwiththeletter“K”.Intechnicalspecificationsofturbomolecularpumps,itisthemaximumattainablevalueofK(atlowforelinepressure).Compressionratiois,infact,afunctionoftheforelinepressureasshowninFigure1.Compressionratiodecaysathighpressuredependingonturbomolecularpumpconfiguration(thenumberofmolecularstages)and/orpowerlimitationsthatslowdowntherotor(gasfrictionincreaseswithpressure).

4

INTRODUCTION

Themaximumcompressionratioisstronglyinfluencedbygasspecies:itisanexponentialfunctionofthemolecularweightofthepumpedgas(compressionratioisconsiderablylowerforlightgases).Pumping Speed and Pressure RatioThepressureratiobetweenforelineandinletpressuresineachoperationalsituationisindicatedby“Rp”.Thisis,ingeneral,equaltopumpingspeedratio

Rp=pforeline/pinlet=Seff/Sforeline

whereSeffistheeffectivepumpingspeed,andSforelineisthepumpingspeedoftheforelinepump.

Infact

Q=Seffpinlet=Sforelinepforeline

therefore

Seff/Sforeline=pforeline/pinlet

Thepumpingspeedofaturbomolecularpumpisminimallyaffectedbypressureratio(andforelinepumpsize)inmostcommonoperationalconditions(whenpressureratioismuchsmallerthanK).Generally,however,theeffectivepumpingspeed“Seff”isalinearfunctionofthepressureratio“Rp”asshowninFigure2(andthereforeisalsodependentuponthesizeofthebackingpump).Seffreachesitsmaximunvalue“S”(nominalpumpingspeed)when“Rp”equalsunity,anditiszerowhenthepressureratioRphasreacheditsmaximumvalue“K”.Thislineardependencecanbeexpressedbythefollowingrelationship:

Seff=S/(1-1/K+S/SforelineK) (1)

Asitcanbeseen:when K>>S/Sforelineand K>>1then Seff≅Swhen K≅1then Seff=Sforeline

Theaboveformula(1)mustbeusedtoevaluatepumpingspeedwhenoperatingathighpressure,especiallywithlightgases(lowK).Base PressureThebasepressureofaturbomolecularpumpistheequilibriumpressurebetweenoutgassingofpumpsurfacesexposedtohighvacuum,includingtestdome,andthepumpingspeedofthepump.

pbase=Qoutgas/Seff

Inthecaseofultimateoperationalpressure,asspecifiedbynorms,thepressureismeasuredafter48hoursbakeoutofpumpanddome(providedwithmetalgasket);thereforetheprevailingoutgassingproductisH2andequilibriumisreachedwithhydrogenpumpingspeed.

pbase=QH2/SeffH2

Whenforelinepumpswithrelativelyhighbasepressuresareused,basepressureissometimeslimitedbythecompressionratioforH2O(orN2).

pbase=pforelineH2O/KH2O

10010

1010

108

106

104

Com

pres

sion

ratio

102

10-2 10-1 1

Foreline pressure (mbar)

1

Figure 1 - Compression Ratio vs Foreline Pressure

Nitrogen Helium Hydrogen

Inlet pressure (mbar)

200

010-10

Pum

ping

spee

d (l/

s)

10-5 10-4 10-3 10-2 10-1

50

250

150100

1

300350

10-6

Figure 2 - Pumping Speed vs Inlet Pressure

Nitrogen Helium Hydrogen

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TURBO PUMPS

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Pump SelectionHow to Select a Turbo-V PumpTherightchoiceofaturbomolecularpumpdependsontheapplication;asageneralrulewecanreducethechoicetotwotypesofuse:UHV(nogasflow)operationsandProcessGasflowoperations.

–UHV(nogasflow)operations.Theformercaseincludesmostcasesinwhichtheturbomolecularpumpisemployedtocreatevacuuminsystemswherethegasloadismainlyproducedbyoutgassing.Inthisapplicationthechoiceistypicallybasedonthedesiredbasepressurewithinadesiredtimeasafunctionoftheforeseenoutgassingrate,i.e.

Seff=Q/p

where: p isthedesiredbasepressure(mbar) Q isthetotaloutgassingrateatthedesiredtime(mbarl/s) Seff istheeffectivepumpingspeed

–ProcessGasflowoperations.Thesecondcaserelatestoalloperationswhereprocessgasesmustbeused.Themainparametersarethereforethedesiredoperationpressureandtheprocessgasflow

Seff=Q’/p’

whereQ’isthetotalgasflowandp’istheoperatingpressure.

How to Select the Backing Pump of a Turbomolecular PumpTheselectionofabackingpumpshouldbebasedanalyzingtworequirementsofthevacuumsystem:a.theroughingtimeb.theminimumrecommendedbackingpumpoftheturboa.Roughing:oncethedesiredroughingtimeisestablished,

thesizeoftheforepumpcanbedeterminedthroughthefollowingformula:

Sforeline=(V/t)ln(p0/p1)

where Sforeline isthepumpingspeedoftheroughingpump(l/min) V isthevolumeofthechambertobeevacuated(l) t isthedesiredroughingtime(min) p0 isthestartingpressure(mbar) p1 istheendpressure(mbar) Whenusingaforelinepumpmuchlargerthanthe

recommendedsize,aby-passlinemightbenecessarytoachievecalculatedroughingtime.

b.Backing:thebackingpumpmustbebigenoughtoachieveaneffectivepumpingspeedascloseaspossibletothenominalspeed.

pforeline=Q/Sforeline

where Sforeline isthepumpingspeedoftheforelinepump Q isthegasload p istheoperatingforelinepressure ItshouldbenotedthatQisthetotalgasloadonthepumpand

includesprocessgasesandturbopurgegaseswhenused. Thesizeofthebackingpumpcanbecalculatedaccording

tothefollowingrule:

Sforeline≥20S/K

where S isthepumpingspeedoftheturbopump Sforeline isthepumpingspeedofthebackingpump K isthemaximumcompressionratioofthe

turbopumpforagivengas(i.e.:processgas)attheoperatingforelinepressure.

Thepumpingspeedofthebackingpumpshouldbethehigherofthetwovaluescalculatedasabove(roughingandbacking).Finally,itispossibletouseadrypump(scrollordiaphragm)forhydrocarbon-freeoperationwhenpumpsoftheMacroTorrtypeareused.

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MOLECULAR-DRAG TECHNOLOGY

Drag Technology allows higher foreline pressure, higher efficiency and smaller backing pump in a very compact design. Agilent solutions are designed using state of the art, proprietary numerical modeling. We offer optimized solutions for:

● Pumps with high compression ratio for UHV applications requiring lowest base pressure

● Pumps with high pressure differential for high throughput

● Pumps with high discharge pressure allowing downsizing of the complete vacuum system

AGILENT TWISTORR TECHNOLOGY*● Pumping effect is created by a spinning rotor disk which

transfers momentum to gas molecules● Gas molecules are forced to follow spiral groove design

on the stator. The specific design of the channel ensures constant local pumping speed and avoids reverse pressure gradients, minimizing power consumption

(*) US Patents applications 12/343961 and 12/343980, 24 Dec. 2008.

Agilent developed two innovative molecular drag stages technological platforms: TwisTorr and MacroTorr.

Loading Edge Performance● The TwisTorr Pumps offer the highest pumping speed in

their category for all gases● The state of the art TwisTorr technology also achieves the

highest compression ratios for light gases in a commercially available Turbo Molecular Pump

● Besides offering the highest performance, average power consumption results particularly low

Space Saving Design● Our rotor is based on the proven Agilent monolithic rotor

design which positions the TwisTorr Stator between two smooth spinning disks and therefore exploits the pumping action by both disk surfaces in series

● The double-sided spiral groove design on the TwisTorr stators combines centripetal and centrifugal pumping action in series, greatly compacting the size of the drag section

Compression Ratio● Compression ratio for N2 of a single TwisTorr stage

can increase up to a factor of 100 with respect to a conventional stage of the same space and rotor speed, providing exceptional foreline tolerance and pumping speed

k

1,0E+00

1,0E+01

1,0E+02

1,0E+03

1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02

K

P foreline (mbar)

TwisTorr stage

Macrotorr stage

1,0E+00

1,0E+01

1,0E+02

1,0E+03

1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02

K

P foreline (mbar)

TwisTorr stage

Macrotorr stage

P foreline (mbar)

Gas flow in centripetal and centrifugal direction through TwisTorr channels

Centripetal pumping action Lowersurfaceareaofrotatingdisktransfersmomentumtogasmolecules.SpiralgroovedesignontheuppersectionoftheTwisTorrstatorcausesacentripetalpumpingaction).

Centrifugal pumping action Upper surface area of rotating disk transfers momentum to gas molecules.Spiral groove design on the lower section of the TwisTorr stator causes a centrifugal pumping action.

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TURBO PUMPS

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TwisTorr Technology in Agilent Turbo Pumps

AGILENT MACROTORR TECHNOLOGYThe MacroTorr ConceptAgilent patented MacroTorr design is based on the idea of replacing (rather than adding) molecular impeller disks to some turbo bladed stages.The molecular impellers consist of a disk rotating in a channel in which the inlet and outlet are divided by a wall.The cross section of the channels decreases from the top to the bottom of the pump (from high vacuum to low vacuum or from the low pressure to the high pressure zone).Gas molecules gain momentum after each collision with the moving surface of the impeller. The gas is then forced to pass through a hole to the next stage due to the wall.The result is a product that, with the same dimensions as a conventional turbopump, provides: high compression ratios for light gases and high compression ratios at high foreline pressure. This allows the use of a very small mechanical pump while maintaining a low inlet pressure, or the use of a dry pump, for an oil free environment, and high throughput capacity at inlet pressures greater than 10-3 mbar.

Turbo section: turbo stators

Turbo section: aluminum rotor with turbo stages designed to optimize pumping speed for light gases

Drag section: New TwisTorr technologyTwisTorr drag stages (spiral channels) designed for high compression ratio performances

8

Upper cover-plate

Thermistor

Lower bearing

Lower AFS

Upper AFS

Upper AFS

Mechanical DesignSST shaft screwed on AI rotor to provide rotor stability (bending effect, behaviour under external shock loads)Agilent Floating Suspensions (AFS)● AFS geometrical precision to guarantee bearing alignment● Designed radial stillness to op timize rotor dynamic behaviour and acoustic noise● Lower AFS acts as an axial spring to provide bearing’s constant perload and rotor axial positioning● Thermal stability● Vibration stability over time

Upper bearing

Lower cover-plate

FLOATING SUSPENSION

Agilent designed a patented innovative suspension technology that gives to Agilent Turbo Pumps the best dynamic behaviour, resulting in low noise, low vibration, longer bearings’ life, and exceptional stability over time.

AGILENT FLOATING SUSPENSIONThe Turbomolecular pumps’ rotor rotates at very high speed to provide the necessary pumping effect.In that operative mode there are several crucial parameters to be rigourosly controlled and managed:

● radial positioning

● axial alignment

● bearings axial pre-load

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TURBO PUMPS

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Lower AFS

Radial press fitting to keep the best working condition for bearings over time

● AFS geometrical precision guarantees perfect bearings alignment

● Designed radial and axial stiffness, optimized rotor dynamic behaviour and acoustic noise

● Lower AFS acts as an axial spring providing bearing’s preload and rotor axial positioning

● Thermal stability

High performance elastomer for

vibration damping

Perfect bearing alignment

Vibration damping

Thermal stability Optimized rotor dynamic

behaviour

TwisTorr 304 FS TwisTorr 84 FS

To ensure● Low vibration and acoustical noise● Optimal working conditions for the bearings,

extended operating life● Exceptional stability for the very demanding

SEM application

TwisTorr 84 FS

10

Wide Pumping Speed Range: 80 to 2,200 l/sAgilent offers a complete range of turbomolecular pumps, to cover all applications and market segments. Controllers

• Various configurations available to match each application’s requirements

• Rack type display controllers, to match your existing system architecture

• Low voltage - PCB units, to fully integrate turbopump electronics into your system’s electronics

• Navigator on board controllers, for plug-and-pump operation driven by the computer of your system

• Truly integrated electronics, completely embedded in the pump body

Molecular Drag Technology& Pumping Efficiency• MacroTorr and TwisTorr technologies

allow higher foreline pressure, higher efficiency and smaller backing pump, in a very compact design

• Agilent R&D Team has the capability to optimize the pump performances for different applications

TURBO PUMP TECHNOLOGY

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TURBO PUMPS

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Controller and T-plus SW• T-plus Software runs on a PC or laptop

and is an effective operation and trouble shooting interface

• It enables complete remote control of the pump

• It is available for all controllers, when equipped with serial port, for data logging and displaying

Oil Free - Permanent Lubrication• Permanent lubrication is possible thanks

to the extremely low vapor pressure of the solid lubricant

• This solution allows pump operation in any position

• No maintenance, no oil, no refill and most important no contamination

Thermal Efficiency & Temperature Control• The correct design of pumping stages,

motor and electronics allows low heat dissipation and low power consumption

• Total temperature control within the pump is important for reliable long- term operation. All our pumps are equipped with at least one temperature sensor

• Controllers manage temperature information related to other operational parameters, for an evenly distributed and controlled temperature within the pump

• These, in combination with efficient air and water cooling systems, are key factors for reliability, in any application

Rotor• Suspension axial/radial

perfect positioning• Vibration damping• Correct bearing pre-load

Ceramic Ball Bearings• Agilent was the first to introduce

permanently lubricated ceramic ball bearings in turbomolecular pumps in 1992

• From there, bearings’ quality and reliability have dramatically improved

• Now typical MTTF well exceeds 200,000 hours

Application Specific Solutions for SEMA complete line of turbo pumps dedicated to Electron Microscopy.(See page 12-13)

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TURBO PUMP TECHNOLOGY FOR INSTRUMENTATION

The Agilent Advantage: Masters in Mass Spec and NanotechnologyAs the leading Ultra-High Vacuum products supplier, Agilent Technologies has long been working with all MS, SEM and TEM manufacturers, providing application specific solutions.

