Agenda
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IEUVI Resist TWG Meeting February 23, 2006 San Jose, California 8:00 Breakfast All 8:30 Welcome and Introductions Review of Charter and Goals for Resist TWG Kim Dean , SEMATECH 8:40 Finish Outgassing Round Robin Results Watanabe (U. Hyogo), Nishiyama (ASET), Dean 9:10 Regional Updates; Japan, Europe, US Exposure Tool Availability and Performance Oizumi (ASET), Goethals (IMEC), Tedesco (CEA/LETI), Dean, U. Wis. 10:10 Break 10:25 Resist Screening Data Hah (Samsung), Leeson (Intel), Ohmori (TOK), Wallow (AMD) 11:20 Stand alone EUV tools (interferometric imaging, outgassing, etc.) Wies (AIXUV), Blackborow (Energetiq), Hughes (BOC Edwards) 11:55 Wrap up, Plans for Next Meeting Kim Dean
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Transcript of Agenda
IEUVI Resist TWG MeetingFebruary 23, 2006 San Jose, California
8:00 Breakfast All
8:30 Welcome and Introductions Review of Charter and Goals for Resist TWG
Kim Dean, SEMATECH
8:40 Finish Outgassing Round Robin Results Watanabe (U. Hyogo), Nishiyama (ASET), Dean
9:10 Regional Updates; Japan, Europe, US Exposure Tool Availability and Performance
Oizumi (ASET), Goethals (IMEC), Tedesco (CEA/LETI), Dean, U. Wis.
10:10 Break
10:25 Resist Screening Data Hah (Samsung), Leeson (Intel), Ohmori (TOK), Wallow (AMD)
11:20 Stand alone EUV tools (interferometric imaging, outgassing, etc.)
Wies (AIXUV), Blackborow (Energetiq), Hughes (BOC Edwards)
11:55 Wrap up, Plans for Next Meeting Kim Dean
12:00 Lunch All
13:00 Adjourn
