Advance Mems Structures

download Advance Mems Structures

of 8

Transcript of Advance Mems Structures

  • 8/16/2019 Advance Mems Structures

    1/8

    Micro-machined inductor

  • 8/16/2019 Advance Mems Structures

    2/8

    SUSPENDED INDUCTOR STRUCTURE

  • 8/16/2019 Advance Mems Structures

    3/8

    SELF ASSEMBLED INDUCTOR

  • 8/16/2019 Advance Mems Structures

    4/8

    OUT OF PLANE MEANDER INDUCTOR

  • 8/16/2019 Advance Mems Structures

    5/8

    ALL COPPER SOLENOID INDUCTOR

  • 8/16/2019 Advance Mems Structures

    6/8

    OVER UN! INDUCTOR

  • 8/16/2019 Advance Mems Structures

    7/8

    RE CONFI!URABLE V-ANTENNA

    CONTACT PADSV-ANTENNA

    ROTATION IN!S ACTUATORS

  • 8/16/2019 Advance Mems Structures

    8/8


Micro-Electro-Mechanical Systems (MEMS) Abstract: MEMS technology consists of microelectronic elements, actuators, sensors, and mechanical structures built.

Micro-Electro-Mechanical Systems (MEMS) Abstract: MEMS technology consists of microelectronic elements, actuators, sensors, and mechanical structures built.

Seventh ISSS National Conference on MEMS, Smart …isssonline.in/pdffiles/ISSS_NC7_Program.pdf · Seventh ISSS National Conference on MEMS, Smart Materials, Structures and Systems

Seventh ISSS National Conference on MEMS, Smart …isssonline.in/pdffiles/ISSS_NC7_Program.pdf · Seventh ISSS National Conference on MEMS, Smart Materials, Structures and Systems

Introduction to Microeletromechanical Systems (MEMS) · 2017-12-14 · MEMS Overview Micromachining: lithography, deposition, etching, … Processes & Foundries Devices & Structures

Introduction to Microeletromechanical Systems (MEMS) · 2017-12-14 · MEMS Overview Micromachining: lithography, deposition, etching, … Processes & Foundries Devices & Structures

MEMS Based Real-Time Monitoring System for Geotechnical Structuresigs/ldh/conf/2010/articles/v001.pdf · MEMS Based Real-Time Monitoring System for Geotechnical Structures Abdoun,

MEMS Based Real-Time Monitoring System for Geotechnical Structuresigs/ldh/conf/2010/articles/v001.pdf · MEMS Based Real-Time Monitoring System for Geotechnical Structures Abdoun,

Advance Steel Structures - Lecture 1 - Introduction

Advance Steel Structures - Lecture 1 - Introduction

Mechanical and Tribological Characterization of MEMS · "Mechanical and tribological characterization of MEMS structures" in 2007 together with Prof.dr.eng. Zygmunt Rymuza from Warsaw

Mechanical and Tribological Characterization of MEMS · "Mechanical and tribological characterization of MEMS structures" in 2007 together with Prof.dr.eng. Zygmunt Rymuza from Warsaw

VACUUM PACKAGING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) · Vacuum Packaging, Microelectromechanical Systems, MEMS, MEMS Sensors, Inertial MEMS MEMS Accelerometers, MEMS Gyros,

VACUUM PACKAGING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) · Vacuum Packaging, Microelectromechanical Systems, MEMS, MEMS Sensors, Inertial MEMS MEMS Accelerometers, MEMS Gyros,

RF-MEMS Switches for Reconfigurable Integrated Circuits ... · Fig. 2. Functional diagrams of two common RF MEMS switch structures. (a) Cantilever. (b) Air bridge. is located inside

RF-MEMS Switches for Reconfigurable Integrated Circuits ... · Fig. 2. Functional diagrams of two common RF MEMS switch structures. (a) Cantilever. (b) Air bridge. is located inside

Advance Structure - Hellopro...Advance Structure fait partie de la gamme complète et intégrée GRAITEC Advance, qui fournit des solutions de modélisation 3D, de calcul de structures,