Today Agilent is the only company able to offer a complete and dedicated range of MS and SEM products, including primary pumps, turbomolecular pumps, ion getter pumps, and vacuum measurement, that meet the most stringent requirements of the industry.

Turbo-V SEM versions are available on request; please ask Agilent for technical details.

● Vacuum in the gun and sample chamber must be particle-free and oil-free● No Vibrations● No Resonances● No Magnetic stray fields from both IGP and TMPs ● No Electric noise from power supplies● Fastest Pumpdown cycles● Pressure levels stable and controlled● Maximum Uptime● Fast, worldwide Service Support

Vacuum for SEM: basic requirements

Superior Vibration Isolation System• Lower vibrations than Mag-Lev!• Certified Computer Aided Balancing,

thanks to suspended benches with special high sensitivity accelerometers

Foreline Pressure up to 15 mbar• Ideal to minimize forepump size

(i.e. IDP-3 Dry Scroll Pump, DS 42 Rotary Vane Pump), resulting in the lowest cost of ownership

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TURBO PUMPS

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Improved Roto Dynamics• Designed to avoid internal mechanical

resonances• Agilent SEM turbopumps are designed to

minimize vibration sources, and have a very stable vibration profile

Enhanced Electronic Controllers• Universal voltages• Integrated Vent valve command,

adjustable valve delay and opening time• Pressure gauge reading• Integrated Profibus

Monolithic RotorMounting in any position, with no limitations.• Rugged design• Light weight• Air inrush proof• Earthquake proof

Magnets Free Design• Lowest Magnetic Signature in the

industry• Best to work very close to ebeams• No need for magnetic shields

Integrated Double Dampers• Agilent developed special Integrated

Double Dampers for the most demanding SEM applications

• Damping factor up to 1400X (Radial, at unbalance level, with IDD100 ISOK): better than Mag-Lev!

• Best SEM image resolution

14

AGILENT TURBO PUMPS TYPICAL APPLICATIONS

Research and Development Particle Accelerators• Turbomolecular pumps are widely used in High Energy

Physics, Fusion Technology and general UHV research. Synchrotron Light Sources, Particle Accelerator Rings, UHV Laboratory research, and Fusion reactors need extremely clean, reliable and cost effective HV and UHV.F Maintenance-free pumps are specifically required, because most pumps are not easily accessible.

• Agilent turbomolecular pumps are designed to offer unmatched reliability, performance and cleanliness for these applications. Ceramic bearing pumps, thanks to their reduced rolling friction, low stress and high thermal stability compared to conventional bearings, deliver longer operating life. Ultra low vapor pressure solid lubricant eliminates the need for maintenance and assures clean operation under any operating conditions.

• Furthermore, in contrast to most of the other pumps, all Agilent turbopumps have both the upper and the lower bearing in the rough vacuum side and not exposed to UHV, further reducing the possibility of contamination - even in case of misuse.

• The patented TwisTorr stages provide the highest speed and compression ratio in the smallest footprint; furthermore all Agilent turbopumps can truly be mounted in any orientation, from vertical to horizontal to upside down, aiding system design in the most stringent space requirements.

• Agilent turbopumps can operate at higher foreline pressures, allowing the use of dry roughing pumps, thus providing a completely clean, oil-free compact and cost effective pumping package.

• Whenever a large amount of gas has to be pumped and higher throughput is needed, the combination of TwisTorr pumps and TriScroll dry pumps is the state-of-the-art solution.

All Agilent turbopumps have integrated or on board controller versions allowing easy plug and pump operation, or a rack-mounted controller for applications where the electronics need to be remotely placed (i.e. radioactive environments).

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TURBO PUMPS

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InstrumentationElectron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis• Modern focused-beam systems such as SEM’s, TEM’s and

FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. End users analyze all types of substances from organic compounds to semiconductor wafers. In the Semiconductor industry, in particular, they require more sensitivity for better sample resolution. Another key requirement is high sample throughput in order to lower the cost of ownership of these instruments.

• Based on these requirements, the demand for high performance vacuum pumps is greater than ever. Agilent offers a full range of high and ultra-high vacuum pumps designed especially for the demanding requirements of SEM’s, TEM’s and surface analysis systems (Agilent has a full range of ion pumps, which are key products for this application; please see ion pump section).

• Turbo molecular pumps are also a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing). From Agilent’s full range of turbo pumps, the focused-beam system designer can choose a pump size that offers the best chamber evacuation time with the best cost of ownership and compact size for use in limited space situations.

• Agilent has a full line of customized, low vibration turbo pumps for the most sensitive microscopy applications. Finally, Agilent has a full range of integrated pump controllers that offer the highest control flexibility with near zero electromagnetic noise generation.

• Agilent offers a full range of application specific designed SEM turbo pumps including 80 l/s, 300 l/s, 550 l/s, 700 l/s and 1000 l/s speeds.

All of Agilent’s SEM turbo pumps designs can be verified in Agilent’s application lab. Finally, each SEM turbo pump is tested in production before being shipped to the customer.

Mass SpectrometryMSisourcorebusinessandhasbecomeafundamentalanalyticaltoolinmanyindustries.Thankstoadvancesinelectronics,instrumentdesignerscanimplementcost-effective,high-performanceanalyticalpowerinacost-effective,easy-to-usesystem.Thesedevelopmentsrequireadvancedvacuumsystemsthatarecharacterizedbymulti-chamber,highthroughputdesignsonthehighqualityinstruments.Theserequirements,inturn,demandcost-effective,highperformancevacuumpumps.Agilentoffersafulllineofpumpsandcontrollersthatmeetthemostchallengingvacuumrequirementsandareoptimizedforthespecificrequirementsofmodernmassspectrometrysystems.

Courtesy TRIUMF-ISAC.

Agilent Split Flow Turbo Pumps

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AGILENT TURBO PUMPS TYPICAL APPLICATIONS

Agilentcanfurthercustomizeitspumpsbyprovidingmulti-inletpumpingsystemsthatarecompactandreliable.Afewcommonapplicationexamplesformassspectrometryarelistedbelow:• GC-MS

GasChromatographMassSpectrometerstypicallyuseonevacuumchamberinrelativelylowgasloadenvironmentsandanintermediatevacuuminterfacetoanalyzeinorganicsamples.TheAgilentTurbo-V81withprintedcircuitboardcontroller(PCB)isaverycost-effectivesolutionforthiscommonanalyticaltechnique.TheV301Navigatoroffersacompact,cost-effectivesolutionforlargerinstrumentdesigns.

• LC-MSLiquidChromatographMassSpectrometerstypicallyincludemulti-chamber,highthroughputvacuumsystems.Agilent’sturbomolecularpumpsaredesignedforhighthroughputoperationwithaircooling–animportantbenefitformaintainingacompactsystem.Theyarealsoavailableinseveralsplitflowversionstoincreasetheirutilityandperformanceinthisapplication.Theintegratedcontrollerprovidesahighlevelofcontrolfunctioninasmallpackage.

• ICP-MSInductivelyCoupledPlasma-MSsystemshaveawiderangeofvacuumrequirements.Manysystemscanuseheavycarriergasessuchasargon,whilecollisioncelldesignsusehelium.AgilentturbopumpshaveahighefficiencymotorandTwisTorrorMacroTorrdragstagestoreduceheatproductionundergasload.Thesefeaturesallowtopumphighlevelsofargon.Integratedoronboardcontrollersassurecompactpackage.

• TOFTimeOfFlightsystemsarebecomingveryimportantanalyticaltoolsindrugdiscoveryandproteomics.Vacuumrequirementsvary,althoughsmallsizeisoftenanimportantconsideration.AgilentturbopumpandcontrollerpackageprovidestheTOFdesignerwithahighdegreeofflexibilitywithregardtohighthroughput,efficientheatdissipationandcompactsize.

• Inawiderangeofindustries,fromglasscoatingtomedicalequipment,manufacturersshareaneedforrobust,reliable,production-friendlyvacuumtechnologies.

• Focusingonthetotalcostofownership,Agilentcontinuestodeliverinnovativevacuumsolutionsthatmaximizethroughput,toleratevaryingoperatingconditions,andsimplifymaintenance,helpingtoassuremaximumuptimeandefficiency.

• Turbo-Vpumps,designedtowithstandheavyindustrialuse,canhandlehighgasloadsandwillrecoverquicklyfromaccidentalairin-rushes.

• Agilentoffersacomprehensiverangeofvacuumpumpsandsystemsforindustrialuses,includingthenewTurbo-VK-GSeries,withtrulyintegratedelectronicsembeddedinthepumpbody.

Thin Film Deposition• Glasscoatingequipment(architecturalglass,

automotiveglass,flatpaneldisplaysubstrates)

Industrial Vacuum Processing

Agilent Turbo-V 2K-G in Thin Film Deposition application.

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• Thinfilmsolarcellsproduction(photo-voltaic)• Opticaldatamedia(CompactDiscs,DigitalVersatileDiscs,

MagnetoOpticalDiscs)• Magneticstoragemedia(harddiscs,readheads)• SurfacetreatmentsusedforTribologicalandWearcoatings• FunctionalandDecorativecoatings,includingMetallization• Opticalcoating(ophthalmic,precisionopto-electronics)• Roll/Webcoatingonfilmsorfoils• PVDandotherPlasmaProcesssystemsrequiringhighgasloadDevice Processing: • TV&Monitorpicturetubemanufacture• Evacuationoflamps(motorwaylighting,beamers)• X-Raytubes&electrondevices• Medicalacceleratortubes• LasersGeneral Industrial Processes:• Vacuumfurnaces/Brazing• Electronbeamwelding

Dedicated Solutions for Thin Film Deposition• Insinglechamberbatchsystems,multiplechambersystems,

withloadlocks,orlargeinlinecontinuoussystems,Agilenthastherightturbopumpforyourprocessrequirements.WhatreallydifferentiatesAgilentistheexpertiseofitsapplications,supportandcustomsystemdesignstafftointegratevacuumpumpsintooptimizedvacuumsolutions.

The Turbo-V K-G Series Systems• Application-specific

pumpingsolutionsdesignedforthinfilmdepositionequipment:thefirstfullyintegratedapproachformaximumsystemproductivityanduptime.

-highpumpingspeedandhighgasthroughput -trulyintegratedpowersupply(ProtectionClassIP54),

resultingincompactsizeandeaseofsystemintegration

-capabilitytocreatedifferentiatedpartialpressureswhereneeded

-maximumthroughputcapacityatstableoperationpressure -ceramicballbearings,oil-free,contamination-free,no

preventivemaintenance,makethepumpmountableinanyposition

-extremelylowvibrationandnoiseforsensitiveapplications -watercooling(watercompatibilityupto35°C)allowslong

servicelifeofelectroniccomponents -permanentmonitoringsystemintegratedintheelectronic

device,andbuilt-inself-diagnosticscapability,incombinationwithourtailoredservice&supportplansoffersauniquesolutionforTFDapplications.

Courtesy Centorr. Courtesy Optovac Vacuum Coating Systems.

