Advanced Gate Stacks and Substrate Engineering Eric Garfunkel and Evgeni Gusev Rutgers University
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1 Rutger s MURI Advanced Gate Stacks and Substrate Engineering Eric Garfunkel and Evgeni Gusev Rutgers University Departments of Chemistry and Physics Institute for Advanced Materials and Devices Piscataway, NJ 08854
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Advanced Gate Stacks and Substrate Engineering Eric Garfunkel and Evgeni Gusev Rutgers University Departments of Chemistry and Physics Institute for Advanced Materials and Devices Piscataway, NJ 08854. Gate Stack. Gate dielectric approaching a fundamental limit (a few atomic layers). - PowerPoint PPT Presentation
Transcript of Advanced Gate Stacks and Substrate Engineering Eric Garfunkel and Evgeni Gusev Rutgers University
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Medium energy ion scattering: compositional profiling
MEIS is a high-resolution ion beam based analytical technique: mass specific - isotope selective quantitative - total areal density sub-nm depth resolution
Rutgers-MEIS uses 100 keV hydrogen projectiles: no significant radiation damage during analysis straightforward interpretation of scattering spectra
MURI
depth profileMEIS depth profilingSensitivity: 10+12 atoms/cm2 (Hf, Zr) 10+14 atoms/cm2 (C, N)Accuracy for determining total amounts: 5% absolute (Hf, Zr, O), 2% relative 10% absolute (C, N)Depth resolution: (need density) 3 near surface 8 at depth of 40
MURI
ZrO2 film re-oxidized in 18O230 Al2O3 annealed in 3 Torr 18O2Isotope studies of diffusion and growth in metal/high-K gate stacksIsotope tracer studies
MURI
Nuclear resonance methods for light element profilingSchematic of ion beam-film reactions for (p,g), (p,a) and (p,ga) resonance reactions. Control incident energy to get depth informationEnergy (keV)Differential cross section
Chart1
9691
8163
8268
8555
Cs
High Voltage (V)
ROI Gross Counts
Sample Run Testing ROI Gross Counts As a Function of HV
Sheet1
HVROI(Gross)
10000969198
20000816390
30000826891
40000855592
Chart2
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
17
0
0
0
0
0
0
21
416
517
458
442
365
274
527
196
397
189
408
214
201
245
171
233
191
197
184
242
96
159
69
192
100
139
127
105
63
169
59
34
73
19
7
4
1
72
O18
High Voltage (HV)
ROI Gross Counts
Sheet2
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
110000
120000
130000
140000
150000
160000
170000
180000
190000
200000
210000
220000
230000
240000
2500174
260000
270000
280000
290000
300000
310000
3200215
330041620
340051723
350045821
360044221
370036519
380027417
390052723
400019614
410039720
420018914
430040820
440021415
450020114
460024516
470017113
480023315
490019114
500019714
510018414
520024216
53009610
540015913
5500698
560019214
570010010
580013912
590012711
600010510
6100638
620016913
6300598
6400346
6500739
6600194
670073
680042
690011
7000728
018c
0
0
0
0
0
0
0
1867
0
1489
55
20
101
61
232
6
17
6884
3153
3298
1925
2184
24
292
60
85
731
349
707
67
25
18
70
437
117
98
81
138
205
114
80
164
4
216
14
22
170
227
43
31
142
225
221
223
254
219
226
228
136
83
45
132
40
226
200
211
202
200
204
233
221
018c
HV
ROI
Sheet3
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
700186743
80000
900148939
1000557
1100204
120010110
1300618
140023215
150062
1600174
1700688483
1800315356
1900329857
2000192544
2100218447
2200245
230029217
2400608
2500859
260073127
270034919
280070727
2900678
3000255
3100184
3200708
330043721
340011711
35009810
3600819
370013812
380020514
390011411
4000809
410016413
420042
430021615
4400144
4500225
460017013
470022715
4800437
4900316
500014212