Advance Structure - Hellopro...Advance Structure fait partie de la gamme complète et intégrée GRAITEC Advance, qui fournit des solutions de modélisation 3D, de calcul de structures,

INF 5490 RF MEMS · • MEMS requirements: access to outside world needed! – Mechanical interaction – Ex. Movable structures on the surface of the wafer • MEMS-packaging is

INF 5490 RF MEMS · • MEMS requirements: access to outside world needed! – Mechanical interaction – Ex. Movable structures on the surface of the wafer • MEMS-packaging is

Fabrication and analysis of MEMS Test Structures for Residual Stress measurement  · 2016-03-03Fabrication and analysis of MEMS Test Structures for Residual Stress measurement Akshdeep

Fabrication and analysis of MEMS Test Structures for Residual Stress measurement  · 2016-03-03Fabrication and analysis of MEMS Test Structures for Residual Stress measurement Akshdeep

Compact MEMS/NEMS Characterization Platform Using a DVD ... · MEMS/NEMS structures. Figure 5 shows a MEMS cantilever with a width of 1.5 µm, which is not easy to be measured by

Compact MEMS/NEMS Characterization Platform Using a DVD ... · MEMS/NEMS structures. Figure 5 shows a MEMS cantilever with a width of 1.5 µm, which is not easy to be measured by

MEMS and Micro Structures in Aerospace Applications

MEMS and Micro Structures in Aerospace Applications

A 4 mm2 Double Differential Torsional MEMS Accelerometer ...€¦ · MEMS accelerometers based on single-beam structures [22,23]. To further improve the performance and promote the

A 4 mm2 Double Differential Torsional MEMS Accelerometer ...€¦ · MEMS accelerometers based on single-beam structures [22,23]. To further improve the performance and promote the

MicroMachined Silicon Detectors - commons.lbl.gov · 3 MEMS: MicroElectromechanical Systems MEMS images from Sandia. 4 aspect ratio up to 600 High Aspect Ratio Structures one enabling

MicroMachined Silicon Detectors - commons.lbl.gov · 3 MEMS: MicroElectromechanical Systems MEMS images from Sandia. 4 aspect ratio up to 600 High Aspect Ratio Structures one enabling

Advance Analysis of Hybrid Frame Structures by Refined Plastic-hinge Approach

Advance Analysis of Hybrid Frame Structures by Refined Plastic-hinge Approach

MEMS Fabrication S.APPA RAO. Overview What are MEMS? MEMS: Micro-Electro-Mechanical Systems => ‘smalltech’ MEMS Applications MEMS fabrication process.

MEMS Fabrication S.APPA RAO. Overview What are MEMS? MEMS: Micro-Electro-Mechanical Systems => ‘smalltech’ MEMS Applications MEMS fabrication process.

BSRF and MEMS activities - saga-u.ac.jp · Electro Discharge Machine, pin structure for molecular mold, gold array structures for biochip, channel structures in glass for capillary

BSRF and MEMS activities - saga-u.ac.jp · Electro Discharge Machine, pin structure for molecular mold, gold array structures for biochip, channel structures in glass for capillary

•Overview • Making MEMSMaking MEMS • Using MEMS ...pioneer.netserv.chula.ac.th/~ksongpho/584/8.pdf · MEMS •Overview • Making MEMSMaking MEMS • Using MEMS • Integrating

•Overview • Making MEMSMaking MEMS • Using MEMS ...pioneer.netserv.chula.ac.th/~ksongpho/584/8.pdf · MEMS •Overview • Making MEMSMaking MEMS • Using MEMS • Integrating

Devices, Structures, and Processes for Optical MEMS · Devices, Structures, and Processes for Optical MEMS ... Structures, and Processes for Optical MEMS by Hyuck Choo ... presentation

Devices, Structures, and Processes for Optical MEMS · Devices, Structures, and Processes for Optical MEMS ... Structures, and Processes for Optical MEMS by Hyuck Choo ... presentation