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AGILENT TURBO PUMPS MODELS

TwisTorr 84 FS TwisTorr 304 FS Turbo-V 551 Navigator

Turbo-V 701 Navigator


Turbo-V 2300 TwisTorr Turbo-V 1K-G Turbo-V 2K-G

SystemTurbo-V 3K-G

System

Pump specification DN40 DN63 DN100 DN160 DN100 DN160 DN200 DN160 DN200 DN250 DN250 DN160 DN200 DN250 DN250

Pumping speed, l/s

NitrogenHeliumHydrogenArgon

49383644

67635366

250255220250

250255220250

350450450

550600510

690620510

790820860

950870900

1,050900920

2,0501,8001,500

810950680750

1,0801,150730

1,040

1,600 2,200

Compression ratio


≥1 x 1011

2 x 106

5 x 104

>1 x 1011

>1 x 1011

>1 x 108

1.5 x 106

>1 x 1011

>1 x 109

1 x 107

1 x 106

1 x 109

1 x 107

1 x 106

1 x 109

1 x 107

1 x 106

>8 x 108

8 x 105

4 x 104

>5 x 107

>4 x 104

1.5 x 104

>5 x 108

3 x 105 >1 x 107

Base pressure, mbar

With recommended mechanical pump

<5 x 10-10 <1 x 10-10<1 x 10-10 <1 x 10-10 <1 x 10-10

10-10<1 x 10-10 <1 x 10-8 <1 x 10-9

With recommended dry pump <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-8 <1 x 10-9

Startup time, min < 2 < 3 < 5 < 5 < 4 < 6 < 5 < 7 < 6

Rotational speed, rpm 81,000 60,000 42,000 42,000 38,000 33,300 45,660 33,000 31,800

Recommended forepump MechanicalpumpDrypump

DS 42, DS 102SH-110, IDP-3

DS 102SH-110

DS 302IDP-15

DS 302IDP-15

DS 402IDP-15

DS 602TS600

>20 m3/h >36 m3/h >40 m3/h >60 m3/h

Inlet flange, nominal diameter

Klamp flange, mmConFlat, mm (inches OD)ISO clamp style, mmISO-F bolted, mm

4035 (2.75)

––

–63 (4.5)

63–

–100 (6)

100–

–160 (8)

160–

–100 (6)

––

–160 (8)

160160-F bolted

–200 (10)

200200-F bolted

––

160–

–200 (10)

200200-F bolted

––

250250-F bolted

–250 (12)

–250-F bolted

–––

160-F

–––

200-F

–––

250-F bolted

–––

250-F bolted

Foreline flange, nominal diameter Klamp flange NW16 NW16

(NW25 optional) NW25 NW25 NW40 NW40 NW25 NW40 NW40 NW40

SEM version available on request – – ● ● ● – – – –

ControllersRack controllerNavigator on board contr.Integrated electronicsPCB controller

●●–●

●●––

●●––

●●––

●●––

●–––

●●––

––●–

––●–

19

TURBO PUMPS

Turb

o Pu

mps

TwisTorr 84 FS TwisTorr 304 FS Turbo-V 551 Navigator



Turbo-V 2300 TwisTorr Turbo-V 1K-G Turbo-V 2K-G

SystemTurbo-V 3K-G

System

Pump specification DN40 DN63 DN100 DN160 DN100 DN160 DN200 DN160 DN200 DN250 DN250 DN160 DN200 DN250 DN250

Pumping speed, l/s


49383644

67635366

250255220250

250255220250

350450450

550600510

690620510

790820860

950870900

1,050900920

2,0501,8001,500

810950680750

1,0801,150730

1,040

1,600 2,200

Compression ratio


≥1 x 1011

2 x 106

5 x 104

>1 x 1011

>1 x 1011

>1 x 108

1.5 x 106

>1 x 1011

>1 x 109

1 x 107

1 x 106

1 x 109

1 x 107

1 x 106

1 x 109

1 x 107

1 x 106

>8 x 108

8 x 105

4 x 104

>5 x 107

>4 x 104

1.5 x 104

>5 x 108

3 x 105 >1 x 107

Base pressure, mbar

With recommended mechanical pump

<5 x 10-10 <1 x 10-10<1 x 10-10 <1 x 10-10 <1 x 10-10

10-10<1 x 10-10 <1 x 10-8 <1 x 10-9

With recommended dry pump <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-10 <1 x 10-8 <1 x 10-9

Startup time, min < 2 < 3 < 5 < 5 < 4 < 6 < 5 < 7 < 6

Rotational speed, rpm 81,000 60,000 42,000 42,000 38,000 33,300 45,660 33,000 31,800

Recommended forepump MechanicalpumpDrypump

DS 42, DS 102SH-110, IDP-3

DS 102SH-110

DS 302IDP-15

DS 302IDP-15

DS 402IDP-15

DS 602TS600

>20 m3/h >36 m3/h >40 m3/h >60 m3/h

Inlet flange, nominal diameter

Klamp flange, mmConFlat, mm (inches OD)ISO clamp style, mmISO-F bolted, mm

4035 (2.75)

––

–63 (4.5)

63–

–100 (6)

100–

–160 (8)

160–

–100 (6)

––

–160 (8)

160160-F bolted

–200 (10)

200200-F bolted

––

160–

–200 (10)

200200-F bolted

––

250250-F bolted

–250 (12)

–250-F bolted

–––

160-F

–––

200-F

–––

250-F bolted

–––

250-F bolted

Foreline flange, nominal diameter Klamp flange NW16 NW16

(NW25 optional) NW25 NW25 NW40 NW40 NW25 NW40 NW40 NW40

SEM version available on request – – ● ● ● – – – –

ControllersRack controllerNavigator on board contr.Integrated electronicsPCB controller

●●–●

●●––

●●––

●●––

●●––

●–––

●●––

––●–

––●–

20

Technical SpecificationsPumping speed(l/s)WithCFF4½”orISO63: N2:67l/s He:63l/s H2:53l/s Ar:66l/sWithCFF2¾”: N2:56l/s He:46l/s H2:40l/s Ar:57l/sWithKF40: N2:49l/s He:38l/s H2:36l/s Ar:44l/sGas throughput at full rotational speed(withrecommendedforepump)Aircooling(35°C) N2:100sccm Ar:70sccmWatercooling(25°C,65l/h) N2:100sccm Ar:70sccmCompression ratio N2:≥1x1011 He:2x106 H2:5x104 Ar:>1x1011

Base pressurewith recommended forepump (5m3/h) <5-10mbar(<3.75x10-10Torr)Inlet flange CFF4½”O.D. ISO63 CFF2¾”O.D. KF40Foreline flange KF16NWRotational speed 81000rpm(1350Hzdrivingfrequency)Start-up time <2minutesRecommended forepump Mechanical:AgilentDS42–DS102 Drypump:AgilentIDP-3,SH110Operating position AnyOperating ambient temperature +5°Cto+35°CRelative humidity of air 0-90%(notcondensing)Bakeout temperature 80°Catinletflangemax.(ISOflange) 120°Catinletflangemax.(CFFflange)Lubricant PermanentlubricationCooling requirements AirCooling: Airflowtemperature+5°Cto+35°C WaterCooling: Coolingwatertemperature:+15°Cto+25°C Minimumflow:65l/h(0.30GPM) Pressure:2to4bar(45to75psi)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Noise pressure level (at 1 mt at full speed) 40dB(A)*Storage temperature -40°Cto+70°CMax altitude 3000mCertifications CE,C-CSA-US,RoHScompliantasper2011/65/UEWeight kg(lbs) PumpISO63: PumpCFF4½”: PumpCFF2¾”: PumpKF40: 2.5(5.5) 3.5(7.7) 3.34(7.35) 2.37(5.22)* Average value ± 4 dB(A) std deviation

Dimensions: millimeters (inches)

AGILENT TURBO PUMP MODELS

► Agilent TwisTorr 84 FS

61.6

(2.4

3)20

°25

°11

5.7

(4.5

6)

Ø 97.0 (3.82)

111.

4 (4

.39)

105.

4 (4

.15)

148.

3 (5

.84)

FORELINE FLANGE

ELECTRICALCONNECTOR

VENTSCREW

62.5 (2.46)59.3 (2.33)

67.7

(2.6

7)20

°25

°12

2.0

(4.8

0)

Ø 97.0 (3.82)

117.

7 (4

.63)

111.

7 (4

.40)

154.

6 (6

.09)

FORELINE FLANGE

ELECTRICALCONNECTOR

VENTSCREW

62.5 (2.46)59.3 (2.33)

21

TURBO PUMPS

Turb

o Pu

mps

Pumps Part NumberTwisTorr84FSISO63 X3502-64000TwisTorr84FSKF40 X3502-64001TwisTorr84FSCFF4½” X3502-64002TwisTorr84FSCFF2¾” X3502-64003Controllers Part NumberTwisTorr84FSAGRackcontrollerRS232/485 X3508-64001TwisTorr84FSAGRackcontrollerProfibus X3508-64002TwisTorr84FSon-boardcontroller110/220V X3509-64000TwisTorr84FSon-boardcontroller24V X3509-64001TwisTorr84FSPCBController X3510-64000Accessories Part NumberCablesMainscableNEMAplug,3mlong 969-9958MainscableEuropeanplug,3mlong 969-9957SerialcableandT-plussoftware 969-9883PCBcable 969-9869Pumpextensioncable(3m) 969-9942Extensioncable5m 969-9942M007Extensioncable10m 969-9942M006Extensioncable15m 969-9942M005Extensioncable20m 969-9942M004Inlet screenInletscreenISO63 X3502-68001InletscreenCFF4½” X3502-68000Inletscreen,KF40 969-9309InletscreenCFF2¾” 969-9328CoolingMetalWaterCoolingKit X3502-68002PlasticWatercoolingkit X3502-68003Aircoolingkit(0,5mcable) 969-9290Aircoolingkitextensioncable(5m) 969-9940

Accessories Part NumberVibration isolatorVibrationisolatorISO63 969-9375VibrationisolatorCFF4½” 969-9376VentingVentValveN.O.0,5mmorifice(0,5mcable) 969-9844VentValveextensioncable(5m) 969-9941VentValveextensioncable(10m) 969-9941M003VentValveextensioncable(15m) 969-9941M001VentValveextensioncable(20m) 969-9941M005VentScrewM5 X3502-68005VentAdapterkitM5-M8 X1699-64039PurgePurgeScrew X3502-68004Purgevalve10SCCMNW16KF-M12 969-9239Purgevalve10SCCM¼Swagelok-M12 969-9240Purgevalve20SCCMNW16KF-M12 969-9241Purgevalve20SCCM¼Swagelok-M12 969-9242Purgevalve10SCCM¼Swagelok-¼Swagelok 969-9232Purgevalve20SCCM¼Swagelok-¼Swagelok 969-9236MountingControllersidemountingbracket X3502-68006CFF4½”mountingkit X3502-68007Metricscrewskit X3502-68008Americanscrewskit X3502-68009Active GaugesFRG700FullRangeGauge AskAgilentfordetailsPVG500PiraniVacuumGauge AskAgilentfordetailsPCG750PiraniCapacitanceGauge AskAgilentfordetailsCDG-500CapacitanceDiaphragmGauge AskAgilentfordetails

Ordering Information


110-3 10-1

Com

pres

sion

ratio

110-2 103102

1012

108

1010

106

104

102


80

010-9 10-7 10-6 10-2

Pum

ping

spee

d (l/

s)

110-8 10-5 10-4 10-3 10-1

70

5060

3040

2010

Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure

Argon Nitrogen Helium Hydrogen Argon Nitrogen Helium Hydrogen

22

59.0

(2.3

)91

.0 (3

.6)

72.7

(2.9

)17

.9 (0

.7)

4.5

(0.2

)

107.0 (4.2) 107.0 (4.2)

91.0 (3.6)

68.5 (2.7)21.4 (0.8) 4x3MA LMAX=8mm

3x5MA LMAX=8mm


TheTwisTorr84FSAGNavigatorOn-boardcontrollerisasolid-statefrequencyconverterwiththefollowingfeatures:• DrivestheTwisTorr84FSpumps• Powersthepumpcoolingfan• Drivestheventvalve• Providesandacquiresthepressureofthewiderangegauge.• RemoteI/Oscompatiblewiththepreviousversion• NavigatordefaultserialcompatiblewiththepreviousRS232

and485version• AbletooperatewithActiveGauges(FullRangeGauge

FRG-700andFRG-702)Thededicatedcontrollerisasolid-statefrequencyconverterwhichisdrivenbyasinglechipmicrocomputerandconsistsoftwoPCBswhichincludepowersupplyand3-phaseoutput,analogandinput/outputsection,microprocessoranddigital

section.Thepowersupply,togetherwiththe3-phaseoutput,convertsthesinglephaseACmainssupplyor24Vdcsupplyintoa3-phase,lowvoltage,mediumfrequencyoutputwhichisrequiredtopowerthepump.Thecontrollercanbeoperatedbyaremotehostcomputerviatheserialconnection.AWindows-basedsoftwareisavailable(optional).TheTwisTorr84FSAGNavigatorcontrollercanbemountedonboard,onthebottomoftheTwisTorr84FSpumps.

Technical SpecificationsInput voltages: Navigatorcontroller,24Vdc 24Vdc±10%Navigatorcontroller,100/240Vac 100÷240Vac±10%Input power: Navigatorcontroller,24Vdc 80WNavigatorcontroller,100/240Vac 180VAInput frequency: Navigatorcontroller,100/240Vac 50to60Hz±5%Fuse 2xT4A250VOutput voltage 60VacOutput frequency 1350HzOutput power: Navigatorcontroller,24Vdc 50WNavigatorcontroller,100/240Vac 70W(ramp), 50W(NormalandAutotuning)Operating temperature +5÷+45°C 0–90%(Notcondensing)Storage temperature -20°Cto+70°C 0–95%

Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr84FSon-boardcontroller*110/220V 0.3(0.66) X3509-64000TwisTorr84FSon-boardcontroller*24V 0.3(0.66) X3509-64001* Order power cable separately

CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details

AGILENT TURBO PUMP CONTROLLERS

► Agilent TwisTorr 84 FS AG Navigator On-board Controller

23

TURBO PUMPS

Turb

o Pu

mps

244 (9.61)

106.4 (4.19)

91.4 (3.60)= =

1.5 (0.06)

8.7

(0.3

4)9.

3 (0

.36)

128.

5 (5

.06)

110.

5 (4

.35)

96.1

(3.7

8)

122.