510022515
520022115
530022315
540025416
550021915
560022615
570022815
580013612
5900839
6000457
610013211
6200406
630022615
640020014
650021115
660020214
670020014
680020414
690023315
700022115
O18d
2454
0
79
82
120
15
393
68
969
1189
4438
1296
240
1038
15
10431
10008
6152
6652
280
181
151
558
68
26
207
97
648
0
509
416
311
695
447
357
285
311
203
235
265
244
340
256
235
192
205
240
230
237
242
251
269
257
242
244
229
262
244
209
262
228
211
265
217
257
190
216
216
225
206
196
018d
HV
ROI
Sheet4
HVROI(Gross)
0245450
10000
200799
300829
40012011
500154
60039320
700688
80096931
900118934
1000443867
1100129636
120024015
1300103832
1400154
150010431102
160010008100
1700615278
1800665282
190028017
200018113
210015112
220055824
2300688
2400265
250020714
26009710
270064825
280000
290050923
300041620
310031118
320069526
330044721
340035719
350028517
360031118
370020314
380023515
390026516
400024416
410034018
420025616
430023515
440019214
450020514
460024015
470023015
480023715
490024216
500025116
510026916
520025716
530024216
540024416
550022915
560026216
570024416
580020914
590026216
600022815
610021115
620026516
630021715
640025716
650019014
660021615
670021615
680022515
690020614
700019614
O18e
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
884
5561
6054
5411
4409
3456
2803
1645
1428
1265
997
434
540
479
697
400
400
356
444
304
487
301
217
267
247
223
253
249
274
242
227
282
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245
238
233
226
214
212
214
257
259
224
248
275
285
279
264
239
194
219
245
213
262
239
243
018e
HV
ROI
Sheet5
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
110000
120000
130000
140000
150088430
1600556175
1700605478
1800541174
1900440966
2000345659
2100280353
2200164541
2300142838
2400126536
250099732
260043421
270054023
280047922
290069726
300040020
310040020
320035619
330044421
340030417
350048722
360030117
370021715
380026716
390024716
400022315
410025316
420024916
430027417
440024216
450022715
460028217
470023815
480024516
490023815
500023315
510022615
520021415
530021215
540021415
550025716
560025916
570022415
580024816
590027517
600028517
610027917
620026416
630023915
640019414
650021915
660024516
670021315
680026216
690023915
700024316
O18f
0
0
0
0
0
0
0
0
0
0
0
0
0
0
5172
8066
6935
4890
3852
2325
2018
1278
1283
658
489
444
388
208
284
303
297
305
213
223
278
295
271
278
281
253
262
235
256
289
221
237
258
248
303
220
263
283
287
275
265
291
313
298
282
234
301
263
291
249
280
318
269
290
236
274
218
O18f
HV
ROI
Sheet6
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
110000
120000
130000
1400517272
1500806690
1600693583
1700489070
1800385262
1900232548
2000201845
2100127836
2200128336
230065826
240048922
250044421
260038820
270020814
280028417
290030317
300029717
310030517
320021315
330022315
340027817
350029517
360027116
370027817
380028117
390025316
400026216
410023515
420025616
430028917
440022115
450023715
460025816
470024816
480030317
490022015
500026316
510028317
520028717
530027517
540026516
550029117
560031318
570029817
580028217
590023415
600030117
610026316
620029117
630024916
640028017
650031818
660026916
670029017
680023615
690027417
700021815
O18b
0
0
0
0
0
0
0
0
0
0
0
2809
1564
3965
6858
4185
4858
4403
3162
2186
2184
1787
1042
888
959
758
587
540
464
491
372
363
395
428
303
340
318
337
281
300
276
292
285
228
261
208
211
247
297
219
213
277
238
263
254
279
249
254
240
217
235
241
220
216
254
236
223
239
232
227
242
O18b
HV
ROI
Sheet7
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
1100280953
1200156440
1300396563
1400685883
1500418565
1600485870
1700440366
1800316256
1900218647
2000218447
2100178742
2200104232