5 (4

.82)

==

Measures

Start/Stop

Counters

Next

Previous

Vacuum Products

Low Speed

Decrease

Increase

Menu


TheTwisTorr84FS-AGRackcontrollerisamicroprocessor-controlledfrequencyconverterwithnew,enhancedfeaturesthatallowgreatercontrolandcommunicationcapabilities.Thiscompact,¼rackunitisdesignedforfullworldwidecompatibility,forventvalvecontrol,activegaugepressurereadingandpumpoperationparameterscontrol,aswellasforselfdiagnosticandprotectionfeatures.• Universal Voltage

Controllerabletoautosetaccordingtotheinputvoltage,providingflexibilityforeasyinstallationworldwide

• RS-232/485 Communication Protocols and Profibus (Options)

- Allowsthepumptobeinterfacedwiththesystemcontrols- EnablesthepumptobeoperatedviaPCwithT-Plussoftware- Helpsdevelopmentofowncustomersoftware• Stop Speed Reading (SSR)- Continuespumpspeedreadingafterthestopcommand- Allowsmonitoringthepumpinslowdownrampandshut

downtime• N.O. and N.C. Vent Valve Drive- Valvedelayandopeningtimeadjustable- Ventvalvedrivenbycontrollerautomaticallyorbyserialline- OpeningtimecontrolthroughSSRfunction

• Active Gauge Pressure Reading Capability- AbletooperatewithActiveGauges(FullRangeGauge

FRG-700andFRG-702)- Providesaccuratepressuremeasurementsfromatmdown

to10-9mbar- Rackmountedcontrolelectronicsnolongernecessary,

withsimple+24Vdcpowerconnector- Proveninvertedmagnetrondesign- Rapidstarteveninhigh-vacuumconditions

Technical SpecificationsInput 100÷240Vac 50/60HzMaximum input power 210VAOutput voltage 76VacOutput frequency 1,350HzNominal output power 100WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C

Ordering InformationDescription Weight Part kg(Ibs) NumberControllerTwisTorr84FSAGRackcontroller*RS232/485 1.7(3.2) X3508-64001TwisTorr84FSAGRackcontroller*Profibus 1.7(3.2) X3508-64002* Order power cable separately

CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details

► Agilent TwisTorr 84 FS-AG Rack Controller

24


Technical SpecificationsPumping speed(l/s)WithCFF6”orISO100: N2:250l/s He:255l/s H2:220l/s Ar:250l/sWithCFF8”orISO160: N2:250l/s He:255l/s H2:220l/s Ar:250l/sGas throughput at full rotational speed(withrecommendedforepump)AmbientTemp.(25°C) N2:170sccm Ar:110sccmWaterTemp.(25°C,50l/h) N2:170sccm Ar:110sccmCompression ratio & Foreline tolerance N2:>1x1011 He:>1x108 H2:1.5x106 Ar:>1x1011 N2:>10mbar He:>10mbar H2:>4mbar Ar:>10mbarBase pressurewith recommended forepump (5m3/h) <1x10-10mbar (<1x10-10Torr)Inlet flange CFF8”O.D. ISO160 CFF6”O.D. ISO100Foreline flange KF16NW(KF25-optional)Rotational speed 60000rpm(1010Hzdrivingfrequency)Start-up time <3minutesRecommended forepump Mechanical:AgilentDS102 Drypump:AgilentSH-110Operating position AnyOperating ambient temperature +5°Cto+35°CRelative humidity of air 0-90%(notcondensing)Bakeout temperature 80°Catinletflangemax.(ISOflange) 120°Catinletflangemax.(CFFflange)Lubricant PermanentlubricationCooling requirements Forcedair(5-35°Cambienttemperature) Water(mandatoryifambienttemperature>35°C)Coolant water Minimumflow: Temperature: Pressure: 50l/h(0.89GPM) +15°Cto+30°C 3to5bar(45to75psi)Noise pressure level <50dB(A)at1meterStorage temperature -40°Cto+70°CMax altitude 3000mWeight kg(lbs) PumpISO100: PumpCFF6”: PumpISO160: PumpCFF8”: 5.5kg(12.3) 7.5kg(16.5) 5.7kg(12.6) 9.7kg(20.9)


► Agilent TwisTorr 304 FS

99.2

(3.9

1)

134.

6 (5

.30)

ISO 100

134.

6 (5

.30)

179.

2 (7

.05)

Ø144 (5.67)

106.

6 (4

.19)

142.

0 (5

.59)

CFF 6”

142.

0 (5

.59)

186.

5 (7

.34)

Ø144 (5.67)

86.5 (3.41)

39°0'27°0'

27°0'

36°0'

144.0 (5.67)

86.3 (3.40)

38.0 (1.50)

ELECTRICALCONNECTOR

FORELINEFLANGE

VENT SREW

86.5 (3.41)

39°0'27°0'

27°0'

36°0'

144.0 (5.67)

86.3 (3.40)

38.0 (1.50)

WATERCOOLING

WATERCOOLING

ELECTRICALCONNECTOR

FORELINEFLANGE

VENT SREW

25

TURBO PUMPS

Turb

o Pu

mps


110-10 10-8 10-8

Com

pres

sion

ratio

10-1 10-1 1021

102

104

106

1010

108

1012


300

010-910-10 10-7 10-6 10-2

Pum

ping

spee

d (l/

s)

110-8 10-5 10-4 10-3 10-1

250

200

150

100

50

Ordering InformationPumps Part NumberTwisTorr304FSISO100watercooling X3500-64000TwisTorr304FSCFF6”watercooling X3500-64001TwisTorr304FSISO160watercooling X3500-64002TwisTorr304FSCFF8”watercooling X3500-64003TwisTorr304FSISO100aircooling X3500-64004TwisTorr304FSCFF6”aircooling X3500-64005TwisTorr304FSISO160aircooling X3500-64006TwisTorr304FSCFF8”aircooling X3500-64007TwisTorr304FSISO100SFwatercooling X3500-64010

Controllers Part NumberTwisTorr304FSAGRackcontrollerwithRS232/485 X3506-64002TwisTorr304FSAGRackcontrollerwithProfibus X3506-64003TwisTorr304FSonboardcontroller24Vdc X3507-64002TwisTorr304FSonboardcontroller100-240Vac X3507-64003

Accessories Part NumberCablesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883Extensioncable5m 969-9942M007Extensioncable10m 969-9942M006Extensioncable15m 969-9942M005Extensioncable20m 969-9942M004Inlet screenInletScreenISO100 X3500-68000InletScreenCFF6” 9699302InletScreenISO160 X3500-68001InletScreenCFF8” 9699304

Accessories Part NumberCoolingWatercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforOnboardcontroller X3500-68010FanextensioncableforOnboardcontroller 9699949AircoolingkitforrackAGcontroller X3500-68011FanextensioncableforrackAGcontroller 9699940Vibration isolatorVibrationisolatorISO100 9699344VibrationisolatorCF6” 9699334VibrationisolatorISO160 9699345VibrationisolatorCF8” 9699335VibrationisolatorISO100IDX 9699396Ventflange,NW10KF/M8 9699108VentingDelayventvalve1.2mmorifice X3505-68000Delayventvalve0.5mmorifice X3505-68001VentvalveN.O.forrackAGcontroller(0.5mm) 9699844Ventvalveforon-boardcontroller(1.2mm) 9699834Ventvalveforon-boardcontroller(0.5mm) 9699834M006PurgePurgevalve10SCCMNW16KF-M12 9699239Purgevalve10SCCM¼Swagelok-M12 9699240Purgevalve20SCCMNW16KF-M12 9699241Purgevalve20SCCM¼Swagelok-M12 9699242Purgevalve10SCCM¼Swagelok-¼Swagelok 9699232Purgevalve20SCCM¼Swagelok-¼Swagelok 9699236MountingBracketforOnboardcontrollersidemounting X3500-68012ForelineflangeKF25 X3500-68002Active GaugesFRG700FullRangeGauge AskAgilentfordetailsPVG500PiraniVacuumGauge AskAgilentfordetailsPCG750PiraniCapacitanceGauge AskAgilentfordetailsCDG-500CapacitanceDiaphragmGauge AskAgilentfordetails


Argon Nitrogen Helium Hydrogen Argon Nitrogen Helium Hydrogen

26

24 V controller front panel

FUSE TYPE

T 8A

MAINS

T 3A

FUSE TYPE

MAINS

VENTP3

J6 SERIALFANP5

STATUSLD1

J5 IN-OUTP5

FANP3

VENT

LD1STATUS

J6 SERIAL J5 IN-OUT

120/220 V controller front panel

107.0 (4.2)= =

==

107.

0 (4

.2)

TheTwisTorr304FSonboardcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.

Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.



► Agilent TwisTorr 304 FS on board Controller

Technical SpecificationsInput voltages: Onboardcontroller,24Vdc 24Vdc±10%Onboardcontroller,120/220Vac 100/120/220/240Volt, 1phase,50/60HzMaximum input power: 100-240controller,24Vdc 200W100-240controller,120/220Vac 300VAOutput voltage 75Vac,3phaseOutput frequency 963HzNominal power 150WStart-up power 150WOperating temperature 0°Cto+40°CStorage temperature 20°Cto+70°C

Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr304FSonboardcontroller*24Vdc 0.3(0.66) X3507-64002TwisTorr304FSonboardcontroller*100-240Vac 0.3(0.66) X3507-64003* Order power cable separately

CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883

27

TURBO PUMPS

Turb

o Pu

mps

244 (9.61)

106.4 (4.19)

91.4 (3.60)= =

1.5 (0.06)

128.

5 (5

.06)

122.

5 (4

.82)

==

8.7

(0.3

4)9.

3 (0

.36)

110.

5 (4

.35)

96.1

(3.7

8)

Measures

Start/Stop

Counters

Next

Previous

Vacuum Products

Low Speed

Decrease

Increase

Menu

TwisTorr 304 FS AG

TheTwisTorr304FSAGRackcontrollerisamicroprocessor-controlledfrequencyconverterwithnew,enhancedfeaturesthatallowgreatercontrolandcommunicationcapabilities.Thiscompact,¼rackunitisdesignedforfullworldwidecompatibility,forventvalvecontrol,activegaugepressurereadingandpumpoperationparameterscontrol,aswellasforselfdiagnosticandprotectionfeatures.• Universal Voltage

Controllerabletoautosetaccordingtotheinputvoltage,providingflexibilityforeasyinstallationworldwide

• RS-232/485 Communication Protocols and Profibus (Options)

- Allowsthepumptobeinterfacedwiththesystemcontrols- EnablesthepumptobeoperatedviaPCwithT-Plussoftware- Helpsdevelopmentofowncustomersoftware• Stop Speed Reading (SSR)- Continuespumpspeedreadingafterthestopcommand.- Allowsmonitoringthepumpinslowdownrampandshut

downtime• N.O. and N.C. Vent Valve Drive- Valvedelayandopeningtimeadjustable- Ventvalvedrivenbycontrollerautomaticallyorbyserialline- OpeningtimecontrolthroughSSRfunction

Technical SpecificationsInput 100÷240Vac 50/60HzMaximum input power 300VAOutput voltage 75VacOutput frequency 963HzNominal output power 150WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C

Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTwisTorr304FSAGRackcontroller*withRS232/485 1.7(3.2) X3506-64002TwisTorr304FSAGRackcontroller*withProfibus 1.7(3.2) X3506-64003* Order power cable separately

CablesMainscableNEMAPlug,3mlong 969-9958MainscableEuropeanPlug,3mlong 969-9957SerialcableandT-PlusSoftware 969-9883Active GaugesPVG-500Pirani,KF16 PVG500KF16PVG-500PiraniTungstenfilament,KF16 PVG500KF16SFRG-700Pirani/IMGCombinationGauge,KF25 FRG700KF25FRG-700Pirani/IMGCombinationGauge,DN40CF FRG700CF35FRG-702Pirani/IMGCombinationGauge,KF25Allmetal-bakeable FRG702KF25FRG-702Pirani/IMGCombinationGauge,DN40CFAllmetal-bakeable FRG702CF35PCG-750Pirani/CDGCombinationGauge(Tungsten),KF16 PCG750KF16GaugeconnectioncabletoAGrackcontroller-3m 9699960GaugeconnectioncabletoAGrackcontroller-5m 9699961NOTE • For other Active Gauges models please ask Agilent for details


► Agilent TwisTorr 304 FS AG Rack Controller

• Active Gauge Pressure Reading Capability- AbletooperatewithActiveGauges(IM-500,FullRange

GaugeFRG-700andFRG-702)- Providesaccuratepressuremeasurementsfromatmdown

to10-9mbar- Rackmountedcontrolelectronicsnolongernecessary,

withsimple+24Vdcpowerconnector- Proveninvertedmagnetrondesign- Rapidstarteveninhigh-vacuumconditions

28

332.

8 (1

3.1)

ISO 160-FØ225.0 (8.8)

229.

1 (9

.0)

A

CFF 6"Ø151.6 (6.0)

==157.1 (6.2)

120'

VIEW FROM "A"

109.8 (4.3)166.0 (6.5)

MoniTorrPORT

13.2

(0.5

)

343.

8 (1

3.5)

130.

8 (5

.1)

70.0

(2.8

)

200.6 (7.9)

Ø202.4 (8.0)Ø180.0 (7.1)ISO 160 CFF 8"

11.3

(0.4

)12

6.0

(5.0

)14

6.5

(5.8

)33

4.3

(13.