230088830
240095931
250075828
260058724
270054023
280046422
290049122
300037219
310036319
320039520
330042821
340030317
350034018
360031818
370033718
380028117
390030017
400027617
410029217
420028517
430022815
440026116
450020814
460021115
470024716
480029717
490021915
500021315
510027717
520023815
530026316
540025416
550027917
560024916
570025416
580024015
590021715
600023515
610024116
620022015
630021615
640025416
650023615
660022315
670023915
680023215
690022715
700024216
O18g
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
67
80
39
60
38
22
35
413
15
196
238
22
46
7
8
3
42
51
13
3
5
2
11
4
2
2
155
4
12
7
37
3
28
3
7
4
7
7
3
3
4
8
5
5
7
2
3
6
3
8
6
3
8
2
32
O18g
HV
ROI
Sheet8
HVROI(Gross)
000
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
110000
120000
130000
140000
150000
1600678
1700809
1800396
1900608
2000386
2100225
2200356
230041320
2400154
250019614
260023815
2700225
2800467
290073
300083
310032
3200426
3300517
3400134
350032
360052
370021
3800113
390042
400021
410021
420015512
430042
4400123
450073
4600376
470032
4800285
490032
500073
510042
520073
530073
540032
550032
560042
570083
580052
590052
600073
610021
620032
630062
640032
650083
660062
670032
680083
690021
7000326
O18h
0
0
0
1252
0
0
0
0
0
0
0
0
4
666
2031
4901
5131
4620
4930
4351
3015
2982
2064
1948
1278
1259
700
527
477
385
409
392
366
481
480
323
650
367
448
444
448
478
365
325
276
257
312
334
265
331
275
282
330
292
356
269
320
264
242
206
241
282
281
262
225
320
263
298
297
305
274
O18h
HV
ROI
Sheet9
HVROI(Gross)
000
10000
20000
300125235
40000
50000
60000
70000
80000
90000
100000
110000
120042
130066626
1400203145
1500490170
1600513172
1700462068
1800493070
1900435166
2000301555
2100298255
2200206445
2300194844
2400127836
2500125935
260070026
270052723
280047722
290038520
300040920
310039220
320036619
330048122
340048022
350032318
360065025
370036719
380044821
390044421
400044821
410047822
420036519
430032518
440027617
450025716
460031218
470033418
480026516
490033118
500027517
510028217
520033018
530029217
540035619
550026916
560032018
570026416
580024216
590020614
600024116
610028217
620028117
630026216
640022515
650032018
660026316
670029817
680029717
690030517
700027417
O18i
0
0
0
5192
0
0
0
0
0
0
0
0
0
320
2645
5364
3872
5544
4565
3351
2949
2470
2549
2257
1368
803
752
580
587
502
547
352
372
400
363
267
531
472
394
368
288
456
381
423
361
296
282
340
317
280
325
358
272
260
332
296
325
279
285
303
260
281
274
267
291
268
275
263
290
314
365
O18i
HV
ROI
Sheet10
HVROI(Gross)
000
10000
20000
300519272
40000
50000
60000
70000
80000
90000
100000
110000
120000
130032018
1400264551
1500536473
1600387262
1700554474
1800456568
1900335158
2000294954
2100247050
2200254950
2300225748
2400136837
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260075227
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300054723
310035219
320037219
330040020
340036319
350026716
360053123
370047222
380039420
390036819
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410045621
420038120
430042321
440036119
450029617
460028217
470034018
480031718
490028017
500032518
510035819
520027216
530026016
540033218
550029617
560032518
570027917
580028517
590030317
600026016
610028117
620027417
630026716
640029117
650026816
660027517
670026316
680029017
690031418
700036519
O18j
0
0
1585
0
0
0
0
0
0
0
0
0
0
0
2575
4524
3677
5337
3936
3390
2952
2614
2467
1562
1656
1408
603
589
732
984
637
795
475
684
618
483
548
500
417
657
526
427
288
657
359
639
501
480
451
257
382
531
419
399
557
364
410
423
372
371
340
558
412
335
308
321
322
274
271
327
289
O18j
HV
ROI
Sheet11
HVROI(Gross)
000
10000
200158540
30000
40000
50000
60000