2)PURGEPORT

11.6

(0.5

)

325.

8 (1

2.8)

VIEW FROM ""

VETPORT

Ø114.0 (4.5)

Ø115.0 (4.5)

Ø164.0 (6.5)

203.7 (8.0)

Ø163.4 (6.4)

(WATER COOIG )

(WATER COOIG )

EOW 90EECT.COECTOR

FOREIEF 25

WATERCOOIG 18 G

WATERCOOIG 18 G

Ø203.7 (8.0)


► Agilent Turbo-V 551 Navigator


Technical SpecificationsPumping speed(withinletscreen)CFF6”: N2:350l/s He:450l/s H2:450l/sCFF8”orISO160: N2:550l/s He:600l/s H2:510l/sCompression ratio N2:1x109 He:1x107 H2:1x106

Base pressure*(withminimumrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange CFF6” ISO160 CFF8” ISO160-FboltedForeline flange KF25Rotational speed 42,000rpmStart-up time <5minutesRecommended forepump Mechanical:AgilentDS302 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements Naturalairconvection Wateroptional(usewaterwithelectrical conductivity≤500µS/cm)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs) ISOflange19.4(43.0) CFflange23.4(51.6) CFandISOboltedflange23.4(51.6)* According to PNEUROP 5608.

SEMversionavailableonrequest

29

TURBO PUMPS

Turb

o Pu

mps

Ordering InformationDescription Weight Part kg(Ibs) Number

Complete Systems Turbo-V551Navigatorcompletesystem,ISO160flange 19.4(43.0) 9698832Turbo-V551Navigatorcompletesystem,ISO160-Fboltedflange 23.4(51.6) 9698842Turbo-V551Navigatorcompletesystem,6”CFflange 23.4(51.6) 9698835Turbo-V551Navigatorcompletesystem,8”CFflange 23.4(51.6) 9698833Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).

PumpsTurbo-V551Navigatorpump,ISO160flange 16.0(35.0) 9698922Turbo-V551Navigatorpump,ISO160-Fboltedflange 22.0(49.0) 9698944Turbo-V551Navigatorpump,6”CFflange 22.0(49.0) 9698925Turbo-V551Navigatorpump,8”CFflange 22.0(49.0) 9698923

ControllersTurbo-V551Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698976Turbo-V551Rackcontroller,100-240V 15.7(35.0) X3501-64001

Description Weight Part kg(Ibs) Number

AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) InletscreenDN100 9699302InletscreenDN160 9699304Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699339Aircoolingkitforusewithstandardrackcontroller,24V X3501-68001BracketforNavigatorcontrollersidemouting 9699349VibrationdamperCFF6” 3.0(7.0) 9699334VibrationdamperISO160 4.0(9.0) 9699345VibrationdamperCFF8” 4.0(9.0) 9699335Ventflange,NW10KF/M8 9699108Ventvalvekitforstandardrackcontroller,24V X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF-M12 9699239Purgevalve10SCCM¼Swagelok-M12 9699240

010 -5


Pum

ping

spee

d (l/

s)

10 -10

100

200

400

500

700

10 -4 10 -3 10 -2 10 -1 1 10

300

600

110 -1 1 10 100


Com

pres

sion

ratio

10 -2

102

104

106

108

1010

Pumping Speed vs Inlet Pressure (DN 160 only) Compression Ratio vs Foreline Pressure

Nitrogen Helium HydrogenNitrogen Helium Hydrogen

30

130.

8 (5

.1)

229.

1(9.

0)

314.

8 (1

2.4)

A

196.1 (7.7)253.2 (10.0)

(WATER COOLING)

(WATER COOLING)

CFF 10"

VIEW FROM "B"

109.7 (4.3)

Ø224.0 (8.8)Ø240.0 (9.5)

324.

9 (1

2.8)

146.

5 (5

.8)

126.

0 (5

.0)

46.0

(1.8

)70

.0 (2

.8)

200.6 (7.9)

115.1 (4.5)

ISO 200

B

Ø203.7 (8.0)

VENT PORT

ISO 200-F

120'

==157.1 (6.2)VIEW FROM "A"

166.0 (6.5)

FORELINEKF 25

324.

7 (1

2.8)

PURGE PORT

ELBOW 90ELECT.CONNECTOR

WATERCOOLING 18 G

WATERCOOLING 18 G

Ø285.0 (11.2)

Ø203.7 (8.0)




Technical SpecificationsPumping speed(withinletscreen)CFF10”orISO200: N2:690l/s He:620l/s H2:510l/sCompression ratio N2:1x109 He:1x107 H2:1x106

Base pressure*(withminimumrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange CFF10” ISO200 ISO200-FboltedForeline flange KF25Rotational speed 42,000rpmStart-up time <5minutesRecommended forepump Mechanical:AgilentDS402 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements Naturalairconvection Wateroptional(usewaterwithelectrical conductivity≤500µS/cm)Bakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs) ISOflange19.4(43.0) CFflange25.5(54.2) CFandISOboltedflange25.5(54.2)* According to PNEUROP 5608.


31

TURBO PUMPS

Turb

o Pu

mps

010 -5


Pum

ping

spee

d (l/

s)

10 -10

100

200

400

500

700

10 -4 10-3 10 -2 10 -1 1 10

300

600

110-1 1 10 100


Com

pres

sion

ratio

10 -2

102

104

106

108

1010



Ordering InformationDescription Weight kg(Ibs) Part NumberComplete SystemsTurbo-V701Navigatorcompletesystem,ISO200flange 19.0(43.0) 9698836Turbo-V701Navigatorcompletesystem,ISO200-Fboltedflange 25.0(56.0) 9698843Turbo-V701Navigatorcompletesystem,10”CFflange 25.0(56.0) 9698837Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).

PumpsTurbo-V701Navigatorpump,ISO200 16.0(35.0) 9698926Turbo-V701Navigatorpump,ISO200-Fbolted 22.0(49.0) 9698945Turbo-V701Navigatorpump,10”CFF 22.0(49.0) 9698927ControllersTurbo-V701Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698977Turbo-V701Rackcontroller,100-240V 16.0(35.0) X3501-64002AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware(previous release Navigator 2.2 included in the CD) 9699883InletscreenDN200 9699316Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699339Aircoolingkitforusewithstandardrackcontroller,24V X3501-68001BracketforNavigatorcontrollersidemounting 9699349Vibrationdamper,ISO200 5.0(10.0) 9699346Vibrationdamper,CFF10” 5.0(10.0) 9699336Ventflange,NW10KF/M8 9699108Ventvalvekitforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF–M12 9699239Purgevalve10SCCM¼Swagelok–M12 9699240

32

LD1

J1 IN-OUTJ2 SERIAL

STATUS

P4P3VENT FAN

FUSE TYPE T XXA

MP

Ø 200.6 (7.88)70.0 (2.76)

201.

7 (7

.94)


► Agilent Turbo-V 551 and 701 Navigator Controllers

TheTurbo-V551and701Navigatorcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.

Technical SpecificationsInput voltages 100/120/220/240VAC 50/60Hz,1phMaximum input power 640VAOutput voltage 54VAC,3phOutput frequency 714HzOperating temperature 0°Cto+40°CStorage temperature –20°Cto+70°C


ControllersTurbo-V551Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698976Turbo-V701Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698977

AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) External“TMPProfibusgateway” 9699261


33

TURBO PUMPS

Turb

o Pu

mps

► Agilent Turbo-V 551 and 701 Rack Controllers

Technical SpecificationsInput voltages 100-240V 1ph,50/60HzMaximum input power 800VAOutput frequency 700HzMaximum output power*V501: 320WV701: 350WStartup power 430WOperating temperature +5°Cto+45°CStorage temperature –20°Cto+70°C* Data valid for nitrogen.

Ordering InformationDescription Weight Part kg(Ibs) NumberControllersTurbo-V551RackcontrollerwithRS232/485,120-220V 15.7(35.0) X3501-64001Turbo-V701RackcontrollerwithRS232/485,120-220V 15.7(35.0) X3501-64002AccessoriesJ1inputmatingconnector 9699853P6andP7matingplug 9699854Mainscable(Europeanplug,3mlong) 9699957Mainscable(Americanplug,120V,3mlong) 9699958OptionsP2outputmatingconnector 9699852Rackadapterforcontroller 9699191Controllertopumpextensioncable(3mextension)forTurbo-V551,701 1.0(2.0) 9699948Controllertopumpextensioncable(5mextension)forTurbo-V551,701 2.0(4.0) 9699948M001Controllertopumpextensioncable(20mextension)forTurbo-V551,701 4.0(8.0) 9699948M002

Thesecontrollersaremicroprocessor-controlledfrequencyconverterswithselfdiagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Thecompact,½rackunithasamultifunctionalphanumericdisplayforpumpstatusanderrorcodediagnostics.Thefrontpanelhasatwo-linedotmatrixLCDdisplaywithbacklighting.Itdisplaysrotationalspeedasthepumpstartsupandindicateswhenfullspeedisreached.Atanytimeduringtheoperationofthepump,thespeed,current,power,andbearingtemperaturecanbedisplayed.Additionally,themicroprocessoractsasapump

cyclelog,andcandisplaythenumberofvacuumcycles,thecycletimeforthecurrentcycle,andthetotaloperatinghoursonthepump.Remoteoperationcanbeaccomplishedwithlogiclevelcontactclosuresandwithoptionalcomputerinterfaces.PCBcontrollersareavailable.PleasecontactAgilentfordetails.


295 (11.61)

128.

5 (5

.06)

198 (7.8)

213 (8.38)

122.

5 (4

.82)

110.

5 (4

.35)

Measures

Start/Stop

PDHSLS

PurgeVent

Counters

Vacuum Products

Turbo-V 551 HT

Low Speed

Menu

34

Ø285.0 (11.22) Ø335.0 (13.19)

Ø232.0 (9.13) Ø232.0 (9.13)

294.

3 (1

1.48

)

158.

1 (6

.17)

ISO 160

ISO 200

ISO 250

ISO 200-F ISO 250-F15

8.1

(6.1

7)

252.

8 (9

.86)

279.

4 (1

0.90

)

52.0

(2.0

3)

CFF 10"

322.

7 (1

2.58

)

228.

5 (8

.91)

122.

8 (4

.79)

200.6 (7.82)

70.0

(2.7

3)

52.0

(2.0

3)

ELEC. CONNECTOR

WATER COOLING

WATER COOLING

VENT1020'

WATER COOLING

ELEC. CONNECTOR WATER

COOLING

VENT1020'

1020'

323.

5 (1

2.74

)

350.

6 (1

3.80

)

Ø232.0 (9.13)

Dimensions: millimeters (inches)Technical SpecificationsPumping speed: ISO160: N2:790l/s He:820l/s H2:860l/s CFF10”orISO200: N2:950l/s He:870l/s H2:900l/s ISO250: N2:1,050l/s He:900l/s H2:920l/sCompression ratio: ISO160 N2:1x109 He:1x107 H2:1x106 CFF10”/ISO200-ISO250 N2:1x109 He:1x107 H2:1x106

Base pressure*(withrecommendedforepump) <1x10-10mbar(<1x10-10Torr)Inlet flange ISO160 ISO200 ISO200-Fbolted CFF10” ISO250 ISO250-FboltedForeline flange KF40Rotational speed 38,000rpmStart-up time <4minutesRecommended forepump Mechanical:AgilentDS402 Dryscroll:AgilentTS300,IDP-15Operating position AnyCooling requirements ForcedairorwaterBakeout temperature 120°Catinletflangemax.(CFflange) 80°Catinletflangemax.(ISOflange)Vibration level(displacement) <0.01µmatinletflangeWeight kg(lbs): ISO160flange 19(41.8) ISO200flange 19.4(43.0) CF10”flange 25.5(54.2) ISO250flange 21.2(46.6) ISO200-Fand250-Fboltedflange,CF10”flange 25.5(54.2)* According to standard DIN 28 428. ailable with On-board Navigator controller, ½ Rack controller or PCB controller;

for information on controllers see also following pages.




35

TURBO PUMPS

Turb

o Pu

mps


Complete Systems Turbo-V1001Navigatorcompletesystem,ISO160flange 24.4(53.8) 9698840Turbo-V1001Navigatorcompletesystem,ISO200flange 24.8(55.0) 9698838Turbo-V1001Navigatorcompletesystem,ISO200-Fboltedflange 30.9(66.2) 9698844Turbo-V1001Navigatorcompletesystem,10”CFflange 30.9(66.2) 9698839Turbo-V1001Navigatorcompletesystem,ISO250flange 26.6(58.6) 9698841Turbo-V1001Navigatorcompletesystem,ISO250-Fboltedflange 30.9(66.2) 9698845Complete system includes: Pump, Inlet screen, Controller mounted on the bottom, 2 Mains cables (NEMA plug and European plug).

PumpsTurbo-V1001Navigatorpump,ISO160flange 19.0(41.8) 9698933Turbo-V1001Navigatorpump,ISO200flange 19.4(43.0) 9698931Turbo-V1001Navigatorpump,ISO200-Fboltedflange 25.5(54.2) 9698946Turbo-V1001Navigatorpump,8’’CFflange 25.5(54.2) 9698932M003Turbo-V1001Navigatorpump,10”CFflange 25.5(54.2) 9698932Turbo-V1001Navigatorpump,ISO250flange 21.2(46.6) 9698934Turbo-V1001Navigatorpump,ISO250-Fboltedflange 25.5(54.2) 9698947

Controllers(See following pagesforspecifications)Turbo-V1001Navigatorcontroller120/220V-50/60Hz 5.4(12.0) 9698978Turbo-V1001Rackcontroller,100-240V 15.7(35.0) X3501-64003

Description Weight Part kg(Ibs) Number

Pump AccessoriesMainscableNEMAplug,3mlong 9699958MainscableEuropeanplug,3mlong 9699957SerialcableandT-plusSoftware 9699883(previous release Navigator 2.2 included in the CD) InletscreenDN160 9699304InletscreenDN200 9699316InletscreenDN250 9699350Watercoolingkit 9699337Plasticwatercoolingkit 9699347AircoolingkitforusewithNavigatorcontroller 9699297Aircoolingkitforusewithstandardrackcontroller X3501-68001BracketforNavigatorcontrollersidemouting 9699298VibrationdamperISO160 4.0(9.0) 9699345Vibrationdamper,ISO200 5.0(10.0) 9699346Vibrationdamper,CFF10” 5.0(10.0) 9699336Ventflange,NW10KF/M8 9699108Ventdevicewithadjustabledelaytimeforstandardrackcontroller 9699831Ventvalveforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834Purgevalve10SCCMNW16KF–M12 9699239Purgevalve10SCCM¼Swagelok–M12 9699240Purgevalve20SCCMNW16KF-M12 9699241Purgevalve20SCCM¼Swagelok–M12 9699242Purgevalve10SCCM¼Swagelok¼Swagelok 9699232PurgeValve20SCCM¼Swagelok¼Swagelok 9699236

010-5


Pum

ping

spee

d (l/

s)

10-10

200

400

800

1000

1200

10-4 10-3 10-2 10-1 1 10

600

110-1 1 10 100


Com

pres

sion

ratio

10-2

102

104

106

108

1010



36

LD1

J1 IN-OUTJ2 SERIAL

STATUS

P4P3VENT FAN

FUSE TYPE T XXA

MP

Ø 200.6 (7.88)70.0 (2.76)

201.

7 (7

.94)

TheTurbo-V1001Navigatorcontrollersaremicroprocessor-controlledfrequencyconverters,fullycontrollablethroughPCsoftware,withself-diagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Theycanbemountedonboard,eitheronthebottomoronthesideofthepump,offeringoutstandingflexibilityandsimplicity.

Technical SpecificationsInput voltages 100/120/220/240VAC 50/60Hz,1phMaximum input power 850VAOutput voltage 54VAC,3phOutput frequency 640HzOperating temperature 0°Cto+40°CStorage temperature -20°Cto+70°C


ControllersTurbo-V1001Navigatorcontroller120/220V-50/60Hz 3.0(6.0) 9698978

AccessoriesMainscableNEMAplug,3mlong 0.5(1.0) 9699958MainscableEuropeanplug,3mlong 0.5(1.0) 9699957SerialcableandT-plusSoftware 0.5(1.0) 9699883(previous release Navigator 2.2 included in the CD) External“TMPProfibusgateway” 0.4(0.8) 9699261



► Agilent Turbo-V 1001 Navigator Controller

37

TURBO PUMPS

Turb

o Pu

mps

Thesecontrollersaremicroprocessor-controlledfrequencyconverterswithselfdiagnosticandprotectionfeaturesthatensurethehighestdegreeofreliability.Thecompact,½rackunithasamultifunctionalphanumericdisplayforpumpstatusanderrorcodediagnostics.Thefrontpanelhasatwo-linedotmatrixLCDdisplaywithbacklighting.Itdisplaysrotationalspeedasthepumpstartsupandindicateswhenfullspeedisreached.Atanytimeduringtheoperationofthepump,thespeed,current,power,andbearingtemperaturecanbedisplayed.Additionally,themicroprocessoractsasapump

cyclelog,andcandisplaythenumberofvacuumcycles,thecycletimeforthecurrentcycle,andthetotaloperatinghoursonthepump.Remoteoperationcanbeaccomplishedwithlogiclevelcontactclosuresandwithoptionalcomputerinterfaces.PCBcontrollersareavailable.PleasecontactAgilentfordetails.

Technical SpecificationsInput voltages 100-240V 1ph,50/60HzMaximum input power 800VAOutput voltage 56VAC,3phOutput frequency 633HzMaximum output power* 450WStartup power 450WOperating temperature +5°Cto+45°CStorage temperature -20°Cto+70°C* Data valid for nitrogen.


ControllerTurbo-V1001Rackcontroller,100-240V 15.7(35.0) X3501-64003

AccessoriesMainscable(Europeanplug,3mlong) 9699957Mainscable(Americanplug,120V,3mlong) 9699958

OptionsRackadapterforcontroller 2.0(4.0) 9699191Controllertopumpextensioncable(5mextension)forTurbo-V1001 1.0(2.0) 9699948M001Controllertopumpextensioncable(12mextension)forTurbo-V1001 2.0(4.0) 9699951S029Controllertopumpextensioncable(20mextension)forTurbo-V1001 4.0(8.0) 9699948M002External“TMPProfibusgateway” 0.4(0.8) 9699261


► Agilent Turbo-V 1001 Rack Controller

295 (11.61)

128.

5 (5

.06)

198 (7.8)

213 (8.38)

122.

5 (4

.82)

110.

5 (4

.35)

Measures

Start/Stop

PDHSLS

PurgeVent

Counters

Vacuum Products

Turbo-V 1001 HT

Low Speed

Menu

38

Technical SpecificationsVacuum PerformancesPumpingspeedforN2(*) 2050l/sPumpingspeedforHe(*) 1800l/sPumpingspeedforH2(*) 1500l/sCompressionratioforN2 >8x108

CompressionratioforHe 8x105

CompressionratioforH2 4x104

Basepressure* 10-10mbar(7.5x10-11Torr)(**)(with recommended forepump)MaxforelinepressureforN2 4mbarInletFlange ISO250F,CFF12”O.D.Forelineflange KF40NWOtherNominalrotationalspeed 33300rpmStart-uptimewithoutgasload <6minutesandwiththerecommendedforepumpMinimumrecommendedforepump TriScroll600Operationalposition Vertical/UpsidedownOperatingambienttemperature +5°Cto+35°CBakeouttemperature 120°C(CFF),80°C(ISO)Maxrotortemperature 120°CVibrationlevel(displacement) <0.01µmatinletflangeLubricant PermanentlubricationCoolingrequirements WaterCoolantwater Recommendedflow:200l/h Temperature:+15°Cto+30°C Pressure:3to5bar(45to75psi)Noiselevel <60dB(A)at1meterStoragetemperature -20°Cto+70°CEnvironmentprotection IP54Weight ISO250:54.2kg(119.5lbs) CFF12”:55.3kg(121.9lbs)(*): WITHOUT INLET SCREEN(*): According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a CFF flange and using the recommended pre-vacuum pump

Controller SpecificationsInputvoltages 100-120VAC,220-240Vac,1-phaseInputfrequency 50-60HzMaximuminputpower 1300VAOutputvoltage 64VacOutputfrequency 555HzOutputPowerstarting 560WmaximumOutputPowernormal 450WmaximumWeight(bothmodels) 12.5kg(28lbs)Installationcategory IIPollutiondegree 2

Ø306.00 [12.05]

181.00 [7.13]

303.

80 [1

1.96

]

36.5

0 [1

.44]

54.5

0 [2

.15]

32.5

0 [1

.28]

275.

80 [1

0.86

]

Ø334.90 [13.19]

71.6

3 [2

.82]

CONTROLLERCONNECTORS FLANGE

CFF 12"FLANGE ISO 250F

WATER COOLING FOR RUBBER TUBE Ø 9.0

45°60°

PURGE/VENTVALVES PORT

VENT HOLE ON ENVELOPE

FORELINE KF 40

BOTTOM VIEW ISO250F AND CFF 12"

40.00 [1.57]

16.0

0 [0

.63]

WATER COOLING FOR RUBBER TUBE Ø 9.0


Ø329.00 [12.95] Ø329.00 [12.95]

VENT

167.

00 [6

.57]

30°0'

PURGE

VENT

GND HOLE



► Agilent Turbo-V 2300 TwisTorr Rack

295.00 (11.62)198.00 (7.80)

213.00 (8.39)

213.00 (8.39)

122.

5 (4

.82)

128.

5 (5

.06)

110.

5 (4

.35)

Measures

Start/Stop

PDHSLS

PurgeVent

Counters

Vacuum Products

Turbo-V 2300

Low Speed

Menu

Agilent S.p.A. Via F.lli Varian 54 10040 Leini Torino ItalyModel

InputSerial Italy

Made in

39

TURBO PUMPS

Turb

o Pu

mps

Ordering InformationPump Part NumberAgilentTurbo-V2300TwisTorrISO250FRack 9696000AgilentTurbo-V2300TwisTorrCFF12”ODRack 9696001

Controllers*AgilentTurbo-V2300Rackcontroller,100-240V X3501-64004AgilentTurbo-V2300Pump-ControllerCablekit,5m,forpumpandventvalveoperation X3501-68003(*): Please note that rack controllers do not include the Pump-Controller Cable Kit

AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957Center-ringISO250 9699144InletscreenDINISO250//CFF12”AISI 9699350Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor3/8in.IDflexibletube 9699338

Inlet pressure (mbar)10

0

500

1000

1500

2000

2500

-10 10-8 1

Pum

ping

spee

d (l/

s)

10-9 10-7 10-6 10-210-310-5 10-4 10-1 10Foreline pressure (mbar)

10

103

102

104

105

106

107

108

109

-5 10-3 1

Com

pres

sion

ratio

10-4 10-2 10-1 10



40

Ø284.86 [11.2]

51.0

0 [2

.0]

133.

67 [5

.3]

133.

67 [5

.3]

ELECTRICAL CONNECTOR

135.30 [5.3]

VENTIN-OUT WATER CIRCUIT

GAS PURGE

138.

00 [5

.4]

FORELINE KF40

ELECTRICAL CONNECTOR

290.

00 [1

1.4]

65.0

0 [2

.6]

90.0

0 [3

.5]

145.

50 [5

.7]

65.0

0 [2

.6]

135.30 [5.3]

VENTIN-OUT WATER CIRCUIT

GAS PURGE

138.

00 [5

.4]

FORELINE KF25

Ø225.00 [8.9]

22.0

3 [0

.9]

Turbo-V 1K-GFORELINE KF25

263.

60 [1

0.4]

ELECTRICALCONNECTOR

GAS PURGE

IN-OUT WATER CIRCUIT

VENT

UPPER VIEW ISO 200F

UPPER VIEW ISO 160F

ISO 160F

Water Cooling 1/4"G

ISO 200F


Technical SpecificationsPumping speed: ISO160: Ar:750l/s N2:810l/s He:950l/s H2:680l/s ISO200: Ar:1,040l/s N2:1,080l/s He:1,150l/s H2:730l/sCompression ratio: Ar:>5x108 N2:>5x107 He:>4x104 H2:1.5x104

Base pressure*(withrecommendedforepump) <1x10-10mbarInlet flange ISO160F,ISO200FForeline flange ISO160: KF25NW ISO200: KF40NWNominal rotational speed 45,500rpmStart-up time <5minutesMinimum recommended forepump >20m3/h(TriScroll600,DS602)Operating position AnyOperating ambient temperature +5°Cto+35°CBakeout temperature 80°Catinletflangemax.(ISOflange)Vibration level (displacement) <0.01µmatinletflangeCooling requirements WaterPower supply Inputvoltage:100-240VacInputfreq.:50-60HzMaxinputpower:600VAStand-bypower:30to35W Maxoperatingpower: 400WusingNitrogenandlightergases(watercoolingsetting) 260WusingArgon(aircoolingsetting)Protection fuse(Navigatorcontroller) 1x6.3ASerial communication(NavigatorKit) RS232cablewitha9-pinDtype maleconnectoranda9-pinDtypefemaleconnector,andNavigatorsoftware(optional)Storage temperature -20°Cto+70°CWeight 26.8kg(59.1lbs)*According to standard DIN 28 428.