70000
80000
90000
100000
110000
120000
130000
1400257551
1500452467
1600367761
1700533773
1800393663
1900339058
2000295254
2100261451
2200246750
2300156240
2400165641
2500140838
260060325
270058924
280073227
290098431
300063725
310079528
320047522
330068426
340061825
350048322
360054823
370050022
380041720
390065726
400052623
410042721
420028817
430065726
440035919
450063925
460050122
470048022
480045121
490025716
500038220
510053123
520041920
530039920
540055724
550036419
560041020
570042321
580037219
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600034018
610055824
620041220
630033518
640030818
650032118
660032218
670027417
680027116
690032718
700028917
O18kC1
0
0
1849
0
0
0
0
0
0
0
0
0
0
0
1847
3729
3799
4775
3765
3979
2789
2524
2389
1864
1612
1807
621
1137
1379
1242
1511
1395
1444
1035
898
758
607
538
561
625
512
617
511
555
599
528
519
464
465
448
395
376
382
386
467
383
458
450
391
390
295
385
391
307
297
299
332
333
294
251
256
O18k
HV
ROI
O18kC2
80
0
0
0
0
0
0
0
0
0
0
0
0
366
1889
3706
3575
4840
4963
4293
2658
2808
2271
1726
1541
1309
1115
858
750
676
512
459
640
434
344
528
348
582
419
349
440
408
429
347
412
642
419
384
554
462
329
460
411
342
337
460
480
465
374
523
498
360
433
305
393
410
339
367
359
365
328
O18kC2
HV
ROI
O18kC3
51
0
0
0
0
0
0
0
0
0
0
0
0
222
2319
2540
4984
4206
4563
4333
2754
2705
2311
2118
1744
990
1029
858
795
736
807
676
692
435
468
413
498
598
820
818
663
631
592
583
549
485
478
388
378
425
410
362
364
361
313
463
355
351
411
394
374
506
443
475
368
425
409
290
327
388
338
O18kC3
HV
ROI
O18kC4
51
0
0
0
0
0
0
0
0
0
0
0
0
256
2569
3544
4321
5041
3918
3490
3151
2545
2109
1816
1789
1529
1253
599
586
799
655
618
703
612
568
688
968
487
410
437
296
519
422
485
488
568
431
278
589
572
439
376
369
502
393
463
427
484
431
403
341
395
297
512
318
274
335
311
387
357
378
O18kC4
HV
ROI
O18kC5
73
0
0
0
0
0
0
0
0
0
0
0
0
256
2241
2362
3759
4059
4169
4661
2694
2485
2531
1682
2018
1105
754
635
607
465
602
555
476
454
525
586
638
400
739
407
777
664
729
466
359
580
447
339
366
405
366
324
347
329
297
290
323
283
290
241
220
269
262
294
272
348
367
277
312
278
269
O18kC5
HV
ROI
O18kC6
59
0
0
0
0
0
0
0
0
0
0
0
0
535
2646
4011
5970
4879
4150
4133
3916
2855
2405
2098
1770
1363
1258
598
638
763
573
570
772
735
304
737
555
642
581
371
586
484
404
331
422
301
405
329
268
424
360
341
383
364
280
261
315
304
279
233
340
282
329
341
220
301
321
226
237
257
315
O18kC6
HV
ROI
O18kC7
47
0
0
0
0
0
0
0
0
0
0
0
0
577
2709
4980
4386
5998
5398
3193
3097
2798
2605
2428
1831
1632
1528
1295
1086
803
431
329
460
500
621
341
549
602
645
508
363
524
396
367
339
355
336
387
287
314
318
292
353
399
196
346
376
448
477
328
340
446
447
312
417
338
359
329
320
323
390
O18kC7
HV
ROI
O18kC8
66
0
0
0
0
0
0
0
0
0
0
0
0
40
1131
4885
2244
3349
3273
4055
3550
2771
2927
2832
4352
3348
2026
1910
2253
1757
1497
1373
1492
1549
1122
967
876
877
939
805
775
705
504
586
625
411
409
472
403
471
406
400
373
299
387
296
439
370
324
355
341
407
437
427
298
311
289
288
356
358
281
O18kC8
HV
ROI
O18kC9
70
0
0
0
0
0
0
0
0
0
0
0
0
0
2919
4325
3367
3702
4112
3210
2674
2550
2368
2508
2177
1776
1594
1834
2042
1410
1857
1216
1155
827
765
610
525
553
532
448
489
562
687
461
414
512
544
430
404
476
533
369
438
364
313
527
412
359
458
351
277
291
319
293
330
351
377
312
351
299
377
O18kC9
HV
ROI
O18kC10
54
0
0
0
0
0
0
0
0
0
0
0
0
685
2909
2379
3551
3580
4715
3523
3089
3131
2681
1845
3418
2653
1693
1902
1474
1227
1269
1065
1444
1084
1169
999
859
677
710
569
422
458
598
690
469
444
497
597
396
425
428
400
329
328
368
433
360
524
399
417
322
350
378
417
325
398
415
341
360
365
398
O18kC10
HV
ROI
Sheet12
c1c2c3c4c5c6c7c8c9c10
HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)HVROI(Gross)
000080905170517073905980477066807080547
10000100001000010000100001000010000100001000010000
200184943200002000020000200002000020000200002000020000
30000300003000030000300003000030000300003000030000
40000400004000040000400004000040000400004000040000
50000500005000050000500005000050000500005000050000
60000600006000060000600006000060000600006000060000
70000700007000070000700007000070000700007000070000
80000800008000080000800008000080000800008000080000
90000900009000090000900009000090000900009000090000
100000100000100000100000100000100000100000100000100000100000
110000110000110000110000110000110000110000110000110000110000
120000120000120000120000120000120000120000120000120000120000
1300001300366191300222151300256161300256161300535231300577241300406130000130068526
1400184743140018894314002319481400256951140022414714002646511400270952140011313414002919541400290954
1500372961150037066115002540501500354460150023624915004011631500498071150048857015004325661500237949
1600379962160035756016004984711600432166160037596116005970771600438666160022444716003367581600355160
1700477569170048407017004206651700504171170040596417004879701700599877170033495817003702611700358060
1800376561180049637018004563681800391863180041696518004150641800539873180032735718004112641800471569
1900397963190042936619004333661900349059190046616819004133641900319357190040556419003210571900352359
2000278953200026585220002754522000315156200026945220003916632000309756200035506020002674522000308956
2100252450210028085321002705522100254550210024855021002855532100279853210027715321002550502100313156
2200238949220022714822002311482200210946220025315022002405492200260551220029275422002368492200268152
2300186443230017264223002118462300181643230016824123002098462300242849230028325323002508502300184543
2400161240240015413924001744422400178942240020184524001770422400183143240043526624002177472400341858
250018074325001309362500990312500152939250011053325001363372500163240250033485825001776422500265352
26006212526001115332600102932260012533526007542726001258352600152839260020264526001594402600169341
27001137342700858292700858292700599242700635252700598242700129536270019104427001834432700190244
28001379372800750272800795282800586242800607252800638252800108633280022534728002042452800147438
2900124235290067626290073627290079928290046522290076328290080328290017574229001410382900122735
3000151139300051223300080728300065526300060225300057324300043121300014973930001857433000126936
3100139537310045921310067626310061825310055524310057024310032918310013733731001216353100106533
3200144438320064025320069226320070327320047622320077228320046021320014923932001155343200144438
330010353233004342133004352133006122533004542133007352733005002233001549393300827293300108433
34008983034003441934004682234005682434005252334003041734006212534001122333400765283400116934
350075828350052823350041320350068826350058624350073727350034118350096731350061025350099932
360060725360034819360049822360096831360063825360055524360054923360087630360052523360085929
370053823370058224370059824370048722370040020370064225370060225370087730370055324370067726
380056124380041920380082029380041020380073927380058124380064525380093931380053223380071027
390062525390034919390081829390043721390040720390037119390050823390080528390044821390056924
400051223400044021400066326400029617400077728400058624400036319400077528400048922400042221
410061725410040820410063125410051923410066426410048422410052423410070527410056224410045821
420051123420042921420059224420042221420072927420040420420039620420050422420068726420059824