Advanced Electronics•RacktypeorNavigatoronboardcontrollers•Versatileelectronicsinterfacewitheasytousecontrol

Software•AnalogI/OsignalsandRS232/RS485interfaceas

standardAgilentProfibusinterfaceasoption

Turbo-V 1K-G•Application-specificpumpingsolutiondesignedforthinfilm

depositionequipment•Highpumpingspeedandhighgasthroughput•Ruggeddesignandhighlyefficientcoolingsystemfor

continuousoperation•GasPurgeforbearingsprotection


► Agilent Turbo-V 1K-G

41

TURBO PUMPS

Turb

o Pu

mps

Description Part Number

Pumping SystemsTurbo-V1K-GISO160F 8698961R002Turbo-V1K-GISO200F 8698962R001

ControllersTurbo-V1K-GNavigatorcontroller,120-220V 9698978M005Turbo-V1K-GRackcontroller,100-240V X3501-64005

AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957SerialcableandNavigatorSoftware 9699883InletscreenISO160 9699304InletscreenISO200 9699316Watercoolingkit(hosetailG¼) 9699825Watercoolingkit(InoxG¼) 9699826Ventflange,NW10KF/M8 9699108Ventdevicewithadjustabledelaytimeforstandardrackcontroller 9699831Ventvalveforstandardrackcontroller X3501-68002VentvalveforNavigatorcontroller 9699834PurgevalveKF16-M1220SCCM 9699241Purgevalve7/16-M1220SCCM 9699242

Recommended ForepumpRotaryVanepumpDS602,with1ph,worldwidemotor 9499335RotaryVanepumpDS602,with3ph,worldwidemotor 9499336RotaryVanepumpHS452,with1ph,worldwidemotor 9499360RotaryVanepumpHS652,with1ph,worldwidemotor 9499365DrypumpTriScroll600,with1ph,worldwidemotor PTS06001UNIVDrypumpTriScroll600,with3ph,worldwidemotor PTS06003UNIVDrypumpTriScroll600inverter,with1ph,worldwidemotor PTS06001INV



010-8 10-7 10-6 10-2 1

Pum

ping

spee

d (l/

s)

10-5 10-4 10-3 10-1

1200

1000

600

800

400

200


1010-1

Com

pres

sion

ratio

1 10

102

104

106

108

1010

100

109

103

105

107


Argon Nitrogen Helium HydrogenArgon Nitrogen Helium Hydrogen

42

188,2 (7.34)

INLET SCREEN WITH CENTER-RING

FLANGE ISO 250F

EYEBOLT

PURGE & VENTSWAGELOCK PIPE 1/8

CONTROLLERFRONT PANEL

Ø 310 (12.09)

Ø 335 (13.07)

Ø 11 (0.43) N 12

FORELINE KF 40

WATER COOLING FORRUBBER TUBE DIA 9.0

40 (1.56)

30

45

298 (11.62)

162.8 (6.35)

95 (3

.71)

124.

1 (4

.84)

146

(5.6

9)

245

(9.5

6)

335

(13.

07)


Technical SpecificationsPumping speed N2:1600l/sCompression ratio N2:3x105

Base pressure*(withrecommendedforepump) <1x10-8mbarInlet flange ISO250FForeline flange KF40NWNominal rotational speed 33,000rpmStart-up time <7minutesRecommended forepump >40m3/hOperating position AnyOperating ambient temperature +5°Cto+40°CPower supply Inputvoltage 100-240Vac Inputfreq. 50-60HzCommunication Interface AnalogueI/O Standard RS232/RS485 Standard Profibus OptionalDimensions Height 335mm(13.18in.) Diameter 335mm(13.18in.) Weight 35kg(77lbs)*According to standard DIN 28 428.

The System Interface• IntegratedpackageincludesTurboMolecularPump,

DriveElectronics,PowerSupply,PurgeGasandCommunication

• VersatileelectronicsinterfacewitheasytousecontrolSoftware

• AnalogI/OsignalsandRS232/RS485interfaceasstandardAgilentProfibusinterfaceasoption

Turbo-V 2K-G System• Thefirstapplication-specificpumpingsolutiondesignedfor

thinfilmdepositionequipment• Thehighestperforming,mostcompactunitavailable• Thefirstfullyintegratedapproachformaximumsystem

productivityanduptime


► Agilent Turbo-V 2K-G System

43

TURBO PUMPS

Turb

o Pu

mps


Pumping Systems (*)Turbo-V2K-GsystemwithMoniTorr 9698871Turbo-V2K-GsystemwithProfibusandMoniTorr 9698873(*) Pumping Systems include Pump with 230 V Integrated Electronics, water hose connection, Inlet Screen with center-ring

and pre-installed IP54 Mating Connectors. Both standard models can be equipped with Agilent’s MoniTorr device on request. Also 120 Vac units available on request.

AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957T-PlusSoftwareandserialcable 9699883Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor⅜in.IDflexibletube 9699338Turbo-Vremotecable 9699945Turbo-Vremotepanel 9698850

Spare PartsIP54proofmatingconnectors 9699958InletscreenISO250withcenterring 9699138Waterhoses 9699825



010-6

Pum

ping

spee

d (l/

s)

200

10-5 10-4 10-3 10-2 10-1 1

600

1000

14001600

400

800

1200

1800

Outlet pressure (mbar)

110-3

Com

pres

sion

ratio

10

10-2 10 10 10-1

100

1000

100000

10000

1000000


ArgonNitrogen ArgonNitrogen

44


VENT HOLE ONENVELOPE

EYEBOLT

CENTER-RING (ISO 250F)

Ø 334.90 [Ø 13.19]

FLANGEISO 250F

WATER COOLINGFOR RUBBERTUBE Ø 9.0

VENT

GND HOLE

CONTROLLERFRONT PANEL

UPPER VIEW

BOTTOM VIEW


FORELINE KF 40

WATER COOLINGFOR RUBBERTUBE Ø 9.0


Technical SpecificationsPumping speed N2:2200l/s He:1900l/s Ar:2050l/sCompression ratio N2:>1x107 He:6x103 Ar:>1x108

Base pressure*(withrecommendedforepump) <1x10-8mbarInlet flange ISO250FForeline flange KF40NWNominal rotational speed 31,800rpmStart-up time without gas load and with the recommended forepump <6minutesForeline pressure <0.5mbarMinimum recommended forepump >60m3/h(dependingongasflowrequirements)Operating position AnyCooling requirements WaterWeight(ISO250) 52kg(114.63lbs)*According to standard DIN 28 428.

Best Footprint to Performance Ratio• ThehighestArgonpumpingspeed(2050l/s)foritssize

allowsuniformdepositionratesathighsubstratethroughput• Highestpumpingspeedinitsclass:2200l/sforNitrogen• Throughput:over1400sccmforNitrogen• Theall-turbo,morecompactrotordesigndelivershighest

performancewiththesmallestfootprint

The Only Truly “Integrated” System in the Market TheTurbo-V3K-G:anadvancedsolutionforThinFilmapplications• Fullyintegratedsystemwithonboardwaterproofpowersupply• Vent/purgevalvescontrolcapability• Integrateddiagnostics• Multipleinterfacedcapability• Lowestpowerabsorption


► Agilent Turbo-V 3K-G System

45

TURBO PUMPS

Turb

o Pu

mps


Pumping Systems(*)Turbo-V3K-GISO250FSystemwithintegratedpurge/ventdevice 9698888Turbo-V3K-GISO250FSystemwithProfibusandintegratedpurge/ventdevice 9698889(*) Pumping Systems include Pump with 230 V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring

and pre-installed IP54 Mating Connectors. Both standard models can be equipped with Agilent’s MoniTorr device on request. Also 120 Vac units available on request.

AccessoriesMainscableNEMAPlug,3mlong 9699958MainscableEuropeanPlug,3mlong 9699957T-PlusSoftwareandserialcable 9699883Watercoolingkitfor6x8(IDxOD)flexibletube 9699348Watercoolingkitfor⅜in.IDflexibletube 9699338

Spare PartsIP54proofmatingconnectors 9699960InletscreenISO250 9699350O-ringandcenterringISO250 9699144


(*) Measured with a 60 m3/h forepump.

10-8 10-7 10-6 10-5 10-4 10-3 10-20

500

1000

1500

2000

2500


Pum

ping

spee

d (l/

s)

10-1

Com

pres

sion

ratio

Foreline pressure (mbar)10-3

0

10 2

10 1

10 3

10 4

10 5

10 7

10 6

10 8

10 9

10-2 10 0 10-1 1

Pumping Speed vs Inlet Pressure (*) Compression Ratio vs Foreline Pressure

Nitrogen Helium ArgonNitrogen Helium Argon

46

Inlet ScreensTopreventanypossibledamagetothepumpbladescausedbyparticlesfallingintothepump,aninletscreenisavailableasanaccessory.Theinletscreenisacurvedstainlesssteelmesh.Itprovidesprotectionagainstdebrislargerthan0.7to3mm(dependingonthemodel),whilereducingthepumpingspeedbyonlyabout10%.Fororderinginformation,seeindividualpumps.Air Cooling KitsAfanisprovidedasanoptionforapplicationsrequiringforcedairflow.Thefaniseasilyinstalledusingtheincludedinstallationkit.TheaircoolingkitfortheTurbo-V81’scanbemountedbesideorunderneaththepumpbody.Thefansforalltheotherpumpmodelscanbeinstalledinasidelocationonly.Themaximumallowableambienttemperatureforaneffectivecoolingactionis30°C.Tomeettheairflowratespecifications,caremustbetakennottorestrictorcoverthespacearoundthefansothataircanflowfreely.TheoperationofthecoolingfaniscontrolledbytheTurbocontroller.Fororderinginformation,seeindividualcontrollers.Water Cooling KitsAwatercoolingkitisprovidedtocoolthepumpwhenoperatingathighinletorhighexhaustpressures.Thecoolingwatercanbesuppliedbyanopencircuitwithdrainageoraclosed-looprefrigeratedsystem.Caremustbetakentosecurethetubestoensurethattheydonotdetachduringoperation.Fourdifferentkitswithvarioustubesizesareavailable(refertothefollowingtable).

Tube Size Material Screw Thread Part Number4x6mm(IDxOD) Plastic ⅛BSP 96993476x8mm(IDxOD) Plastic ¼BSP 9699348¼”ID SST ⅛BSP 9699337⅜”ID SST ¼BSP 9699338For ordering information, see individual pumps.

Vibration DampersHighlysensitiveequipmentsuchasanelectronmicroscopeandcertainanalyticalinstrumentsrequireextremelylowvibrationamplitudes.Thedampersreduceturbopumpvibration

amplitudebyatleastafactorof10attheirmainfrequencies.Theyareavailableuptoasizeof200mm(ISO200orCFF10”O.D.).Toeffectivelydecoupletheequipmentfromthepump,thevibrationdampermustbeinstalledbetweentheconnectingflanges.Fororderinginformation,seeindividualpumps. H (mm) H (inches) VibrationDamper4½”CF 96.5 3.80VibrationDamper6”CF 101 3.97VibrationDamper8”CF 110 4.33VibrationDamper10”CF 113 4.45VibrationDamper63ISO 84 3.31VibrationDamper100ISO 84 3.31VibrationDamper160ISO 88 3.46VibrationDamper200ISO 88 3.46

Turbo Vent ValveTheTurboVentValve,consistingofacontrolunitandavalve,isacompleteunitforautomaticventingoftheTurbopumpwhenitisswitchedofforduringapowerfailure.Thevalveisanormallyopen,electromagnetically-actuatedvalvewithafilterontheairinlet.ThecontrolunitispoweredbytheTurbocontrollerandisprovidedwithafixeddelaytimeofabout5secondstoavoidundesiredventingduringatemporarypowerfailureandtoallowclosureofthesystemvalvesbeforeventing.Fororderinginformation,seeindividualcontrollers.Turbo Vent DeviceTocontroltheventingoftheTurbopumpswhentheyareswitchedofforduringapowerfailure,aventdeviceisoffered.TheTurboventdeviceconsistsofanormallyclosedvalveandacontrolunit.Thevalveiselectromagnetically-actuatedandhasafilterontheair-inlet.ThecontrolunitispoweredbytheTurbocontrollerandhasabuilt-inbatterybackup.Delayandventingtimesareadjustableupto36minutestooptimizetheventingconditionsforeachapplication.Fororderinginformation,seeindividualcontrollers.Handheld TerminalThehandheldterminalisaremotecontroldisplayforusewithV81seriesTurbopumpswhenconnectedtoacontrollerwithoutafrontpanel.ItconsistsofanLCDalphanumericdisplayandkeyboardwhichprovideusefulrealtimeindicationsoftheoperatingconditionsandparametersoftheturbopump.Moreover,itallowsthereprogrammingofthecontrollerparametersandtroubleshootingofthepumpandcontroller.ThehandheldterminalisconnectedtoandpoweredfromtheTurbo-Vcontrollerthrougha1.5metercable.Fororderinginformation,pleasecallyourlocalAgilentOffice.Purge ValveToprotectthebearingsofaturbomolecularpumpusedwithaggressiveprocessgases,ameasuredsupplyofinertgas(N2,Ar)mustflowintothepumpbodyaroundtheupperbearingtowardthefore-vacuumline.TheAgilentfixedorificepurgevalveiscalibratedfornitrogentoprovidethecorrectgasflowtosafelyoperateTurbopumps.Fororderinginformation,seeindividualpumps.

H

AGILENT TURBO PUMP ACCESSORIES

Vibrator Damper Drawing

47

TURBO PUMPS

Turb

o Pu

mps

AGILENT TURBO PUMP TECHNICAL NOTES

Vibration LevelThankstolowvibration,focuseddesign,andcomputerassistedbalancingtools,todayturbomolecularpumpsgenerateverylowlevelsofmechanicalvibration.Thisismainlyaresultofthenumericalmodelingofthepumprotodynamics(seeFigure1)andaspecificvibrationdampingsystemalreadybuiltintothepumpstructure.Thankstobothdesignfeatures,todayceramicballbearingspumpsarestandardeveninveryhighvibrationapplicationslikeSEMandMetrologyTools.

AtypicalvibrationspectrumofaturbomolecularpumpcanbeseeninFigure2:Possiblesourcesofvibrationinaturbomolecularpumpareunbalancedrotor,highfrequencymotororbearings.Rotorunbalancecanbereducedtoaverylowlevelthroughdynamicbalancing,whichminimizesforcescausedbyanonsymmetricdistributionofmassesinrelationtotherotationalaxis.Asanorderofmagnitude,theradialdisplacementonthepumpHVflangeafterbalancingcanbeaslowas0.001µm.

Thevibrationsfromahighfrequencymotorarecausedbyelectromagneticinteractionsbetweenthemotorstatorandrotor:theircharacteristicfrequenciesaremultiplesofthemotordrivingfrequency.Also,therotorsupportsgeneratebothwhitenoiseandvibrationsatspecificfrequenciesofthebearings’movingparts(cage,ballsandrotatingring,usuallytheinnerone).Ingeneral,thevibrationscausedbyanelectricmotororbearingareevenlowerthanthosecausedbyunbalance.Theymayberelevantinthecaseofbearingdamageorbecauseofexcitationofanaturalresonantfrequencyofthesystemconnectedtothepump.Inthesecondcase,thesystemstructureshouldbemodifiedbyaddingmass,changingthestiffnessand/orinsertingavibrationdamperbetweenpumpandsystem.

Operation in Presence of Magnetic FieldsMagneticfieldsinduceeddycurrentsintheturbomolecularpumprotorthattendtoopposeitsrotation.Asaconsequencethepowerdeliveredtotheelectricalmotorisincreased.Sincethepumprotorisnotincontactwiththestator,alltheheatgeneratedbytheeddycurrentsmustbedissipatedbyradiation,sotherotorcanbeoverheatedevenifthestaticpartsremaincool.Accordingtoourtests,themaximummagneticfieldthatourpumpscantolerateis:• 50Gaussinthetransversaldirection• 100GaussintheaxialdirectionInthesecases,apowerincreasetothemotorcanbeexpected.Ifthemagneticfieldisgreaterthantheabovevaluesashieldmustbeusedinordertohavearesidualmagneticfieldaroundthepumpbelowthevaluespecified.PleasecontactAgilentformoredetails.

Turbomolecular Pump Bearings and Lubrication SystemTheTurbo-VpumpsincorporateAgilent’sinnovativeceramicbearingdesignwithaproprietaryultra-lowvaporpressuresolidlubricant,whichenablesthesepumpstoprovidealongservicelifeandahighdegreeofcleanlinessundermostoperatingconditions.ThislubricationsystemisasuperiorfeatureofAgilentTechnologyandguaranteesnocontaminationofthevacuumsystem,especiallywhencomparedtootheroil-lubricatedturbomolecularpumps(Seefigures3-4).Theceramicbearingsutilizeballsmadeofsiliconnitride,apolycrystallinematerialwithanamorphousintergranularbinderbasethatoffersthefollowingadvantages:Hardness Thisisacriticalaspectofbearingdesign,anditcloselyrelatestobearingperformanceandreliability.ThesiliconnitridematerialusedinAgilent’sTurbo-Vbearingsystemistwiceashardasconventionalsteelprovidingdramaticimprovementinwearresistancewhileminimizingtheeffectsofsurfacecontactandstress.

Figure 1

Figure 2

48

Weight Siliconnitrideis40%lessdensethanconventionalsteels,whichhelpstoreducecentrifugalloadingandstresslevelsathighrotationalspeeds,especiallyinthebearingracearea.Friction Siliconnitride’slowcoefficientoffrictionenhanceswearresistanceandaddstothebearing’soperationallife.Thermal Stability Withitslowthermalexpansioncoefficient,thesiliconnitridebearingmaterialensuresthattighttolerancesandmatingcomponentfitwillbemaintainedoveranextremelywidetemperaturerange.Inaddition,siliconnitridehasanoutstandingresistancetofracturebythermalshock.Chemical Stability Siliconnitrideisvirtuallyinert.AnotherfeatureoftheTurbo-Vbearingsystemisitsproprietarylubricantwhichhasanextremelylowvaporpressureandisvirtuallyhydrocarbonfree.Theuseofthislubricantinthepermanentlysealedbearingsystemensuresclean,reliableoperationwithouttheneedforanymaintenancewhatsoever.

Agilent T-plusAgilentT-plus(TurboPumpsLinkedUserSoftware)isthenewcommunication,controlandmonitoringsoftwareforAgilentTurbomolecularPumpsandallotherAgilentproductsfeaturingtheAgilentWindowSerialProtocol.WithT-plus,youcansimultaneouslydriveandcontroloneormoreTurboPumps,connectedtoaPCthroughanRS232oranRS485serialcommunication.AutomaticidentificationoftheconnectedPumps,descriptionofeachcommandalwaysonscreen,andUserInterfaceadaptabletothePumpStatusareonlysomeofthenewfeaturesdevelopedtomaketheapproachtopumpsettingseasyandtoreducethenumberofstepsduringpumpconfiguration.Moreover,specialcareisgiventotheGUI(GraphicalUserInterface),toreproducetheenvironmentofwell-knownUserInterfaces(suchasMicrosoftWindowsapplications),toobtainarealUserFriendlytool,andtoreducetheuserlearningtime.T-plussoftwarefeaturesseveraloptionslikeDataLogging,ChartRepresentationandNetworkConfiguration,tohelpyouconfigureyourVacuumdevicesquickly,andtocheckyourvacuumsystemstatusatanytime.ExhaustiveonlineHelpisalsoincluded,providingtheuserwithacomplete,easytolearnsystem,tailoredtocustomerrequirements.The previous software release Navigator 2.2 is included in the T-plus CD.

1

H2

10-8

10-9

10-10

10-11

10-1216116

H2O

21 26 31 36 41 46 51 56 61 66 71 76 81 86a.m.u.

N2

O2

CO2

CF2C3F CF3

C5F

P (To

rr)

1 11

H2

10-9

10-10

10-11

10-12166

H2O

21 26 31 36 41 46 51 56 61 66 71 76 81 86a.m.u.

N2

O2 CO2

P (T

orr)

AGILENT TURBO PUMP TECHNICAL NOTES

Figure 3 - Typical Competitor Pump

Figure 4 - Typical Agilent Pump

Figure 5

49

TURBO PUMPS

Turb

o Pu

mps

CE/CSA, EMC Electrical Specifications ComplianceCompliancetothesenormsguaranteesthattherearenolimitsontheuseofthecontrollersandturbopumpsineverytypeofambient,andthattheirusedoesn’tcreateanykindofdisturbancetoelectronicunitsconnectedtothesameline.Agilent’snewgenerationofTurbocontrollerscomplywiththelimitsgivenbythefollowingnorms:EN55011ClassAgroup1EN61000/3/2EN61000/3/3EN61000/4/2EN61000/4/3EN61000/4/4EN61010-1UNIEN291-1UNIEN292-2EN1012-2

50

AgilentVacuumProductsoffersoneofthemostcomprehensiveserviceandsupportplansintheindustry.Asaworldwide,firstclasscompanywestrivetoofferaddedvaluetoourCustomerswherevertheymaybelocated.ExcellenceinServiceandSupportisakeyfactorinaddedvalue.SupportcanbeaccomplishedwithqualifiedEngineersandanappropriatelogisticinfrastructure.Technicalskillsandinfrastructurearetwoareaswherewearecontinuouslymakingmediumandlong-terminvestments.Ourdailycustomersupportphilosophyisfocusedontwoimportantfactors:fastresponseandnohassle.ThisphilosophytranslatestothefollowingsectionsofourTurboPumpServiceandSupportPlan:• Worldwide Parts Sourcing Plan:

ThreeProgressiveLevelsofSupport• Technical Assistance:CustomerSupport,Application

Support,ApplicationTrainingAgilentVacuumProducts is committedtoprovidingourCustomerswiththemostcomprehensiveserviceplanspossible.ThefollowingpagesdetailthestandardsectionsofourTurboPumpServiceandSupportPlan.Formoreinformation,orifyouhaveaneedforcustomizedsolutions,pleasecontactyourAgilentrepresentative.Often,excellentproductsarenotenough:Agilent’sconstantpresencewithCustomerServiceasaresponsivepartneriswhatreallymakesadifference.

Worldwide Parts Sourcing Plan• Repair Program Agilentproductsofferunmatchedreliability,performance

andcleanliness.Productionrequirements,however,inevitablycreate,overtime,theneedformaintenanceandrepair.TimelyrepairatAgilentwillkeepyourproductsperformingatanoutstandinglevelallthetime.

• Advanced Exchange Program Tomaximizeuptime,andforthoseoccasionswheretimeisessential,Agilentoffersexchangeunitsforadvanceshipment.

Exchangeunitsarefullyremanufacturedtothesamestrictstandardsasnewproducts.TheyarekeptinstockinNorthAmerica,Europe,China,Japan,Korea,Singapore,TaiwanandIndia.

Assoonasrequested,yourExchangeunitcanbeshippedforovernightdelivery.ThisefficiencyisduetoourlogisticinfrastructureandistheresultofexcellentteamworkamongourServiceandCustomerServiceTeams!

TheExchangeandRepairProgramsareavailableworldwideandallowglobalOEMsandEnd-Usersconsistentdeliverytime,valuepricing,consistentpartnumbers,andsimpleorderprocessingprocedures.

• Upgrade Program TheUpgradeProgramisdesignedforcustomerswhoneedtoreplaceanAgilent(formerlyVarian)productattheendofitslife,orofoldtechnology,withanewesttechnologyproduct.

AGILENT TURBO PUMP SERVICE AND SUPPORT PLANS

51

TURBO PUMPS

Turb

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TheUpgradeProgramincludesproactivetechnicalinstallationsupport,bytelephoneandfull12-monthwarranty.

Agilent’sTurbopumpUpgradeProgramprovidesacustomerwiththesameoutstandingsupportdeliveredwithourserviceprograms,including:

-RMA#tracking -Replacementwithremanufacturedpumpofthenewest

technology -Advancereplacement -24-hourexpeditedordermanagement -WEBon-lineorderstatus&shipmenttracking• End User Extended Warranty TheEndUserExtendedWarrantyisaServiceAgreement

thatprovidescoverageextensionbeyondthestandard12monthswarrantyofaproduct.Itextendsforadditional12monthsthecoveragefromfailuresduetodefectsinmaterialandworkmanship.

Byextendingthewarrantyofpurchasedproducts,post-salessatisfactionisguaranteed.Thisistheresultoftherelevantcostdecreasewhilecostpredictabilityisincreased.TheEndUserExtendedWarrantyhasbeendesignedtocovertheneedsoftheEndUserMarket:

-GeneralPurposeVacuumapplications. -HighEnergyPhysicsUltraHighVacuumapplications.

Ordering Information for End User Extended Warranty

General Purpose Vacuum Applications Part NumberExtd.Warranty12MTurbo80l/sclass EW81Extd.Warranty12MTurbo300l/sclass EW300Extd.Warranty12MTurbo700l/sclass EW700Extd.Warranty12MTurbo1000l/sclass EW1000Extd.Warranty12MTurboTV1KG EWTV1KGExtd.Warranty12MTurboTV2KG EWTV2KGExtd.Warranty12MTurboTV3KG EWTV3KGExtd.Warranty12MTurbo(otherconfig.) EW969TMPHigh Energy Physics UHV Applications Part NumberExtd.WarrantyHEP12MTurbo80l/sclass EW969TV81Extd.WarrantyHEP12MTurbo300l/sclass EW969TV301Extd.WarrantyHEP12MTurbo700l/sclass EW969TV701Extd.WarrantyHEP12MTurbo1000l/sclass EW969TV1001Extd.WarrantyHEP12MTurboV2300 EW969TV2300Extd.Warranty12MTurbo(otherconfig.) EW969TMP

• Cleaning Service Agilentoffersacleaningserviceincaseswhereaturbopumpmayhavebeenexposedtochemicallyhazardousmaterials.ThisserviceisavailableworldwideandallowsglobalOEMsandEnd-Usersconsistentdeliverytime,pricing,partnumbers,andorderprocessingprocedures.

OrderingInformationforAgilent’sCleaningService

Turbo-V Pump Size Part NumberFromV60toTwisTorr304FS TURBOCLEAN1FromV450toV701Navigator TURBOCLEAN2FromV1000to3K-G/2300TwisTorr TURBOCLEAN3

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Technical AssistanceAsanAgilentCustomer,youcanrelyonanattentiveandprofessionalsupportstaff,dedicatedtoprovidingyouwiththeeasiestandmostpersonalizedservicesolutionpossible.

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vacuumtechnologytoourcustomers• ApplicationSupportisaproject-basedactivitywhereour

expertsassistyousolvingtheapplicationissuesthatmightarisepre-salesorpost-sales

• Bydesigningsolutionsthatmeetcustomerneeds,Agilentaimsatcreatingapositiveandsynergeticrelationshipwithcustomers

• Ourexpertskeepyouup-to-dateonindustrialandscientificvacuumapplicationswiththegoalofoptimizingtheuseofourproductsonyoursystem

AGILENT TURBO PUMP SERVICE AND SUPPORT PLANS

AGILENT TURBO PUMPS - Ideal Vac · a. the roughing time b. the minimum recommended backing pump of...

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