430055524430034719430058324430048522430046622430033118430036719430058624430046121430069026
440059924440041220440054923440048822440035919440042221440033918440062525440041420440046922
450052823450064225450048522450056824450058024450030117450035519450041120450051223450044421
460051923460041920460047822460043121460044721460040520460033618460040920460054423460049722
470046422470038420470038820470027817470033918470032918470038720470047222470043021470059724
480046522480055424480037819480058924480036619480026816480028717480040320480040420480039620
490044821490046221490042521490057224490040520490042421490031418490047122490047622490042521
500039520500032918500041020500043921500036619500036019500031818500040620500053323500042821
510037619510046021510036219510037619510032418510034118510029217510040020510036919510040020
520038220520041120520036419520036919520034719520038320520035319520037319520043821520032918
530038620530034218530036119530050222530032918530036419530039920530029917530036419530032818
540046722540033718540031318540039320540029717540028017540019614540038720540031318540036819
550038320550046021550046322550046322550029017550026116550034619550029617550052723550043321
560045821560048022560035519560042721560032318560031518560037619560043921560041220560036019
570045021570046522570035119570048422570028317570030417570044821570037019570035919570052423
580039120580037419580041120580043121580029017580027917580047722580032418580045821580039920
590039020590052323590039420590040320590024116590023315590032818590035519590035119590041720
600029517600049822600037419600034118600022015600034018600034018600034118600027717600032218
610038520610036019610050622610039520610026916610028217610044621610040720610029117610035019
620039120620043321620044321620029717620026216620032918620044721620043721620031918620037819
630030718630030517630047522630051223630029417630034118630031218630042721630029317630041720
640029717640039320640036819640031818640027216640022015640041720640029817640033018640032518
650029917650041020650042521650027417650034819650030117650033818650031118650035119650039820
660033218660033918660040920660033518660036719660032118660035919660028917660037719660041520
670033318670036719670029017670031118670027717670022615670032918670028817670031218670034118
680029417680035919680032718680038720680031218680023715680032018680035619680035119680036019
690025116690036519690038820690035719690027817690025716690032318690035819690029917690036519
700025616700032818700033818700037819700026916700031518700039020700028117700037719700039820
O18a
0
0
0
0
0
0
0
0
38
137
675
279
1395
2360
2963
4129
4620
2934
4310
3653
3929
4608
4774
4667
4106
4938
5843
4829
4215
5456
4734
5247
5570
5191
4794
5026
5000
5000
4761
4571
4136
4155
5095
4422
3090
3259
3416
3338
2700
2781
3050
3378
3259
2582
2476
2245
2637
2417
2557
2381
2097
2583
2088
1818
2032
2076
1963
1912
1912
1526
1080
1147
1279
975
1094
843
1042
1115
1100
1726
2752
2112
2487
2557
2418
2256
2373
2485
2361
2336
2419
2234
2066
1582
1923
2123
2223
2245
1970
2495
2016
1728
1644
1693
1783
1684
1853
1950
2238
1814
1899
O18a
HV
ROI
Sheet13
HVROI(Gross)
110000
112000
114000
116000
118000
120000
122000
124000
1260386
128013712
130067526
132027917
1340139537
1360236049
1380296354
1400412964
1420462068
1440293454
1460431066
1480365360
1500392963
1520460868
1540477469
1560466768
1580410664
1600493870
1620584376
1640482969
1660421565
1680545674
1700473469
1720524772
1740557075
1760519172
1780479469
1800502671
1820500071
1840500071
1860476169
1880457168
1900413664
1920415564
1940509571
1960442266
1980309056
2000325957
2020341658
2040333858
2060270052
2080278153
2100305055
2120337858
2140325957
2160258251
2180247650
2200224547
2220263751
2240241749
2260255751
2280238149
2300209746
2320258351
2340208846
2360181843
2380203245
2400207646
2420196344
2440191244
2460191244
2480152639
2500108033
2520114734
2540127936
256097531
2580109433
260084329
2620104232
2640111533
2660110033
2680172642
2700275252
2720211246
2740248750
2760255751
2780241849
2800225647
2820237349
2840248550
2860236149
2880233648
2900241949
2920223447
2940206645
2960158240
2980192344
3000212346
3020222347
3040224547
3060197044
3080249550
3100201645
3120172842
3140164441
3160169341
3180178342
3200168441
3220185343
3240195044
3260223847
3280181443
3300189944
MURI
Some low energy nuclear resonances
MURI
Deuterium distribution in SiO2 films
MURI
Determine electronic structure and band alignment for metal/high-k/Si gate stackUse high resolution spectroscopic tools to:Determine band alignment and defectsObserve changes induced by radiation
MURI
Inverse Photoemission (Unoccupied States)Photoemission (Occupied States)Experimental tools to examine electronic structureEFCLVBCBEVBMECBMEFEF
MURI
e-Additional experimental toolsEFVBCLCBXAS, EELS (Core CB)hwOptical methods EFhwEgEgMetSiHigh-kEFEgMetSiHigh-kVI-V EFEgMetSiHigh-kVprobeSTM/C-AFM
MURI
Photoemission and Inverse Photoemission of ZrO2/SiCBM= EF + 1.4 eVVBM = EF - 4.2 eVFirstPrinciplesTheoryTheory resolutionFirstPrinciplesTheoryVBM, CBM Determination:
Comparison with Theory (where possible) Extrapolation Establish band offsets
MURI
Internal Photoemission (IntPES)EcEFEVSi/OxmetalsemiconductorEFhigh-k(a) Ec(Hik)-EF(met.) e-IntPES; (b) photo-excitation; optical band gap; (c) Ec(sc)-Ev (Hik) h-IntPESArc lampMonochromatorChopperLock-in amplifierI-V Source Measure UnitProbe station
MURI
IntPES: W / SiO2 / n-Si Negative Bias on Si, Si/ SiO2 : ~4.4 eVCombine positive and negativebias data to determineW and Si barriers with SiO2
MURI
Conductive Tip AFM Image and I-V Behavior of a Ru/HfO2/Si StackFor simple F-N tunneling with an electron effective mass of 0.18, the HfO2/Si conduction band barrier height is 1.4eVImage physical and spectroscopic behavior of radiation induced defects
MURI
I. High-mobility Channels: GermaniumCarrier mobility enhancementInterface-free high-K
MURI
II. High-mobility Channels: HfO2 on strained Si
MURI
High-mobility Channels: HfO2 on strained SiSignificant mobility enhancement for HfO2 on strained Si
MURI
III. High-mobility Channels: Si orientationsHybrid (Si) Orientation Technology: combines best NFET performance for Si(100) and PFET for Si(110)PFETNFET
MURI
Logistics & MURI CollaborationsSamples, Processes, Devices Rutgers, NCSU, IBMMaterials & Interface Analysis Rutgers & NCSU Radiation Exposure Vanderbilt & SandiaPost-radiation Characterization Vanderbilt & Rutgers Theory Vanderbilt
MURI
PlansGeneration of films and devices with high-K dielectrics (HfO2) and/or metal gate electrodes (Al, Ru, Pt) with 1-50nm thickness Interface engineering: SiOxNy (vary thickness and composition)Physical measurements of defects: STM, AFM, TEM vs particle, fluence, energyH/D concentration and profiles, and effects on defect generation and passivationCorrelate UHV-based studies with electrical and internal photoemission measurements.Explore different processing and growth methods.Correlate with first principles theory.
Develop predictive understanding of radiation induced effectsGeneral goal: to examine new materials for radiation induced effects and compare with Si/SiO2/poly-Si stacks
MURI
Industrial contactsGusev, Guha - IBMLiang, Tracy - FreescaleTsai - IntelChambers, Columbo - TI Vogel, Green - NISTGardner, Lysaght, Bersuker, Lee SematechEdwards, Devine AFOSR
3
